This document and process conversion measures necessary to comply with this revision shall be completed by 9 September 2009 MIL-PRF-38534G 9 March 2009 SUPERSEDING MIL-PRF-38534F 12 April 2006 PERFORMANCE SPECIFICATION HYBRID MICROCIRCUITS, GENERAL SPECIFICATION FOR This specification is approved for use by all Departments and Agencies of the Department of Defense. This document is a performance specification. It is intended to provide the device manufacturers an acceptable established baseline in order to support Government microcircuit applications and logistic programs. The basic document has been structured as a performance specification that is supplemented with detailed appendices. These appendices provide guidance to manufacturers on demonstrated successful approaches to meeting defense performance requirements. These appendices are included as a performance benchmark and are intended to impose mandatory requirements. 1. SCOPE 1.1 Scope. This specification establishes the general performance requirements for hybrid microcircuits, multi- chip modules (MCM) and similar devices, and the verification requirements for ensuring that these devices meet the applicable performance requirements. Verification is accomplished through the use of one of two quality programs (Appendix A). The main body of this specification describes the performance requirements and the requirements for obtaining a Qualified Manufacturers List (QML) listing. The appendices of this specification are intended for guidance to aid a manufacturer in developing their verification program. Detail requirements, specific characteristics, and other provisions that are sensitive to the particular intended use should be specified in the applicable device acquisition specification. Comments, suggestions, or questions on this document should be addressed to: Defense Supply Center, Columbus, ATTN: DSCC-VAS, P. O. Box 3990, Columbus, OH 43218-3990, or emailed to PRF38534@dla.mil. Since contact information can change, you may want to verify the currency of this address information using the ASSIST Online database at http://assist.daps.dla.mil. AMSC N/A FSC 5962 MIL-PRF-38534G 1.2 Description of this specification. The intent of this specification is to allow the device manufacturer the flexibility to implement best commercial practices to the maximum extent possible while still providing a product which meets the military performance needs. Devices that are compliant to this specification are those that are capable of meeting the verification requirements outlined herein; and are built on a manufacturing line which is controlled by the manufacturer's quality management program and has been certified and qualified in accordance with the requirements herein. The certification and qualification requirements outlined herein are the requirements to be met by a manufacturer to be listed on the (QML). The manufacturer may modify, substitute, or delete the tests and inspections defined herein. This is accomplished by baselining a flow of tests and inspections that will assure that the devices are capable of meeting the generic verifications provided in this specification. This does not necessarily mean that compliant devices have been subjected to the generic performance verifications provided in this specification, just that compliant devices are capable of meeting them. It is the manufacturer's responsibility to ensure that their devices are capable of meeting the generic performance verifications applicable to each specified product assurance level. Appendix A defines the quality management program that may be implemented by the manufacturer. Appendix A includes an option to use a quality review board concept, hereafter referred to as the Technology Review Board (TRB) in this document, which may be used to modify the generic verification, design, and construction criteria provided in this specification. Appendix B is not currently being used. Appendix C defines generic performance verifications. These verifications consist of a series of tests and inspections which may be used to verify the performance of devices. They may be used as is or modified as allowed by this specification. Appendix D is not currently being used. Appendix E defines generic design and construction criteria relative to this technology, including rework limitations and major change testing guidance. Appendix F provides statistical sampling procedures. Appendix G provides the guidelines for a Radiation Hardness Assurance (RHA) Program. 1.3 Classification. Five quality assurance levels are provided for in this specification. Four of these classes, in highest to lowest order, are K, H, G and D, as defined below. The fifth class is Class E, the quality level associated with a Class E device is defined by the acquisition document. 1.3.1 Class K. Class K is the highest reliability level provided for in this specification. It is intended for space applications. 1.3.2 Class H. Class H is the standard military quality level. 1.3.3 Class G. Class G is a lowered confidence version of the standard military quality level (H) with QML listing in accordance with 4.5.2.2, a possibly lower temperature range (-40oC to +85oC), a manufacturer guaranteed capability to meet the Class H conformance inspection and periodic inspection testing, and a vendor specified incoming test flow. The device will meet the Class H requirements for in-process inspections and screening. 1.3.4 Class D. Class D is a vendor specified quality level available to this specification. This is a possibly lower temperature range (0oC to +70oC) part with a vendor specified test flow available from a QML listed manufacturer. 1.3.5 Class E. Class E designates devices which are based upon one of the other classes (K, H, or G) with exceptions taken to the requirements of that class. These exceptions are specified in the device acquisition document, therefore the device acquisition document should be carefully reviewed by the user to ensure that the exceptions taken will not adversely affect the performance of the system. 2. APPLICABLE DOCUMENTS 2.1 General. The documents listed in this section are specified in sections 3, 4, or 5 of this specification. This section does not include documents cited in other sections of this specification or recommended for additional information or as examples. While every effort has been made to ensure the completeness of this list, document users are cautioned that they must meet all specified requirements of documents cited in sections 3, 4, or 5 of this specification, whether or not they are listed. 2.2 Government documents. 2.2.1 Specifications, standards, and handbooks. The following specifications, standards, and handbooks form a part of this specification to the extent specified herein. Unless otherwise specified, the issues of these documents are those cited in the solicitation or contract. 2 MIL-PRF-38534G DEPARTMENT OF DEFENSE SPECIFICATIONS MIL-I-46058 -Insulating Compound, Electrical (For Coating Printed Circuit Assemblies). DEPARTMENT OF DEFENSE STANDARDS MIL-STD-883 -Test Method Standard Microcircuits. (Copies of these documents are available online at http://assist.daps.dla.mil/quicksearch/ or from the Standardization Document Order Desk, 700 Robbins Avenue, Building 4D, Philadelphia, PA 19111-5094.) 2.2.2 Other Government documents, drawings, and publications. The following other Government documents, drawings, and publications form a part of this document to the extent specified herein. Unless otherwise specified, the issues of these documents are those cited in the solicitation or contract. Handbook H4/H8 -Commercial and Government Entity (CAGE) Handbook. 1/ JEDEC Publication JEP133 -Guide for the Production and Acquisition of Radiation-Hardness- Assured Multichip Modules and Hybrid Microcircuits JESD22-A114 -Electrostatic Discharge (ESD) Sensitivity Testing Human Body Model (HBM) NAVSHIPS 0967-190-4010 QML-38534 - - Manufacturer's Designating Symbols. 2/ Qualified Manufacturer's List of Products Qualified Under Performance Specification MIL-PRF-38534, Hybrid Microcircuits General Specification For. (Copies of these documents are available online at http://assist.daps.dla.mil/quicksearch/ or from the Standardization Document Order Desk, 700 Robbins Avenue, Building 4D, Philadelphia, PA 19111-5094.) 2.3 Order of precedence. Unless otherwise noted herein or in the contract, in the event of a conflict between the text of this document and the references cited herein, the text of this document takes precedence. Nothing in this document, however, supersedes applicable laws and regulations unless a specific exemption has been obtained. 3. REQUIREMENTS 3.1 Performance requirements for Class K devices. Class K devices shall be capable of meeting the Class K tests and inspections of Appendices C and E (see table I). This shall include the incoming inspection flow, the in- process inspection flow, the screening flow, and the conformance inspection and periodic inspection flow. These devices shall be specified over the temperature range of -55oC to +125oC or as specified in the device acquisition document. Manufacturers of these devices shall be fully certified and qualified in accordance with this specification. Verification of these performance requirements shall be performed as described in 4 herein. 3.2 Performance requirements for Class H devices. Class H devices shall be capable of meeting the Class H tests and inspections of Appendices C and E (see table I). This shall include the incoming inspection flow, the in- process inspection flow, the screening flow, and the conformance inspection and periodic inspection flow. These devices shall be specified over the temperature range of -55oC to +125oC or as specified in the device acquisition document. Manufacturers of these devices shall be fully certified and qualified in accordance with this specification. Verification of these performance requirements shall be performed as described in 4 herein. 1/ Handbook H4/H8 has been replaced by Defense Logistics Information Services CAGE Code website at https://www.bpn.gov/bincs/begin_search.asp 2/ NAVSHIPS 0967-190-4010 Manufacturer’s Designating Symbols is no longer available. All current product should use Commercial and Government Entity (CAGE) Code. See 3.7.5 (e) for the CAGE Code online database website. 3 MIL-PRF-38534G 3.3 Performance requirements for Class G devices. Class G devices shall be capable of meeting the Class H tests and inspections of Appendices C and E, except incoming inspection (see table I). This shall include the in- process inspection flow, the screening flow, and the conformance inspection and periodic Inspection flow. Compliance with the conformance inspection and periodic inspection flow shall be guaranteed by the manufacturer. Actual completion of conformance inspection and periodic inspection tests and inspections are optional and at the manufacturer's discretion. DSCC approval or notification is not required to eliminate conformance inspection and periodic inspection tests and inspections for this class of device; however, it is the manufacturer's responsibility to ensure that their devices are capable of passing these tests and inspections. These devices shall be specified over the temperature range of -40oC to +85oC or a wider range. Manufacturers of these devices shall be fully certified and QML listed in accordance with this specification. Verification of these performance requirements shall be performed as described in 4 herein. 3.4 Performance requirements for Class E devices. Class E devices are devices which meet all of the requirements of one of the other classes (K, H, or G) with some exceptions taken. The device acquisition document shall clearly state which class the device is based upon (K, H, or G) and what exceptions are being taken. The users of these devices should carefully examine the device acquisition document to verify that the exceptions being taken will not adversely affect the system performance. Manufacturers of these devices shall be fully certified in accordance with this specification. Verification of the performance requirements shall be performed as described in paragraph 4. 3.5 Performance requirements for Class D devices. Class D devices are built and tested in accordance with the manufacturer's specified production and testing flow (see table I). These devices shall be capable of meeting the specified electrical tests. However, these devices are not required to meet any of the tests and inspections of this specification. These devices shall be specified over the temperature range of 0oC to +70oC or a wider range. Manufacturers of these devices shall be fully certified and QML listed in accordance with this specification. Verification of these Performance Requirements shall be performed as described in 4 herein. 3.6 Performance requirements for Radiation Hardness Assurance (RHA) devices. Compliant RHA devices shall meet the additional performance requirements of Appendix G. Detailed information for producing and acquiring RHA devices can be found in JEDEC publication JEP133 Guide for the Production and Acquisition of Radiation-Hardness- Assured Multichip Modules and Hybrid Microcircuits. 4 MIL-PRF-38534G TABLE I. Performance requirements summary. Test flow or requirement 1/ Class D E 2/ G 2/ H 2/ K 2/ Certification Required Required Required Required (Class H) Required (Class K) QML listing Required IAW 4.5.2.2 Required I accordance with the Applicable device class and the Acquisition Document Required IAW 4.5.2.2 Required IAW 4.5.2.1 Required IAW 4.5.2.1 Incoming inspection (appendix C) Manufacturer specified 3/ Manufacturer specified 3/ Applicable (Class H) 1/ Applicable (Class K) 1/ In-process inspections (appendix. C) Manufacturer specified 3/ Applicable (Class H) 1/ Applicable 1/ Applicable 1/ Screening (appendix. C) Manufacturer specified 3/ Applicable (Class H) 1/ Applicable (Class H) 1/ Applicable (Class K) 1/ Conformance inspection and periodic inspection (appendix. C) Manufacturer specified 3/ Guaranteed (Class H) 4/ Applicable (Class H) 1/ Applicable (Class K) 1/ Temperature range 5/ 0oC to +70oC -40oC to +85oC -55oC to +125oC -55oC to +125oC 1/ For test flow implementation and available flexibility see 3.7.1. 2/ Design and construction and rework criteria are as specified in Appendix E and shall be utilized in accordance with 3.7.1. 3/ Manufacturer specified means that the manufacturer does not have to take the generic criteria of this specification into consideration during the establishment of its manufacturing and test flows. The manufacturer's flow may or may not meet the same requirements as the flow of this specification. In addition, the manufacturer may specify that they do not perform the particular test or inspection flow. 4/ Guaranteed (Class H) means that the manufacturer is assuring that their devices shall meet the conformance inspection and periodic inspection test flow contained in tables C-Xa, C-Xb, C-Xc, and C-Xd, but may or may not actually perform the tests and inspections specified. Elimination of these tests and inspections does not necessitate DSCC approval or notification. 5/ Classes D and G may be specified at wider temperature ranges. Classes H and K shall be -55oC to +125oC unless otherwise specified in the acquisition document. 5 MIL-PRF-38534G 3.7 General. The manufacturer of devices, in compliance with this specification, shall have and use production and test facilities and a verification program adequate to assure successful compliance with the provisions of this specification and the associated device acquisition specification. Adequacy of a device manufacturer to meet the requirements of this specification shall be determined by the Government qualifying activity. The individual item requirements shall be as specified in the associated device acquisition specification and as specified herein. Only devices which meet all the performance requirements of this specification and the associated device acquisition specification and have been adequately verified shall be marked as compliant and delivered. Monolithic microcircuits may be built to the Class K, H, G, or E performance requirements of this specification; however, monolithic microcircuits offered in compliance with this specification shall be specified on a Standard Microcircuit Drawing (SMD). Facilities and programs listed on the Qualified Manufacturer's List (QML) may be used for the manufacture of other than compliant devices; however, any use or reference to compliant device marking, Class K, H, G, or E certification status, or this specification in such a way as to state or imply equivalency (and thereby Government endorsement) in connection with noncompliant devices is prohibited and may be cause for revocation of certification or QML status (or both). Terms, definitions, methods, and symbols are in accordance with 6.4. Any defense specification or standard referred to in this specification may be replaced by an equivalent commercial standard as determined by the preparing activity. 3.7.1 Implementation of this specification. All devices offered and shipped in compliance with this specification shall meet the performance requirements specified for the applicable device class. The manufacturer shall verify that devices meet the performance requirements of the applicable device class. The manufacturer is responsible for developing a verification program which shall meet this requirement. The appendices of this specification give standard methods for verifying that the devices meet the performance requirements (except for Class D). The manufacturer may address the requirements of this specification as written, adapt them to their products, or develop a new methodology. Prior to the manufacturer being certified, the actual verification program to be used shall be reviewed and approved by DSCC. Any deletions or changes to the test flow shall also be reviewed and approved by DSCC or the manufacturer's DSCC approved Technology Review Board (TRB) prior to implementation. In this manner, a manufacturer may use an alternative method to the method specified in this specification to evaluate their parts if the alternate method verifies the same performance requirement. Furthermore, the manufacturer may eliminate a test or inspection (or decrease the occurrence or sample size of the test or inspection) if it is shown that the test or inspection is not necessary or can be performed less frequently. It is the manufacturer's responsibility to show how their verification program (and any changes to it) meets the requirements of this specification. The manufacturer shall analyze the impact of major changes and their affect on previously approved modifications of tests (test optimization). See table II for clarification. 6 MIL-PRF-38534G TABLE II. Implementation summary. Option Definition Typical examples Implementation procedures Meet The manufacturer Self explanatory The manufacturer implements requirement performs the test or the test or requirement into as written requirement as specified. internal documentation, verified during certification. Alternate method to the requirement The manufacturer assures that the intent of the requirement is met, but does not perform the test/requirement exactly as written. - Replacement of a test with statistical process control (SPC) or alternate method. - Historical data analysis shows that the requirement is met. - Design verification/validation shows that the process is capable of meeting the requirement. - Requirement does not address new materials, technologies, or designs. For TRB companies, alternate method and appropriate justification are approved by the manufacturer's TRB. For traditional companies, manufacturer proposes the alternate method and justification to the qualifying activity for approval. Elimination of the requirement The manufacturer proves that the test or requirement is either: Non-value added - Test does not stress the process adequately (e.g., PIND for encapsulated parts). - Historical data analysis shows that the test does not induce failures. Elimination is achieved in the same manner as alternate methods described above. The product will not comply - Configuration of the product (i.e., The exception shall be with the test or size, mass, package) is documented in the applicable requirement due to incompatible with the test method. acquisition document. Product technology limitations. is classified as Class E. Application has no need of The device will not experience the The exception shall be the requirement. particular stress in the application. documented in the applicable acquisition document. Product is classified as Class E. 3.7.2 Device acquisition specification. The preferred device acquisition document for devices built in full compliance with this specification is a SMD. Monolithic microcircuits built in compliance with this document shall be documented on an approved SMD. 3.7.3 Design and construction. The design and construction of compliant devices shall address the limitations and guidelines of Appendix E. 3.7.3.1 Lead finish. Appendix E provides the general interface requirements for lead finishes. 3.7.4 QML qualification requirements. Hybrid microcircuits furnished under this specification shall be products which are authorized by the qualifying activity for listing on the QML. Qualification testing shall be performed in accordance with the agreed upon qualification plan. (See appendix C for guidance on qualification testing.) 7 MIL-PRF-38534G 3.7.5 Marking of devices. Marking shall be in accordance with the requirements of this specification and the * device procurement specification. The marking shall be legible and complete, and shall meet the resistance to solvents requirements of method 2015 of MIL-STD-883. When mechanical or laser marking is performed, it shall be clearly visible through those conformal coatings approved for use in MIL-I-46058 (see method 2015 of MIL-STD-883 if contrasting material or ink is used to highlight the trace). Mechanical or laser marked metal surfaces shall meet all applicable microcircuit finishes and shall not degrade the performance requirements of the device. Mechanical or laser marking shall be approved by the qualifying activity. If any special marking is used, it shall in no way interfere with the marking required herein, and shall be visibly separated therefrom. The following marking shall be included on each microcircuit unless otherwise specified. a. Part or Identifying Number (PIN) (see 3.7.5.1). b. Index point (see 3.7.5.2). c. Lot identification code or date code (see 3.7.5.3). d. Device manufacturer's identification (see 3.7.5.4). e. Device manufacturer's CAGE CODE. The CAGE CODE online database is available at http://www.bpn.gov/bincs/begin_search.asp (see 3.7.5.5). f. Country of manufacture (see 3.7.5.6). g. Serialization, when applicable (see 3.7.5.7). h. Special marking (see 3.7.5.8). i. Electrostatic discharge (ESD) sensitivity identifier (see 3.7.5.8.2). j. Certification mark (see 3.7.5.8.3). Unless otherwise specified, the certification mark, the PIN, the inspection lot identification code, and the ESD identifier shall be located on the top surface of flat packages or dual-in-line configurations and on either the top or the side of cylindrical packages (TO configurations and similar configurations). 3.7.5.1 Part or Identifying Number (PIN). Each Standard Microcircuit Drawing (SMD) microcircuit shall be marked with the complete PIN, as specified in the SMD. The number sequence for MIL-PRF-38534 is 5962-XXXXXZZHYY, where: 5962 -XXXXX ZZ H Y Y Federal RHA Device QML Case Lead stock class designator type no. device outline finish designator (see 3.7.5.1.1) class (see 3.7.5.1.3) designator \ / designator (see 3.7.5.1.4) \/ (see 3.7.5.1.2) Drawing number 3.7.5.1.1 Device type. The device type shall identify the circuit function as indicated in the SMD. 3.7.5.1.2 Device class designator. This device class designator shall be a single letter identifying the quality level in accordance with the SMD. 3.7.5.1.3 Case outline. The case outline shall be designated by a single letter assigned to each outline within each SMD. 3.7.5.1.4 Lead finish. Lead frame or terminal material and finish shall be as specified (see Appendix E). The lead finish shall be designated by a single letter as follows: 8 MIL-PRF-38534G Finish letter Lead finish (see note) A Hot solder dip B Tin-lead plate C Gold plate X Finishes A, B, or C (see note) NOTE: Finish letter "X" shall not be marked on the microcircuit or its packaging. This designation is provided for use in drawings, part lists, acquisition orders, or other documentation where lead finishes A, B, and C are all considered acceptable and interchangeable without preference. For Government logistic support, the A lead finish will be acquired and supplied to the end user when the X is included in the PIN for lead finish. If the PIN is not available with the A lead finish, the same PIN will be acquired except with the C or B lead finish designator as determined by availability. Type C terminal material is a fired on metallization used with leadless chip carriers. 3.7.5.2 Index point. The index point, tab, or other marking indicating the starting point for numbering of leads or for mechanical orientation shall be as specified and shall be applied so that it is visible from above when the microcircuit is installed in its normal mounting configuration. The outline of an equilateral triangle (i.e., .), which may be used as an electrostatic identifier (see 3.7.5.8.2), may also be used as the pin 1 identifier. 3.7.5.3 Lot identification code (date code). Devices shall be marked by a unique code to identify the week of final seal. The first two numbers in the code shall be the last two digits of the number of the year, the third and fourth numbers shall be two digits indicating the calendar week of the year. When the number of the week is a single digit, it shall be preceded by a zero. Reading from left to right or from top to bottom, the code number shall designate the year and week, in that order (e.g., 8806 equals week 6 of 1988). 3.7.5.4 Manufacturer's identification. Devices shall be marked with the name or trade mark of the manufacturer. The identification of the equipment manufacturer may appear on the device only if the equipment manufacturer is also the device manufacturer. 3.7.5.5 Manufacturer's designating symbol. When space permits, the manufacturer may mark the CAGE code on devices. The manufacturer's designating symbol or CAGE code number shall be as listed on NAVSHIPS 0967-190-4010 or cataloging Handbook H4/H8. NAVSHIPS 0967-190-4010 and Handbook H4/H8 are no longer being maintained. Manufacturing symbols found in NAVSHIPS 0967-190-4010 should no longer be used for current product. All current product should use the current manufacturers CAGE code. CAGE codes can be found using the online database references in 3.7.5.e. The designating symbol shall be used only by the manufacturer to whom it has been assigned and only on those devices manufactured at the manufacturer's plant. In the case of small devices, the manufacturer's designating symbol may be abbreviated by omitting the first "C" in the series of letters. 3.7.5.6 Country of manufacture. The manufacturer shall indicate the country where the device was manufactured (i.e., substrate and element attach, interconnect, seal). At the option of the manufacturer, the country of manufacture marking may be omitted from the body of the device but shall be retained on the initial container. 3.7.5.7 Serialization. Serialization allows traceability of electrical tests results (variables data) to an individual device. 3.7.5.7.1 Class K serialization. Prior to the first recorded electrical measurement in screening, each Class K device shall be marked with a unique serial number assigned consecutively. Lot records shall be maintained to provide traceability from the serial number to the specific incoming inspection lots from which the elements originated. 3.7.5.7.2 Class H and G serialization. Serialization of Class H and G devices shall only be required when specified in the device acquisition specification. 3.7.5.8 Special marking. When the size of a package is insufficient to allow marking of special process identifiers on the top surface, the back side of the package may be used for these markings except the ESD identifier shall be marked on the top. Button cap flat packs with less than, or equal to, 16 leads may have the identifier marked on the ceramic. Back side marking with conductive or resistive ink shall be prohibited on nonconductive surfaces. 3.7.5.8.1 Beryllium oxide package identifier. If a device package contains beryllium oxide, the device shall be marked with this designation: BeO. 9 MIL-PRF-38534G NOTE: Packages containing beryllia will not be ground, sandblasted, machined, or have other operations performed on them which will produce beryllia or beryllium dust. Furthermore, beryllium oxide packages will not be placed in acids that will produce fumes containing beryllium. 3.7.5.8.2 Electrostatic discharge (ESD) sensitivity identifier. ESD classification levels are defined as follows when * tested in accordance with method 3015, of MIL-STD-883. The testing procedure of JESD22-A114 may optionally be used in lieu of method 3015 provided the manufacturer is able to demonstrate correlation between the two methods. Optional Prior individual Required ESD class designation part packaging Electrostatic designator category marking marking voltage___ 0 .0 .0 <250 V 1A .A .A 250 V – 499 V 1B .B .B 500 V - 999 V 1C .C .C 1,000 V – 1,999 V 1Note * A . Note* . Note * 0 - 1,999 V 2 B .. .. 2,000 - 3,999 V 3 Note* ... Note* ... Note* = 4,000 V 3A ...A ...A 4,000 V – 7,999 V 3B ...B ...B . 8,000 V NOTE * ESD class designator 1 has been replaced with designators 0, 1A, 1B, 1C and ESD class 3 designator has been replaced with 3A and 3B ESD class designators as of 24 March 2006. Devices not yet ESD re-classified may continue to be marked as class 1 (single triangle) or class 3 until testing determines the appropriate class. The class 1 single (.) may be used as a pin 1 identifier. The manufacturer may mark the part as indicated under “Optional Individual Part Marking” (see C.6.3.3.4 for testing requirements.) After 24 March 2006, (for newly qualified product- PI), the 0, 1A, 1B, 1C, 3A, and 3B designators shall be used with the appropriate marking. Devices previously classified by test as category A may be designated as class 1 and devices classified as category B may be designated as class 2. 3.7.5.8.3 Certification mark. All devices acquired to and meeting the requirements of this specification, and the applicable associated device acquisition specification, and which are approved for listing on QML-38534, shall bear a certification mark as shown in table III. TABLE III. Certification mark. Acquisition document Class Certification mark SMD All QML or Q for small devices Non-SMD dated after this document K CK H CH G CG E CE D CD Non-SMD dated prior to this document All CH or C for small devices These certification marks, or the abbreviations "Q" or "C", shall not be used for any device acquired under contracts or orders which permit or require any changes to this specification except as allowed in 3.7.1. In the event that a lot fails to pass inspection, the manufacturer shall remove or obliterate the certification mark from the sample tested and also from the devices represented by the sample. 10 MIL-PRF-38534G 3.7.5.9 Marking option for controlled storage of Class H and G. Where devices are subjected to testing and screening in accordance with some portion of the quality assurance requirements and stored in controlled storage areas pending receipt of orders requiring conformance to the same or a different level, the inspection lot identification code shall be placed on the device package along with the other markings specified in 3.7.5 sufficient to assure identification of the material. As an alternative, if the microcircuits are stored together with sufficient data to assure traceability to processing and inspection records, all markings may be applied after completion of all inspection to the specified level. 3.8 Item requirements. The individual item requirements, including temperature range, for devices delivered under this specification shall be documented in the device acquisition specification. * 3.8.1 Certification of conformance. Manufacturers, or distributors, who offer compliant devices described by this specification shall provide written certification, signed by the corporate officer who has management responsibility for the production of the devices, that the devices are built, tested, and handled in accordance with this specification and that they meet or exceed the performance requirements for the applicable class. The responsible corporate official may, by documented authorization, designate other responsible individuals to sign the certificate of conformance, but, the responsibility for conformity to the facts shall rest with the responsible corporate officer. The certificate shall include the following information: a. Manufacturer documentation: (1) Manufacturer’s name and address. (2) Customer’s or distributor’s name and address. (3) Acquisition order number. (4) Device type and Class level (SMD part numbers include both). (5) Date code. (6) Assembly plant location, if applicable. (7) Quantity of devices in shipment from manufacturer. (8) Statement certifying QML microcircuit conformance and traceability. (9) Signature and date. b. Distributor documentation for each distributor: (1) Distributor’s name and address. (2) Name and address of customer. (3) Quantity of devices in shipment. (4) Latest re-inspection date, if applicable. (5) Certification that this shipment is a part of the shipment covered by the manufacturer’s documentation. (6) Signature and date. (7) Contract number. (8) Part number. (9) Company or distributor from which parts were received. (10) Include all documentation from 3.8.1.a. 11 MIL-PRF-38534G 3.9 Recycled, recovered, or environmentally preferable materials. Recycled, recovered, or environmentally preferable materials should be used to the maximum extent possible, provided that the material meets or exceeds the operational and maintenance requirements, and promotes economically advantageous life cycle costs. 3.10 Workmanship. Devices shall be manufactured, processed, and verified to meet the performance requirements of this specification; and with the production practices, workmanship instructions, inspection and test procedures, and training aids prepared by the manufacturer in fulfillment of the baseline process flow. 3.10.1 Rework and repair provisions. All rework and repair operations shall address the limitations and guidelines of Appendix E. 4. VERIFICATION 4.1 General verification. All items shall meet all requirements of section 3. The manufacturer is responsible for verifying that product delivered to this specification meets the performance requirements as stated in section 3. The absence of any inspection requirements in the specification shall not relieve the contractor of the responsibility of ensuring that all products or supplies submitted to the Government for acceptance comply with all requirements of the contract. Sampling inspection, as part of manufacturing operations, is an acceptable practice to ascertain conformance to requirements, however, this does not authorize submission of known defective material, either indicated or actual, nor does it commit the Government to accept defective material. 4.2 Quality Management (QM) Program. Manufacturers of compliant devices to this specification shall have in place, or shall implement a quality management program, (see Appendix A). This system will be used to verify that devices meet the applicable performance requirements of section 3. This system will be verified by the qualifying activity, see 4.5 herein. 4.3 Baseline process flows. Manufacturers of compliant devices to this specification shall implement a baseline process flow detailing the processes, tests, inspections/monitors, material entry points, and the order in which operations are performed. Appendices C and E provide generic verifications, design, and construction criteria for use in developing these flows. The criteria and verifications identified in Appendices C and E may be modified as specified in 3.7.1 herein. The baseline flow will be verified by the qualifying activity, see 4.5 herein. The baseline process flow used to list a QML manufacturer as Class G or D may be one or more of its product manufacturing flows (e.g., travelers) that are representative of the manufacturer's processes and materials. 4.4 Quality management (QM) plan. The manufacturer's QM plan reflects the major elements of the quality management program. The QM plan shall be available at, and continually effective in, the manufacturer's plant. 4.4.1 Self-audit program. As part of the QM plan, the manufacturer shall establish an independent self-audit program under the direction of the quality organization to assess the effectiveness of the manufacturer's quality assurance system, and ability to meet specification requirements. The results of these audits shall be available. 4.4.2 Change control procedures. As part of the QM plan, the manufacturer shall have a system which shall include procedures for notification of change that affects form, fit, and function, to all applicable acquiring activities. 4.5 Verifications for QML listing. Manufacturers of devices furnished as compliant to this specification shall obtain a (QML) listing from the qualifying activity (DSCC). The qualifying activity is as defined in 6.4.39. QA approval of the manufacturers quality management program, baseline process flows, and technology capability will result in the manufacturers receiving a QML certification and QML listing. The manufacturing processes and materials portion of the baseline flow (see 4.3) are listed on the QML. The qualifying activity shall provide procedures to obtain a QML certification and QML listing. This verification will require an on-site visit to the manufacturer's facility. 12 MIL-PRF-38534G 4.5.1 Verification audit. During the audit, the qualifying activity shall verify the adequacy of the manufacturer's quality management program to achieve at least the same level of quality as could be achieved by complying with Appendix A. The qualifying activity shall also verify the adequacy of the manufacturer's baselined process flow, assessing the flow’s capability to produce products that can meet the generic performance verifications defined in Appendix C. The qualifying activity shall also evaluate the manufacturer’s capability for holding critical processes within established limits at specified points and continuously maintaining this capability during production. Qualifying activity approval of the manufacturer's quality management system and baseline process flow results in certification, and is a mandatory precondition to QML listing. The interval between on-site reaudits shall normally be two years. However, the qualifying activity will adjust this interval based on the manufacturer's TRB reports or retention reports (as applicable), customer feedback, self-audit, and other indications of the manufacturer's maintenance of the QML system. 4.5.1.1 On-site verification. The manufacturer shall make available to the qualifying activity all data needed to support the quality management program and procedures. Qualifying activity access to manufacturing and testing facilities and operators will be required. For first time qualification, on-site verifications will include all of the following areas: The manufacturer's quality management program, design program, substrate fabrication, assembly and test processes, and facility control. Deficiencies and concerns shall be noted by the audit team and provided during the exit critique. 4.5.1.2 Certification. After verification, and upon correction of all deficiencies and concerns, the qualifying activity shall issue a certificate and letter of certification to the manufacturer. 4.5.1.3 Classes E, G, H, and K process flow audits. The qualifying activity shall also verify the adequacy of the manufacturer's baselined process flow, assessing those flows' capability to produce a product that can meet the generic performance verifications and criteria as defined in Appendices C, and E as applicable. 4.5.1.4 Class D process flow audit. The qualifying activity shall verify that the manufacturer plans the manufacturing of products and ensures that process control is practiced in accordance with the manufacturer's defined quality management program. The manufacturer's processes and materials will also be compared to the manufacturer's selected baseline process flow (see 4.3) for verification. 4.5.2 Technology capability verification (qualification). In order to receive a QML listing, manufacturers shall demonstrate the capability of their processes and materials to produce products that meet the appropriate performance requirements. Manufacturers of emerging technologies or advanced technologies shall also perform technology characterization as part of their technology capability verification. 4.5.2.1 Class H and K QML listing. The manufacturer shall demonstrate the capability of products built using their baseline process flow to meet the specified performance requirements with an established reliability safety margin. An established reliability safety margin is shown by testing performed to more stringent stress levels than those specified for screening and conformance inspection and periodic inspection testing. The safety margin is specified in Appendix C as a qualification test flow. This demonstration shall be performed using data, either historical data or data specifically generated by testing, performed to meet the qualification test flow of Appendix C. In order to qualify advanced or emerging technologies, the manufacturer may need to modify the qualification test flow of Appendix C. 4.5.2.2 Class G and D QML listing. The manufacturer shall demonstrate the ability of their baseline to produce devices which will meet the performance requirements of the respective class. This demonstration shall consist of data, either historical or specifically generated to demonstrate this capability. This data shall be presented to the qualifying activity. It is the manufacturer's responsibility to provide enough information to demonstrate that their devices are capable of meeting the performance requirements. 4.5.2.3 Class E listing. Class E listing is granted upon qualification to one of the above levels. As Class E is based upon one of the above flows, users should carefully evaluate and approve exceptions taken to the H, K, or G baselined flow. 13 MIL-PRF-38534G 5.PACKAGING 5.1 Packaging For acquisition purposes, the packaging requirements shall be as specified in the contract or order (see 6.2). When packaging of materiel is to be performed by DoD or in-house contractor personnel, these personnel need to contact the responsible packaging activity to ascertain packaging requirements. Packaging requirements are maintained by the Inventory Control Point’s packaging activity within the Military Service or Defense Agency, or within the Military Service’s system command. Packaging data retrieval is available from the managing Military Department’s or Defense Agency’s automated packaging files, CD-ROM products, or by contacting the responsible packaging activity. 6. NOTES. (This section contains information of a general or explanatory nature that may be helpful, but is not mandatory.) 6.1 Intended use. Microcircuits conforming to this specification are intended for use for Government microcircuit applications and logistic purposes. For maximum cost effectiveness while maintaining essential quality and reliability requirements, it is recommended that, for initial acquisitions for original equipment complements, the device class appropriate to the need of the application be acquired. For acquisition of spare parts for logistic support, it is recommended that, unless otherwise specified, all devices be acquired to Class H requirements. 6.2 Acquisition requirements. Acquisition documents should specify the following: a. Title, number, and date of the specification. b. Packaging requirements (see 5.1). c. PIN. d. Title, number, and date of applicable device acquisition specification and identification of the originating design activity. e. Device finishes. f. Product assurance level (see 1.3). g. Change notification (i.e, point of contact). 6.2.1 Optional acquisition data. The following items are optional and are only applicable when specified in the acquisition documents. a. Requirements for failure analysis. b. Special requirements. c. Disposition of samples. d. Requirement for qualification or conformance inspection (CI) and periodic inspection (PI) plan. e. Requirements for resistance of soldering heat. 6.3 Qualification. With respect to products requiring qualification, awards will be made only for products which are, at the time of award of contract, qualified for inclusion in Qualified Manufacturer’s List, QML-38534, whether or not such manufacturers have actually been listed by that date. The attention of the contractors is called to these requirements, and manufacturers are urged to arrange to have the products that they propose to offer to the Federal Government tested for qualification in order that they may be eligible to be awarded contracts or orders for the products covered by this specification. Information pertaining to qualification of products may be obtained from Defense Supply Center, Columbus, ATTN: DSCC-VQ, P.O. Box 3990, Columbus, Ohio 43218-3990. 14 MIL-PRF-38534G 6.4 Terms, definitions, methods, symbols, and abbreviations. For the purposes of this specification, the terms, definitions, methods, and symbols of MIL-STD-883, MIL-STD-750, MIL-HDBK-1331, and those contained herein apply and may be used in applicable device acquisition specifications wherever they are pertinent. The preparing activity will interpret these definitions for use wherever pertinent. To further describe a particular type of device, additional modifiers may be prefixed to the type name. 6.4.1 Acquiring activity. The organizational element of the Government which contracts for articles, supplies, or services may authorize a contractor or subcontractor to be it’s agent. When this organizational element of the Government has given specific written authorization to a contractor or subcontractor to serve as agent, the agent will not have the authority to grant waivers, deviations, or exceptions to this specification unless specific written authorization to do so has also been given by the Government organization which is the preparing activity, or qualifying activity. In the absence of a specific acquiring activity, the acquiring activity will be an organization within the supplier's company that is independent of the group responsible for device design, process development or screening, or may be an independent organization outside the supplier's company. 6.4.2 Acquisition documents. Acquisition documents consist of the acquisition order or contract, SMD, or specifications as applicable. The preferred device acquisition document for compliant devices is the SMD. 6.4.3 Audit checklist. A form listing specific items which are to be audited. 6.4.4 Baseline index of documents. The documents which establish the baseline for a given device manufacturer in satisfying the requirements of certification in accordance with this specification. 6.4.5 Baseline process flow. The manufacturer's baseline process flow is that flow of manufacturing processes, inspection and test processes, and material entry points into the flow that defines the manufacturer's specific technology flow. This flow begins with incoming material, goes through all manufacturing processes including in- processes monitors, completed device screening, and final acceptance verification of the product. The manufacturing processes and materials portion of the baseline process flow are the portions of the baseline that are listed on the QML. The total baseline flow is certified under QML certification. 6.4.6 Burn-in lot. The burn-in lot is used for purposes of percent defective allowable (PDA) or pattern failure accountability (or both). 6.4.7 Compliant devices. Compliant devices are those that meet, without exception, the performance requirements of this specification, as well as the requirements of the device acquisition specification (e.g., SMD). 6.4.8 Compound bond. A bond placed on top of another bond, wire, ribbon, or other conductor not integral to the substrate. 6.4.9 Cpk. Cpk is a capability index that reflects process centering and variability with respect to specification requirements. The higher the Cpk number, the more capable the process. 6.4.10 Critical control parameters. Critical control parameters are parameters whose variability most affect a design, process, or material. 6.4.11 Customer compliance matrix (CCM). The CCM documents the relationship between each customer requirement for a specific product, and the method used to assure that customer requirements will be achieved. The CCM will document the correlation between alternative methods used by the manufacturer and the verification methods of Appendix C including any changes, and justification for any changes, made to the design requirements. 6.4.12 Delta (.) limits. Delta limits, maximum changes in specified parameter readings which permit device acceptance on specified tests, will be based on comparison of present measurements with specified previous measurements. NOTE: When expressed as a percentage value, they will be calculated as a proportion of previously measured values. 6.4.13 Design activity. The organization that specifies the device design parameters, layout, materials of construction, elements, sources, etc. 15 MIL-PRF-38534G 6.4.14 Design analysis. Design analysis is an evaluation of critical performance parameters or design data to determine a design/process/material combination that guarantees compliance to a specific requirement without testing. 6.4.15 Design of experiments (DOE). DOE is a formal plan for conducting experiments which may be used to make achievement of a specific requirement less sensitive to process/material variability. Typical examples include: Taguchi, Central Composite Design, and factorial designs. 6.4.16 Design robustness. Design robustness is the insensitivity of a design to uncontrollable variation so that it does not significantly affect the product or process once it is in routine operation. 6.4.17 Electrostatic discharge sensitivity (ESDS). The level of susceptibility of devices to damage by static electricity, found by classification testing, is used as the basis for assigning an ESDS class. 6.4.18 Element. A constituent of a device that contributes directly to its operation (e.g., chip resistor, capacitor, diode, transistor, integrated circuit, surface acoustic wave (SAW), substrate, package, etc., incorporated into a device), is an element of the device. 6.4.19 Film microcircuit. A microcircuit consisting exclusively of elements which are films formed in-situ upon or within an insulating substrate. 6.4.20 Final seal. After manufacturing operations which complete the enclosure of a device following all allowable rework so that further internal processing cannot be performed, and for the purpose of seal date code identification and (CI) and (PI) testing, the final seal date code is used. 6.4.21 Flip chip bonding. Direct attachment of a bare die face down with the surface of the die being placed in direct contact with the substrate. 6.4.22 Hybrid microcircuit. A microcircuit that contains two or more of a single type, or a combination of the following types of elements with at least one of the elements being active. a. Film microcircuit (6.4.19). b. Monolithic microcircuit (6.4.30). c. Semiconductor element (6.4.42). d. Passive chip or printed or deposited substrate elements (6.4.35). 6.4.23 Hybrid microcircuit type (device type). The term "hybrid microcircuit type" (device type) refers to a single specific device configuration. All samples of a hybrid microcircuit type are electrically and functionally interchangeable with each other; have the same electrical and environmental test limits; and use the same package, materials, piece parts, and assembly process. 6.4.24 Inspection lots. Inspection lots consist of a quantity of devices of a single device type (required for group A) or several different circuit types (allowed for groups B, C3, and D tests only) in a single package type and lead finish submitted at one time for final acceptance. All devices within each inspection lot will be finally sealed in the same period not exceeding 13 weeks. 6.4.25 Inspection lot formation. Inspection lot formation is required if the inspection lot is to be formally accepted by the lot related CI and PI testing of this specification or method 5005 of MIL-STD-883. If the in-line process verification testing alternative is used, inspection lot formation is not required. 6.4.26 Integral substrate/package. An integral substrate/package (ISP) element is a unit where the base substrate becomes an integral part of the finished package. 6.4.27 Known good die (KGD). A bare die of the same quality and reliability level as an equivalent packaged die. 16 MIL-PRF-38534G 6.4.28 Microelectronics. That area of electronic technology associated with, or applied to, the realization of electronic systems from extremely small electronic parts or elements. 6.4.29 Microcircuit. A small active circuit having a high equivalent circuit element density, which is considered as a single part composed of interconnected elements on one or more substrates to perform an electronic circuit function. (This excludes printed wiring boards, circuit cards assemblies, and modules composed exclusively of discrete electronic parts mounted on a non-ceramic substrate or board.) 6.4.30 Monolithic microcircuit. A microcircuit (active) consisting exclusively of elements formed in-situ or within a single semiconductor substrate with at least one of the elements formed within the substrate. 6.4.31 Multichip module (MCM). A hybrid microcircuit that contains two or more microcircuits, each having greater than 100,000 junctions. 6.4.32 Non-continuous production. Non-continuous production occurs when devices are held by the manufacturer, with no additional assembly work performed, for more than 30 days. 6.4.33 Off-line reliability assessment. Off-line reliability assessment is the use of statistically based methods to monitor reliability data. This data may be used to control future adjustments to the design/process/material. 6.4.34 Package type. Packages which have the same case outline, configuration, materials (including bonding wire and die attach), piece parts (excluding preforms which differ only in size), and assembly processes. 6.4.35 Passive element. Planar resistors, capacitors, inductors and patterned substrates (single and multilayer), and nonplanar chip resistors, capacitors, inductors, and transformers. 6.4.36 Percent defective allowable (PDA). PDA is the maximum observed percent defective which will permit the lot to be accepted after the specified 100 percent test. 6.4.37 Periodic capability certification. Periodic capability certification is the calibration and certification of equipment or process steps for an individual parameter(s) such that it can be used as an alternative method to detection testing. 6.4.38 Production lot. A production lot consists of a device type manufactured from the same basic raw materials on the same production line, processed under the same manufacturing techniques and controls using the same type of equipment. The production lot is formed at, or prior to, device kit preparation (i.e., release to manufacturing). In addition for Class K devices, all materials will be from the same incoming inspection lot for each element. If necessary, rework requirements may be satisfied with materials from a different incoming inspection lot. 6.4.39 Qualifying activity. The qualifying activity is the organizational element of the Government that grants certification and QML status. For the purpose of this document the qualifying activity will be DSCC. 6.4.40 Quality function deployment (QFD). QFD is a technique for analysis of the interrelationships between different requirements. These interrelationships are evaluated in a decision making matrix developed through concurrent engineering. 6.4.41 Self-audit. The performance of periodic surveys and reviews by the device manufacturer's designated personnel to evaluate compliance to defense specifications, customer and internal requirements, and to evaluate the companies overall quality programs. 6.4.42 Semiconductor element. Active semiconductor elements other than microcircuits (e.g. transistors, diodes, silicon controlled rectifiers (SCRs), etc.) * 6.4.43 Similar devices. For the purpose of PI, one device type is similar to another when it meets all the following conditions: a. Designed and manufactured identically using the same or fewer fabrication and assembly processes and materials. b. Assembled with the same, or fewer, active and passive elements. 17 MIL-PRF-38534G c. Subjected to the same screening except electrical testing. d. Designed to generate the same, or fewer, functions (magnitude of functional attributes such as voltage, current, duty cycle, frequency, etc. may vary) using the same, or less functional, circuitry and element type (e.g., a 4-bit A/D converter is similar to a 10-bit A/D converter, but not vice versa). 6.4.44 Standard evaluation circuit (SEC). An SEC is a test coupon/device that is representative of actual product. The SEC may be actual product or may be specifically designed to evaluate a particular process. The SEC should be processed using the same processes, equipment, and type of material as the product it represents. 6.4.45 Statistical process control (SPC). SPC utilizes statistical methods to monitor parameters (i.e., process or product) in order to provide early warning of a process fluctuation or shift. Appropriate actions should be taken to maintain a state of statistical control. SPC may be used as a tool to facilitate process improvement. 6.4.46 Tape automated bonding (TAB). The attachment of a bare die to a very fine pitch lead frame. 6.4.47 Technology capability. Technology reliability and performance limits, normally determined through tests known to reveal failure modes/mechanisms; and through testing of critical characteristics of the technology that are known to impact performance and reliability. Testing performed to more severe test conditions than those used for screening and final acceptance testing of the device, or test-to-failure testing, are examples of testing performed specifically to determine a technology's capability. The data may also be produced through other means for mature technologies, e.g., production test data taken over time, design or product qualification test data accumulated for a specific program or customer, etc. 6.4.48 Wafer lots. Wafer lots consist of microcircuit and semiconductor wafers formed into lots at the start of wafer fabrication for homogeneous processing as a group. Each lot is assigned a unique identifier or code to provide traceability and maintain lot integrity throughout the fabrication process. Wafer lot processing as a homogeneous group is accomplished by any of the following procedures, providing process schedules and controls are sufficiently maintained, to assure identical processing in accordance with process instructions of all wafers in the lot: a. Batch processing of all wafers in the wafer lot through the same machine process steps simultaneously. b. Continuous or sequential processing (wafer by wafer or batch portions of wafer lot) of all wafers through the same machine or process steps. c. Parallel processing of portions of the wafer lot through multiple machines or process stations on the same certified line, provided statistical quality control (SQC) assures and demonstrates correlation between stations and separately processed portions of the wafer lot. 6.5 Destructive tests. All mechanical or environmental tests (other than those listed in 6.6), will be considered destructive initially, but may subsequently be considered nondestructive upon accumulation of sufficient data to indicate that the test is nondestructive. The accumulation of data from five repetitions of the specified tests on the same sample of product, without evidence of cumulative degradation or failure to pass the specified test requirements in any device in the sample, is considered sufficient evidence that the test is nondestructive. Any test specified as a 100 percent screen will be considered nondestructive for the stress level and duration or number of cycles applied as a screen. Unless otherwise specified, or subsequently determined to be otherwise, the following MIL-STD-883 test methods will be initially classified as destructive. 18 MIL-PRF-38534G Internal visual and mechanical (method 2014). 1/ Die shear strength test. Bond strength (method 2011). Total dose radiation hardness test. Solderability (except for lead finish A). ESDS test. Moisture resistance. Lid torque test. Lead integrity (method 2004). Adhesion of lead finish. Salt atmosphere. Vibration, variable frequency. SEM inspection for metallization. Internal water vapor test. 2/ Steady state life test (accelerated). Pin grid package lead pull (method 2028). Single Event Upset (SEE). Dose rate upset. Neutron testing. 6.6 Nondestructive tests. Unless otherwise specified, the following tests are classified as nondestructive: Barometric pressure. Radiography. Steady-state life (see note). Particle impact noise detection (PIND). Intermittent life (see note). Physical dimensions. Hermeticity. Nondestructive bond pull test (method 2023). External visual. Resistance to solvents. Internal visual (preseal). Solderability (for lead finish A only). Burn-in screen (see note). NOTE: When the test temperature exceeds the maximum specified junction temperature for the device (including maximum specified for operation or test), these tests are considered destructive unless otherwise specified. 6.7 Environmentally preferable material. Environmentally preferable materials should be used to the maximum extent possible to meet the requirements of this specification. As of the dating of this document, the U.S. Environmental Protection Agency (EPA) is focusing efforts on reducing 31 priority chemicals. The list of chemicals and additional information is available on their website at http://www.epa.gov/osw/hazard/wastemin/priority.htm. Included in the list of 31 priority chemicals are cadmium, lead, and mercury. Use of these materials should be minimized or eliminated unless needed to meet the requirements specified herein (see Section 3) 6.8 Subject term (key word) listing. Class E Qualified Manufacturers List (QML) Class G Qualification Class H Statistical Process Control (SPC) Class K Technology Review Board (TRB) Multichip module (MCM) * 1/ This inspection is nondestructive when performed at preseal visual. 2/ Test samples may be delidded/relidded in accordance with Appendix E making these devices eligible for shipment. The manufacturer will ensure that proper precautions for handling, testing, and shipping have been taken by the RGA test laboratory. 19 MIL-PRF-38534G 6.9 List of acronyms. ATT -Authorization to test CCM -Customer compliance matrix CI -Conformance inspection DOE -Design of experiments DRC -Design rules check ERC -Electrical rules check ESD -Electrostatic discharge ESDS -Electrostatic discharge sensitivity IC -Integrated circuit IR -Insulation resistance ISP -Integral substrate package KGD -Known good die LTPD -Lot tolerance percent defective MCM -Multichip module MIS -Metal insulation semiconductor PDA -Percent defective allowable PI -Periodic inspection PIND -Particle impact noise detection PPM -Parts per million QA -Qualifying activity QFD -Quality function deployment QM -Quality management QML -Qualified manufacturers list QPL -Qualified product list RF -Radio frequency RGA -Residual gas analysis RHA -Radiation hardness assurance SAW -Surface acoustic wave SCR -Silicon controlled rectifier SEC -Standard evaluation circuit SEM -Scanning electron microscope SEU -Single event upset SMD -Standard microcircuit drawing SPC -Statistical process control SQC -Statistical quality control TAB -Tape automated bonding TCR -Temperature coefficient of resistance TRB -Technology review board 6.10 Change from previous issue. The margins of this specification are marked with asterisks to indicate where changes from the previous issue were made. This was done as a convenience only and the Government assumes no liability whatsoever for any inaccuracies in these notations. Bidders and contractors are cautioned to evaluate the requirements of this document based on the entire content irrespective of the marginal notations and relationship to the last previous issue. 20 MIL-PRF-38534G APPENDIX A QUALITY MANAGEMENT PROGRAM A.1 SCOPE A.1.1 Scope. This appendix is intended to be used by manufacturers in developing their Quality Management (QM) Program for implementation of verification and preventative techniques to assure product quality and reliability. The QM program should demonstrate the methods used to assure conformance to the applicable performance requirements, including design, manufacturing, and verification. This appendix is a mandatory part of the specification. The information contained herein is intended for compliance. Manufacturers may demonstrate a QM system that achieves at least the same level of quality as could be achieved by complying with this appendix. A.1.2 Technology Review Board (TRB) option. Manufacturers using this option will develop a TRB system and have it approved by the qualifying activity (QA). This option allows a manufacturer to migrate from the conventional design and construction requirements and detection tests (e.g., screening, conformance inspection and periodic inspection, and qualification) of this document to alternative prevention methods with sufficient documentation. Alternative prevention methods include statistical process control (SPC), periodic process capability certification, design analysis, design robustness, off-line reliability assessment, etc. The documentation will show that the alternative methods ensure product compliance to the minimum quality and reliability requirements of this specification without performing the detection tests or adhering to the specific design and construction requirements. Using this specification as a baseline, the manufacturer develops a QM program, which encompasses the entire manufacturing line being validated. This line is controlled by the TRB, which can modify, substitute, or delete detection tests as appropriate for the technology or process. Techniques such as statistical process control (SPC) and design of experiments may be employed to ascertain process capabilities. Once alternative techniques are developed, periodic assessment is required to ensure that the processes continue to meet the required capabilities. The QM program also requires a program of continuous improvement to reduce overall product cost and improve quality and reliability. A customer compliance matrix (CCM) is generated for each product as part of the conversion of customer requirements process, and documents the means by which the end-item performance requirements will be met. A.1.3 Description of appendix A. This appendix describes a QM program to demonstrate and assure that design, manufacture, inspection, and testing of devices are adequate to ensure compliance with the applicable performance requirements and quality standards for each device manufactured. This appendix also describes an optional TRB system. When used, the TRB system will be certified by the QA. A.1 SCOPE 21 A.2 APPLICABLE DOCUMENTS 21 A.3 QUALITY SYSTEM REQUIREMENTS 22 A.2 APPLICABLE DOCUMENTS A.2.1 General. The documents listed in this section are specified in section A.3 of this specification. This section * does not include documents cited in other sections of this specification or recommended for additional information or as examples. While every effort has been made to ensure the completeness of this list, document users are cautioned that they must meet all specified requirements of documents cited in section A.3 of this specification, whether or not they are listed. A.2.2 Government documents. A.2.2.1 Specifications, standards, and handbooks. The following specifications, standards, and handbooks form a part of this specification to the extent specified herein. Unless otherwise specified, the issues of these documents are those cited in the solicitation or contract. DEPARTMENT OF DEFENSE STANDARDS MIL-STD-883 -Test Method Standard Microcircuits (Copies of this document are available online at http://assist.daps.dla.mil/quicksearch/ or from the Standardization Document Order Desk, 700 Robbins Avenue, Building 4D, Philadelphia, PA 19111-5094.) 21 MIL-PRF-38534G APPENDIX A A.2.3 Non-Government publications. The following documents form a part of this document to the extent specified herein. Unless otherwise specified, the issues of these documents are those cited in the solicitation or contract. AMERICAN NATIONAL STANDARDS INSTITUTE (ANSI) ANSI/NCSL Z540.3 -Calibration Laboratories and Measuring and Test Equipment - General Requirements. (Copies of these documents are available online at http://www.ansi.org/ or from American National Standards Institute, Incorporated, 25 West 43rd Street, 4th Fl. New York, NY 10036.) INTERNATIONAL ORGANIZATION FOR STANDARDIZATION (ISO) STANDARDS ISO 14644-1 - Cleanrooms and Associated Controlled Environments - Part 1: Classification of Air Cleanliness - First Edition. ISO 14644-2 - Cleanrooms and Associated Controlled Environments – Part 2: Specifications for Testing and Monitoring to Prove Continued Compliance with ISO 14644-1 – First Edition. (Applications for copies of ISO Standards should be addressed to the Institute of Environmental Sciences and Technology (IEST), 940 East Northwest Highway, Mount Prospect, IL 60056-3444. Copies of these documents are also available online at http://www.iso.org/iso/home.htm A.2.4 Order of precedence. Unless otherwise noted herein or in the contract, in the event of a conflict between the text of this document and the references cited herein, the text of this document takes precedence. Nothing in this document, however, supersedes applicable laws and regulations unless a specific exemption has been obtained. A.3 QUALITY SYSTEM REQUIREMENTS A.3.1 Management responsibility. Management is responsible to ensure that the quality system is implemented and successful in fulfilling its goals. A.3.2 Quality system. A.3.2.1 QM plan . The QM plan should consist of a volume or portfolio, or series of documents, which is adequate to assure the quality of the device. This section is a guide in developing these documents. A summary of the manufacturer's approach that makes specific reference to the manufacturer's actual procedures is also a method of documenting the product assurance program plan. The documents authorizing and implementing changes should be maintained. Any difference in treatment of different product lines within a plant should be stated and explained in the QM plan, or separate QM plan's prepared for such different lines. The QM plan should contain, as a minimum, documentation covering the items detailed herein, including all TRB information when applicable. A.3.2.1.1 Functional block organization chart. This chart should show, in functional block-diagram form, the lines of authority and responsibility (both line and staff) for origination, approval, and implementation of all aspects of the product assurance program. Names of the incumbents are not necessary in this chart. A.3.2.1.2 Baseline process flowchart. The flow (see 4.3 herein) should identify all major documents pertaining to the inspection of materials, the production processes, the production environments, and production controls which were used. The documents will be identified by name and number. Changes approved thereafter will be treated in accordance with the approved document change control procedures in A.3.5 herein. A.3.2.1.3 Design guidelines. Design guidelines used to design or verify the design of microcircuits intended to be submitted for acceptance inspection (see A.3.4 herein). A.3.2.1.4 Travelers. Travelers are used to track materials and products during production and testing. A.3.2.1.5 Baseline index of documents. A list of the specification titles, document numbers, and revisions which make up the QML program. This is the baseline the manufacturer is certified to at the certification audit. 22 MIL-PRF-38534G APPENDIX A A.3.2.1.6 Manufacturer's self-audit. The manufacturer's self-audit program should identify key review areas, their frequency of audit, and the corrective action system to be employed when variations from approved procedures or specification requirements are identified. A.3.2.2 Design, processing, manufacturing, and testing instructions. The manufacturer should maintain * documentation and instructions covering, as a minimum, the areas identified below. Procedures should exist which will control the processes and materials which affect the quality of the devices. The following is a guideline for developing these procedures; it is the manufacturer’s responsibility to develop necessary procedures to adequately control the quality of their devices. These areas will normally be addressed by the manufacturer's standard drawings, specifications, process instructions, and other established manufacturing practices. a. Quality control operations (A.3.2). b. Material handling (A.3.2.3). c. Design, processing, rework, tool and materials standards, and instructions (A.3.2.3). d. Conversion of customer requirements into manufacturer’s internal instructions (A.3.3). e. Change control of design, process, and documentation (A.3.5). f. Inspection of incoming materials, applicable utilities, and work in-process (A.3.6). g. Incoming, in-process, and outgoing inventory control (A.3.6.2). h. Performance verification operations (including test methods) (A.3.10.3). i. Tool, gauge, and test equipment maintenance and calibration (A.3.11). j. Failure and defect analysis and data feedback (A.3.13). k. Failure corrective action and evaluation (A.3.14.1). l. Control of non-conforming materials (A.3.14). m. ESD handling control program (A.3.15.1). n. Cleanliness and atmosphere control in work areas (A.3.15.2) o. Personnel training and testing (A.3.18) p. Packaging 23 MIL-PRF-38534G APPENDIX A A.3.2.3 Design, processing, manufacturing equipment, and materials instructions. Procedures should address device design, processing, manufacturing equipment, and materials described in drawings, standards, specifications, or other appropriate media covering the requirements and tolerances for all aspects of design and manufacturing including equipment test and prove-in, materials acquisition and handling, design verification testing and processing steps. As a minimum, detailed instructions should exist for the following items, and be adequate to assure that quantitative controls are exercised, that tolerances or limits of control are sufficiently tight to assure a reproducible high quality product, and that process and inspection records reflect the results actually achieved: a. Incoming materials control (substrates, packages, active and passive chips or elements, wire, water purification, etc.). b. Substrate fabrication operations. c. Die, element, or substrate attachment. d. Interconnect (e.g., wire bonding). e. Rework. f. Sealing. A.3.2.4 Quality improvement program. The manufacturer should develop and implement a program for continuous quality and reliability improvement of processes, including corrective and preventative action. A.3.2.5 QM program (TRB option). A.3.2.5.1 General. A QM program should be developed and implemented by the manufacturer, documented in the QM plan, and controlled by the TRB. The QM program should ensure and demonstrate compliance to the minimum performance requirements of this specification and outline a program for continuous improvement. A device manufactured under this option should, as a minimum, be equivalent in form, fit, function, quality, and reliability to a device manufactured in accordance with Appendix C. A.3.2.5.2 Implementation. Appendix A should be used as a baseline for the QM program. From that baseline, this option may be implemented incrementally by process, or by product line. After satisfying the minimum requirements for validation, a manufacturer may implement alternative methods for addressing the requirements contained in the baselined (Appendix C) flow while performing detection testing in accordance with Appendix C on the remainder of the processes. The minimum requirements for the QM program which should be reviewed during validation are as follows: a. A TRB. b. A QM plan. c. Process/material confirmation and capability achievement procedures including technology qualification test flows. 24 MIL-PRF-38534G APPENDIX A A.3.2.5.3 TRB. The manufacturer should establish a TRB and develop the necessary procedures to govern its’ operation. The manufacturer will be responsible for ensuring that the actions of the TRB result in products that meet all customer and performance requirements. As a minimum, these operating procedures should address the following: a. Record retention. b. Minimum organizational membership. c. TRB charter. d. Responsibilities. e. System for recovery of data used in TRB decisions. f. TRB meeting structure. g. Decision making/approval procedures. h. Distribution of TRB minutes. A.3.2.5.3.1 TRB organizational structure. The following functions, as a minimum, should be represented on the manufacturer's TRB: Design, material procurement, assembly, test, reliability, and quality assurance. Other personnel with decision making responsibilities affecting the product, its processes, or its production facility should participate as required. The manufacturer should identify those organizations that shall be represented on the TRB. A responsible technical representative within each of these organizations should be identified to the qualifying activity. A.3.2.5.3.2 TRB responsibilities. The TRB should oversee the manufacturer's qualified line, including the processes and materials that continue to be controlled under Appendix C. The TRB should be responsible for the following: a. Developing, monitoring, maintaining and controlling the QM program and QM plan, and all supporting documents and data. b. Managing QM plan implementation. c. Monitoring and controlling the self audit program. d. Managing and maintaining the quality improvement programs. e. Overseeing the process/material confirmation and change control activities. f. Overseeing the initial process/materials certification/qualification and subsequent maintenance thereof. g. Reviewing and analyzing data (e.g., Cpk data, defect data, rate of assembly failures, rate of failure returns, and failure analysis results) and taking appropriate action to improve processes. When performance or reliability of shipped microcircuits is called into question, the TRB should provide quick evaluation, appropriate corrective action, and prompt notification of the problem to the qualifying activity. h. Maintaining records of conditions found and actions taken. i. Reporting status of the QM program to the qualifying activity. j. Approving alternative methods that modify, substitute, or delete existing methods (e.g., inspection, testing, screening, CI and PI, or design/construction procedures of this specification). 25 MIL-PRF-38534G APPENDIX A A.3.2.5.4 Alternative method correlation, confirmation, and implementation procedures. This is the approach by which inspection/testing/screening/CI and PI or design/construction requirements within this specification should be modified, substituted, or deleted. The manufacturer should develop methods for confirmation and maintenance of process and material capability and for verification of design capability under this option. Test methods and design/construction requirements of this specification are intended to address worst case application environments for military product. Any alternate method used in lieu of testing, screening, or design/construction requirements should be approved by the manufacturer's TRB and should document the specific areas of correlation between the alternative method and the specification requirement it replaces (i.e., how it meets the specific application environments of this specification) or if the requirement does not apply to a particular technology (see 3.7.1). Alternative methods may be used by non-TRB companies with qualifying activity approval. A.3.2.5.4.1 Correlation, confirmation, and implementation. The following is a typical flow. a. Identify candidate requirements of this specification for alternative method. b. Using data, identify any correlations between the candidate requirement and potential alternative method(s). c. Where correlations exist, develop and document alternative method(s). d. Accumulate data off-line to confirm the capability of the alternative method(s) to assure meeting the requirement. e. Submit alternative method(s) for TRB approval. f. Implement the alternative method(s) as directed by the TRB. NOTE: If an alternative method is determined to no longer assure meeting the requirements of this specification, the product should be inspected/screened/tested in accordance with the previous TRB approved baseline, until the required capability is achieved. A.3.2.5.4.2 Alternative methods. For each candidate process under this option, the manufacturer should specify and implement alternative methods that should be used to maintain each process/material capability such that it continues to meet the minimum performance requirements of this specification. Examples of alternative methods are design analysis, Design of experiment (DOE), off-line reliability assessment, periodic capability certification, SPC, embedded machine controls, manufacturer derived test methods, automated methods with feedback controls, etc. A.3.2.5.4.2.1 Standard evaluation circuits (SEC). A manufacturer may utilize SEC's to evaluate the capability of alternative methods and monitor product performance. The SEC design should be approved by the TRB and controlled through the manufacturer's documentation system. SEC documentation should include construction, dimensions, intended application (i.e., the processes it evaluates), and minimum acceptable limits (e.g., mechanical or electrical values). A.3.2.5.4.2.2 Periodic assessment of alternative methods. Alternative methods should be periodically assessed, as necessary (determined and documented by the TRB), to assure their continued effectiveness. This periodic assessment is a tool for the TRB to aid in monitoring and maintaining product quality. Methods for periodic assessment may include stress-to-failure tests, failure mode analysis, analytic prediction modeling, etc. If an alternative method is determined to no longer meet the initial requirement (i.e., Appendix C), the manufacturer should implement the appropriate previous TRB approved baselined inspection/screening/testing/step. A.3.2.5.5 TRB records. Records of the TRB's membership, deliberations, and decisions should be maintained; dissenting opinions should be recorded. As a minimum, TRB minutes and associated data should be maintained for 5 years. 26 MIL-PRF-38534G APPENDIX A A.3.3 Conversion of customer requirements. The manufacturer should develop a system by which customer requirements and all requirements of this specification, are converted into working instructions. The results of this review, including alternate methods, shall be documented and made available to the customer upon request. As part of the conversion of customer requirements process for TRB companies, the manufacturer should generate a Customer compliance matrix (CCM) for each product that documents the means by which the end-item quality, reliability, and customer/specification requirements should be met and the next level assembly environment should be considered. Required process capabilities and specific internal documents used by the manufacturer to control, monitor, or assess processes and materials should be specified in the CCM. The CCM should be approved by the TRB or procuring activity when specified by contract. The CCM should be kept current. A.3.4 Design requirements. The manufacturer should develop an approach for device design when applicable. The design approach should include the following: a. Design guidelines/handbook. The design guidelines/handbook should define the manufacturer's qualified processes and materials as they relate to the design including the interactions between the application environment and affected materials/processes. Any design requirement not in accordance with this specification should be recorded. These guidelines should form the basis for all designs to be manufactured under the QM program. b. Design models/procedures for worst case temperature and electrical extremes. c. Rules check procedures, covering the following areas, as applicable: (1) Design rules check (DRC) - geometric and physical. (2) Electrical rules check (ERC) - shorts and connectivity. (3) Reliability rules - Electromigration and current density, IR drops, latchup, single event upset (SEU), hot electrons, ESD, burn-out, or backgating, as applicable. (4) RHA rules - applicable radiation environments. d. Thermal design verification procedures. e. Reliability design verification procedures. Worst case circuit design. f. Package design performance verification procedures. g. Feedback loop from design/material/process development activities into design guidelines. h. Next level assembly environment (e.g. hand solder device or wave solder device to the next level assembly). A.3.4.1 Changes in design, materials, or processing. Records should document the change, the date the change is made, traceability of the first change through processing and testing, and justification for the change. A.3.5 Change control. Procedures should address the methods and procedures for implementation and control of changes in device design, processing, and documentation; and for making change information available when applicable. This includes changes made for cost reduction and continuous improvement. The manufacturer should assure that the correct revisions of all documents are available to the appropriate people. 27 MIL-PRF-38534G APPENDIX A A.3.5.1 Configuration control. Changes are categorized into three classifications. Class Description I Major changes II Minor changes III Editorial changes All changes in design, substitution of materials or processes, or modifications to baselined documentation (i.e., all class I, II, and III changes) for any hybrid microcircuit should be processed in accordance with established change control procedures. a. Class I: Class I changes are those changes that may affect the performance, quality, reliability, radiation (when specified), or interchangeability of the product (see Table E-I of Appendix E for representative examples of major changes). Acquiring activity approval shall be required if specified by contract. b. Class II changes are all changes except class I and class III changes (e.g., conformance to the performance specification revision, vendor metallization mask change, package height change within the envelope tolerances of the detail drawing, etc.). Control procedures, records, and rationale for the changes should be kept available for review. c. Class III: Class III, editorial changes, are those changes to documentation necessary to ensure the understanding and execution of the affected document (e.g., format changes, spelling, word identity, etc.). Change documentation history for class III type changes should be kept available for on-site review. A.3.6 Control and acceptance of incoming materials. A.3.6.1 Supplier control program. The capability of supplied material may be validated through a supplier certification system. This system selects and monitors suppliers in order to guarantee that the supplied material should meet and maintain required capability levels (e.g., Cpk, ppm, etc.). Supplier certification is granted based on consistent proof that their product conforms to the specification requirements, through implementation of SPC and quality control systems analogous to those herein. Conventional element evaluation is not required when the elements are purchased from certified suppliers. Material may be procured from vendors who are not certified; such material should be evaluated in accordance with Appendix C of this specification or alternative methods approved by the TRB or the QA. The following are the minimum documentation requirements for each supplier controlled under this program: a. A description of the vendor quality assurance plan with status update reports as required by the TRB or QA. b. A description of the procedure used by the vendor for notification of changes in materials or processes. c. A quality assurance procedure that can be performed by either the vendor or the manufacturer, or a combination of the two. A.3.6.2 Incoming, in-process, and outgoing inventory control. Procedures should address methods and procedures which are used to control storage and handling of incoming materials, work in-process, and warehoused and outgoing product in order to achieve such factors as age control of limited-life materials; and prevent inadvertent mixing of conforming and nonconforming materials, work, or finished product. Each area should maintain identity of work in process. A.3.7 Customer supplied material. A system should be in place to track and control all customer supplied material. 28 MIL-PRF-38534G APPENDIX A A.3.8 Traceability. A.3.8.1 Material and element traceability. Traceability for each device, all adhesives and coatings shall be traceable to a material production lot, inspection lot, or other specified grouping. All elements and materials used for Classes G, H, and K will be traceable to the element manufacturer’s production lot. Traceability for die for Class G, H, K , and parts identified as radiation hardened, is to the wafer lot. For Class K, traceability shall be from the device serial number to specific wafer lot. A.3.8.2 Process/test traceability. Each device, or each group of devices, which have been fabricated as a common batch, will be identifiable through means of production travelers or similar documentation such that the complete manufacturing history, including rework, will be recorded. The records should include, as a minimum, the performance date of all identified production process steps, the specification, number of production process steps, and the identification of the operator performing the process steps. The records will be retained in accordance with A.3.16. A.3.8.3 Production lot traceability. The manufacturer will maintain production lot traceability. In addition for Class * K devices, all materials will be from the same incoming inspection lot for each element. If necessary, rework requirements may be satisfied with materials from a different incoming inspection lot, and shall be traceable to the device serial number. A.3.8.4 Country of manufacture. The manufacturer shall maintain traceability to the location(s) where the baselined assembly processes were performed. A.3.8.5 Production lot identification. Records should identify when each production or inspection lot was processed through each area. These records should identify, for each production or performance verification lot (as applicable) of finished product, test/inspections performed and results, device serial numbers, date of completion, lot identification, device acquisition specification, lot disposition, and the number of devices at seal, shipped, and stocked. A.3.9 Process control. The manufacturer should define all processes and methods used to assure the capability and consistency of the processes. As a minimum, all critical process parameters should be defined. The manufacturer should define process monitors as appropriate. A.3.9.1 Process and materials controls. Records should cover the implementation of tools such as control charts (e.g., X and R charts) or other means of indication of the degree of control achieved at the points in the material, utility, and assembly process flow documented in the manufacturing instructions. Records should also indicate the action taken when each out-of-control condition is observed, and the disposition of product processed during the period of out-of-control operation. A.3.10. Inspection and testing A.3.10.1 Inspection operations. Procedures should address inspection operations specifying type of inspection, sampling and test procedures, acceptance and rejection criteria, and frequency of use. A.3.10.2 Quality control operations. Procedures should address quality control operations specifying the type, procedures, rating criteria, action criteria, records, and frequency of use. A.3.10.3 Performance verification operations. Procedures should address performance verification operations specifying the type, procedures, equipment, judgment, and action criteria, records, and frequency of use. A.3.10.4 Inspection operations. Records of inspection operations should cover the tests or inspections made, the materials group (lot, batch, etc.) inspected, the controlling documentation, the date of completion of inspection, the amount of material tested, and acceptance, rejection, or other final disposition of the material. A.3.11 Tool, gauge and test equipment maintenance and calibration. Procedures should address the maintenance and calibration procedures, and the frequency of scheduled actions, for tools, gauges, and test equipment in accordance with the requirements of ANSI/NCSL Z540.3 or equivalent. For electrical test see MILSTD- 883 electrical test equipment accuracy requirements. 29 MIL-PRF-38534G APPENDIX A A.3.11.1 Equipment calibrations. Records should cover the scheduled calibration intervals for each equipment item, the dates of completion of actual calibration, identification of the group performing the calibration, and certification of the compliance of the equipment with documented requirements after calibration, in accordance with ANSI/NCSL Z540.3 or equivalent. A.3.12 Examples of assembly and verification travelers. Screening and conformance inspection verification travelers should be maintained on a current basis. When in-line inspections replace end-of-line verifications (i.e., alternate group A or B) the traveler should include evidence of required inspections. The traveler should include information necessary to adequately detail the steps utilized in the production and testing of the devices, including all manufacturer imposed tests. As a guide, the following information should be available: a. Name or title of operation and specification number of each process or test. b. Identify PIN, date code, and manufacturer internal lot identification number. c. Date of test and operator identification. d. Calibration control number or equipment identification of all major equipment components used for test. e. Quantity tested and rejected for each process or test and actual quantity tested, if sampled. f. Serial numbers of passing and failing devices, when applicable. g. Time in and out of process, or test, if critical to process, or test, results (i.e., burn-in and 96-hour window). h. Specific major conditions of test that are verifiable by operator including times, temperature, rpm, etc. i. The percent defective calculated and the pattern failure analysis for burn-in. j. Burn-in or life test board serial number or test circuit identification number and revision. k. All required variables data except for electrical tests (use attachments if applicable). l. For electrical tests, test program number and revision, and identify when variables data is required. A.3.13 Failure and defect analysis and data feedback. Procedures should address methods for identification, handling, analysis, and disposition of failed or defective devices. A.3.13.1 Procedure in case of test equipment failure or operator error. Whenever a device is believed to have failed as a result of faulty test equipment or operator error, the failure will be entered in the test record which will be retained for review along with a complete explanation verifying why the failure is believed to be invalid. NOTE: ESD failures will be counted as rejects and not attributed to equipment or operator error for screening, group A, and end-point electrical tests of screening, CI and PI, and qualification and method 5005 of MIL-STD-883. A.3.13.1.1 Procedure for sample tests. When it has been established that a failure is due to test equipment failure or operator error, and it has been established that the sample device has been damaged or degraded, a replacement device from the same inspection lot may be added to the sample. The replacement device will be subjected to all tests to which the discarded device was subjected prior to its failure and to any remaining specified tests to which the discarded device was not subjected prior to its failure. The manufacturer, at their own risk, has the option of replacing the failed device and continuing with the tests before the validity of the test equipment failure or operator error has been established. A.3.13.1.2 Procedure for screening tests. When it has been established that a lot failure during screening test is due to operator or equipment error, and it has been established that the remaining product has not been damaged or degraded, the lot, or surviving portion of the lot, as the case may be, may be resubmitted to the corrected screening test in which the error occurred. Failures verified as having been caused by test equipment failure or operator error will not be counted in the PDA calculation (when applicable). 30 MIL-PRF-38534G APPENDIX A A.3.13.2 Failure and corrective action reports. When the procedures of A.3.13.1.1 and A.3.13.1.2 are used in continuing sample tests or resubmitting lots for screening tests, the manufacturer will document the results of their failure investigations and corrective actions. A.3.14 Failure analysis and corrective action program. The manufacturer should develop the procedures for testing, analyzing, and taking corrective actions on failed parts from all stages of manufacturing, including field returns. The program should include the specific steps to be followed in order to correct any process that is out of control. The manufacturer should also develop procedures for corrective actions to nonconformities other than failed parts. A.3.14.1 Reports and analyses of defective devices and failures. Records of defective devices should cover the source from which each device was received, the test or operation during which failure occurred or defects were observed, and prior testing or screening history of the device, the date of receipt, and the disposition of the device. Records of failure and defect analyses should cover the nature of the reported failure or defect (failure or defect mode), verification of the failure or defect, the nature of any device discrepancies which were found during analysis (failure or defect mechanism), assignment of the failure activating cause if possible, the date of completion of the analysis, identification of the group performing the analysis, disposition of the device after analysis, and the distribution of the record. The record should also address the relationship of observed failure or defect modes in related lots or devices and, where applicable, corrective action taken as a result of the findings. A.3.15 Atmospheric control and handling. A.3.15.1 ESD handling control program. Procedures should address the ESD handling control program documentation. This includes methods, equipment and materials, training, packaging, handling, and procedures for handling ESD sensitive devices. A.3.15.2 Cleanliness and atmosphere control in work areas. Procedures should address instructions for cleanliness and atmosphere control in each work area in which unsealed devices, or parts thereof, are processed or assembled. Controlled work areas should be established in accordance with ISO 14644-1 or equivalent. Airborne particulate class limits shall be as defined by ISO 14644-1. A method for class verification and reverification shall be documented and implemented. ISO 14644-2 may be used for a guide. Action and absolute control limits (at which point work stops until corrective action is completed) based on historical data and criticalness of the process in each particular area, should be established. A method for the identification and control of foreign material, equivalent to or better than the foreign material control program described in method 2017 of MIL-STD-883, should be employed. A.3.16 Control of quality records. A.3.16.1 Records to be maintained. Records shall be legible and maintained which will adequately describe the * processes, materials, inspections, and tests which affect the quality of the device for appropriate amounts of time such that quality concerns and customers are properly supported (e.g. method 5011 of MIL-STD-883 test records, Group C, QML, package evaluation testing, and alternate methods). The records pertaining to production processes, incoming, and in-process inspections should be retained for a minimum of 3 years (7 years for Class K) and those pertaining to performance verification retained for a minimum of 5 years (7 years for Class K) after performance of the inspections. Records pertaining to alternate methods, group C testing, QML, package evaluation, and method 5011 testing shall be retained for 5 years (7 years for Class K) after the process or materials affected have been removed from the qualified flow. A.3.16.1.1 Computerized records. Computerized records are optional provided they clearly and objectively indicate that all requirements of this document have been met. The computerized records for traceability, screening, and conformance inspection should be readily accessible and available to Government personnel for review and an appropriate electronic or hard copy provided to the qualifying activity as required. Computerized records, when used, should be maintained with controls sufficient to easily provide the necessary information and traceability, including identification of individual and time of input. The integrity of the system and the data should be maintained. A.3.16.2 Altered records. Altered records should identify all information necessary to maintain proper traceability and the integrity of the original data and justification for the change. 31 MIL-PRF-38534G APPENDIX A A.3.17 Internal quality audits. A.3.17.1 Self-audit requirements. The manufacturer should have a self-audit program which assists in determining what areas need improvement. The self-audit program should be approved, monitored, and controlled by the manufacturer’s TRB, when applicable. A.3.17.1.1 Self-audit representatives. The designated auditors should be independent from the area being audited. If the use of an independent auditor is not practical; then, as a minimum, another individual should be assigned to participate in the audit or review the results with the auditor from the area. The auditors should be trained in the area to be audited, in the applicable defense specification requirement, and provided with an appropriate checklist for annotating deficiencies. Prior to the audit, the assigned auditor should review the previous audit checklist and deficiencies to assure corrective actions have been implemented and are sufficient to correct the deficiencies. A.3.17.1.2 Audit deficiencies. All audit deficiencies should be documented on the appropriate checklist and a copy submitted to the department head for corrective action. All corrective actions should be agreed to by the quality organization or review board. A.3.17.1.3 Audit follow-up. All audit reports should be filed and maintained. A procedure should be established to follow up on all audit deficiencies to assure that the corrective actions have been implemented in a timely manner. The system (e.g., management review) should also review the acceptability and timeliness of all corrective actions and determine if any deficiencies have repeated since the last required self-audit. If any deficiencies have occurred two or more times in the predetermined time period, additional corrective actions should be taken to assure immediate correction of the problem including notification of applicable organizations. A.3.17.1.4 Audit schedules. The original audit frequency is established by the manufacturer normally not to exceed 1 year for each area. A.3.17.1.5 Self-audit report. The manufacturer keeps the self-audit report on file for the established amount of time prescribed by the manufacturer's record retention requirements, and makes the self-audit report, deficiencies, and corrective actions taken available for review by the qualifying activity. A.3.17.1.6 Self-audit areas. The self-audit should be performed on all areas which directly affect the quality of the device. A.3.17.1.7 Self-audit checklist. The audit checklist should be approved and maintained under document control. The checklist is intended to assure that the quality assurance system is adequate and followed by all personnel in each area. A.3.18 Personnel training and testing. The procedures should address the training and testing practices employed to establish, evaluate, and maintain the skills of personnel engaged in reliability critical work including the form, content, and frequency of use. A.3.18.1 Personnel training and testing. Records should cover the nature of training or testing given (e.g., when it was given, how long it lasted, and who was trained and tested). An effective training program should address various types of training (formal, on-the-job etc.) identification of critical areas, evaluation and re-evaluation, and the use of trained personnel. 32 MIL-PRF-38534G APPENDIX B Appendix B has been combined with the previous appendix. The appendix letter will be held for future use. 33 MIL-PRF-38534G APPENDIX B This page intentionally left blank. 34 MIL-PRF-38534G APPENDIX C GENERIC PERFORMANCE VERIFICATIONS FOR HYBRID AND MULTICHIP MODULE TECHNOLOGIES C.1 SCOPE C.1.1 Scope. This appendix is intended to be used by manufacturers in developing their baseline flow of processes, tests, and inspections. This appendix provides an acceptable standard which may be used to verify the performance requirements of compliant devices. This appendix is a mandatory part of the specification. The information contained herein is intended for compliance. Manufacturers may demonstrate a test and inspection system that achieves at least the same level of quality as could be achieved by complying with this appendix. These standards may be used as is, or as modified in accordance with 3.8.1. The test flow presented in this appendix may not be appropriate for all technologies. For these types of devices this appendix should be used as a starting point in developing an appropriate test flow. C.1.2 Description of Appendix C. This appendix contains the standard testing and inspection approach to verifying the performance requirements of this specification. This approach is a five-step approach consisting of an element evaluation program, a process control program, a screening program, a conformance inspection (CI) and periodic inspection (PI) program, and a qualification program. C.1 SCOPE 35 C.2 APPLICABLE DOCUMENTS 35 C.3 ELEMENT EVALUATION 36 C.4 PROCESS CONTROL 47 C.5 DEVICE SCREENING 50 C.6 CONFORMANCE INSPECTION AND PERIODIC INSPECTION 55 C.7 QUALIFICATION 65 C.2 APPLICABLE DOCUMENTS * C.2.1 General. The documents listed in this section are specified in sections C.3, C.4, C.5, C.6, or C.7 of this specification. This section does not include documents cited in other sections of this specification or recommended for additional information or as examples. While every effort has been made to ensure the completeness of this list, document users are cautioned that they must meet all specified requirements of documents cited in sections C.3, C.4, C.5, C.6, or C.7 of this specification, whether or not they are listed. C.2.2 Government documents. C.2.2.1 Specifications, standards, and handbooks. The following specifications, standards and handbooks form a part of this document to the extent specified herein. Unless otherwise specified, the issues of these documents are those cited in the solicitation or contract. DEPARTMENT OF DEFENSE SPECIFICATIONS MIL-PRF-19500 -Semiconductor Devices, General Specification for. MIL-PRF-38535 -Integrated Circuits (Microcircuits) Manufacturing, General Specification for. 35 MIL-PRF-38534G APPENDIX C DEPARTMENT OF DEFENSE STANDARDS MIL-STD-202 -Test Method Standard for Electronic and Electrical Component Parts. MIL-STD-750 -Test Method Standard for Semiconductor Devices. MIL-STD-883 -Test Method Standard Microcircuits. (Copies of these documents are available online at http://assist.daps.dla.mil/quicksearch/ or from the Standardization Document Order Desk, 700 Robbins Avenue, Building 4D, Philadelphia, PA 19111-5094.) C.2.3 Non-Government publications. The following documents form a part of this document to the extent specified herein. Unless otherwise specified, the issues of these documents are those cited in the solicitation or contract. ELECTRONIC INDUSTRIES ALLIANCE (EIA) JEDEC Publication JEP 142 – Obtaining and Accepting Material for Use in Hybrid/MCM Products. (Copies of this document are available online at http://www.jedec.org/ or from the Electronics Industries Alliance, 2500 Wilson Boulevard, Arlington, VA 22201-3834). C.2.4 Order of precedence. Unless otherwise noted herein or in the contract, in the event of a conflict between the text of this document and the references cited herein, the text of this document takes precedence. Nothing in this document, however, supersedes applicable laws and regulations unless a specific exemption has been obtained. C.3 ELEMENT EVALUATION C.3.1 Description of element evaluation. Element evaluation is used to verify that procured materials and devices meet their specified characteristics and are adequate to perform as intended under the conditions experienced in the application. Element characteristics required to assure device performance and assembly process capability shall be identified. These evaluations should be completed on all materials prior to their use in production devices (see Table C-I). These evaluations may be modified by the manufacturer based on: a. Element quality and reliability history. b. Device quality and reliability history. c. Supplier history. d. Supplier/manufacturer relationship. e. Possible impact of element evaluation failure after assembly. NOTE: Elements may be assembled into the device prior to final element lot acceptance. The hybrid manufacturer will have a system, approved by the qualifying activity, to maintain traceablility of all such elements for the purpose of element containment. This system should be employed only when a work stoppage situation is encountered, schedule is affected, or when a lengthy test is required. For Class K devices, elements may be assembled into the device only with acquiring activity approval. For all classes, element evaluation will be successfully completed prior to device shipment. C.3.1.1 Element evaluation guidance. JEP 142 provides guidance regarding design considerations, material assessment techniques, and recommendations for material acceptance prior to use in hybrid/MCM products. JEP 142 is not an alternate element evaluation and shall not supersede any element evaluation requirements of Class H and Class K of this document. 36 MIL-PRF-38534G APPENDIX C C.3.2 General. C.3.2.1 Sequence of testing. Subgroups within a group (table) of tests may be performed in any sequence, but individual tests within a subgroup will be performed in the sequence indicated. C.3.2.2 Sample selection. Samples will be randomly drawn from inspection lots or in-line production samples as applicable. The sample size columns in the evaluation tables give minimum quantities to be evaluated with applicable accept number enclosed in parentheses. C.3.2.3 Class requirements. Class K and Class H element evaluation requirements are identified by X's in the appropriate column locations of evaluation tables. C.3.2.4 Location of element evaluation. Element evaluation may be performed at the element supplier facility (or other facility approved by the device manufacturer) or at the device manufacturing facility. C.3.2.5 Characteristics. Characteristics to be verified will be those necessary for compatibility with the element acquisition documents and assembly procedures and at least those which cannot be verified after assembly, but could cause functional failure. C.3.2.6 Protection from electrostatic discharge. Suitable handling precautions and grounding procedures will be taken to protect ESDS elements from accidental damage. C.3.2.7 Electrical test specifications. Electrical test parameters, values, limits (including deltas when applicable), and conditions will be specified in the element acquisition documents. TABLE C-I. Element evaluation summary. Element Paragraph Table or MIL-STD-883 method Microcircuit and semiconductor dice C.3.3 Table C-II Passive elements C.3.4 Table C-III Surface acoustic wave (SAW) elements C.3.5 Table C-IV Alternate evaluation C.3.6 N/A Substrate evaluation C.3.7 Table C-V Package evaluation C.3.8 Table C-VI Integral substrate/package evaluation C.3.9 Table C-VII Polymeric material evaluation C.3.10 Method 5011 C.3.3 Microcircuit and semiconductor dice. Microcircuit and semiconductor dice from each wafer lot will be evaluated in accordance with table C-II and C.3.3.1 through C.3.3.6.1. For Class H devices, element evaluation testing is not required for JANHC or JANKC discrete semiconductor MIL-PRF-19500 qualified die or for MIL-PRF-38535 Class Q or Class V qualified die. For Class K devices, element evaluation is not required for JANKC discrete semiconductor MIL-PRF-19500 qualified die or for MIL-PRF-38535, Class V qualified die. C.3.3.1 Subgroup 1, 100 percent electrical test of dice. Each die will be electrically tested, which may be done at the wafer level provided all failures are identified and removed from the lot when the dice are separated from the wafer. When wafer/die level testing requirements are not specified in the procurement documents, the manufacturer/die supplier will choose the parameters, conditions, and limits to assure compliance with the electrical characteristics. 37 MIL-PRF-38534G APPENDIX C C.3.3.2 Subgroup 2, 100 percent visual inspection of dice. Each die will be visually inspected to ensure conformance with the applicable die related requirements of method 2010 of MIL-STD-883; methods 2072 and 2073 of MIL-STD-750; and the element acquisition documents. C.3.3.3 Sample evaluation of assembled dice. C.3.3.3.1 Test samples. A sample of dice from each wafer lot will be evaluated in accordance with table C-II, subgroups 3 through 6 as applicable, and C.3.3.3.2 through C.3.3.6.1. C.3.3.3.2 Test sample preparation. Test samples may be assembled such that similar assembly methods and conditions the element will see during normal production assembly will be simulated. Electrical probe testing may be performed in lieu of assembly. C.3.3.4 Subgroups 3 and 4. C.3.3.4.1 Sample size. The Class H sample will consist of at least ten die from each wafer lot. The Class K sample will consist of three die from each wafer and a total of at least ten die from each wafer lot. If one wafer is evaluated, then ten die shall be tested. If ten wafers are evaluated, then 30 die (three from each wafer) shall be tested. C.3.3.4.2 Internal visual. Each sample will be visually inspected to ensure conformance with the applicable requirements of method 2010 of MIL-STD-883; methods 2072 and 2073 of MIL-STD-750; and the element acquisition documents. C.3.3.4.3 Electrical test. For interim, post burn-in, and final electrical tests, the minimum requirements for microcircuits and semiconductor dice will include static tests at each of the following: a. +25.C. b. Maximum rated operating temperature. c. Minimum rated operating temperature. NOTE: Final electrical tests that satisfy end-point electrical test requirements specified in preceding test methods and need not be repeated. C.3.3.5 Subgroup 5. C.3.3.5.1 Sample size. From each wafer lot, a sample of at least five die requiring ten bond wires minimum will be selected. C.3.3.5.2 Wire bond strength testing. For wire bond strength testing: a. A minimum of ten wires consisting of die-to-package, die-to-die, or die-to-substrate bonds will be destructively pull tested. An equal number of bonds will be tested on each sample die. b. For beam lead and flip-chips, five devices shall be tested. c. The element metallization shall be acceptable if no failure occurs. If only one wire bond fails, a second sample shall be selected in accordance with C.3.3.5.1 and subjected to subgroup 5 evaluation. If the second sample contains no failures, the bonding test results are acceptable and the lot of dice is acceptable. If the second sample contains one or more failures, or if more than one failure occurs in the first sample, the lot of dice shall be rejected. d. The rejected wafer lot may be resubmitted to subgroup 5 evaluation if the failure was not due to defective die metallization. C.3.3.6 Subgroup 6, scanning electron microscope (SEM). 38 MIL-PRF-38534G APPENDIX C C.3.3.6.1 Sample selection and reject criteria. Microcircuit sample selection and reject criteria shall be in accordance with method 2018 of MIL-STD-883 on a homogeneous lot. Discrete semiconductor devices with oxide steps or expanded contacts shall be tested with the sample selection and reject criteria in accordance with method 2077 of MIL-STD-750. In cases when dice are very large and comprise a large area of the wafer, the qualifying activity may approve other alternate sample selection plans. TABLE C-II. Microcircuit and semiconductor dice evaluation requirements. Subgroup Class Test MIL-STD-883 Quantity (accept number) Reference paragraphK H Method Condition 1 X X Element electrical 100 percent C.3.3.1 2 X X Element visual 2010 1/ 2072 1/ 2073 100 percent C.3.3.2 3 X X Internal visual 2010 1/ 2072 1/ 2073 10 (0) C.3.3.3 C.3.3.4.2 4 X Temperature cycling 1010 C 2/ 10 (0) C.3.3.3 X Mechanical shock or Constant acceleration 2002 2001 B, Y1 direction 3,000 g’s, Y1 direction X Interim electrical C.3.3.4.3 X Burn-in 1015 240 hours minimum at +125.C X Post burn-in electrical C.3.3.4.3 X Steady-state life 1005 X X Final electrical C.3.3.4.3 5 X X Wire bond evaluation 2011 10 (0) wires or 20 (1) wires C.3.3.3 C.3.3.5 6 X SEM 2018 1/ 2077 See method 2018 of MIL-STD-883 or method 2077 of MIL-STD-750 C.3.3.6 1/ MIL-STD-750 methods. 2/ For Class K sample sizes, see C.3.3.4.1. C.3.4 Passive elements. Passive elements from each inspection lot will be evaluated in accordance with table C-III and C.3.4.1 through C.3.4.7 This evaluation is not required when the elements are acquired from the established reliability series of performance specifications and is listed on the QPL. C.3.4.1 Subgroup 1, 100 percent electrical test of passive elements. Each passive element will be electrically tested at +25.C as specified in the element acquisition documents. C.3.4.2 Subgroup 2, visual inspection of passive elements. Passive elements will be visually inspected to assure conformance with the applicable passive element related requirements of method 2032 of MIL-STD-883, and the passive element acquisition documents. a. Each Class K passive element will be visually inspected. b. Class H elements will be sample inspected using a sample size and (accept number) of 22 (0). 39 MIL-PRF-38534G APPENDIX C C.3.4.3 Test sample preparation for subgroups 3 and 4. a. For Class H and Class K passive elements, when assembly is required to perform electrical tests, test samples may be assembled such that the assembly methods and conditions the element will see during normal assembly will be simulated. Electrical probe testing may be performed in lieu of assembly. b. The total test sample will contain at least ten wires (an equal number on each element) if wire bonding assembly is applicable. C.3.4.4 Sample electrical test of passive elements. Sample passive elements will be electrically tested at +25.C for the following characteristics (minimum): a. Resistors: DC resistance. b. Capacitors: (1) Ceramic type: Dielectric withstanding voltage, insulation resistance, capacitance, and dissipation factor. (2) Tantalum type: DC leakage current, capacitance, and dissipation factor. (3) Metal insulation semiconductor type (MIS): DC leakage current, capacitance, dielectric withstanding voltage. c. Inductors: DC resistance, inductance, and Q. C.3.4.5 Visual examination. Elements will be visually examined for evidence of corrosion or damage attributable to the test and conditioning sequence. C.3.4.6 Wire bond strength testing. Wire bond strength testing applies to elements which are wire bonded during the device assembly operation. The sample will include at least five elements and ten bond wires minimum. a. At least ten wires, consisting of element-to-substrate, element-to-package, or element-to-element bonds will be destructively pull tested. An equal number of bonds will be tested on each sample element. b. The element metallization will be acceptable if no failure occurs. If only one wire bond fails, a second sample will be selected and subjected to the test in accordance with C.3.4.6.a. If the second sample contains no failures, the bonding test results and the element lot are acceptable. If the second sample contains one or more failures, or if more than one failure occurs in the first sample, the element lot will be rejected. c. The element inspection lot may be resubmitted to evaluation if the failure was not due to defective element metallization. C.3.4.7 Voltage conditioning or aging. Voltage conditioning or aging shall be performed in accordance with the appropriate passive device specification. When there is no applicable device specification, or the requirements of the device specifications are not appropriate, the manufacturer shall document the procedure being used. Below are some examples of performance specifications used for passive element conditioning requirements: 40 MIL-PRF-38534G APPENDIX C a. Resistors: MIL-PRF- 914 - Resistor Networks, Fixed, Film, Surface Mount, Nonestablished Reliability, and Established Reliability, General Specification For. MIL-PRF-32159 -Resistors, Chip, Fixed, Film, Zero Ohm, Industrial, High Reliability, Space Level, General Specification for. MIL-PRF-39007 - Resistors, Fixed, Wire Wound (Power Type), Nonestablished Reliability, Established Reliability, and Space level, General Specification for MIL-PRF-55182 - Resistors, Fixed, Film, Nonestablished Reliability, Established Reliability, and Space Level, General Specification for. MIL-PRF-55342 -Resistors, Chip, Fixed, Film, Nonestablished Reliability, Established Reliability Space Level, General Specification for. b. Capacitors: MIL-PRF-123 - Capacitors, Fixed, Ceramic, Dielectric, (Temperature Stable and General Purpose), High Reliability General Specification for. MIL-PRF-49470 -Capacitor, Fixed, Ceramic Dielectric, Switch Mode Power Supply (General Purpose and Temperature Stable), Standard Reliability and High Reliability, General Specification for. MIL-PRF-55365 -Capacitor, Fixed, Electrolytic (Tantalum), Chip, Established Reliability, Nonestablished Reliability, and High Reliability, General Specification for. MIL-PRF-55681 - Capacitor, Chip, Multiple Layer, Fixed, Ceramic Dielectric, Established and Nonestablished Reliability, General Specification for. c. Coils, transformers: MIL-PRF-27 - Transformers and Inductors (Audio, Power, and High Power Pulse) General Specification for. MIL-PRF-15305 -Coils, Fixed and Variable, Radio Frequency, General Specification for. TABLE C-III. Passive element evaluation requirements. * Subgroup Class Test MIL-STD-883 Quantity (accept number) Reference paragraphK H Method Condition 1 X X Element, electrical 100 percent C.3.4.1 2 X X Visual inspection 2032 100 percent 22 (0) C.3.4.2 3 X Temperature cycling 1010 C 10 (0) C.3.4.3 X X Mechanical shock or constant acceleration 2002 2001 B, Y1 direction 3,000g’s, Y1 direction X X Voltage conditioning or aging C.3.4.7 X Visual inspection 2032 C.3.4.5 X X Element electrical C.3.4.4 4 X X Wire bond evaluation 2011 10 (0) wires or 20 (1) wires C.3.4.3 C.3.4.6 C.3.5 Surface acoustic wave (SAW) element evaluation. SAW elements will be evaluated in accordance with table C-IV and C.3.5.1 through C.3.5.3. 41 MIL-PRF-38534G APPENDIX C C.3.5.1 Radio frequency (RF) probe test. Each SAW element will be RF probe tested as specified in the detail/acquisition specification. This RF probe test may be done at the wafer level provided all failures are identified and removed from the lot when the elements are separated from the wafer. RF probe testing will be performed at +25.C unless otherwise specified by the detail/acquisition specification. C.3.5.2 Visual inspection. Each SAW element will be visually inspected to ensure conformance with the requirements of method 2032 of MIL-STD-883. C.3.5.3 Wire bond evaluation. From each inspection lot of SAW elements, a randomly selected sample of at least two elements will be evaluated for wire bond pull strength. a. A minimum of ten wires will be bonded and destructively pull tested in accordance with method 2011 of MIL-STD-883. b. The SAW element metallization will be acceptable if no failure occurs. If only one wire bond fails, a second sample will be selected and subjected to the test in accordance with C.3.5.3.a. If the second sample contains no failures, the bonding test results and the element lot are acceptable. If the second sample contains one or more failures, or if more than one failure occurs in the first sample, the element lot will be rejected. c. The element inspection lot may be resubmitted to wire bond evaluation if the failure was not due to defective element metallization. d. With acquiring activity approval, destructive bond pull tests may be performed on test coupons that provide the specified test requirements. Test coupons shall be processed with the same element production lot. TABLE C-IV. SAW element evaluation requirements. Subgroup Class Test MIL-STD-883, method Quantity (accept number) Reference paragraphK H 1 X X RF electrical probe 100 percent C.3.5.1 2 X X Visual inspection 2032 100 percent C.3.5.2 3 X X Wire bond evaluation 2011 10 (0) wires or 20 (1) wires C.3.5.3 C.3.6 Alternate element evaluation. Alternate element evaluation will be used only in cases where full device performance cannot be adequately ascertained outside the actual end item (e.g., hybrid microcircuit RF component). The sample built into devices shall successfully complete evaluation prior to release of the balance of the incoming lot. In lieu of packaged element evaluation tests in accordance with C.3.3, C.3.4, and C.3.5, elements may be assembled into devices and screened in accordance with table C-IX through final electrical. Acceptance of these elements will be based on the ability of the device to meet all group A, subgroups 1, 2, and 3 (plus 4, 7, and 9, as applicable) electrical tests required for the device. A minimum of ten elements or 100 percent of the elements, whichever is less, (0 defects) will be assembled into at least 3 devices. Devices assembled for the purpose of element evaluation are deliverable provided all of the provisions of this specification are met. Element wire bond evaluation for elements may be accomplished using a second or additional sample of elements wire bonded for that purpose only. When the device build option for evaluation is selected, the manufacturer will establish and maintain a sample plan or procedure to identify the sample prior to electrical test. In case of lot failure when alternative element evaluation is used, all of the device samples and the inspection lots will be rejected. When the manufacturer chooses to analyze the failed devices to isolate the cause of failure and this analysis determines that the cause of failure is not related to the element being tested, and that the element has been correctly stressed during the required screening and testing, then the inspection lot may be accepted. If the element has not been correctly stressed, the failed device may be reworked or new sample replacement devices may be assembled. 42 MIL-PRF-38534G APPENDIX C C.3.7 Substrate evaluation. Substrates will be evaluated in accordance with table C-V and C.3.7.1 through C.3.7.5.3.3. NOTE: Substrates fabricated by the device manufacturer using a qualified process will be exempt from this evaluation. C.3.7.1 Definition. For the purpose of substrate evaluation, a substrate inspection lot will consist of homogeneous substrates having the same number of layers, manufactured using the same facilities, processes, materials, and vacuum deposited, plated, or printed as one lot. C.3.7.2 Electrical test parameters. Electrical test parameters, values, limits, and conditions will be as specified in the applicable detail/acquisition specification. C.3.7.3 Subgroup 1, 100 percent electrical testing. Each substrate will be electrically tested at +25.C, if and as specified in the applicable detail/acquisition specification. C.3.7.4 Subgroup 2, 100 percent visual inspection. Each substrate will be visually inspected to ensure conformance with the applicable requirements of method 2032 of MIL-STD-883, and the applicable detail/acquisition specification. C.3.7.5 Subgroups 3, 4, and 5 general requirements. From each inspection lot of substrates, a randomly selected sample will be evaluated. Destructive tests may be performed on test coupons which provide the required test data. The test coupons shall be made with the same materials that were used in the manufacturing of the inspection lot and processed at the same time as the inspection lot. C.3.7.5.1 Subgroup 3. A minimum of five samples will be submitted to subgroup 3 testing. C.3.7.5.1.1 Physical dimension. Inspect in accordance with method 2016 of MIL-STD-883, and the applicable detail/acquisition specification. C.3.7.5.1.2 Visual inspection. Inspect in accordance with method 2032 of MIL-STD-883, and the applicable detail/acquisition specification. C.3.7.5.1.3 Electrical. Substrates will be electrically tested at +25.C for the following characteristics (minimum). Requirements will be as specified in the applicable detail/acquisition specification. a. Resistors: DC resistance. b. Capacitors: Capacitance. As specified in the applicable detail/acquisition specification, test for dielectric withstanding voltage, insulation resistance, and dissipation factor. c. For multilayered substrates, continuity and isolation testing will be performed to verify the interconnection of conductors as specified in the applicable detail/acquisition specification. C.3.7.5.2 Subgroup 4. A minimum of three samples that have been subjected to, and passed, subgroup 3 testing will be submitted to subgroup 4 testing. C.3.7.5.2.1 Conductor thickness. Measure conductor thickness in accordance with the applicable detail/acquisition specification. Conductor thickness will meet the requirements specified in the applicable detail/acquisition specification. C.3.7.5.2.2 Conductor resistivity. Measure conductor resistivity in accordance with the applicable detail/acquisition specification. Conductor resistivity will meet the requirements specified in the applicable detail/acquisition specification. C.3.7.5.2.3 Film adhesion. Perform film adhesion testing in accordance with acceptable industry standards. The substrate and tape will show no evidence of peeling or flaking of metallization. C.3.7.5.2.4 Solderability. For solderable substrates only, perform solderability testing if specified in the applicable detail/acquisition specification. 43 MIL-PRF-38534G APPENDIX C C.3.7.5.3 Subgroup 5. A minimum of two samples that have been subjected to, and passed, subgroup 3 testing will be submitted to subgroup 5 testing. C.3.7.5.3.1 Temperature coefficient of resistance (TCR): Perform TCR testing for resistors in accordance with method 304 of MIL-STD-202. TCR will meet the requirements specified in the applicable detail/acquisition specification. a. Thick film type: Test as a minimum, two resistors from each resistor paste sheet resistance value. One from the smallest and one from the largest area resistors at -55.C using a reference reading at +25.C, or temperatures as specified in the detail/acquisition specification. b. Thin film type: Test as a minimum, the highest value resistor at +125.C using a reference reading at +25.C, or temperatures as specified in the detail/acquisition specification. c. If specified in the applicable detail/acquisition specification, TCR tracking testing will be performed. TCR tracking will meet the requirements specified in the applicable detail/acquisition specification. C.3.7.5.3.2 Wire bond strength testing. For wire bondable substrates, perform wire bond strength testing in accordance with method 2011 of MIL-STD-883. The sample will include at least two substrates and ten bond wires minimum. For gold metallized Class K substrates that at the device level are intended to contain aluminum wire bonds, aluminum wires will be placed as specified in the detail/acquisition specification and these wire bond samples will be baked for 1 hour at +300.C in either an air or an inert atmosphere prior to the performance of wire bond strength testing. a. At least ten wires, consisting of substrate to substrate bonds, will be destructively pull tested. An equal number of bonds will be tested on each sample substrate. b. The substrate metallization will be acceptable if no failure occurs. If only 1 wire bond fails, a second sample of a minimum of ten wires will be prepared using the same wire type/size and the same type equipment as the failed bond(s). If the second sample contains one or more failures, or if more than one failure occurs in the first sample, then the substrate inspection lot will be rejected. c. The substrate inspection lot may be resubmitted to evaluation if the failure(s) was not due to defective substrate metallization. C.3.7.5.3.3 Die shear strength testing. Perform shear strength testing in accordance with method 2019 of MIL-STD-883. At least two die for each substrate will be attached and tested for each die attachment method as specified in applicable detail/acquisition specification. If a failure occurs at less than the specified force and is not due to defective substrate materials, the lot will be resubmitted to die shear evaluation and the failure mode documented. 44 MIL-PRF-38534G APPENDIX C TABLE C-V. Substrate evaluation requirements. Subgroup Class Test MIL-STD-883 Method Quantity (accept number) Reference paragraphK H 1 X X Electrical testing 100 percent C.3.7.3 2 X X Visual inspection 2032 100 percent C.3.7.4 3 X X Physical dimensions 2016 5 (0) C.3.7.5.1.1 X X Visual inspection 2032 C.3.7.5.1.2 X X Electrical C.3.7.5.1.3 4 X X Conductor thickness or conductor resistivity3 (0) C.3.7.5.2.1 C.3.7.5.2.2 X X Film adhesion C.3.7.5.2.3 X X Solderability C.3.7.5.2.4 5 X X TCR 2 (0) C.3.7.5.3.1 X X Wire bond evaluation 2011 10 (0) wires or 20 (1) wires C.3.7.5.3.2 X X Die shear evaluation 2019 2 (0) C.3.7.5.3.3 C.3.8 Package evaluation. Package cases or covers will be evaluated in accordance with table C-VI and C.3.8.1 through C.3.8.5. In addition, laser marked surfaces will be subjected to, and pass, subgroups 3 and 6 of table C-VI. C.3.8.1 Definition. For the purpose of package evaluation, a package inspection lot will consist of homogeneous cases or covers of the same package type and outline dimensions (may differ only in lead length and lead count); manufactured using the same facilities and processes; and plated as one lot within a 6-month time frame (if plating is applicable). C.3.8.2 General. a. From the package inspection lot, a randomly selected sample will be subjected to package evaluation. b. Subgroups 1, 2, and 3 of table C-VI will be accomplished for each lot. Subgroup 4 of table C-VI will be accomplished periodically at intervals not exceeding 6 months for additional package inspection lots, for metal packages. Subgroup 6 will be performed one time only for Class H and at 6-month intervals for Class K unless a change in material or plating is made. c. Subgroups 2, 3, and 4 of table C-VI apply to cases only. A quantity (accept number) of 15 (0) will apply to the number of terminals or leads to be tested. The leads will be randomly selected from three packages minimum. d. Covers require only subgroups 1 and 6 of table C-VI. C.3.8.3 Subgroup 1. Separately verify case and cover dimensional compliance with the element acquisition documents. C.3.8.4 Subgroup 4. For metal cases with leads separated by an insulator, measure insulation resistance between the metal body of the case and the leads that are isolated from the case. This test does not apply to non-metallic cases. This test will be performed at 6-month intervals unless a change in insulator material is made for Class H devices and on every incoming lot for Class K devices. C.3.8.5 Subgroup 6. Separately verify case and cover for compliance with subgroup 6 of table C-VI. Corrosion in the internal cavity area will not be cause for rejection. 45 MIL-PRF-38534G APPENDIX C TABLE C-VI. Package evaluation requirements. Subgroup Class Test MIL-STD-883 Quantity (accept number) Reference paragraphK H Method Condition 1 X X Physical dimensions 2016 3 (0) C.3.8.3 2 X X Solderability 2003 Soldering temperature +245.C + 5.C 3 (0) C.3.8.2c 3 X X Thermal shock 1011 C 3 (0) C.3.8.2 X X High temperature bake 1008 1 hour at +150.C X X Lead integrity 2004 2028 B2 (lead fatigue) D (leadless chip carriers) B1 for rigid leads (pin grid array leads) X X Seal 1014 A4 Unlidded cases 4 X X Metal package isolation 1003 600 V dc 100 nA maximum 3 (0) C.3.8.4 5 Not used 6 X X Salt atmosphere 1009 A 5 (0) C.3.8.5 C.3.9 Integral substrate/package (ISP) evaluation. (ISP) will be evaluated in accordance with table C-VII and C.3.9.1 through C.3.9.8. C.3.9.1 ISP inspection lot. For the purpose of ISP evaluation, an ISP inspection lot shall consist of ISP of the same type; manufactured using the same facilities, processes and materials, within 90 days. C.3.9.2 General. a. Section C.3.9 is intended to be used as an end-of-line ISP acceptance procedure performed at the completion of the ISP construction and prior to the construction of the device. b. ISP elements fabricated by the hybrid device manufacturer using a MIL-PRF-38534 qualified process will be exempt from this evaluation as long as C.3.7 and C.3.8 are used for the components of the ISP. c. Subgroups 1, 2, 3, 4, 5, 6, and 7 of table C-VII will be accomplished for each inspection lot. d. For lead integrity and solderability testing, a quantity (accept number) of 15 (0) will apply to the number of terminals or leads to be tested. The leads will be randomly selected from three packages minimum. e. The same samples may be used for subgroups 4, 5, 6, and 7 of table C-VIII. C.3.9.3 Subgroup 1. Each element will be electrically tested at +25.C as specified in the detailed acquisition specification. If none is stated, the device manufacturer shall use their standard procedure. NOTE: This may be satisfied by performing a continuity/isolation test. C.3.9.4 Subgroup 2. Each element will be visually inspected to ensure conformance to the applicable requirements of method 2009 and method 2032 of MIL-STD-883, and the applicable detailed/acquisition specification. This inspection shall be limited to the features that are inspectable. * C.3.9.5 Subgroup 4. The physical dimensions will be verified against the detailed/acquisition specification. 46 MIL-PRF-38534G APPENDIX C * C.3.9.6 Subgroup 5. Wire bond strength testing. For wire bondable devices, perform wire bond strength testing in accordance with method 2011 of MIL-STD-883. The sample size shall include at least two ISP devices and ten bond wires minimum. For gold metallized Class K ISPs that at the hybrid level are intended to contain aluminum wire bonds, aluminum wires shall be placed as specified in the detail/acquisition specification and these wire bond samples shall be baked for one hour at 300.C +10.C in either air or an inert atmosphere prior to the performance of wire bond strength testing. a. At least ten wires, consisting of substrate to substrate bonds, shall be destructively pull tested. An equal number of bonds shall be tested on each sample ISP device. b. The ISP metallization shall be acceptable if no failures occur. If only 1 wire bond fails, a second sample of a minimum of ten additional wires shall be prepared using the same wire type/size and the same type of equipment as the failed bond. If the second sample contains one or more failures, or if more than one failure occurs in the first sample, then the ISP lot shall be rejected. c. The ISP inspection lot may be resubmitted to evaluation if the failure(s) was not due to defective ISP metallization. C.3.9.7 Subgroup 7. Prior to solderability testing, the elements shall be submitted to a preconditioning * temperature of +250.C +10.C for a period of 6 +0.5 hours, or equivalent. (See C.6.3.2.6 herein for examples of equivalent conditions). * C.3.9.8 Subgroup 8. Corrosion in the internal cavity area shall not be cause for rejection. This test shall be performed one time only for the life of the program, or as needed to evaluate changes in the fabrication process. * TABLE C-VII. Integral substrate/package element evaluation requirements. Subgroup Class Test MIL-STD-883 Quantity (accept number) Reference paragraphK H Method Condition 1 X X Electrical testing 100 percent C.3.9.3 2 X X Visual inspection 2032 and 2009 100 percent C.3.9.4 Not used 4 X X Physical dimensions 2016 3 (0) C.3.9.5 5 X X Wire bond evaluation 2011 10 wires (0) 20 wires (1) C.3.9.6 6 X X Thermal shock 1011 C 3 (0) C.3.9.2 X X Lead integrity 2004 B2 X X Seal 1014 A4 7 X X Solderability 2003 Solder temperature +245.C + 5.C 3 (0) C.3.9.7 8 X X Salt atmosphere 1009 A 3 (0) C.3.9.8 * C.3.10 Polymeric material evaluation. The polymeric materials used in device applications will be subjected to and pass the evaluation procedures detailed in method 5011 of MIL-STD-883. C.4 PROCESS CONTROL C.4.1 Description of process control. Process control is a methodology used to detect defective processes prior to completion of assembly. This section outlines the requirements for process control on two processes though process control may be applied to other areas. The indicated processes will be controlled in accordance with table C-VIII and C.4.2 and C.4.3. 47 MIL-PRF-38534G APPENDIX C C.4.2 Wire bonding. C.4.2.1 General. A process machine operator evaluation will be performed: a. When a machine is put into operation. b. Periodically while in operation, not to exceed 4 hours. c. When the operator is changed. Change of certified auto wire bond operators is allowed without machine re-evaluation if all other machine conditions for evaluation are maintained. d. When any machine part has been changed. e. When any machine adjustment of the process parameters has been made. f. When the spool of wire is changed. g. When a new device type is started (unless the machine was evaluated using test samples that also simulate the new device type, see C.4.2.2). C.4.2.2 Standard evaluation circuit (test coupon or test vehicle). Standard evaluation circuits (test coupons or test vehicles) that simulate the production device metal bonding system (e.g., thick film, thin film, aluminum bonding pads, plated gold) may be destructively evaluated in lieu of the product. C.4.2.3 Process machines. Process machines not meeting the evaluation requirements will not be used. C.4.2.4 Corrective action of process machine. A process machine may be returned to operation only after appropriate corrective action has been implemented and the machine has been evaluated and passed testing in accordance with table C-VIII as required. C.4.2.5 Data record. A data record will be maintained and identifiable to each machine, operator, shift, and date of test. C.4.2.6 Wire bonding. C.4.2.6.1 Process machine/operator evaluation. Sample wires from three devices or a test sample will be destructively pull tested in accordance with method 2011 of MIL-STD-883, and as follows: a. Class H devices: A minimum of ten wires total consisting of wire bonds to elements metalization bonding systems (e.g., thick film, thin film, aluminum bonding pads, plated gold) typical of device assembly operation will be tested. b. Class K devices: A minimum of 15 wires total will be tested. As a minimum, wires tested will include one each from a typical transistor, diode, capacitor, and resistor die, and five wires from the header to the substrate, as applicable. c. Class H and Class K: Evaluation results are acceptable if no failure occurs at less than the value given in method 2011 of MIL-STD-883. If any of the sample wires fail, the machine/operator will be deactivated and corrective action taken. When a new sample has been prepared, tested, and has passed this procedure, the machine/operator has been certified or recertified, it can be returned to service. 48 * * * MIL-PRF-38534G APPENDIX C C.4.2.6.2 Lot sample bond strength. From each wire bonding lot, a random sample of at least two devices will be nondestructively tested in accordance with method 2023 of MIL-STD-883. This requirement does not apply to devices that are 100 percent nondestructively tested. Alternately, destructive pull testing in accordance with method 2011 may be performed. Devices with known visual wire bonding rejects will not be excluded from this sample. a. A wire bonding lot consists of devices that are consecutively bonded using the same set-up and wire, by one machine/operator (operator changes are allowed for autobonders) during the same period not to exceed 4 hours. b. In each sample device, at least 15 wires will be tested, including one wire from each type of transistor, diode, capacitor, and resistor chips, three wires from each type of integrated circuit, and five wires connecting package leads, as applicable. If there are less than 15 wires in the device, all wires will be tested. Sample devices will be inspected for lifted wires. Lifted wires resulting from bond pull testing will be counted as nondestruct pull test failures. c. The wire bonding lot will be acceptable if no failure occurs. If one wire/bond fails, another sample of two devices will be selected and 100 percent nondestructively tested. If the second sample contains no failures, the wire bonding lot is acceptable. If the second sample also contains failure(s), or more than one wire/bond fails in the first sample, the bonding machine/operator will be removed from the operation. d. The failures will be investigated and appropriate corrective action will be implemented. The machine/operator will be recertified in accordance with C.4.2.6.1 before being returned to operation. All devices bonded since the previous certification (lot sample bond strength test) will be subjected to 100 percent nondestructive bond strength testing (Class H). e. For RF/microwave devices, test sample circuits that simulate the production device may be destructively evaluated in lieu of the product (see C.4.2.2). When test sample circuits are used, the data from this test will be used for SPC monitoring of the process/product. C.4.3 Seal testing. All Class K devices will receive fine leak testing, without pressurization (bomb) within one hour of removal from sealing atmosphere and prior to any other test. Class K devices may be sealed with any amount of helium tracer gas and shall pass the corresponding leak rate, or the helium leak rate may be calculated based on the helium tracer gas atmosphere. 37 percent Helium – 3.7 x 10-8 atm cc/sec He 10 percent Helium – 1.0 x 10-8 atm cc/sec He 5.0 percent Helium – 5.0 x 10-9 atm cc/sec He 3.0 percent Helium – 3.0 x 10-9 atm cc/sec He Calculation: He leak rate = 1 x 10-7 x He% If failure occurs, the lid seal rework requirements will be followed. CAUTION NOTE: The use of helium fill for high voltage devices may lead to ionization of the helium and cause the parts to fail. The device manufacturer should contact the qualifying activity to review and possibly eliminate this requirement for sealing in helium tracer gas if this requirement is shown to be degrading to the device. C.4.4 Internal water vapor process monitor. The manufacturer shall develop and document a system to utilize method 1018, of MIL-STD-883, as a guideline to monitor the sealing process. Levels of all gases reported, including moisture, shall be evaluated to the extent necessary to detect any variation in the sealing process, based upon the manufacturer’s data. Reported gases shall be used to aid in identifying possible process deficiencies or evidence of out-of-control conditions C.4.5 Testing for pure tin finishes. The manufacturer will develop a test plan that will assure no parts used in the hybrid have a pure tin finish. 49 MIL-PRF-38534G APPENDIX C TABLE C-VIII. Process control summary. * Operation Class MIL-STD-883 Paragraph K H Method Condition Wire bonding X X X X 2011 2023 C.4.2 Seal X 1014 A C.4.3 Internal water vapor X X 1018 C.4.4 C.5 DEVICE SCREENING C.5.1 Description of device screening. Screening is a series of tests and inspections performed on each device in each lot in order to eliminate products which do not meet the performance requirements. Each device will be subjected to and pass all of the applicable screening tests and inspections in accordance with table C-IX and C.5.2 through C.5.13. C.5.2 General. a. Additional tests and inspections may be performed where experience indicates justifiable concern for specific quality characteristics. b. Electrical test parameters, values, limits (including deltas), and conditions will be as specified on the acquisition document. c. All devices that fail any test criterion in the screening sequence will be removed from the lot at the time of observation, or immediately at the conclusion of the test, in which the failure was observed. d. When PDA, pattern failure, or delta limits have been specified, or other conditions for lot acceptance have been imposed, the required data will be recorded and maintained as a basis for lot acceptance. e. Once rejected and verified as a device failure, rework and subsequent rescreening in accordance with the limitations of this specification may be performed. f. Tests will be performed in the order specified in table C-IX, except as specified in C.5.11 and C.5.12. C.5.3 Pre-seal burn-in test Pre-seal burn-in is optional. C.5.4 Non-destructive bond pull test for Class K devices. Non-destructive 100 percent bond pull test will be performed for Class K devices. The total number of failed wires and the total number of devices failed will be recorded. The lot will have a PDA of 2 percent or one wire, whichever is greater based on the number of wires pulled in the wire bond lot or production lot. Failed lots may be resubmitted one time to 100 percent non-destructive bond pull test with a tightened PDA of 1.5 percent. The test will be performed in accordance with method 2023 of MIL-STD-883. Devices from lots that have been subjected to the non-destructive 100 percent bond pull test and have failed the specified Class K PDA requirement will not be delivered as Class H, G, D, or E product. C.5.5 Internal visual inspection. Devices awaiting pre-seal inspection and accepted devices awaiting further processing will be stored in a controlled environment until sealed as specified in method 2017 of MIL-STD-883. C.5.6 Visual inspection for damage. The manufacturer may inspect for damage after each thermal or mechanical screening step, or at any subsequent time in the screening sequence. 50 MIL-PRF-38534G APPENDIX C C.5.7 Particle impact noise detection (PIND) test. PIND will be performed in accordance with test method 2020 * of MIL-STD-883, condition A or B. For Class K devices, condition A shall be used unless otherwise specified. For Class K screening, the lot may be accepted on any of the five runs if the percentage of defective devices is less than 1 percent (or one device, whichever is greater). All defective devices will be removed after each run. Lots which do not meet the 1 percent PDA on the fifth run, or exceed 25 percent defectives cumulative, will be rejected. C.5.8 Pre-burn-in electrical test. a. Pre-burn-in electrical testing is optional except when delta limit measurements are required. However, devices may be tested to remove defects prior to further screening and to form a basis for application of PDA criteria. b. This test need not include all device parameters, but will include those measurements most sensitive to, and effective in removing, electrically defective devices. c. When delta limits are specified in the device acquisition specification, the measurements will be recorded, and traceability will be maintained from the device to the corresponding electrical test data. C.5.9 Burn-in. Burn-in will be performed on each device. C.5.9.1 General. a. Pre-burn-in (interim burn-in for Class K) and post burn-in electrical parameters as specified in the device acquisition specification will be measured. b. Burn-in electrical conditions will be as specified in the device acquisition specification. c. Delta limits will be defined in the device acquisition specification when required. d. Delta measurements will be made on parameters specified in the device acquisition specification. e. The manufacturer will determine and document, prior to beginning burn-in, the criteria for the formation of burn-in lots (e. g., devices submitted to burn-in at one time, a production lot, or an inspection lot). The burn- in lot will be > 41 devices or all devices submitted to burn-in during a 1 week period. f. The manufacturer will not conduct burn-in in addition to that specified. g. Unless otherwise specified in the device acquisition specification, PDA, and pattern failure, analysis will be applicable only to +25.C static tests (group A, subgroup 1). C.5.9.2 Burn-in period. a. Class K devices will be burned-in in accordance with the time-temperature regressions specified in method 1015 of MIL-STD-883. The burn-in time will be equally divided into two successive burn-ins. Interim electrical tests in accordance with the device acquisition specification will be performed after the first burn-in to determine acceptable devices for the second burn-in. b. Class H devices will be burned-in in accordance with the time-temperature regressions specified in method 1015 of MIL-STD-883. C.5.9.3 Failure analysis of burn-in screen failures for Class K devices. Catastrophic failures (e.g., shorts or opens measurable or detectable at +25.C) after burn-in will be analyzed. Analysis of catastrophic failures may be limited to a quantity and degree sufficient to establish failure mode and cause. Failure analysis results will be documented and available to the Government representatives. 51 MIL-PRF-38534G APPENDIX C C.5.9.4 Lots resubmitted for burn-in. Burn-in lots that do not exceed twice the allowable PDA may be resubmitted for burn-in one time only (e.g., if the PDA limit is ten percent, then the lot may be resubmitted if less than twenty percent). Failure analysis for other than Class K is not required. Resubmitted lots will be kept separate from new lots and will be inspected for all specified characteristics using a tightened inspection PDA equal to the next lower number in the PDA series. The number of pattern failures allowed will be the same as required for the original burn-in. C.5.9.5 Burn-in acceptance criteria. At the option of the manufacturer, burn-in acceptance will be based on PDA or pattern failures. Either option, or both, may be applied to a burn-in lot as acceptance criteria (i.e., if a lot exceeds PDA requirements, then pattern failure analysis may be used to determine if the lot is acceptable without performing a resubmitted burn-in). C.5.9.5.1 General. Pattern failures are multiple device failures within a device burn-in lot with the same root cause of failure. When the PDA or pattern failures applies to delta limits, the delta parameter values measured after burn-in (100 percent screening test) will be compared with the delta parameter values measured prior to that burn-in. C.5.9.5.2 PDA option. C.5.9.5.2.1 PDA Class H. For Class H, the PDA will be 10 percent or one device, whichever is greater, regardless of burn-in lot size. C.5.9.5.2.2 PDA Class K. For Class K, the PDA will be 2 percent or one device, whichever is greater, regardless of burn-in lot size. Class K PDA will be calculated on failures occurring during the second half of burn-in only. C.5.9.5.3 Pattern failure option. C.5.9.5.3.1 Pattern failure option, Class H. For Class H devices, when acceptance is based on pattern failures, all multiple device static failures at +25.C shall be analyzed to determine root cause. Multiple device failures with the same root cause (three or more, depending on lot size) will be considered a “pattern failure”. If a “pattern failure” is established, the lot will be rejected; otherwise, the lot will be accepted regardless of PDA. In all cases, lots with device failures that do not exceed the PDA are acceptable and do not require pattern failure analysis. The number of device failures with the same root cause that establish a “pattern failure” will be based on lot size, as follows: Number of failures Lot size (x) that establish a pattern x . 20 21 . x . 40 40 < x . 100 100 < x . 300 300 < x . 500 500 < x3 4 5 6 11 16 EXAMPLE 1: Lot size is 25 with four device static failures at +25.C. If all four device static failures do not have the same root cause of failure (i.e., 3 or less failures with the same root cause), then no “pattern failure” exists and the passing 21 devices are acceptable. If all four device static failures have the same root cause of failure, then a “pattern failure” exists and the lot should be rejected. EXAMPLE 2: Lot size is 400 with 15 device static failures at +25.C. The lot is acceptable (i.e., 10 percent PDA allows 40 device static failures). 52 MIL-PRF-38534G APPENDIX C EXAMPLE 3: Lot size 400 with 41 device static failures at +25.C. If ten or less of the device static failures are due to the same root cause, then a “pattern failure” does not exist and the lot is acceptable. If 11 or more of the device static failures are due to the same root cause, then a “pattern failure” has been established and the lot is unacceptable. In all instances where analysis of the failed devices indicates that the failure mechanism is due to poor basic processing procedures, a basic design fault, or non-screenable defects, the lot will be rejected. C.5.9.5.3.2 Pattern failure option, Class K. For Class K, when acceptance is based on pattern failures, all multiple * device static failures at +25.C shall be analyzed to determine root cause. The lot will be stopped and placed on hold if: a. Any two device static failures within the burn-in lot have the same root cause of failure (i.e., pattern failure established),or b. The total number of device static failures in the burn-in lot exceeds 5 percent. The lots may be reworked and recovered if the failure is due to: a. A defect that can be effectively removed by rescreening the entire burn-in lot or, b. Random type defects which do not reflect poor basic device design or poor basic processing procedures. In all instances where analysis of the failed devices indicates that the failure mechanism is due to poor basic processing procedures, a basic design fault, or non-screenable defects, the lot will be rejected. C.5.10 Final electrical test. a. Final electrical testing will include all parameters, limits, and conditions of test which are specifically identified in the device acquisition specification as final electrical test requirements. As a minimum, final electrical testing will include group A electrical test, table C-Xa, subgroups 1, 2, and 3 (plus subgroups 4, 7, and 9 as applicable). b. Final electrical testing satisfies end-point electrical test requirements specified in the preceding test methods, and need not be duplicated. * C.5.11 Seal (fine and gross leak). a. For Class K devices, the seal test may be performed in any sequence between the final electrical test and external visual, but it will be performed after all shearing and forming operations on the terminals. b. For Class H devices, the seal test may be performed in any sequence between the constant acceleration/mechanical shock test (or PIND, if applicable) test and external visual, but it will be performed after all shearing and forming operations on the terminals. c. For Class K and H devices, all device lots (sublots) having any physical processing steps that may affect the seal (e.g., solder dipping to the glass seal, etc.) performed following seal or external visual will be retested for hermeticity and visual defects. This will be accomplished by performing, and passing, as a minimum, a sample seal test (method 1014 of MIL-STD-883) using an acceptance criteria of a quantity (accept number) of 45 (0), and an external visual inspection (method 2009 of MIL-STD-883) on the entire inspection lot (sublot). For devices with leads that are not glass sealed, and that have a lead pitch less than or equal to .050 inch (1.27 mm), the sample seal test will be performed using an acceptance criteria of a quantity (accept number) of 15 (0). If the sample fails the acceptance criteria specified, all devices in the inspection lot represented by the sample will be subjected to the fine and gross seal tests and all devices that fail will be removed from the lot for final acceptance. C.5.12 Radiography for Class K devices. Radiographic inspection can be performed anytime after PIND. 53 MIL-PRF-38534G APPENDIX C C.5.12.1 Solder sealed devices. Solder sealed devices will be tested 100 percent in accordance with method 2012 of MIL-STD-883. C.5.12.2 Non-solder sealed devices. Non-solder sealed devices will be tested 100 percent in accordance with method 2012 of MIL-STD-883, unless otherwise specified. NOTE: Radiography should only be deleted if the manufacturer and customer determine it to be unapplicable; or, of limited value for a given design or technology. C.5.13 External visual screen. The final external visual screen will be conducted in accordance with, method 2009 of MIL-STD-883, after all other 100 percent screens have been performed. The manufacturer will inspect the devices 100 percent or on a sample basis using a quantity/accept number of 116 (0). If one or more rejects occur in this sample, the manufacturer may double the sample size with no additional failures allowed or inspect the remaining devices 100 percent for failed criteria and remove the failed devices from the lot. If the doubled sample also fails, the manufacturer will be required to 100 percent inspect the remaining devices in the lot for the failed criteria. Re-inspection magnification will be no less than that used for the original inspection for the failed criteria. TABLE C-IX. Device screening. * Test or inspection MIL-STD-883 Requirement Reference paragraphMethod Condition Class K Class H Preseal burn-in 1030 Optional Optional C.5.3 Non-destructive bond pull 2023 100 percent Optional C.5.4 Internal visual 2017 100 percent 100 percent C.5.5 Temperature cycling 1010 C, 10 cycles 100 percent 100 percent C.5.6 Mechanical shock or constant acceleration 2002 2001 B, (Y1 direction only) 3,000 g’s, Y1 direction only 100 percent 100 percent C.5.6 PIND 2020 Condition A shall be used for Class K, unless otherwise specified 100 percent Optional C.5.7 Pre-burn-in electrical test In accordance with applicable device specification 100 percent Optional C.5.8 Burn-in 1015 100 percent 100 percent C.5.9 Final electrical test In accordance with applicable device specification 100 percent 100 percent C.5.10 Seal (fine and gross) 1014 100 percent 100 percent C.5.11 Radiographic 2012 100 percent Optional C.5.12 External visual screen 2009 100 percent 100 percent C.5.13 54 MIL-PRF-38534G APPENDIX C C.6 CONFORMANCE INSPECTION AND PERIODIC INSPECTION * C.6.1 Description of conformance inspection and periodic inspection. Conformance inspection (CI) and periodic inspection (PI) is a series of tests and inspections performed on samples of devices that have passed screening. These tests and inspections are used to further verify the performance requirements on a sample basis. Sample testing is necessary due to the fact that many of these tests are either destructive, expensive, or time consuming. Group A is considered CI, whereas groups B, C, and D are considered PI. CI and PI will consist of the tests and inspections specified herein. Devices will not be accepted or approved for delivery until all applicable CI and PI requirements have been met. The acquiring activity may approve delivery if groups A, B, C1, C3, C4, C5 and D testing have been completed and group C2, steady-state life test, has commenced. The manufacturer will maintain traceability of all devices delivered to the acquiring activity prior to completion of CI and PI testing for the purpose of notification/recall in case of test failure. C.6.2 General. CI and PI for a given device type is determined by selection of a requirements option flow (see Table C-X). The requirements option flow selected will determine the CI and PI requirements for the specific device manufactured. Where applicable, inspection lot sampling will be in accordance with Appendix F of this specification. Except where the use of final electrical test rejects or simulation samples (i.e., test coupons or test vehicles) are allowed, all devices will have been previously screened and subjected to and passed all final electrical tests. Successful completion of CI and PI for a given product assurance level will satisfy the requirements for any lower level device manufactured on the same certified line. If a lot is withdrawn in a state of failing to meet requirements and is not resubmitted, it will be considered a failed lot and reported as such. C.6.2.1 Inspection lots. Inspection lots consist of a quantity of devices of a single device type (required for group A) or several different circuit types (allowed for groups B, C3, and D tests only) in a single package type and lead finish submitted at one time for final acceptance. All devices within each inspection lot will be finally sealed in the same period not exceeding 13 weeks. C.6.2.2 Inspection lot formation. Inspection lot formation is required if the inspection lot is to be formally accepted by the lot related CI and PI testing of this specification or method 5005 of MIL-STD-883. If the in-line process verification testing alternative is used, inspection lot formation is not required. NOTE: The device manufacturer has the right to elect not to use any solution or solvent identified within this specification, or related specifications, that has also been identified by the American Congress of Government Industrial Hygienists as being a potential or suspect carcinogen. Where the device manufacturer elects not to use a material, they shall notify the acquiring or qualifying activities and the customer in writing in clear, unambiguous language not subject to misinterpretation that this right has been exercised. TABLE C-X. CI and PI summary. Requirement Reference Option 1 (in-line) Option 2 (end-of-line) General Paragraph C.6.3 C.6.4 Group A (CI) Paragraph C.6.3.1 C.6.4.1 Table C-Xa C-Xa Group B (PI) Paragraph C.6.3.2 C.6.4.2 Table N/A C-Xb Group C (PI) Paragraph C.6.3.3 C.6.4.3 Table C-Xc C-Xc Group D (PI) Paragraph N/A C.6.4.4 Table N/A C-Xd 55 MIL-PRF-38534G APPENDIX C C.6.2.3 Sample selection. The number of hybrid microcircuits to be tested will be chosen (independent of lot size) by the manufacturer in accordance with the applicable requirements of options 1 or 2 herein. Initial samples and resubmitted samples, when applicable, will be randomly selected from the inspection lot. Lot acceptance is based on an accept number of zero. If a failure occurs, the failed subgroup or test may be performed once using double the sample size, or 100 percent, with zero failures allowed. For group C inspection, limited sample quantities may be used to meet the requirements of C.6.1 for production start-up. When limited sampling is used for start-up, a subsequent full sample, group C test will be performed within 6 months of initial group C or prior to exceeding the limited usage requirements of C.6.3.3.1.c, whichever comes first. C.6.2.4 End-point. Electrical end-points will be measured and recorded when applicable. C.6.2.5 Data. Test results will be recorded by inspection lot identification code (date code), or each inspection lot, when applicable. For in-line group B inspections, where inspection lots are not applicable, data records or logs will be maintained and available for review by the qualifying and acquiring activities. A summary of attributes results for all tests and measurements shall be part of the test report unless 100 percent recorded data is provided. Variable data will be provided when required by the device acquisition specification. C.6.2.6 Non-functional samples. Electrically rejected devices from the same inspection lot may be used in all subgroups when end-point measurements are not required, provided that the devices have been subjected to all device screening conditions through burn-in. C.6.3 Option 1 (in-line inspection). Option 1 CI and PI will be satisfied by in-line inspections and tests in accordance with C.6.3.1, through C.6.3.4. C.6.3.1 Group A electrical testing. Group A electrical testing will be performed in accordance with table C-Xa, C.6.3.1.1 through C.6.3.1.4 and the applicable device acquisition specification. C.6.3.1.1 Group A general requirements. Group A subgroups will, as a minimum, include the final electrical testing subgroups 1, 2, and 3 (plus subgroups 4, 7, and 9, as applicable) and any other subgroups required by the device acquisition specification. Each inspection lot or sublot will be tested. A procedure for performing group A inspection in accordance with one or more of the following methods will be available for review by the qualifying activity. Each of these three methods are equivalent, therefore, the manufacturer may choose to use any of the three. a. Sampling: A single sample may be used for all subgroup testing. Where the required size exceeds the lot size, 100 percent inspection will be allowed. b. Sequence of test: Group A testing by subgroup, or within subgroups may, be performed in any sequence after subgroup 1, or alternate subgroups, (see method 1015 of MIL-STD-883) are performed. C.6.3.1.2 End-of-line sample testing. a. Production performs all required final electrical screening tests. b. Quality assurance or quality designate randomly pulls samples in accordance with table C-Xa and performs acceptance testing. * C.6.3.1.3 In-line sample testing. Test samples for each individual group A subgroup will be randomly selected from the inspection lot after 100 percent screening of that subgroup (or subgroups, in the event that multiple subgroups are tested at the same temperature in sequence with the same test program). All devices in the inspection lot or sublot will be available for selection as a test sample and a fully random sample will be selected in accordance with table C-Xa from the total population of devices. In addition, a different person will check the entire test set-up and verify the use of the correct test program prior to testing the group sample. 56 MIL-PRF-38534G APPENDIX C * C.6.3.1.4 In-line verification testing. In-line verification testing, generally, is performed in conjunction with final electrical tests at screening which satisfy the requirements of group A testing and need not be repeated. Therefore, if the screening tests are performed with the verification defined here, the requirements of group A have been met. a. For each test set-up (and operator for manual testing) production will test a correlation unit to ensure that the accuracy requirements of MIL-STD-883 are being met. b. Testing will be performed using the verified set-up. c. At the completion of testing (or at least once each week) or following a change of operators for manual testing, a different person designated by quality assurance verifies the production testing by: (1) Visually inspecting to confirm that the correct test fixture, equipment, software, and procedures were used. (2) Review actual testing or data of a controlled, known good, device of the device type being tested, utilizing the fixtures, equipment, software, and procedure(s) that were used by production. Variables data for all applicable group A tests at +25.C will be read and recorded for the controlled unit. This data will be maintained with the lot or traceable to the lot. (3) Failure of the verification test will, as a minimum, require engineering to perform a detailed review of hardware, software, set-up, and parts. If the engineering review does not locate the problem, the verification unit will undergo failure analysis. The appropriate corrective action shall be taken based on the failure analysis results. The entire group of devices being considered for acceptance at the time of the failure may then be retested for the appropriate subgroup(s) acceptance, one time only, by repeating in-line verification testing. If the failure analysis does not specifically locate the problem, the lot may be reconsidered for acceptance, one time only, for 100 percent retesting of all of the devices to all of group A requirements and by repeating in-line verification testing. TABLE C-Xa. Group A electrical test. Subgroup Parameters Quantity (accept number) 1 Static test at +25.C 116 (0) 2 Static tests at maximum rated operating temperature 76 (0) 3 Static tests at minimum rated operating temperature 45 (0) 4 Dynamic tests at +25.C 116 (0) 5 Dynamic tests at maximum rated operating temperature 76 (0) 6 Dynamic tests at minimum rated operating temperature 45 (0) 7 Functional tests at +25.C 116 (0) 8 Functional tests at maximum and minimum rated operating temperatures 76 (0) 9 Switching tests at +25.C 116 (0) 10 Switching tests at maximum rated operating temperature 76 (0) 11 Switching tests at minimum rated operating temperature 45 (0) C.6.3.2 Group B inspection. Group B inspection will be satisfied by performing in-line inspection sample monitoring as follows. Electrically rejected devices or test vehicles or coupons may be used in all subgroup tests in lieu of actual product. C.6.3.2.1 Physical dimensions. Randomly select devices from devices at final inspection such that, as a minimum, two devices of each package configuration presented for inspection are inspected each month. Confirm that all critical dimensions affected by the assembly process (e.g., package length, width, height, pin length, etc.) meet the requirements of the device acquisition specification. Critical dimensions unaffected by assembly processes may be inspected at final visual inspection or as a part of incoming (receiving) inspection. 57 MIL-PRF-38534G APPENDIX C C.6.3.2.2 Resistance to solvents. Each inspection lot of marking ink will be tested prior to acceptance in accordance with method 2015 of MIL-STD-883. This series of tests will be performed on each type of surface which is used as the marking surface on completed devices (e.g., silver plate, abraded nickel plate, non-abraded nickel plate, etc.). One piece of each surface type will be tested in each solvent. Each week one device or element (lid or package) representative of each of the marking surfaces of each device marked during the week will be tested in accordance with method 2015 of MIL-STD-883, except that only "solvent D" is required. C.6.3.2.3 Internal visual and mechanical. Internal visual and mechanical inspection will be performed at pre-seal visual inspection in accordance with the requirements of method 2014 of MIL-STD-883. As a minimum, one device of each device type received at pre-seal visual inspection each month will be inspected. C.6.3.2.4 Bond strength. Wire bond strength in-line inspection will be performed as a part of wire bond certification and in accordance with method 2011 of MIL-STD-883. Each wire bond process (i.e., thermosonic gold, ultrasonic aluminum, thermal compressions gold, etc.) will be tested weekly. Where more than one machine exists for a specific process, the test sample will be rotated between machines such that all machines are tested at least once during each 13 week period when in operation. At the time of certification, an additional minimum 10 wires total (15 wires for Class K) will be bonded in the certification sample part(s). After completion of certification bond pulls, the parts with the additional 10 wires (15 wires for Class K) intact will be preconditioned for 1 hour at +300.C minimum in either air or an inert atmosphere followed by destructive pull tests. Bond strength requirements (i.e., minimum pull forces) will be as specified in table C-Xb-1. No failures are allowed. C.6.3.2.5 Die shear. Die shear testing will be performed on two devices as a part of group C inspection (i.e., first lot and any element attach changes). Die shear testing during group C will be performed in accordance with method 2019 of MIL-STD-883. C.6.3.2.6 Solderability. Solderability testing will be performed as a part of incoming inspection (i.e., package * evaluation) as follows: Packages will be temperature aged to one of the following conditions prior to performing the solderability test. 6 .0.5 hours at TA = +250.C, .10.C 22 .1 hours at TA = +200.C, .8.C 160 .8 hours at TA = +150.C, .6.C When the device process flow includes an operation in which the package lead finish is changed prior to delivery of the device (i.e., a solder coating is applied), this operation will be performed on the package evaluation sample packages subsequent to the temperature aging. Following the temperature aging (and the lead finish application, if applicable), the sample packages will be solderability tested in accordance with method 2003 of MIL-STD-883 including an 8 hour (±15 min) steam aging. C.6.3.2.7 Seal. Seal tests will be performed in accordance with method 1014 of MIL-STD-883. One-hundred percent testing will be performed on all devices between final electrical test and external visual. C.6.3.3 Group C inspection. Group C inspection will be performed only on the first inspection lot submitted for inspection and as required to evaluate or qualify changes. Group C inspection will be performed in accordance with table C-Xc under the PI column and as outlined herein. For QML qualification, refer to section C.7 herein of this specification. NOTE: The qualifying activity may approve alternate test plans for small lots of devices for group C inspection. 58 MIL-PRF-38534G APPENDIX C C.6.3.3.1 General. a. Group C sample selection: Samples for group C will be drawn from the first inspection lot submitted. b. Subgroup sampling: Subgroup 1 samples (or electrical rejects or mechanical samples, see C.6.2.6) will be used for the subgroup 3 and subgroup 4 tests. c. Limited usage samples: (See C.6.2.3 for group C production start-up). A minimum of five devices will be subjected to subgroup 2 when all three criteria listed below are met. A sample of 22 devices shall be selected otherwise. (1) A maximum of 500 devices in a single order against a single drawing (SMD or contractor prepared document). (2) A maximum of 2,000 devices acquired against a single drawing (SMD or contractor prepared document) on a given equipment-acquisition contract or program. (3) A maximum of 2,000 devices acquired against a single drawing (SMD or contractor prepared document) during a 12 month period for a given device and manufacturer. d. Tests will be performed in the order specified in table C-Xc. C.6.3.3.2 Wire bond strength for option 1 PI product qualification. Two devices minimum will be tested to assure conformance to the applicable requirements of method 2011 of MIL-STD-883. Sample criteria will be based on the number of wires pulled using a sample size (accept number) of 22 (0) for Class H and a sample size (accept number) of 45 (0) for Class K devices. If the 45 (0) requirement for Class K cannot be met with two devices then all wires in two devices will be pulled with a minimum of 22 wires being pulled with zero failures. Sample wires will include one wire from each type transistor, diode, capacitor, and resistor chip; three wires from each type of integrated circuit; and five wires from package leads, as applicable. For test conditions F and H, test three dice for each method of interconnection, or all flip chips and beam lead dice, if less. The minimum allowable bond strength will be the post-seal bond strength requirements of method 2011 of MIL-STD-883. C.6.3.3.3 Element shear for option 1 PI product qualification. The element (die/chip) shear test will be performed to a quantity (accept number) 22 (0) of the elements in the devices, or all elements in the two sample devices, whichever is less. The shear sample will be uniformly divided among all element types (or all elements, if less) in the device and will be performed in a minimum of two devices. The sample will include typical resistor, capacitor, integrated circuit, and discrete semiconductor elements. Alternative element shear may be conducted in accordance with C.7.5.4.11.1. * C.6.3.3.4 Qualification to electrostatic discharge sensitivity (ESDS) classes. Initial qualification to an ESDS class or re-qualification after redesign will consist of qualification to the appropriate quality and reliability level plus ESDS classification in accordance with method 3015 of MIL-STD-883. ESDS classification levels and associated marking are defined in 3.7.5.8.2 herein. NOTE: Manufacturers may, at their option, classify hybrid devices by: (1) Testing the devices using method 3015 or MIL-STD-883. (2) Classifying the hybrid to the lowest electrostatic voltage class level of the active devices ESDS listed in accordance with MIL-PRF-38535 that are accessible to leads of the device by analysis. Support data (from device testing or IC manufacturers’ ESD results) will be retained by the hybrid manufacturer for all device types compliant with this specification. (3) Classify hybrid devices as Class 0 (see 3.7.5.8.2 herein) without performing the ESD sensitivity test with procuring activity approval. 59 MIL-PRF-38534G APPENDIX C * C.6.3.3.5 Resistance to soldering heat. Products qualified or re-qualified after 9 September 2009 require testing to method 2036 of MIL-STD-883, unless called out by contract, resistance to soldering heat testing is to be done for table C-Xc group C, QML, and PI testing prior to any other subgroup 1 testing. Unless otherwise specified, condition A testing shall be used for devices with leads and condition I testing shall be used for devices without leads. 60 MIL-PRF-38534G APPENDIX C * TABLE C-Xc. Group C testing. Subgroup Class Test MIL-STD-883 Quantity (accept number) Reference paragraphMethod Conditions K H PI QML 1 X X Resistance to Soldering Heat 2036 A or I 1/ N/A 5 (0) C.6.3.3.5 X X External visual 2009 X X PIND 2/ 2020 N/A A 5 passes 3/ C.7.5.4.1 X Temperature cycling 1010 C, 20 cycles C, 100 cycles C.7.5.4.2 X Temperature cycling 1010 C, 10 cycles C, 100 cycles C.7.5.4.2 X X X X Mechanical shock or Constant acceleration 2002 or 2001 B, Y1 direction or 3,000 g’s, Y1 direction B, Y1 direction and 5,000 g’s, Y1 direction C.7.5.4.3 C.7.5.4.4 X X Seal (fine and gross) 1014 X X PIND 2020 N/A A, 1 pass 3/ C.7.5.4.1 X X Visual examination 1010 C.7.5.4.5 X X End-point electrical 4/ C.7.5.4.6 2 X X Steady-state life test 1005 1,000 hours at +125.C or equivalent in accordance with method 1005 1,000 hours at +125.C or equivalent in accordance with method 1005 5/ 22 (0) or 5 (0) C.7.5.4.7 X X End-point electrical 4/ C.7.5.4.6 3 X X Internal water vapor content 1018 6/ 3 (0) or 5 (1) C.7.5.4.8 4 X X Internal visual 2017 Option 1 only 6/ 2(0) C.7.5.4.9 X X Wire bond strength 2011 Option 1 only C.7.5.4.10, C.6.3.3.2 X X Element shear 2019 or 2027 Option 1 only C.7.5.4.11, C.6.3.3.3 5 X X ESD a. Electrical parameters b. ESDS c. Electrical parameters 3015 Group A-1 Group A-1 N/A 3 (0) C.6.3.3.4 * 1/ Unless otherwise specified condition A testing shall be used for devices with leads, and condition I testing shall be used for devices without leads. 2/ Manufacturer may choose to do PIND before temperature cycling at their option. 3/ Condition B may be used when specified in the applicable device specification or acquisition order. 4/ In accordance with the applicable device specification. 61 MIL-PRF-38534G APPENDIX C 5/ When group C, subgroup 2 is being performed for QML qualification or limited PI or class I changes only, a sample size (accept number) of 5 (0) may be used. 6/ Subgroups 3 and 4 samples will have received subgroup 1 environmental exposure. Subgroup 3 samples may be used to perform subgroup 4 tests. C.6.3.4 Nonconformance. Should failure occur in any of the above in-line inspections, an analysis to determine cause will be performed and corrective action, as necessary, will be imposed. The cause of failure, applicable corrective action, and disposition of product affected by the failure will be documented. This documentation will be available for qualifying and acquiring activity review. C.6.4 Option 2 (end-of-line). Option 2 CI and PI will be satisfied by end-of-line inspections and tests in accordance with C.6.4.1 through C.6.4.5. C.6.4.1 Group A electrical testing. Group A testing will be performed in accordance with table C-Xa, C.6.3.1 through C.6.3.1.4, and the applicable device acquisition specification. C.6.4.2 Group B inspection. Group B inspection will be performed on each inspection lot for each package type and lead finish in accordance with table C-Xb and C.6.4.2.1 through C.6.4.2.5. C.6.4.2.1 Internal visual and mechanical. The criteria for internal visual and mechanical examination will be the general requirements for design and construction, the requirements of the device acquisition specification and confirmation that the actual device construction is in accordance with the design documentation on file. C.6.4.2.2 Bond strength. Destructive wire bond pull tests will be performed in accordance with method 2011 of MIL-STD-883 and as follows. Testing may be accomplished in-line anytime after device wire bonding. Coupons which simulate actual production processes and materials may be used in lieu of actual product. a. Two devices will be pre-conditioned and tested. b. Sample devices will be pre-conditioned for one hour minimum at +300.C minimum in either air or an inert atmosphere. c. Sampling criteria will be based on the number of wires pull tested using a sample size (accept number) as follows: (1) Class H: 22 (0) wires, 11 wires each device (or all wires, if less). (2) Class K: 44 (0) wires, 22 wires each device (or all wires, if less). d. Sample wire locations will include wires from the following device locations, as applicable: (1) One wire from each type transistor, diode, capacitor, and resistor chip/die. (2) Three wires from each type integrated circuit. (3) Five wires connecting to package leads. e. The minimum allowable bond strength will be in accordance with table C-Xb-1. TABLE C-Xb-1. Bond strength requirements. Gold or aluminum wire diameter, X (inches) Minimum bond strength (grams) X < 0.001 0.5 X = 0.001 1.0 0.0001 < X < 0.003 (Method 2011 of MIL-STD-883, table I, post-seal requirement) minus 1 gram 0.003 < X (Method 2011 of MIL-STD-883, figure 2011-1, post-seal requirement) minus 10 percent 62 MIL-PRF-38534G APPENDIX C C.6.4.2.3 Die shear strength. The element (die/chip) shear test will be performed to a quantity (accept number) of 22 (0) of the elements in the devices, or all elements in the two sample devices, whichever is less. The shear sample will be uniformly divided among all element types (or all elements, if less) in the device and will be performed in a minimum of two devices. The sample will include typical resistor, capacitor, integrated circuit, and discrete semi-conductor elements. Alternative element shear may be conducted in accordance with C.7.5.4.11.1. C.6.4.2.4 Solderability. At least 15 leads (or all leads, if less) will be randomly selected, identified, and tested. C.6.4.2.5 Seal (fine and gross). This test is not required if the 100 percent seal test screening is performed between the final electrical test and external visual. * TABLE C-Xb. Group B testing (option 2 only). Subgroup Class Test MIL-STD-883 Quantity (accept number) Reference paragraphK H Method Condition 1 X X Physical dimension 2016 2(0) 2 Not used 3 X X Resistance to solvents 2015 3(0) 4 X X Internal visual and mechanical 2014 1(0) C.6.4.2.1 5 X X Bond strength: a. Thermocompression b. Ultrasonic or wedge c. Flip-chip d. Beam lead 2011 C or D C or D F H 2(0) C.6.4.2.2 6 X X Die shear strength 2019 2(0) C.6.4.2.3 7 X X Solderability 2003 Solder temperature +245.C + 5.C 1(0) C.6.4.2.4 8 X Seal: a. Fine b. Gross 1014 A or B C or D 15(0) C.6.4.2.5 C.6.4.3 Group C inspection. Group C inspection will be in accordance with C.6.3.3 except table C-Xc, subgroup 4 tests are not required. C.6.4.4 Group D inspection. Group D inspection will be performed on the first inspection lot submitted, and at intervals not exceeding 26 weeks, for additional inspection lots (except as modified in C.6.4.4.4 and C.6.4.4.5 herein). Group D inspection will be performed in accordance with table C-Xd and C.6.4.4.1 through C.6.4.4.5. NOTE: This testing may be accomplished during package evaluation at incoming inspection and need not be repeated. C.6.4.4.1 Samples. Sealed empty packages that have been subjected to the handling and stress conditions of screening may be used for group D testing. C.6.4.4.2 End-point electrical measurements. End-point electrical measurements are not required. C.6.4.4.3 Lead integrity. Lead integrity testing will be performed on 15 leads minimum, or all leads if there are fewer than 15 leads for each device package. C.6.4.4.4 Subgroup 3. Verify complete package (may verify case and cover separately) for compliance with subgroup 3. Corrosion in the internal cavity area is not cause for rejection. This test is performed one time for Class H and at 26 week intervals for Class K unless a change in material or plating is made. 63 MIL-PRF-38534G APPENDIX C C.6.4.4.5 Subgroup 4. For metal cases with leads separated by an insulator, measure insulation resistance between the metal body of the case and the leads that are isolated from the case. This test does not apply to nonmetallic cases. This test will be performed once for Class H unless a change in insulator material is made, and on every group D lot for Class K. TABLE C-Xd. Group D package related tests. Subgroup Test MIL-STD-883 Quantity (accept number) Reference paragraphMethod Condition 1 Thermal shock 1011 C 5(0) Stabilization bake 1008 +150.C, 1 hour 5(0) Lead integrity 2004 2028 B2 (lead fatigue) D (leadless chip carrier) B1 for rigid leads (pin grid array leads) 1(0) C.6.4.4.3 Seal: a. Fine b. Gross 1014 A or B C or D 5(0) 2 Not used 3 Salt atmosphere 1009 A 5(0) C.6.4.4.4 4 Metal package isolation 1003 600 V dc, 100 nA maximum 3(0) C.6.4.4.5 C.6.4.5 Nonconformance. Lots which fail subgroup requirements of groups A, B, C, and D may be resubmitted in accordance with the provisions of C.6.4.5.1. A failed lot which is reworked, or is rescreened, (resubmittal to inadvertently missed process steps is not considered a rescreen) may not be resubmitted to the failed subgroups (and will be counted as a failure) for periodic groups B, C, and D PI coverages. The lot may be resubmitted only to the failed subgroup to determine its’ own acceptance. If a lot is not resubmitted, or fails the resubmission, the lot will not be shipped and the compliant marking and all references to this document will be removed. C.6.4.5.1 Resubmission of failed lots. Resubmitted lots will be kept separate from new lots and will be clearly identified as resubmitted lots. When any lot submitted for CI and PI fails any subgroup requirement of groups A, B, C, and D tests, it may be resubmitted once for that particular subgroup at double the sample size with zero failures allowed. A second resubmission using double the initial sample size with zero failures allowed is permitted only if failure analysis is performed to determine the mechanism of failure for each failed device from the prior submissions and it is determined that failure is due to: a. A defect that can be effectively removed by rescreening the entire lot, or b. Random type defects which do not reflect poor basic device design or poor basic processing procedures. In all instances where analysis of the failed devices indicates that the failure mechanism is due to poor basic processing procedures, a basic design fault, or nonscreenable defects, the lot will not be resubmitted. 64 MIL-PRF-38534G APPENDIX C C.7 QUALIFICATION C.7.1 Description of qualification. The following criteria have traditionally been used to qualify all processes and materials used in the manufacture of chip and wire devices. It may not, however, be adequate for all, or new, technologies, in which case it should be used as a starting point for developing a qualification program. These criteria are intended to be used to characterize all process and materials used in the manufacture of the device. These criteria will be used to determine the acceptability of the processes and materials. All parts built using processes and materials that have successfully completed characterization and have been verified by the qualifying activity are considered qualified. C.7.2 Rework qualification. Devices containing any unqualified rework will not be shipped until the rework has been successfully qualified. The rework and repair provisions will apply. C.7.2.1 Qualification of rework. If any rework is to be qualified, and unless otherwise allowed, the manufacturer will build a qualification lot of reworked devices in which certified rework processes are performed. Standard evaluation circuits may be used. Qualification of rework by this method will require qualifying activity approval of the test plan and authorization to test (ATT) prior to assembly of the lot. C.7.2.2 Delid/relid rework qualification procedures. If delid/relid rework is to be qualified, a qualification lot of delidded/relidded devices will be assembled that includes adequate devices for five qualification samples plus reserve units. Qualification of two or more delid/relid cycles require that the samples be delidded and relidded N+1 times to qualify "N" delid/relid cycles. The N+1 delid/relid rework operations will be performed on qualification devices that have been fully screened. In addition to the original screen, there will be N screens performed for N+1 delid/relid operations. The final screen will occur after the last delid/relid cycle. NOTE: One delid/relid qualification will require no additional delid/relid operation. C.7.2.3 Alternate qualification procedures for die/wire bond rework. The manufacturer may elect to review the initial production lot(s) from which qualification samples are selected for the occurrence of certified rework processes. The devices containing the rework to be qualified will be among those selected for qualification. If the amount of rework that was performed does not meet the sample size requirements, then additional die/bond rework will be performed on the selected rework samples, or more rework samples, to meet the minimum sample size requirements. If the initial qualification does not cover all certified rework, then subsequent production lot(s) will be reviewed for the occurrence of the unqualified rework until all certified rework is qualified. Delid/relid rework will not be qualified by these procedures. C.7.3 Qualified manufacturers list (QML) qualification lot. The manufacturer may elect to perform the QML qualification in accordance with C.7.5 on an inspection lot of shippable product; or, the manufacturer may choose to build a lot of devices specifically for QML qualification and test them in accordance with C.7.5. Devices specifically built for QML qualification may either be actual product or standard evaluation circuits. Any actual products from the qualification lot are shippable as a compliant product after successful completion of qualification tests, subgroups 1, 3, 5, and 7 of table C-Xb, and table C-Xd tests. C.7.4 Qualification test requirements. QML qualification will be accomplished by successful performance of group C testing as specified herein. For options 1 and 2, the group C testing will be the QML qualification tests and inspections specified in table C-Xc, under the QML column. C.7.5 QML-38534 qualification. All tests, test methods, test conditions, and limits will be in accordance with MIL-STD-883 and as specified herein. If a qualification lot is withdrawn due to: (1) failing to meet qualification requirements or (2) lack of failure analysis, corrective action, and (3) no retesting is performed, the certification of the process or material (or both) to be covered by that qualification will be removed by the qualifying activity. NOTE: The device manufacturer has the right to select to not to use any solution or solvent identified within this specification, or related specifications, that has also been identified by the American Congress of Government Industrial Hygienists as being a potential or suspect carcinogen. Where the device manufacturer elects not to use a material, they shall notify the acquiring or qualifying activities and the customer in writing in clear, unambiguous language not subject to misinterpretation that this right has been exercised. 65 MIL-PRF-38534G APPENDIX C C.7.5.1 Qualification eligibility. All processes to be qualified, and which are to be included on QML-38534, shall have been certified by the qualifying activity in accordance with 4.5.1.2 herein. C.7.5.2 Test samples. Devices used for qualification will have been assembled using certified process (or as allowed by the Qualifying Activity) and screened in accordance with the applicable sections of C.6 herein. Qualification tests will be performed at facilities which have a laboratory suitability granted by the qualifying activity or approved by the manufacturer’s TRB. DSCC Form VQH-42H, “Device Product Baseline”, or its equivalent, will be used to baseline the specific processes and materials used in the qualification device. C.7.5.2.1 Standard evaluation circuits. The manufacturer may elect to design and build a functional standard evaluation circuit (device) in lieu of utilizing actual product. If qualification is to be performed on a lot of devices built specifically for QML qualification, the device will be representative of the physical complexity of the product that will be covered by its testing. Standard evaluation circuits will not be used for group C PI product qualifications. C.7.5.2.2 Sample selection. The sample size for each test is listed in the corresponding subgroups of the group C table C-Xc. Except for designated rework and nonfunctional devices, test samples will be randomly selected from the inspection lot. The manufacturer will retain a sufficient number of test devices from the lot to designate reserve samples. C.7.5.2.3 Rework samples. For approval of rework qualification, the rework sample will be prepared in accordance with the manufacturer's baselined rework procedure. Three out of five devices tested in group C, subgroup 1 will have undergone the rework to be qualified. Two out of the three (3 (0)) devices tested in group C, subgroup 3 will contain the rework to be qualified. One of the two devices tested in group C, subgroup 4 will contain the rework to be qualified. The die and wire sample size requirements of C.7.5.4.10 and C.7.5.4.11 will be applied to reworked wire bonds and replaced die. Each rework method will be considered a different process. C.7.5.2.4 Nonfunctional samples. Electrical rejects from final electrical testing in screening can be used in any subgroup of qualification tests where electrical testing is not required (e.g., for group C3, the rejects shall be subjected to group C1 prior to testing to group C3). C.7.5.2.5 Disposition of samples. Samples destructively tested during qualification testing will be submitted to the qualifying activity with the qualification test report. Other devices in the qualification inspection lot will be properly disposed of. C.7.5.3 Test failures. C.7.5.3.1 Resubmission of failed samples or lots (or both). Unless otherwise specified (C.7.5.4.8.1), resubmission of failed samples, or additional samples from the same production lot, are not allowed unless such failures are due to equipment or operator errors in accordance with Appendix A. Notification of the qualifying activity is required. C.7.5.3.2 Failures. All test failures will be reported to the qualifying activity, along with (if applicable) the resulting failure analysis and corrective actions needed to assess qualification status or alternatives. C.7.5.4 Technology capability verifications. Table C-Xc under the QML column and C.7.5.4.1 through C.7.5.4.11 detail the testing requirements for qualification for both Class H and Class K devices. C.7.5.4.1 PIND. The devices will show no evidence of loose particles. Any device showing loose particles when tested as specified herein will be analyzed. Failure of PIND will not jeopardize qualification provided the manufacturer demonstrates that the loose particle control is established and random samples, from product fabricated using the baselined process, are PIND tested after corrective action implementation. These random samples will have been screened (see C.5). The retest requirements will be determined based on the nature of the changes made as a result of the corrective action. Compliant Class H will receive 100 percent PIND screening until the manufacturer demonstrates to the qualifying activity that these requirements are met. C.7.5.4.1.1 Loose particle recovery. The loose particles that caused the failures will be recovered and analyzed for the cause and source. If the analysis fails to locate the particles causing failure, the device will be carefully delidded and examined in an attempt to locate the particles. Captured particles will be evaluated at 30X minimum and the offending portion of the process will be identified and corrected. 66 * * * * MIL-PRF-38534G APPENDIX C C.7.5.4.2 Temperature cycling. Temperature cycling will be done in accordance with method 1010 of MIL-STD-883. C.7.5.4.3 Mechanical shock. When QML qualification is being performed, constant acceleration is not an option in place of mechanical shock. Both tests are required for qualification. C.7.5.4.4 Constant acceleration. For QML qualification, a stiffener plate (e.g., .125 inch (3.18 mm) aluminum) may be attached to the base of the package to prevent damage due to "oil canning" of the package. C.7.5.4.5 Visual examination. The visual examination will be in accordance with the procedure of method 1010 or 1011 of MIL-STD-883. C.7.5.4.6 Electrical requirements. Electrical end-points will be measured (and recorded when required) before starting and after completion of all tests in subgroups 1 and 2 of group C tests. Data from group A, or final electrical test, may be used as the initial end-point electrical before starting subgroup 1 and 2. Electrical end-point limits, life test conditions, and intermediate measurement requirements will be specified as required by the applicable device acquisition specification. Test samples which require variable data will be serialized prior to tests. C.7.5.4.7 Steady-state life test. Steady-state life testing will be performed on each initial lot of each device type. If group C, subgroup 2 testing is being performed for QML qualification only, the sample size will be five with zero failures allowed. In addition, if group C2 testing is being performed for QML qualification only and life test has previously been completed, a 1,000-hour bake at +150.C followed by end-point electrical testing may be performed in lieu of steady-state life testing. C.7.5.4.8 Internal water vapor. An internal water vapor content sample of three devices (zero failures) or five devices (one failure) will be selected from the subgroup 1 sample. The use of electrical rejects, or representative mechanical samples, is permissible provided these samples have seen, as a minimum, the environmental exposures required in subgroup 1 (e.g., temperature cycle or thermal shock, mechanical shock or constant acceleration, and seal tests as applicable). If the sample size (accept number) of 5 (1) is used and the sample contains one (1) failure, then the manufacturer shall perform an engineering evaluation of the failure. The evaluation, as an example, may include data to support materials used, element evaluation of materials, cure process time and temperature, bake-out process, seal chamber environment, seal process, adequacy of hermeticity test process, trend analysis, historical data review, or the consideration of other gases present. The engineering evaluation data will be available for review. Different circuits in the same package type, and with an equal quantity (or fewer) of elements and the same materials, may be qualified by similarity to the qualified test sample. C.7.5.4.8.1 Correlation testing for internal water vapor. At the manufacturer's option, if the initial test samples (three or five devices) fail internal water vapor, a second complete sample may be tested at an alternate laboratory that has been issued suitability by the qualifying activity. An additional three samples will be held by the manufacturer until final disposition of the test report. If this test passes, the devices and data from both test submissions will be submitted to the qualifying activity for review of internal water vapor criteria. C.7.5.4.9 Internal visual. In addition to the criteria of method 2017 of MIL-STD-883, this inspection will verify that no damage has occurred to, and no contamination is present on, the elements and substrate. Manufacturer may disregard damage done by delidding and shall be recorded. C.7.5.4.10 Wire bond strength for QML qualification. Two devices minimum will be tested to ensure the post-seal bond strength requirements of method 2011 of MIL-STD-883. The bond strength test will be performed on a sample size (accept number) of 15 (0) bond wires for each wire bond process (including each rework method outlined in C.7.5.4.10.1 as a separate process) material (wire metallization and size), and bonding surface (posts, substrate metallization, and die pad) present in the device. Each 15 piece sample of wires will contain an even distribution of all wire sizes that can be qualified by that sample. No failures will be allowed. Additional devices will be added, if necessary, to meet the required wire sample size. The test wires will be predesignated. 67 MIL-PRF-38534G APPENDIX C C.7.5.4.10.1 Wire bond strength for QML rework qualification. Each of the following wire bond rework methods will be considered as separate methods requiring QML qualification: a. Gold ball bonds on substrate wires. b. Gold ball bonds on crescent bonds. c. Gold ball bonds on top of gold ball bonds. * C.7.5.4.11 Element shear for QML qualification. Two devices minimum will be tested to ensure the die shear strength requirements of method 2019 of MIL-STD-883. The die shear test will be performed to a quantity (accept number) of 5 (0) elements for each element attach process (including element replacement as a separate process) and material present in the device. The materials considered will include the attach medium, element backing, and substrate/package attach area surface. Each five piece sample of elements will contain an even distribution of all element sizes that can be qualified by that sample. No failures will be allowed. Additional devices will be added if necessary to meet the required element sample size. The test elements will be predesignated. C.7.5.4.11.1 Alternative to element shear testing. The manufacturer may utilize method 2027 of MIL-STD-883 to test the strength of organic and solder/alloy attachments on selected elements, except that the accept/reject criteria shall be based on an acceleration on the element of 50,000 g's in the Y1 direction (i.e., the minimum acceptable pull strength shall be 50,000 times the weight of the element). NOTE: This alternative test is only appropriate for elements whose element thickness or mass is small in proportion to the area of attach (e.g., 10 mil thick GaAs die). The acceptance level is more severe than die shear testing for many element types. In cases where the element is relatively massive compared to the attachment area (e.g., tantalum capacitors), this method will give a false indication of die attach strength, pass, or fail. 68 MIL-PRF-38534G APPENDIX D Appendix D has been deleted. The appendix letter will be held for future use. 69 MIL-PRF-38534G APPENDIX D This page intentionally left blank. 70 MIL-PRF-38534G APPENDIX E GENERIC DESIGN AND CONSTRUCTION CRITERIA E.1 SCOPE E.1.1 Scope. This appendix is intended to present the generic design and construction criteria which will be addressed by the manufacturer. The criteria of this appendix may be modified as described in this specification. This appendix is a mandatory part of the specification. The information contained herein is intended for compliance. Manufacturers may demonstrate a design and construction system that achieves as least the same level of quality as could be achieved by complying with this appendix. E.1.2 Description of appendix E. This appendix will describe the generic design and construction criteria of this technology and is presented as requirements for conformance. E.1 SCOPE 71 E.2 APPLICABLE DOCUMENTS 71 E.3 REWORK LIMITATIONS 71 E.4 DESIGN AND CONSTRUCTION 75 E.5 MAJOR CHANGES 77 E.2 APPLICABLE DOCUMENTS E.2.1 General. The documents listed in this section are specified in sections E3, E4, or E5 of this specification. This section does not include documents cited in other sections of this specification or recommended for additional information or as examples. While every effort has been made to ensure the completeness of this list, document users are cautioned that they must meet all specified requirements of documents cited in sections E3, E4, or E5 of this specification, whether or not they are listed. E.2.2 Government documents. E.2.2.1 Specifications, standards, and handbooks. The following specifications, standards, and handbooks form a part of this specification to the extent specified herein. Unless otherwise specified, the issues of these documents are those cited in the solicitation or contract. DEPARTMENT OF DEFENSE STANDARDS MIL-STD-883 -Test Method Standard Microcircuits. (Copies of these documents are available online at http://assist.daps.dla.mil/quicksearch/ or from the Standardization Document Order Desk, 700 Robbins Avenue, Building 4D, Philadelphia, PA 19111-5094.) E.2.3 Order of precedence. Unless otherwise noted herein or in the contract, in the event of a conflict between the text of this document and the references cited herein, the text of this document takes precedence. Nothing in this document, however, supersedes applicable laws and regulations unless a specific exemption has been obtained. E.3 REWORK LIMITATIONS E.3.1 Description of the rework limitations. This section describes a typical rework program, including limitations and testing required to ensure that reworked devices are capable of meeting the performance requirements of this specification. 71 MIL-PRF-38534G APPENDIX E E.3.2 Rework and repair provisions. All rework and repair permitted on devices will be accomplished in accordance with procedures and safeguards documented in accordance with Appendix A. This documentation will reflect the processes, procedures, and materials to be used including verification or test data. Each process or procedure will be designated as rework or repair. This documentation will indicate that a decision to rework is made solely by the manufacturer while a repair decision will be made with the concurrence of the customer, except for repairs permitted by this specification. A typical example of rework is the removal of a defective element and replacement with a new element. An example of repair is the use of an organically attached molytab to replace a previously alloy attached semiconductor element. * E.3.2.1 General rework and repair provisions. a. All temperature excursions during any rework or repair will not exceed the baselined rework or repair limitations. Time and temperature limits will be specified. b. Replate of package sealing surface on delidded packages is not permitted. c. The minimum distance between the glass-to-metal seals and the package sealing surface will be at least .040 inch (1.02 mm) after final seal to prevent damage to lead seals by welding adjacent to them. (Applies to seam welding only.) d. For Class H devices, any device that is reworked or repaired after pre-seal visual inspection will be subjected to full screening or rescreening as applicable. If a device has not been subjected to a given required screen prior to rework or repair, then that device will be subjected to that screen after rework or repair. If a device has been subjected to a given screen prior to rework or repair, then rescreening applies as follows: (1) Pre-seal visual inspection. Inspect for general damage (low magnification in accordance with method 2017 and method 2032 of MIL-STD-883) which might have been caused by the rework or repair and perform a complete method 2017 or method 2032 inspection of the reworked or repaired element or area (e.g., replaced die, wire bonds, etc.). (2) Temperature cycle or shock, mechanical shock or centrifuge, seal, and external visual. Rescreen all rework or repair devices 100 percent. (3) Burn-in. Devices delidded to rework package seal failures do not require burn-in rescreen. Devices which have had elements reworked, have been wire bonded or rewire bonded, or have been active trimmed/tuned require 100 percent burn-in rescreen. e. Class K devices that are reworked or repaired prior to sealed burn-in shall be (re)screened as follows: (1) If no active elements or wire bonds affecting them have been replaced, full (re)screening shall apply with the following allowances: (a) Only the replacement wires need be non-destructively pull tested. (b) Pre-seal burn-in need not be repeated. (c) Post-seal burn-in may be reduced to 240 hours at 125.C, or at the time temperature equivalent, provided total pre-seal burn-in on active devices is 320 hours or at the time temperature equivalent. (2) If active elements or wire bonds affecting them have been replaced, full (re)screening shall apply with the following allowances: (a) Only the replacement wires need be non-destructively pull tested. (b) Pre-seal burn-in need not be repeated. (c) Total burn-in (pre-seal plus post-seal) shall be 320 hours at 125.C, or at the time temperature equivalent. 72 MIL-PRF-38534G APPENDIX E f. Class K devices that are reworked or repaired after sealed burn-in. (1) If no active elements or wire bonds affecting them have been replaced, full (re)screening shall apply with the following allowances: (a) Only the replacement wires need be non-destructively pull tested. (b) Pre-seal burn-in need not be repeated. (c) Sealed burn-in may be reduced to 240 hours at 125.C, or at the time temperature equivalent if burn-in was previously performed. (2) If active elements or wire bonds affecting them have been replaced, full (re)screening shall apply as follows: (a) Only the replacement wires need be non-destructively pull tested. (b) Pre-seal burn-in need not be repeated. (c) Burn-in (pre-seal plus post-seal) shall be 320 hours at 125.C, or at the time temperature equivalent. g. When flux is required for rework or repair, the specific flux and detailed procedures for its use and subsequent special cleaning operations will be documented and approved in accordance with Appendix A. h. Replacement elements will not be bonded onto the chip element they are to replace. E.3.2.2 Element wire rebonding. Wire rebonding of elements other than substrates, thick film elements, capacitors, and package posts will be permitted with the following limitations: a. No scratched, voided, or discontinuous paths or conductor patterns on an element will be repaired by bridging with, or addition of, bonding wire or ribbon. b. All rebonds will be placed on at least 50 percent undisturbed metal (excluding probe marks that do not expose underlying oxide). No more than one rebond attempt at any design bond location will be permitted. No rebonds will touch an area of exposed oxide caused by lifted or blistered metal. Bond-offs required to clear the bonder after an unsuccessful bond attempt need not be visible, will not be cause for reject and will not be counted as a rebond. For Class K, the total number of rebond attempts (exclusive of element replacement or tuning wire replacement) will be limited to a maximum of 10 percent of the total number of bonds in the device. The 10 percent limit on rebond attempts may be rounded to the nearest whole number to the 10 percent value. E.3.2.3 Substrate, thick film elements, capacitors, and package post wire rebonding or repair. Wire rebonding on substrates and package posts will be permitted with the following limitations: a. Scratched, open, or discontinuous substrate metallization paths or conductor pattern on a substrate, not caused by poor adhesion, may be repaired by bridging with, or by addition of, bonded conductors having current carrying capacity at least three and one-half times the maximum calculated operating load current for the conductor or three and one-half times the current capacity of the wire bond connection terminating on the damaged conductor path. The quantity of repairs will be limited to one for each one-half square inch, or fraction thereof, of substrate area. This repair is not applicable to thick film elements, capacitors, or package posts. b. No rebonds will be made over intended bonding areas in which the top layer metallization has lifted, peeled, or has been damaged such that underlying metallization or substrate is exposed at the immediate bond site. 73 MIL-PRF-38534G APPENDIX E E.3.2.4 Compound bonding. Compound bonding is permitted only as follows: a. When required for design, rework, or repair, gold compound bonds will be limited to one bond over the original bond, wire, or ribbon. b. Only monometallic compound bonds of the same size wire or ribbon are permitted (i.e., the original bond wire and that used for compound bonding shall be the same material). c. For rework or repair, the maximum number of compound bonds will not exceed 10 percent of the total number of wires. d. For rework or repair, a corrective action system shall be utilized in order to reduce the number of compound bonds. e. For rework or repair, all compound bonds will be 100 percent non-destructive pull tested in accordance with method 2023 of MIL-STD-883. f. A compound bond will not be used to connect two wires. g. All compound bonds will meet the visual criteria in method 2017 of MIL-STD-883. E.3.2.5 Element replacement. Element replacement will be permitted with the following limitations: a. Any polymer attached element may be replaced two times at a given location on any device. Any element attached with polymer to metal, other than substrate metallization (e.g., pedestals, ribs, carriers, etc.) may be replaced four times at a given location. The number of polymer attached tuning element replacements will be defined in the manufacturers' baseline documentation, and approved by the qualifying activity. b. Any metallic attached element may be replaced one time at a given location. c. Any metallic attached element onto a plated tab, where the tab is attached to a substrate with a higher temperature metallic attach process, may be replaced two times. d. Substrates may be removed, replaced, or put into a new package one time. This restriction does not apply to substrates attached into a package using mechanical fasteners. E.3.2.6 Seal rework. The use of polymers to affect, improve, or repair any hermetic package seal will not be permitted. E.3.2.6.1 Lid seal rework. It will be permissible to perform seal rework without delidding on devices that fail fine leak testing one time, only if tracer gas is included during the original sealing operation and under all of the following conditions: a. Fine leak testing, without pressurization (bomb), shall be performed immediately after sealing prior to any other test. b. Devices will be stored in a nitrogen environment for a maximum of 4 hours between initial seal and reseal without replacing the cover. c. Devices will be submitted to a predetermined vacuum bake prior to reseal. d. Solder sealed packages may not be reworked in accordance with this procedure. NOTE: The above leak testing will not be used as a substitute for the fine leak testing. E.3.2.6.2 Other seal rework. It will be permissible to rework other seals (e.g., feed-throughs, connectors, seal plugs, windows, etc.) at metal-to-metal interfaces on unlidded devices. 74 MIL-PRF-38534G APPENDIX E E.3.2.7 Delidding of devices. Devices may be delidded and relidded for rework or repair provided the delid-relid procedures, controls, and resulting data are baselined. The number of delid-relid cycles allowed will be in accordance with E.3.2.7.1 or E.3.2.7.2. Delid-relid history (i.e., traceability by lot number or serial numbers) will be maintained by the device manufacturer. E.3.2.7.1 Solder sealed devices. Class H solder sealed devices may be delidded-relidded one time. Class K solder sealed devices may not be delidded-relidded. E.3.2.7.2 Welded devices. Only seam sealed, overlapping pulse welded, or laser welded packages designed for delid-relid may be delidded-relidded. Devices may be delidded-relidded N times, with N = 2 maximum for Class K. E.4 DESIGN AND CONSTRUCTION E.4.1 Description of design and construction. This section describes a typical design and construction program used to ensure that these devices will be capable of meeting of the performance requirements of this specification. E.4.2 Design and construction. Device design and construction will be in accordance with the requirements specified herein and the device acquisition specification or SMD. The design will be capable of passing all applicable tests and screens (see Appendix C). E.4.2.1 Package. Devices will be hermetically sealed in glass, metal, or ceramic (or combinations of these) packages. The following provisions apply to package construction and sealing: a. No adhesive or polymeric materials will be used for package lid, or feedthrough, attach (or seal) or rework/repair. b. Polymer impregnations or secondary seal (backfill, coating, other uses or organic or, polymeric materials to effect, improve, or rework/repair the seal) on the device package will not be permitted. c. Flux will not be used in the final sealing process. d. In the case of final lid seal using a welding process, sufficient distance will be maintained between the lid seal and any glass-to-metal seal so as to preclude damage or degradation of the glass-to-metal seal. e. Package materials will be selected such that thermal expansion rate mismatches between different materials do not compromise package integrity or hermeticity during applicable temperature excursions. E.4.2.2 Polymeric materials. The cure temperature of polymeric materials will not be exceeded after completion of final seal. Polymeric materials will meet the requirements of method 5011 of MIL-STD-883. For materials outside the scope of method 5011, the manufacturer will develop an alternative plan. E.4.2.3 External metals. External metal surfaces, other than seal weld areas, will meet the applicable corrosion resistance requirements, or will be plated to do so. E.4.2.4 Other external materials. External parts, elements, or coatings, including markings, will be non-nutrient to fungus and will not blister, crack, flow, or exhibit defects that adversely affect storage, operation, or environmental capabilities of the device under the specified test and operating conditions. E.4.2.5 Design and manufacturing documentation. Design, topography, schematic circuit information, manufacturing flowcharts, and process control documents for all devices will be available for review by the acquiring activity and the qualifying activity. This documentation will depict the physical and electrical construction of the device. Each device will be traceable to a specific part, drawing, or type number, and to the production lot and inspection lot codes under which devices are manufactured and tested (so that revisions can be identified). E.4.2.5.1 Schematic diagrams. The device schematic diagram, logic diagram, or combination thereof, will be available with sufficient detail to represent all electrical elements functionally designed into the device together with their values (when applicable). For complex devices, or those with redundant detail, the overall device may be represented by a logic diagram in combination with schematic details. 75 MIL-PRF-38534G APPENDIX E E.4.2.6 Internal conductors. Internal thin film conductors on elements (metallization stripes, contact areas, bonding interfaces, etc.) and internal wires (wires, ribbons, etc.) will be designed such that no properly fabricated conductor will experience current in excess of the maximum value calculated by the manufacturer to preclude damage or degradation to the conductors, except by design (e.g., internal fuses). The following conditions will be considered when calculating the maximum current: a. Calculate the current density at the point of maximum current density (i.e., greatest current in accordance with unit cross section) for the specified device type. b. Use a current value equal to the maximum continuous current (at full fan-out for digitals or at maximum load for linears) or equal to the simple time-averaged current obtained at maximum rated frequency and duty cycle with maximum load, whichever results in the greater current value at the point of maximum current density. This current value will be determined at the maximum recommended supply voltage and with the current assumed to be uniform over the entire conductor cross-sectional area. c. Use the minimum allowed metal thickness in accordance with manufacturing specifications and controls including appropriate allowance for thinning experienced in the metallization step (via). The thinning factor over a metallization step is not required unless the point of maximum current density is located at the step. d. Use the minimum allowable actual conductor widths (not mask widths) including appropriate allowance for narrowing or undercutting experienced in metal etching. e. Do not include areas of barrier metals and non-conducting material in the calculation of conductor cross- section. E.4.2.7 Device finishes. Tin is prohibited as a final finish and as an undercoat. The use of tin-lead finish is acceptable provided that the lead content is a minimum of 3 percent by weight. E.4.2.7.1 Internal element finishes. Finishes on interior elements (e.g., bonding pads, posts, tabs, element backing, element leads, attach material, etc.) shall be such that they meet lead and element bonding requirements and any applicable design and construction requirements. The use of pure tin on interior elements is prohibited. Tin lead alloy with a minimum of 3 percent lead is acceptable on interior elements. Tin alloys other than lead used on interior elements or as an attach material require that the tin content be less than or equal to 97percent and require approval of the qualifying activity and notification of the acquiring activity. E.4.2.7.2 External element finishes. Finishes of all external leads, or terminals, and all external metallic package/lid elements will meet the applicable corrosion resistance requirements. E.4.2.7.3 External lead finish. Lead finish thickness measurements will be taken halfway between the seating * plane and the tip of the lead. The finish system on all external leads or terminals will conform to one of the following: a. Hot solder dip. The hot solder dip will be homogeneous with a minimum thickness of 60 microinches (1.52 .m) for round leads and, for other shapes, a minimum thickness at the crest of the major flats of 200 microinches (5.08 .m) solder (SN60 or SN63). For leadless chip carrier devices, the solder will cover a minimum of 95 percent of the metallized side castellation or notch and metallized areas above and below the notch (except the index feature if not connected to the castellation). Terminal area intended for device mounting will be completely covered. The hot solder dip on leads is applicable to either E.4.2.7.3.a.(1) or E.4.2.7.3.a.(2) as follows: (1) All outlines with hot solder dip over a finish with c or d as follows. The hot solder dip shall extend beyond the effective seating plane. If the seating plane is not defined, the hot solder dip shall extend to within .040 inch (1.02 mm) of the lead/package interface and is bound by the lead/package interface. For dual inline type termination forms (through hole and surface mount), the plane of the two longest lead/package interfaces will define this bound. For leadless chip carrier devices, the hot solder dip shall cover a minimum of 95 percent of the metallized side castellation or notch and metallized areas above and below the notch, except the index feature if not connected to the castellation. Terminal area intended for device mounting shall be completely covered. 76 MIL-PRF-38534G APPENDIX E (2) All outlines with hot solder dip over base metal or noncompliant coating. The solder shall extend to the glass seal or point of emergence of the metallized contact or lead through the package wall. If solder is applied up to the seal, a hermeticity test and external visual in accordance with C.5.11.c shall subsequently be performed and passed. For leadless chip carrier devices, the hot solder dip shall completely cover the metallized side castellation or notch and metallized areas above and below the notch, except the index feature if not connected to the castellation b. Tin-lead plate. Tin-lead plate will have in the plated deposit 3 percent to 50 percent by weight lead (balance nominally tin) co-deposited. As plated tin-lead will be a minimum of 300 microinches thick and will contain no more than 0.05 percent by weight co-deposited organic material (measured as elemental carbon). Tin-lead plating may be fused by heating above its liquidus temperature. Fused tin-lead will be a minimum of 200 microinches thick. Tin-lead plate is applicable: (1) Over a finish in accordance with entry c as follows, or (2) Over the basis metal. * c. Nickel plate or undercoating. Electroplated nickel, or electroless nickel phosphorous nickel undercoating, or finishes, will be 50 to 350 microinches (1.27 .m to 8.89 .m) thick measured on major flats or diameters. Electroless nickel will not be used as the undercoating on flexible or semiflexible leads and will be permitted only on rigid leads or package elements other than leads (see method 2004 of MIL-STD-883 for definitions of flexible and semiflexible leads). Combinations of pre-plate electroplate or electroless nickel and final electroplate nickel finishing shall not exceed 700 microinches/17.78 micrometers total. Combinations of pre-plate electroplate nickel and final electroless nickel plate finishing shall not exceed 600 microinches total. d. Gold plate. Gold plating will be a minimum of 99.7 percent gold, and only cobalt will be used as the hardener. Gold plating will be a minimum of 50 microinches (1.27 .m) and a maximum of 225 microinches (5.72 .m) thick. Gold plating will be permitted only over nickel plate or undercoating in accordance with c above. E.4.2.8 Thermal design. Thermal design analysis will be performed and will establish, as a minimum, that functional device elements are operating within their design temperature ratings when the device is operated at the specified maximum operating case temperature. Finite element analysis is an acceptable thermal design analysis technique. All active and passive elements will be derated. E.4.2.9 Electrical circuit design. Worst case circuit design analysis will be performed and include the following evaluations as a minimum (applicable to the design): a. Electrical element stress over the specified operating temperature range will be within the specified derating criteria under worst case temperature conditions. b. Evaluated to meet the Group A CI test limits at worse case operating temperature conditions, as applicable. E.4.2.10 Assembly process induced environments. When the next level assembly environment (e.g. solder attach to a board assembly) is specified, the design and construction shall be considered. E.5 Major changes. This section describes how to handle major changes to devices or processes. E.5.1 Manufacturer controls. The manufacturer is responsible for controlling all materials and processes (see A.3.2.3) involved in the production of devices compliant to this specification. Any change to the supplier, materials, or processes which may impact the reliability and performance of the final device, will be controlled and evaluated by the manufacturer. This may include documentation of all changes, additional testing of devices, and/or notification of customers and the qualifying activity. This includes obsolescence and availability issues. 77 MIL-PRF-38534G APPENDIX E E.5.2 Class I, major changes. A thorough description of the proposed change, acceptable engineering data, and a suggested test plan designed to demonstrate that the changed product will continue to meet the acquisition document requirements including performance, quality, reliability, or interchangeability will be generated and provided to the qualifying activity for review and approval. The manufacturer will proceed with the change after approval of the test plan. To minimize the need for additional tests due to insufficient details or data regarding the proposed changes, it is recommended that the test plan be discussed with the acquiring or qualifying activity prior to commencing the test program. Test guidelines for each major change listed herein are provided in table E-I for product design changes (column CI and PI) and baselined process changes (column QML). The subgroup designations in table E-I correspond with the subgroups designated in tables C-Xa, C-Xb, C-Xc, and C-Xd of Appendix C. Tests will be performed on samples of the first devices or subassemblies manufactured incorporating the changes. Upon completion of the prescribed test program, the results will be recorded and available for review. At the manufacturer's option, devices incorporating the change may be manufactured and tested prior to approval; however, all shipments of these changed devices will be withheld until formal documented approval is granted by the acquiring activity or qualifying activity. Changes representative of those which are subject to the requirement are: a. Change of substrate material (e.g., alumina versus BeO). b. Change of materials or inks deposited on the substrate (e.g., (1) Conductor: Gold versus copper; (2) Resistor: Ruthenium base versus carbon) or deposit method (e.g., thin film versus thick film). c. Cumulative change of nominal process time of deposited materials exceeding 25 percent or nominal process temperature exceeding +50.C or 10 percent, whichever is greater, since the last qualification or major change notification. d. Cumulative changes to substrate mask design that reduce nominal design dimensions, spacing, or isolation more than .25 percent, or changes to electrical parameters of the deposited elements beyond the design limits since the last qualification or major change notification. e. Change of trimming method (e.g., abrasive versus laser). f. Increase in substrate fabrication multi-layer conductor levels more than one conductor level from the QML listing. g. Change of attach material (e.g., epoxy A versus epoxy B) or of attachment method (e.g., epoxy versus eutectic) for device elements. h. Change in the baselined attach process temperature for element or substrate attachment which exceeds +25.C or 10 percent, whichever is greater. i. Change of die type (e.g., 2N2484 versus 2N2905) or other element types (e.g., tantalum versus ceramic capacitors or thin film versus thick film resistors) mounted on the substrate. j. Increase in element attach area more than 50 percent from the QML listing. k. Change of baselined wire bond method (e.g., ultrasonic versus thermal compression) or wire size changes greater than 1.0 mil. l. Any change in specified material composition or purity of the wire. m. Increase in substrate attach perimeter more than 50 percent of the QML listing. n. Change of package configuration (e.g., platform versus bathtub), lid or covers (e.g., step lid versus drawn cover) or plating material. o. Change of package or lid base material (e.g., nickel versus stainless steel). p. Changes to finished device dimensions exceeding the acquisition document, or SMD envelope tolerances. q. Change of seal method (e.g., seam weld versus laser weld), or seal material (e.g., SnAg versus AuSn). 78 MIL-PRF-38534G APPENDIX E r. Change in the baselined seal process time, temperature, or vacuum of more than 10 percent, or sealing atmosphere, except for the addition of helium. s. Increase in package seal perimeter more than 50 percent from the QML listing. t. Increase in lead count for QML listing in accordance with package type. u. Changes to the baselined product flowchart in which element evaluation, screening, CI and PI options, and any operations are added or deleted, except for additional inspections and SPC operations. v. Addition of new processes or materials to the QML. w. Assembly operation or test facility move. x. Class I and Class II changes for Class K. y. Change of die manufacturer for class K devices, all Class I and Class II changes since the original baseline qualification (CI, PI, QML). z. For radiation hardened devices, all Class I and class II as defined in Appendix G changes since the original baseline qualification (CI, PI, QML). aa. Change of element backside or topside finish (e.g. palladium termination to gold, gold plated lead to nickel) from QML listing. bb. Change affecting ESD level. 79 NOTE: Table E-I provides examples for PI and QML tests to be performed for major changes. Consideration to increase or decrease the testing shall be given depending on existing data and on the particular circumstance. Manufacturers shall evaluate the impact of the change, determine any necessary testing, and notify the qualifying activity, acquiring activity or TRB. * Changes that may result in increased TJ of components, shall be reviewed and, as necessary, justified through data on similar devices, or applications, or repeat life testing to demonstrate performance at the increased TJ. C2 need not be repeated where data exists to justify the increased TJ. TABLE E-I. Testing guidelines for major product/process changes. 1/ 2/ 3/ 4/ 5/ 6/ 7/ 8/ 9/ Major changes a. Change of substrate material b. Change of material deposited on substrate (1) conductor (2) resistor (3) dielectric (4) deposit method c. Process/time/temperature changes Recommended test subgroups of table C-Xc, (unless otherwise noted) PI QML C1 C2, C3, C4 C1 C2, C3, C4 C1, C2 C4 C2 C2 C1, C4, C2 C1 ,C2 C4 C1, C2 C1, C2 C1 C2 C4 Notify qualifying activity with your recommendation Notify qualifying activity with your recommendation Variable data required (subgroups) PI QML C2, C3, C4 C2, C3, C4 C2, C4 C2 C2 C2, C4 C2, C4 C2 C2 C2, C4 N/A N/A Explanation for recommended test guideline C1 then C4 will demonstrate mechanical integrity via electrical test, visual inspection (adhesion, cracking, delamination), bond strength, and die shear of the elements on the substrate. C2 will demonstrate electrical performance differences and long term reliability of substrate material change. C3 will validate outgas properties of substrate material. C2 will demonstrate electrical performance differences and long term reliability of deposited materials. C1 then C4 will demonstrate mechanical integrity via electrical test, visual inspection (adhesion, cracking, delamination), bond strength, and die shear of the elements on the substrate material. MIL-PRF-38534G APPENDIX E 80 MIL-PRF-38534G APPENDIX E TABLE E-I. Testing guidelines for major product/process changes – Continued. Major changes Recommended test subgroups of Table C-Xc (unless otherwise specified Variable data required (subgroups) Explanation for recommended test guideline PI QML PI QML d. Substrate mask design Pre-cap, C2 N/A C2 N/A In-line pre cap inspection will validate the internal inspection and mechanical requirements. C2 will demonstrate electrical performance differences from Group A and long term reliability of the mask change. e. Change of trim method C2 C1, C2, C4 C2 C2, C4 C1 then C4 will demonstrate active trim integrity via electrical test; visual inspection, bond strength, and die shear will provide supporting data on the affects of the active trim. Group C2 will demonstrate electrical performance differences from Group A and long term reliability of trim method. f. Increase in multi-layer conductor levels, more than one level C1, C2, C4 C1, C2, C4 C2, C4 C2, C4 C1 then C4 will demonstrate mechanical integrity via electrical test; visual inspection (adhesion, cracking, delamination), bond strength, and die shear will verify the multilayer increase. C2 will demonstrate electrical differences from Group A and long term reliability. g., h. Change of attach material or attach process temperature C1 C3, C2 , C4 (no wire bond pull) C1 C2, C3, C4 (no wire bond pull) C2, C3, C4 (no wire bond pull) C2, C3, C4 (no wire bond pull) C1 will demonstrate mechanical integrity via electrical test. C3 will validate the process temperatures (cure time/temp, vacuum bake, etc). C4 (no wire pull) will demonstrate mechanical integrity via visual inspection (adhesion, cracking, delamination) and die shear of the elements on the substrate C2 will demonstrate electrical differences from Group A and long term reliability. 81 MIL-PRF-38534G APPENDIX E TABLE E-I. Testing guidelines for major product/process changes – Continued. Major changes Recommended test subgroups of Table C-Xa, C-Xc (unless otherwise noted) Variable data required (subgroups) Explanation for recommended test guideline PI QML PI QML i. Change of die type 7/ C2 C2 C2 C2 C2 will demonstrate electrical differences from Group A and long term reliability. j. Increase in element area from QML listing N/A C1, C4 (no wire bond pull) N/A C4 (no wire bond pull) C1 then C4 (no wire bond) will demonstrate mechanical integrity via electrical test, visual inspection (adhesion, cracking, delamination), and die shear of the elements on the substrate. k1. Change of baselined wire bond N/A C1, C4 (no die shear) N/A C4 (no die C1 then C4 (no die shear) will method shear) demonstrate mechanical integrity via electrical test, visual inspection, and bond strength. k2. Wire size change C1 C4 (no die shear) C1, C4 (no die shear) C4 (no die shear) C4 (no die shear) C1 then C4 (no die shear) will demonstrate mechanical integrity via electrical test, visual inspection, and bond strength. l. Change of wire bond material C1 C4 (no die shear) C1, C4 (no die shear) C4 (no die shear) C4 (no die shear) C1 then C4 (no die shear) will demonstrate mechanical integrity via electrical test, visual inspection, and bond strength. m. Increase in substrate perimeter from QML listing N/A C1, C3, C4 (no die shear, wire bond pull) N/A C3 C4 (no die shear wire bond pull) C1 then C4 will demonstrate mechanical integrity via electrical test and visual inspection (adhesion, cracking, delamination). C3 will validate outgas of larger substrate. n. Change of package or lid configuration, etc. C1, C3 C1, C3 C3 C3 C1 will demonstrate mechanical integrity via electrical test. C3 will validate the integrity of the new package configuration. 82 MIL-PRF-38534G APPENDIX E TABLE E-I. Testing guidelines for major product/process changes – Continued. Major changes Recommended test subgroups of Table C-Xa, C-Xc (unless otherwise noted) Variable data required (subgroups) Explanation for recommended test guideline PI QML PI QML o. Change of package, lid base material C1, C3 C1, C3 C3 C3 C1 will demonstrate mechanical integrity via electrical test. C3 will validate the integrity of the new package configuration. p. Change to finished device dimensions Notify acquiring activity N/A N/A N/A Notify acquiring activity. q., r. Change of seal method, profile or seal material C1, C3 C1, C3 C3 C3 C1 will demonstrate the package mechanical integrity and electrical test will validate the process changes. C3 will validate the new seal process. s. Increase in package seal perimeter from QML listing N/A C1, C3 N/A C3 C1 will demonstrate mechanical integrity via electrical test. C3 will validate the new package increase in package volume, processes related to the increased seal perimeter. t. Increase in lead count for each package type from QML listing N/A C1 C3 N/A C3 C1 then C3 will demonstrate the package mechanical integrity and electrical test will validate the package/process. Not required for ceramic packages. u. Change to baselined product flowchart N/A Notify qualifying activity N/A N/A Notify qualifying activity. v. Addition of new process or material N/A Notify qualifying activity N/A N/A Notify qualifying activity. w. Assembly operation or test facility move N/A Notify qualifying activity N/A N/A Notify qualifying activity. x. Class I and Class II changes for Class K Notify acquiring activity N/A N/A N/A 83 TABLE E-I. Testing guidelines for major product/process changes – Continued. Major changes Recommended test subgroups of Table C-Xa, C-Xc (unless otherwise noted) Variable data required (subgroups) Explanation for recommended test guideline PI QML PI QML y. Change of die manufacturer for Class K devices Notify the acquiring activity N/A N/A N/A Notify acquiring activity to determine the applicable re-qualification requirements for change of die manufacturer for Class K devices z For Radiation Hardened Devices, major changes as defined in appendix G See Appendix G See Appendix G N/A N/A See Appendix G aa. Change of element backside or topside finish material from QML listing N/A C1, C4 N/A C4 This affects the attach interface. C1 then C4 will demonstrate mechanical integrity via electrical test, visual inspection will validate attach (inspect for cracks, fissures), and die shear will validate the attach strength to the newfinish material. bb. Change affecting ESD Level N/A C5 N/A N/A 1/ Sampling will be in accordance with Table C-Xc, of this specification. 2/ All electrical parameter testing will be in accordance with the device acquisition specification, drawing, or SMD. 3/ Data histograms providing a parametric data summary may be submitted in place of variables data. 4/ The acquiring or qualifying activity (or both) may add or reduce testing as warranted by detail specification requirements, unique design, or process circumstances, after notification by the manufacturer. 5/ The acquiring activity will determine testing requirements for design changes affecting Class K devices. 6/ Notification is required at the time of acceptance of new order; or delivery on existing order, when changes are made to devices acquired to Specification Control Drawings. 7/ Review and determine if worst case circuit analysis or thermal analysis is required based upon the change. 8/ If QML is covered, then PI is not required to be performed. 9/ Group A testing is expected to be completed prior to any table E-I test. MIL-PRF-38534G APPENDIX E 84 MIL-PRF-38534G APPENDIX F STATISTICAL SAMPLING F.1 SCOPE F.1.1 Scope. This appendix contains statistical sampling qualification procedures and general test and inspection procedures used throughout this specification. This appendix is a mandatory part of the specification. The information contained herein is intended for compliance. F.1.2 Description of Appendix F. This appendix contains general information and guidance to be used by manufacturers when testing and inspecting devices. F.1 SCOPE 85 F.2 APPLICABLE DOCUMENTS 85 F.3 GENERAL STATISTICAL SAMPLING 85 F.4 STATISTICAL SAMPLING PROCEDURES AND TABLE 86 F.2 APPLICABLE DOCUMENTS F.2.1 General. The documents listed in this section are specified in sections F3, F4, or F5 of this specification. This section does not include documents cited in other sections of this specification or recommended for additional information or as examples. While every effort has been made to ensure the completeness of this list, document users are cautioned that they must meet all specified requirements of documents cited in sections F3, F4, or F5 of this specification, whether or not they are listed. F.2.2 Government documents. F.2.2.1 Specifications, standards, and handbooks. The following specifications, standards, and handbooks form a part of this specification to the extent specified herein. Unless otherwise specified, the issues of these documents are those cited in the solicitation or contract. DEPARTMENT OF DEFENSE STANDARDS MIL-STD-883 -Test Method Standard Microcircuits. (Copies of these documents are available online at http://assist.daps.dla.mil/quicksearch/ or from the Standardization Document Order Desk, 700 Robbins Avenue, Building 4D, Philadelphia, PA 19111-5094.) F.2.3 Order of precedence. Unless otherwise noted herein or in the contract, in the event of a conflict between the text of this document and the references cited herein, the text of this document takes precedence. Nothing in this document, however, supersedes applicable laws and regulations unless a specific exemption has been obtained. F.3 GENERAL STATISTICAL SAMPLING F.3.1 Definitions. The following definitions will apply for all statistical sampling procedures: a. Percent defective allowable (PDA) series: The PDA series is defined as the following decreasing series of PDA values: 50, 30, 20, 15, 10, 7, 5, 3, 2, 1.5, 1, 0.7, 0.5, 0.3, 0.2, 0.15, 0.1. b. Tightened PDA inspection: Tightened PDA inspection is defined as inspection performed using the next PDA value in the PDA series which is lower than that specified. c. Acceptance number (c): The acceptance number is defined as zero. d. Rejection number (r): Rejection number is defined as one or more. 85 MIL-PRF-38534G APPENDIX F F.3.2 Symbols. The following symbols will apply for all statistical sampling procedures: a. c: Acceptance number. b. r: Rejection number. F.4 STATISTICAL SAMPLING PROCEDURES AND TABLE F.4.1 General. Statistical sampling will be conducted using a sample size (accept number) method as specified in table F-I herein. The procedures specified herein are suitable for all quality conformance requirements. F.4.1.1 Selection of samples. Samples will be randomly selected from the inspection lot or inspection sublots. For continuous production, the manufacturer, at their option, may select the sample in a regular periodic manner during manufacture provided the lot meets the formation of lots requirement. F.4.1.2 Failures. Failure of a unit for one or more tests of a subgroup will be charged as a single failure. F.4.2 Single-lot sampling method. CI and PI information (sample sizes and number of observed defectives) will be accumulated from a single inspection lot to demonstrate conformance to the individual subgroup criteria. F.4.2.1 Sample size. The sample size for each subgroup will be determined from table F-I and will meet the specified sample size (accept number). F.4.2.2 Acceptance procedure. If zero failures are found in the initial sample of the required sample size, the lot will be accepted. If the observed number of defectives from the initial sample is greater than zero, a second sample of double the initial sample size may be selected from the original sub(lot). The sub(lot) may be accepted if zero defectives are observed in this double-size sample. F.4.2.3 One-hundred percent inspection. Inspection of 100 percent of the lot will be allowed, at the option of the manufacturer, for any or all subgroups other than those which are called "destructive". If the observed percent defective for the inspection lot exceeds the specified PDA series value for the sample size specified, the lot will be considered to have failed the appropriate subgroup. One-hundred percent sampling is required where lot size is smaller than the required sample size with zero defectives allowed. Resubmission of lots tested on a 100 percent inspection basis will also be on a 100 percent inspection basis and in accordance with the tightened PDA inspection criteria. TABLE F-I. Sample size (accept number) sampling plan. 1/ 2/ 3/ PDA series 50 30 20 15 10 7 5 3 2 Minimum sample size (accept number) Accept number c = 0, r > 1 5(0) 8(0) 11(0) 15(0) 22(0) 32(0) 45(0) 76(0) 116(0) PDA series 1.5 1 0.7 0.5 0.3 0.2 0.15 0.1 Minimum sample size (accept number) Accept number c = 0, r > 1 153(0) 231(0) 328(0) 461(0) 767(0) 1152(0) 1534(0) 2303(0) 1/ Sample sizes are based upon the Poisson exponential binomial limit. 2/ In this specification lot tolerance percent defective (LTPD) has been replaced with sample size (accept number) where the accept number is zero. Where reference is made by unrevised test methods of MIL-STD-883 to an LTPD value, that value will be found in the PDA series and the sample size will be the value immediately below the PDA series value. The accept number will always be zero. 3/ Minimum size of sample to be tested to assure, with a 90 percent confidence, that a lot having percent defective equal to the specified sample size (accept number) will not be accepted (single sample). 86 MIL-PRF-38534G APPENDIX G RADIATION HARDNESS ASSURANCE REQUIRMENTS FOR HYBRID MICORCIRCUITS AND MULTICHIP MODULES G.1 SCOPE G.1.1 Scope. This appendix establishes the performance requirements for hybrid microcircuits and multichip modules (MCM’s) that have a radiation hardening requirement. This appendix is a mandatory part of the specification. The information contained herein is intended for compliance This appendix is intended for devices which are offered as radiation hardened devices and are in full compliance with the remainder of this document. G.1.2 Description of Appendix G. This appendix provides the performance requirements and verification methods applicable for RHA devices. Section G.3 provides the performance requirements which shall be met in order to provide RHA devices to this specification, the definitions of RHA levels, and the criteria for conversion of customer requirements and change control. Verification methods to verify that devices meet the performance requirements shall be developed. Due to the complexity of this field, and these devices, it is apparent that a non-standard approach to verification is necessary. Section G.4 is provided as a methodology for manufacturers and their customers to determine what the RHA requirements are and how to verify that the devices are meeting these requirements. Devices shall only be marked with the appropriate designator if they meet the requirements. Devices built in accordance with G.3 are RHA devices as defined in the acquisition document (e.g., SMD) and verified using the methods developed by the manufacturer. G.1 SCOPE 87 G.2 APPLICABLE DOCUMENTS 87 G.3 PERFORMANCE REQUIREMENTS 88 G.4 VERIFICATION 89 G.2 APPLICABLE DOCUMENTS G.2.1 General. The documents listed in this section are specified in sections G.3, G.4, or G.5 of this specification. This section does not include documents cited in other sections of this specification or recommended for additional information or as examples. While every effort has been made to ensure the completeness of this list, document users are cautioned that they must meet all specified requirements of documents cited in sections G.3, G.4, or G.5 of this specification, whether or not they are listed. G.2.2 Government documents. G.2.2.1 Specifications, standards, and handbooks. The following specifications, standards, and handbooks form a part of this specification to the extent specified herein. Unless otherwise specified, the issues of these documents are those cited in the solicitation or contract. DEPARTMENT OF DEFENSE STANDARDS MIL-STD-883 -Test Method Standard Microcircuits. DEPARTMENT OF DEFENSE HANDBOOKS MIL-HDBK-814 -Ionizing Dose and Neutron Hardness Assurance Guidelines for Microcircuits and Semiconductor Devices. MIL-HDBK-815 -Dose-Rate Hardness Assurance Guidelines. (Copies of these documents are available online at http://assist.daps.dla.mil/quicksearch/ or http://assist.daps.dla.mil or from the Standardization Document Order Desk, 700 Robbins Avenue, Building 4D, Philadelphia, PA 19111-5094.) G.2.3 Non-Government publications. The following documents form a part of this document to the extent specified herein, Unless otherwise specified, the issues of these documents are those cited in the solicitation or contract. 87 MIL-PRF-38534G APPENDIX G ELECTRONIC INDUSTRIES ALLIANCE JEDEC Publication JEP 133 - Guide for the Production and Acquisition of Radiation Hardness Assured Multichip Modules and Hybrid Microcircuits. JESD57 -Test Procedures for the Measurement of Single-Event Effects in Semiconductor Devices from Heavy Ion Irradiation. JESD89 -Measurement and Reporting of Alpha Particles and Terrestrial Cosmic Ray- Induced Soft Errors in Semiconductor Devices. (Copies of this document are available online at http://www.jedec.org/ or from the Electronics Industries Alliance, 2500 Wilson Boulevard, Arlington VA 22201-3834). AMERICAN SOCIETY FOR TESTING AND MATERIALS (ASTM) ASTM F 1032 -Standard Guide for Measuring Time-Dependent Total Dose Effects in Semiconductor Devices Exposed to Pulse Ionizing Radiation. ASTM F 1192 -Standard Guide for the Measurement of Single Event Phenomena (SEP) Induced by Heavy Ion Irradiation of Semiconductor Devices. ASTM F 1892 -Standard Guide for Ionizing Radiation (Total Dose) Effects Testing of Semiconductor Devices. (Copies of these documents are available online at http://www.astm.org or from the American Society for Testing and Materials, P O Box C700, 100 Barr Harbor Drive, West Conshohocken, PA 19428-2959) G.2.4 Order of precedence. Unless otherwise noted herein or in the contract, in the event of a conflict between the text of this document and the references cited herein, the text of this document takes precedence. Nothing in this document, however, supersedes applicable laws and regulations unless a specific exemption has been obtained. G.3 PERFORMANCE REQUIREMENTS G.3.1 Performance requirements for RHA devices. RHA devices shall meet the performance requirements of this document for the applicable device class (D, E, G, H, or K) and shall be capable of passing the tests, analyses, and inspections applicable for the environments specified in the acquisition document and the manufacturers approved QML RHA program plan. For further guidance on specific methods related to radiation hardness assurance see MIL-HDBK-814, MIL-HDBK-815, methods 1017, 1019, 1020, 1021, 1022, 1023 and 1032 of MIL-STD-883, JESD 57, JEP 133, ASTM F 1892, ASTM F 1032, and ASTM F 1192. G.3.1.1 Radiation hardness assurance (RHA) levels. The RHA designators defined In table G-I shall be used in the PIN of the compliant devices which meet the requirements of the manufacturer’s approved QML RHA program. Other parameters may be specified in the acquisition specification. 88 MIL-PRF-38534G APPENDIX G TABLE G-I. RHA levels. RHA level and designator Radiation total ionizing dose (krad (SI)) - (dash) No RHA M 3 D 10 P 30 L 50 R 100 F 300 G 500 H 1000 Devices are considered to meet a specific RHA level if the manufacturer meets the requirements of this appendix and the acquisition specification. G.3.2 Implementation of this appendix. Manufacturers wishing to offer compliant RHA devices verified in accordance with an approved QML RHA program shall meet the requirements of G.3. The manufacturer of RHA devices shall be certified by the qualifying activity (DSCC) to this appendix. In addition to the standard certification requirements, the qualifying activity shall examine all aspects of the RHA program. This includes determining that the manufacturer’s conversion of customer requirements procedure includes the RHA requirements of G.3.3 and that the manufacturer’s change control procedure includes the requirements of G.3.4. Furthermore, all RHA tests, process flows, and configuration control documentation shall be available for review to determine if they meet the intent of this appendix. G.3.3 Conversion of customer requirements. The manufacturer shall have a conversion of customer requirements procedure(s) in accordance with Appendix A, which includes determining from the customer which RHA environments, tests, and analyses are applicable for the device application. Once this is determined, the methods for verification shall be developed. The environments, the respective radiation levels, and the requisite tests and analyses shall be specified in the acquisition document. G.3.4 Change control procedures. In addition to the change control procedures specified in Appendix A, manufacturers of RHA devices shall have in place a procedure to notify their customers of any change in components (die, resistors, capacitors, substrate, metallization, package, etc.) or test and analysis methods which are proposed. The acquisition specification may specify the applicable change control procedures (e.g., all class I and applicable class II changes). Prior to implementation of the change, the manufacturer and the customer shall determine what additional verification shall be performed to ensure that the proposed change will not degrade the radiation hardness of the device. G.4 VERIFICATION G.4.1 Verification methods. Verification methods for determining radiation hardness in the applicable environments shall be established by the manufacturer, or the manufacturer in conjunction with a third party source, expert in the RHA area. Due to the many different types of hybrid and Multichip module (MCM) technologies and RHA environments, verification methods may vary significantly between manufacturers. 89 TITLE PARAGRAPH Acceptance procedure............................F.4.2.2 Acquiring activity.....................................6.4.1 Acquisition documents............................6.4.2 Acquisition requirements ........................6.2 Altered records .......................................A.3.16.2 Alternate element evaluation ..................C.3.6 Alternate to element shear testing..........C.7.5.4.11.1 Alternative method correlation, confirmation, and implementation procedures ........................................A.3.2.5.4 Alternative methods................................A.3.2.5.4.2 Alternate qualification procedures for die/wire bond rework ....................C.7.2.3 Applicable documents ............................2. Applicable documents ............................A.2 Applicable documents ............................C.2 Applicable documents ............................E.2 Applicable documents ............................F.2 Applicable documents ............................G.2 Assembly Process Induced Environments………………………….E.4.2.10 Atmospheric control and handling ..........A.3.15 Audit checklist.........................................6.4.3 Audit deficiencies....................................A.3.17.1.2 Audit follow-up ........................................A.3.17.1.3 Audit schedules ......................................A.3.17.1.4 Baseline index of documents..................6.4.4 Baseline index of documents..................A.3.2.1.5 Baseline process flow.............................6.4.5 Baseline process flowchart.....................A.3.2.1.2 Baseline process flows ...........................4.3 Beryllium oxide package identifier ..........3.7.5.8.1 Bond strength .........................................C.6.3.2.4 Bond strength .........................................C.6.4.2.2 Burn-in ....................................................C.5.9 Burn-in acceptance criteria.....................C.5.9.5 Burn-in lot ...............................................6.4.6 Burn-in period .........................................C.5.9.2 Case outline............................................3.7.5.1.3 Certification.............................................4.5.1.2 Certification mark....................................3.7.5.8.3 Certification of conformance...................3.8.1 Change control .......................................A.3.5 Change control procedures ....................4.4.2 Change control procedures ....................G.3.4 Change from previous issue...................6.10 Changes in design, materials, or processing.........................................A.3.4.1 Characteristics........................................C.3.2.5 Class I, major changes ...........................E.5.2 Class D ...................................................1.3.4 Class D process flow audit .....................4.5.1.4 Class E ...................................................1.3.5 Class E listing…………………………….. 4.5.2.3 Class G...................................................1.3.3 Class G and D QML listing .....................4.5.2.2 Class H ...................................................1.3.2 Class H and K QML listing......................4.5.2.1 PAGE 86 15 15 14 31 42 68 26 26 65 2 21 35 71 85 87 77 31 15 32 32 32 15 22 15 22 12 9 58 62 51 52 15 51 8 13 10 11 27 12 89 20 27 37 78 2 13 2 13 2 13 2 13 MIL-PRF-38534G INDEX TITLE PARAGRAPH PAGE Class H, G, and D serialization .............. 3.7.5.7.2 9 Class K................................................... 1.3.1 2 Class K serialization............................... 3.7.5.7.1 9 Class requirements ................................ C.3.2.3 37 Classes E, G, H, and K process flowaudits......................................... 4.5.1.3 13 Classification.......................................... 1.3 2 Cleanliness and atmosphere control in work areas .................................... A.3.15.2 31 Compliant devices.................................. 6.4.7 15 Compound bond..................................... 6.4.8 15 Compound bonding................................ E.3.2.4 74 Computerized records............................ A.3.16.1.1 31 Conductor resistivity............................... C.3.7.5.2.2 43 Conductor thickness............................... C.3.7.5.2.1 43 Configuration control.............................. A.3.5.1 28 Conformance inspection and periodic inspection.......................................... C.6 55 Constant acceleration ............................ C.7.5.4.4 67 Control and acceptance of incoming materials ........................................... A.3.6 28 Control of quality records ....................... A.3.16 31 Conversion of customer requirements ... A.3.3 27 Conversion of customer requirements ... G.3.3 89 Corrective action of process machine.... C.4.2.4 48 Correlation, confirmation, and implementation ................................. A.3.2.5.4.1 26 Correlation testing for internal water vapor................................................. C.7.5.4.8.1 67 Country of manufacture.......................... 3.7.5.6 9 Country of manufacture.......................... A.3.8.4 29 Cpk......................................................... 6.4.9 15 Critical control parameters ..................... 6.4.10 15 Customer compliance matrix (CCM) ...... 6.4.11 15 Customer supplied material ................... A.3.7 28 Data........................................................ C.6.2.5 56 Data record ............................................ C.4.2.5 48 Definition ................................................ C.3.7.1 43 Definition ................................................ C.3.8.1 45 Definitions .............................................. F.3.1 85 Delid/relid rework qualification procedures........................................ C.7.2.2 65 Delidding of devices............................... E.3.2.7 75 Delta (.) limits........................................ 6.4.12 15 Description of Appendix A...................... A.1.3 21 Description of Appendix C...................... C.1.2 35 Description of Appendix E...................... E.1.2 71 Description of Appendix F ...................... F.1.2 85 Description of Appendix G ..................... G.1.2 87 Description of conformance inspection and periodic inspection..................... C.6.1 55 Description of design and construction .. E.4.1 75 Description of device screening ............. C.5.1 50 Description of element evaluation.......... C.3.1 36 Description of process control................ C.4.1 47 Description of qualification ..................... C.7.1 65 Description of the rework limitations ...... E.3.1 71 Description of this specification.............. 1.2 2 90 TITLE PARAGRAPH Design Activity……………………………. 6.4.13 Design analysis ......................................6.4.14 Design and construction .........................3.7.3 Design and construction .........................E.4 Design and construction .........................E.4.2 Design and manufacturing documentation...................................E.4.2.5 Design guidelines ...................................A.3.2.1.3 Design of experiments (DOE).................6.4.15 Design, processing manufacturing equipment, and materials instructions ........................................A.3.2.3 Design, processing, manufacturing and testing instructions .....................A.3.2.2 Design requirements ..............................A.3.4 Design robustness..................................6.4.16 Destructive tests .....................................6.5 Device acquisition specification..............3.7.2 Device class designator..........................3.7.5.1.2 Device finishes .......................................E.4.2.7 Device screening ....................................C.5 Device type.............................................3.7.5.1.1 Die shear ................................................C.6.3.2.5 Die shear strength ..................................C.6.4.2.3 Die shear strength testing.......................C.3.7.5.3.3 Disposition of samples............................C.7.5.2.5 Electrical .................................................C.3.7.5.1.3 Electrical circuit design...........................E.4.2.9 Electrical requirements ...........................C.7.5.4.6 Electrical test ..........................................C.3.3.4.3 Electrical test parameters .......................C.3.7.2 Electrical test specifications....................C.3.2.7 Electrostatic discharge sensitivity (ESDS)..............................6.4.17 Electrostatic discharge (ESD) sensitivity identifier ............................3.7.5.8.2 Element ..................................................6.4.18 Element evaluation .................................C.3 Element evaluation guidance .................C.3.1.1 Element replacement..............................E.3.2.5 Element shear for option 1 PI product qualification ..........................C.6.3.3.3 Element shear for QML qualification.......C.7.5.4.11 Element wire rebonding..........................E.3.2.2 End-of-line sample testing ......................C.6.3.1.2 End point ................................................C.6.2.4 End point electrical measurements ........C.6.4.4.2 Environmentally preferable material ......6.7 Equipment calibrations ...........................A.3.11.1 ESD handling control program................A.3.15.1 Examples of assembly and verification travelers.............................................A.3.12 External element finishes........................E.4.2.7.2 External lead finish .................................E.4.2.7.3 External metals.......................................E.4.2.3 External visual screen.............................C.5.13 Failure analysis and corrective action program.............................................A.3.14 PAGE 15 16 7 75 75 75 22 16 24 23 27 16 18 7 8 76 50 8 58 63 44 66 43 77 67 38 43 37 16 10 16 36 36 74 59 68 73 56 56 63 19 30 31 30 76 76 75 54 31 MIL-PRF-38534G INDEX TITLE PARAGRAPH PAGE Failure analysis of burn-in screen failures for class K devices ............... C.5.9.3 51 Failure and corrective action reports...... A.3.13.2 31 Failure and defect analysis and data feedback ........................................... A.3.13 30 Failures .................................................. C.7.5.3.2 66 Failures .................................................. F.4.1.2 86 Film adhesion......................................... C.3.7.5.2.3 43 Film microcircuit ..................................... 6.4.19 16 Final electrical test ................................. C.5.10 53 Final seal................................................ 6.4.20 16 Flip chip bonding.................................... 6.4.21 16 Functional block organization chart........ A.3.2.1.1 22 General .................................................. 3.7 6 General .................................................. A.3.2.5.1 24 General .................................................. C.3.2 37 General .................................................. C.3.8.2 45 General .................................................. C.3.9.2 46 General .................................................. C.4.2.1 48 General .................................................. C.5.2 50 General .................................................. C.5.9.1 51 General .................................................. C.5.9.5.1 52 General .................................................. C.6.2 55 General .................................................. C.6.3.3.1 59 General .................................................. F.4.1 86 General rework and repair provisions .... E.3.2.1 72 General statistical sampling ................... F.3 85 General verification ................................ 4.1 12 General .................................................. 2.1 2 General .................................................. A.2.1 21 General .................................................. C.2.1 35 General .................................................. E.2.1 71 General .................................................. F.2.1 85 General .................................................. G.2.1 87 Government documents......................... 2.2 2 Government documents......................... A.2.2 21 Government documents......................... C.2.2 35 Government documents......................... E.2.2 71 Government documents......................... F.2.2 85 Government documents......................... G.2.2 87 Group A electrical testing....................... C.6.3.1 56 Group A electrical testing....................... C.6.4.1 62 Group A general requirements............... C.6.3.1.1 56 Group B inspection................................. C.6.3.2 57 Group B inspection................................. C.6.4.2 62 Group C inspection ................................ C.6.3.3 58 Group C inspection ................................ C.6.4.3 63 Group D inspection ................................ C.6.4.4 63 Handbooks............................................. G.2.2.1 87 Hybrid microcircuit.................................. 6.4.22 16 Hybrid microcircuit type (device type) .... 6.4.23 16 Implementation....................................... A.3.2.5.2 24 Implementation of this appendix ............ G.3.2 89 Implementation of this specification ....... 3.7.1 6 Incoming, in-process, and outgoing inventory control ............................... A.3.6.2 28 Index point.............................................. 3.7.5.2 9 In-line sample testing ............................. C.6.3.1.3 56 91 TITLE PARAGRAPH In-line verification testing ........................C.6.3.1.4 Inspection and testing.............................A.3.10 Inspection lots.........................................6.4.24 Inspection lots……………………………..C.6.2.1 Inspection lot formation ..........................6.4.25 Inspection lot formation…………………..C.6.2.2 Inspection operations .............................A.3.10.1 Inspection operations .............................A.3.10.4 Integral substrate/package .....................6.4.26 Integral substrate/package evaluation....C.3.9 Intended use...........................................6.1 Internal conductors .................................E.4.2.6 Internal element finishes.........................E.4.2.7.1 Internal quality audits..............................A.3.17 Internal visual .........................................C.3.3.4.2 Internal visual and mechanical ...............C.6.3.2.3 Internal visual and mechanical ...............C.6.4.2.1 Internal visual ........................................C.7.5.4.9 Internal visual inspection ........................C.5.5 Internal water vapor................................C.7.5.4.8 Internal water vapor process monitor .....C.4.4 ISP inspection lot....................................C.3.9.1 Item requirements...................................3.8 Known good die (KGD)...........................6.4.27 Lead finish ..............................................3.7.3.1 Lead finish ..............................................3.7.5.1.4 Lead integrity ..........................................C.6.4.4.3 Lid seal rework........................................E.3.2.6.1 Lists or acronyms ...................................6.9 Location of element evaluation...............C.3.2.4 Loose particle recovery...........................C.7.5.4.1.1 Lot identification code (date code)..........3.7.5.3 Lot sample bond strength .......................C.4.2.6.2 Lots resubmitted for burn-in....................C.5.9.4 Major changes ........................................E.5 Marking of devices..................................3.7.5 Marking option for controlled storage of class H and G................................3.7.5.9 Management responsibility.....................A.3.1 Manufacturer controls…………………....E.5.1 Manufacturer’s designating symbol ........3.7.5.5 Manufacturer’s identification...................3.7.5.4 Manufacturer’s self-audit ........................A.3.2.1.6 Material and element traceability............A.3.8.1 Mechanical shock ...................................C.7.5.4.3 Microelectronics......................................6.4.28 Microcircuit..............................................6.4.29 Microcircuit and semiconductor dice ......C.3.3 Monolithic microcircuit ............................6.4.30 Multichip module (MCM).........................6.4.31 Nonconformance ....................................C.6.3.4 Nonconformance ....................................C.6.4.5 Noncontinuous production......................6.4.32 Nondestructive bond pull test for class K devices..................................C.5.4 Nondestructive tests ...............................6.6 Nonfunctional samples ...........................C.6.2.6 Nonfunctional samples ...........................C.7.5.2.4 PAGE 57 29 16 55 16 55 29 29 16 46 14 76 76 32 38 58 62 67 50 67 49 46 11 16 7 8 63 74 20 37 66 9 49 52 77 8 11 22 77 9 9 23 29 67 17 17 37 17 17 62 64 17 50 19 56 66 MIL-PRF-38534G INDEX TITLE PARAGRAPH PAGE Non-Government publications................ A.2.3 22 Non-Government publications................ C.2.3 36 Non-Government publications................ G.2.3 87 Non-solder sealed devices..................... C.5.12.2 54 Notes...................................................... 6. 14 Off-line reliability assessment ................ 6.4.33 17 On-site verification ................................. 4.5.1.1 13 One-hundred percent inspection............ F.4.2.3 86 Option 1 (in-line inspection) ................... C.6.3 56 Option 2 (end-of-line) ............................. C.6.4 62 Optional acquisition data........................ 6.2.1 14 Order of precedence .............................. 2.3 3 Order of precedence .............................. A.2.4 22 Order of precedence .............................. C.2.4 36 Other external materials......................... E.4.2.4 75 Other Government documents, drawings, and publications ............... 2.2.2 3 Other seal rework................................... E.3.2.6.2 74 Package ................................................. E.4.2.1 75 Package evaluation................................ C.3.8 45 Package type ......................................... 6.4.34 17 Packaging .............................................. 5 14 Packaging .............................................. 5.1 14 Part or identifying number (PIN)............. 3.7.5.1 8 Particle impact noise detection (PIND) test .................................................... C.5.7 51 Passive element..................................... 6.4.35 17 Passive elements ................................... C.3.4 39 Pattern failure option.............................. C.5.9.5.3 52 Pattern failure option, class H ................ C.5.9.5.3.1 52 Pattern failure option, class K ................ C.5.9.5.3.2 53 PDA class H ........................................... C.5.9.5.2.1 52 PDA class K ........................................... C.5.9.5.2.2 52 PDA option ............................................. C.5.9.5.2 52 Percent defective allowable (PDA)......... 6.4.36 17 Performance requirements..................... G.3 88 Performance requirements for Class D devices ................................ 3.5 4 Performance requirements for Class E devices ................................ 3.4 4 Performance requirements for Class G devices................................ 3.3 4 Performance requirements for Class H devices ................................ 3.2 3 Performance requirements for Class K devices ................................ 3.1 3 Performance requirements for RHA devices ..................................... 3.6 4 Performance requirements for RHA devices ..................................... G.3.1 88 Performance verification operations....... A.3.10.3 29 Periodic assessment of alternative methods ............................................ A.3.2.5.4.2.2 26 Periodic capability certification............... 6.4.37 17 Personnel training and testing................ A.3.18 32 Personnel training and testing................ A.3.18.1 32 Physical dimension ................................ C.3.7.5.1.1 43 92 TITLE PARAGRAPH Physical dimensions ...............................C.6.3.2.1 PIND .......................................................C.7.5.4.1 Polymeric material evaluation.................C.3.10 Polymeric materials ................................E.4.2.2 Preburn-in electrical test.........................C.5.8 Preseal burn-in test ................................C.5.3 Procedure for sample tests.....................A.3.13.1.1 Procedure for screening tests.................A.3.13.1.2 Procedure in case of test equipment failure of operator error......................A.3.13.1 Process and materials controls ..............A.3.9.1 Process control.......................................A.3.9 Process control.......................................C.4 Process machines ..................................C.4.2.3 Process machine/operator evaluation ....C.4.2.6.1 Process/test traceability..........................A.3.8.2 Production lot..........................................6.4.38 Production lot identification.....................A.3.8.5 Production lot traceability .......................A.3.8.3 Protection from electrostatic discharge ..C.3.2.6 QML qualification requirements..............3.7.4 QML-38534 qualification.........................C.7.5 Qualified manufacturers list (QML) qualification lot ..................................C.7.3 Qualification............................................6.3 Qualification............................................C.7 Qualification eligibility .............................C.7.5.1 Qualification of rework ............................C.7.2.1 Qualification test requirements ...............C.7.4 Qualification to electrostatic discharge sensitivity (ESDS) classes.................C.6.3.3.4 Qualifying activity....................................6.4.39 Quality control operations.......................A.3.10.2 Quality function deployment (QFD) ........6.4.40 Quality improvement program ................A.3.2.4 Quality management (QM) plan..............4.4 Quality management (QM) plan..............A.3.2.1 Quality management (QM) program (TRB option) ......................................A.3.2.5 Quality management program ................4.2 Quality system ........................................A.3.2 Quality system requirements ..................A.3 Radiation hardness assurance (RHA) levels .................................................G.3.1.1 Radiography for class K devices ............C.5.12 Records to be maintained.......................A.3.16.1 Recycled, recovered, or environmentally preferable materials...........................3.9 Reports and analysis of defective devices and failures...........................A.3.14.1 Requirements .........................................3. Resistance to soldering heat ..................C.6.3.3.5 Resistance to solvents............................C.6.3.2.2 Resubmission of failed lots.....................C.6.4.5.1 Resubmission of failed samples or lots (or both).............................................C.7.5.3.1 Rework and repair provisions .................3.10.1 Rework and repair provisions .................E.3.2 PAGE 57 66 47 75 51 50 30 30 30 29 29 47 48 48 29 17 29 29 37 7 65 65 14 65 66 65 65 59 17 29 17 24 12 22 24 12 22 22 88 53 31 12 31 3 60 58 64 66 12 72 MIL-PRF-38534G INDEX TITLE PARAGRAPH PAGE Rework limitations.................................. E.3 71 Rework qualification............................... C.7.2 65 Rework samples..................................... C.7.5.2.3 66 RF probe test ......................................... C.3.5.1 42 Sample electrical test of passive elements ........................................... C.3.4.4 40 Sample evaluation of assembled dice.... C.3.3.3 38 Sample selection.................................... C.3.2.2 37 Sample selection.................................... C.6.2.3 56 Sample selection.................................... C.7.5.2.2 66 Sample selection and reject criteria ....... C.3.3.6.1 39 Sample size............................................ C.3.3.4.1 38 Sample size............................................ C.3.3.5.1 38 Sample size............................................ F.4.2.1 86 Samples ................................................. C.6.4.4.1 63 Schematic diagrams............................... E.4.2.5.1 75 Scope..................................................... 1 1 Scope..................................................... 1.1 1 Scope..................................................... A.1 21 Scope..................................................... A.1.1 21 Scope..................................................... C.1 35 Scope..................................................... C.1.1 35 Scope..................................................... E.1 71 Scope..................................................... E.1.1 71 Scope..................................................... F.1 85 Scope..................................................... F.1.1 85 Scope..................................................... G.1 87 Scope..................................................... G.1.1 87 Seal (fine and gross leak) ...................... C.5.11 53 Seal........................................................ C.6.3.2.7 58 Seal (find and gross).............................. C.6.4.2.5 63 Seal rework ............................................ E.3.2.6 74 Seal testing ............................................ C.4.3 49 Selection of samples.............................. F.4.1.1 86 Self-audit................................................ 6.4.41 17 Self-audit areas...................................... A.3.17.1.6 32 Self-audit checklist ................................. A.3.17.1.7 32 Self-audit program.................................. 4.4.1 12 Self-audit report...................................... A.3.17.1.5 32 Self-audit representatives ...................... A.3.17.1.1 32 Self-audit requirements.......................... A.3.17.1 32 Semiconductor element ......................... 6.4.42 17 Sequence of testing ............................... C.3.2.1 37 Serialization............................................ 3.7.5.7 9 Similar devices....................................... 6.4.43 17 Single-lot sampling method.................... F.4.2 86 Solder sealed devices............................ C.5.12.1 54 Solder sealed devices............................ E.3.2.7.1 75 Solderability............................................ C.3.7.5.2.4 43 Solderability............................................ C.6.3.2.6 58 Solderability............................................ C.6.4.2.4 63 Special marking...................................... 3.7.5.8 9 Specifications, standards, and handbooks ........................................ 2.2.1 2 Specifications, standards, and handbooks ........................................ C.2.2.1 35 Standard................................................. A.2.2.1 21 Standard................................................. E.2.2.1 71 93 TITLE PARAGRAPH Standard .................................................F.2.2.1Standard evaluation circuit (SEC)...........6.4.44 Standard evaluation circuit (test coupon or test vehicle)...................................C.4.2.2 Standard evaluation circuits ...................A.3.2.5.4.2.1 Standard evaluation circuits ...................C.7.5.2.1 Statistical process control (SPC) ............6.4.45 Statistical sampling procedures and table...................................................F.4 Steady-state life test ...............................C.7.5.4.7 Subgroup 1 .............................................C.3.8.3 Subgroup 1 .............................................C.3.9.3 Subgroup 1, 100 percent electrical test of dice.........................................C.3.3.1Subgroup 1, 100 percent electrical test of passive elements...........................C.3.4.1Subgroup 1, 100 percent electrical testing................................................C.3.7.3Subgroup 2 .............................................C.3.9.4Subgroup 2, 100 percent visual inspection of dice ..............................C.3.3.2 Subgroup 2, 100 percent visual inspection ..........................................C.3.7.4Subgroup 2, visual inspection of passive elements...........................C.3.4.2 Subgroup 3 .............................................C.3.7.5.1 Subgroup 3 .............................................C.6.4.4.4 Subgroup 4 .............................................C.3.7.5.2 Subgroup 4 .............................................C.3.8.4 Subgroup 4 .............................................C.3.9.5 Subgroup 4 .............................................C.6.4.4.5 Subgroup 5 .............................................C.3.3.5 Subgroup 5 .............................................C.3.7.5.3 Subgroup 5 .............................................C.3.9.6 Subgroup 6 .............................................C.3.8.5 Subgroup 6, scanning electron microscope (SEM).............................C.3.3.6 Subgroup 7 .............................................C.3.9.7 Subgroup 8 .............................................C.3.9.8 Subgroups 3 and 4 .................................C.3.3.4 Subgroups 3, 4, and 5 general requirements .....................................C.3.7.5Subject term (key word) listing................6.8Substrate evaluation...............................C.3.7 Substrate, thick film elements, capacitors, and package post wire rebonding or repair............................E.3.2.3 Supplier control program ........................A.3.6.1 Surface acoustic wave (SAW) element evaluation..........................................C.3.5Symbols..................................................F.3.2TABLE I. Performance requirements summary...................... TABLE II Implementation summary....... PAGE 85 18 48 26 66 18 86 67 45 46 37 39 43 46 38 43 39 43 63 43 45 46 64 38 44 47 45 38 47 47 38 43 19 43 73 28 41 86 5 7 MIL-PRF-38534G INDEX TITLE PARAGRAPH PAGE TABLE III. Certification mark................. 10 TABLE C-I.. Element evaluation summary........................................... 37 TABLE C-II.. Microcircuit and semiconductor dice evaluation requirements..................................... 39 TABLE C-III.. Passive element evaluation requirements..................................... 41 TABLE C-IV. SAW element evaluation requirements..................................... 42 TABLE C-V Substrate evaluation requirements..................................... 45 TABLE C-VI. Package evaluation requirements..................................... 46 TABLE C-VII. Integral substrate/package element evaluation requirements...... 47 TABLE C-VIII. Process control summary 50 TABLE C-IX. Device screening ............. 54 TABLE C-X. CI and PI summary............ 55 TABLE C-Xa. Group A electrical test .... 57 TABLE C-Xb Group B testing (option 2 only) ................................... 63 TABLE C-Xb-1. Bond strength requirements..................................... 62 TABLE C-Xc. Group C testing............... 61 TABLE C-Xd. Group D package related tests .................................................. 64 TABLE E-I Testing guidelines for major product/process changes.................. 80 TABLE F-I. Sample size (accept number) sampling plan.................................... 86 TABLE G-I. RHA levels ......................... 89 Tape automated bonding (TAB)............. 6.4.46 18 Technology capability............................. 6.4.47 18 Technology capability verification (qualification) .................. 4.5.2 13 Technology capability verifications......... C.7.5.4 66 Technology review board (TRB)............. A.3.2.5.3 25 Technology Review Board (TRB) option...................................... A.1.2 21 Temperature coefficient of resistance (TCR) ............................................... C.3.7.5.3.1 44 Temperature cycling............................... C.7.5.4.2 67 Terms, definitions, methods, symbols, and abbreviations .............. 6.4 15 Test failures............................................ C.7.5.3 66 Test sample preparation ........................ C.3.3.3.2 38 Test sample preparation for subgroups 3 and 4............................ C.3.4.3 40 Test samples.......................................... C.3.3.3.1 38 Test samples.......................................... C.7.5.2 66 Testing for pure tin finishes.................... C.4.5 49 Thermal design ...................................... E.4.2.8 77 Tool and test equipment maintenance and calibration .................................. A.3.11 29 Traceability............................................. A.3.8 29 Travelers ................................................ A.3.2.1.4 22 TRB organizational structure.................. A.3.2.5.3.1 25 94 MIL-PRF-38534G INDEX TITLE PARAGRAPH PAGE TITLE PARAGRAPH PAGE TRB records............................................A.3.2.5.5 26 TRB responsibilities................................A.3.2.5.3.2 25 Verification..............................................4 12 Verification..............................................G.4 89 Verification audit .....................................4.5.1 13 Verification methods ...............................G.4.1 89 Verifications for QML listing....................4.5 12 Visual examination..................................C.3.4.5 40 Visual examination..................................C.7.5.4.5 67 Visual inspection.....................................C.3.5.2 42 Visual inspection.....................................C.3.7.5.1.2 43 Visual inspection for damage .................C.5.6 50 Voltage conditioning or aging .................C.3.4.7 40 Wafer lots ...............................................6.4.48 18 Welded devices ......................................E.3.2.7.2 75 Wire bond evaluation..............................C.3.5.3 42 Wire bond strength for option 1 PI product qualification ..........................C.6.3.3.2 59 Wire bond strength for QML qualification .......................................C.7.5.4.10 67 Wire bond strength for QML rework qualification .......................................C.7.5.4.10.1 68 Wire bond strength testing .....................C.3.3.5.2 38 Wire bond strength testing .....................C.3.4.6 40 Wire bond strength testing .....................C.3.7.5.3.2 44 Wire bonding ..........................................C.4.2 48 Wire bonding ..........................................C.4.2.6 48 Workmanship .........................................3.10 12 95 MIL-PRF-38534F CONCLUDING MATERIAL Custodians: Preparing activity: Army - CR DLA - CC Navy - EC Air Force - 85 NASA – NA (Project 5962-2008-007) DLA - CC Review activities: Army - MI, SM Navy – AS, CG, MC, SH, TD Air Force - 03,19, 99 NOTE: The activities listed above were interested in this document as of the date of this document. Since* organization and responsibilities can change, you should verify the currency of the information above using the ASSIST Online database at http://assist.daps.dla.mil. 96

 
 
US MICROWAVES
Advanced Microwave Components
MIL-PRF-38534G PERFORMANCE SPECIFICATION GENERAL SPECIFICATION FOR HYBRID MICROCIRCUITS
 
 

This document and process
conversion measures necessary to
comply with this revision shall be MIL-PRF-38534G
completed by 9 September 2009 9 March 2009
SUPERSEDING
MIL-PRF-38534F
12 April 2006

PERFORMANCE SPECIFICATION

HYBRID MICROCIRCUITS, GENERAL SPECIFICATION FOR

This specification is approved for use by all Departments and Agencies of the Department of Defense.

This document is a performance specification. It is intended to provide the device manufacturers an acceptable established baseline in order to support Government microcircuit applications and logistic programs. The basic document has been structured as a performance specification that is supplemented with detailed appendices. These appendices provide guidance to manufacturers on demonstrated successful approaches to meeting defense performance requirements. These appendices are included as a performance benchmark and are intended to impose mandatory requirements.

1. SCOPE

1.1 Scope. This specification establishes the general performance requirements for hybrid microcircuits, multi-chip modules (MCM) and similar devices, and the verification requirements for ensuring that these devices meet the applicable performance requirements. Verification is accomplished through the use of one of two quality programs (Appendix A). The main body of this specification describes the performance requirements and the requirements for obtaining a Qualified Manufacturers List (QML) listing. The appendices of this specification are intended for guidance to aid a manufacturer in developing their verification program. Detail requirements, specific characteristics, and other provisions that are sensitive to the particular intended use should be specified in the applicable device acquisition specification.

Comments, suggestions, or questions on this document should be addressed to: Defense Supply Center, Columbus, ATTN: DSCC-VAS, P. O. Box 3990, Columbus, OH 43218-3990, or emailed to PRF38534@dla.mil . Since contact information can change, you may want to verify the currency of this address information using the ASSIST Online database at http://assist.daps.dla.mil.

AMSC N/A FSC 5962

1.2 Description of this specification. The intent of this specification is to allow the device manufacturer the flexibility to implement best commercial practices to the maximum extent possible while still providing a product which meets the military performance needs. Devices that are compliant to this specification are those that are capable of meeting the verification requirements outlined herein; and are built on a manufacturing line which is controlled by the manufacturer's quality management program and has been certified and qualified in accordance with the requirements herein. The certification and qualification requirements outlined herein are the requirements to be met by a manufacturer to be listed on the (QML). The manufacturer may modify, substitute, or delete the tests and inspections defined herein. This is accomplished by baselining a flow of tests and inspections that will assure that the devices are capable of meeting the generic verifications provided in this specification. This does not necessarily mean that compliant devices have been subjected to the generic performance verifications provided in this specification, just that compliant devices are capable of meeting them. It is the manufacturer's responsibility to ensure that their devices are capable of meeting the generic performance verifications applicable to each specified product assurance level.

Appendix A defines the quality management program that may be implemented by the manufacturer. Appendix A includes an option to use a quality review board concept, hereafter referred to as the Technology Review Board (TRB) in this document, which may be used to modify the generic verification, design, and construction criteria provided in this specification. Appendix B is not currently being used. Appendix C defines generic performance verifications. These verifications consist of a series of tests and inspections which may be used to verify the performance of devices. They may be used as is or modified as allowed by this specification. Appendix D is not currently being used. Appendix E defines generic design and construction criteria relative to this technology, including rework limitations and major change testing guidance. Appendix F provides statistical sampling procedures. Appendix G provides the guidelines for a Radiation Hardness Assurance (RHA) Program.

1.3 Classification. Five quality assurance levels are provided for in this specification. Four of these classes, in highest to lowest order, are K, H, G and D, as defined below. The fifth class is Class E, the quality level associated with a Class E device is defined by the acquisition document.

1.3.1 Class K. Class K is the highest reliability level provided for in this specification. It is intended for space applications.

1.3.2 Class H. Class H is the standard military quality level.

1.3.3 Class G. Class G is a lowered confidence version of the standard military quality level (H) with QML listing in accordance with 4.5.2.2, a possibly lower temperature range (-40oC to +85oC), a manufacturer guaranteed capability to meet the Class H conformance inspection and periodic inspection testing, and a vendor specified incoming test flow. The device will meet the Class H requirements for in-process inspections and screening.

1.3.4 Class D. Class D is a vendor specified quality level available to this specification. This is a possibly lower temperature range (0oC to +70oC) part with a vendor specified test flow available from a QML listed manufacturer.

  1. Class E. Class E designates devices which are based upon one of the other classes (K, H, or G) with exceptions taken to the requirements of that class. These exceptions are specified in the device acquisition document, therefore the device acquisition document should be carefully reviewed by the user to ensure that the exceptions taken will not adversely affect the performance of the system.

  2. APPLICABLE DOCUMENTS

2.1 General. The documents listed in this section are specified in sections 3, 4, or 5 of this specification. This section does not include documents cited in other sections of this specification or recommended for additional information or as examples. While every effort has been made to ensure the completeness of this list, document users are cautioned that they must meet all specified requirements of documents cited in sections 3, 4, or 5 of this specification, whether or not they are listed.

2.2 Government documents.

2.2.1 Specifications, standards, and handbooks. The following specifications, standards, and handbooks form a part of this specification to the extent specified herein. Unless otherwise specified, the issues of these documents are those cited in the solicitation or contract.

DEPARTMENT OF DEFENSE SPECIFICATIONS

MIL-I-46058 -Insulating Compound, Electrical (For Coating Printed Circuit Assemblies).

DEPARTMENT OF DEFENSE STANDARDS

MIL-STD-883 -Test Method Standard Microcircuits.

(Copies of these documents are available online at http://assist.daps.dla.mil/quicksearch/ or from the Standardization Document Order Desk, 700 Robbins Avenue, Building 4D, Philadelphia, PA 19111-5094.)

2.2.2 Other Government documents, drawings, and publications. The following other Government documents, drawings, and publications form a part of this document to the extent specified herein. Unless otherwise specified, the issues of these documents are those cited in the solicitation or contract.

Handbook H4/H8 -Commercial and Government Entity (CAGE) Handbook. 1/

JEDEC Publication JEP133 -Guide for the Production and Acquisition of Radiation-Hardness- Assured Multichip Modules and Hybrid Microcircuits

JESD22-A114 -Electrostatic Discharge (ESD) Sensitivity Testing Human Body Model (HBM)

NAVSHIPS 0967-190-4010 - Manufacturer's Designating Symbols. 2/

QML-38534 -Qualified Manufacturer's List of Products Qualified Under Performance Specification MIL-PRF-38534, Hybrid Microcircuits General Specification For.

(Copies of these documents are available online at http://assist.daps.dla.mil/quicksearch/ or from the Standardization Document Order Desk, 700 Robbins Avenue, Building 4D, Philadelphia, PA 19111-5094.)

  1. Order of precedence. Unless otherwise noted herein or in the contract, in the event of a conflict between the text of this document and the references cited herein, the text of this document takes precedence. Nothing in this document, however, supersedes applicable laws and regulations unless a specific exemption has been obtained.

  2. REQUIREMENTS

3.1 Performance requirements for Class K devices. Class K devices shall be capable of meeting the Class K tests and inspections of Appendices C and E (see table I). This shall include the incoming inspection flow, the in-process inspection flow, the screening flow, and the conformance inspection and periodic inspection flow. These devices shall be specified over the temperature range of -55oC to +125oC or as specified in the device acquisition document. Manufacturers of these devices shall be fully certified and qualified in accordance with this specification. Verification of these performance requirements shall be performed as described in 4 herein.

3.2 Performance requirements for Class H devices. Class H devices shall be capable of meeting the Class H tests and inspections of Appendices C and E (see table I). This shall include the incoming inspection flow, the in-process inspection flow, the screening flow, and the conformance inspection and periodic inspection flow. These devices shall be specified over the temperature range of -55oC to +125oC or as specified in the device acquisition document. Manufacturers of these devices shall be fully certified and qualified in accordance with this specification. Verification of these performance requirements shall be performed as described in 4 herein.

1/ Handbook H4/H8 has been replaced by Defense Logistics Information Services CAGE Code website at

https://www.bpn.gov/bincs/begin_search.asp

2/ NAVSHIPS 0967-190-4010 Manufacturer’s Designating Symbols is no longer available. All current product should use Commercial and Government Entity (CAGE) Code. See 3.7.5 (e) for the CAGE Code online database website.

3.3 Performance requirements for Class G devices. Class G devices shall be capable of meeting the Class H tests and inspections of Appendices C and E, except incoming inspection (see table I). This shall include the in-process inspection flow, the screening flow, and the conformance inspection and periodic Inspection flow. Compliance with the conformance inspection and periodic inspection flow shall be guaranteed by the manufacturer. Actual completion of conformance inspection and periodic inspection tests and inspections are optional and at the manufacturer's discretion. DSCC approval or notification is not required to eliminate conformance inspection and periodic inspection tests and inspections for this class of device; however, it is the manufacturer's responsibility to ensure that their devices are capable of passing these tests and inspections. These devices shall be specified over the temperature range of -40oC to +85oC or a wider range. Manufacturers of these devices shall be fully certified and QML listed in accordance with this specification. Verification of these performance requirements shall be performed as described in 4 herein.

3.4 Performance requirements for Class E devices. Class E devices are devices which meet all of the requirements of one of the other classes (K, H, or G) with some exceptions taken. The device acquisition document shall clearly state which class the device is based upon (K, H, or G) and what exceptions are being taken. The users of these devices should carefully examine the device acquisition document to verify that the exceptions being taken will not adversely affect the system performance. Manufacturers of these devices shall be fully certified in accordance with this specification. Verification of the performance requirements shall be performed as described in paragraph 4.

3.5 Performance requirements for Class D devices. Class D devices are built and tested in accordance with the manufacturer's specified production and testing flow (see table I). These devices shall be capable of meeting the specified electrical tests. However, these devices are not required to meet any of the tests and inspections of this specification. These devices shall be specified over the temperature range of 0oC to +70oC or a wider range. Manufacturers of these devices shall be fully certified and QML listed in accordance with this specification. Verification of these Performance Requirements shall be performed as described in 4 herein.

3.6 Performance requirements for Radiation Hardness Assurance (RHA) devices. Compliant RHA devices shall meet the additional performance requirements of Appendix G. Detailed information for producing and acquiring RHA devices can be found in JEDEC publication JEP133 Guide for the Production and Acquisition of Radiation-Hardness- Assured Multichip Modules and Hybrid Microcircuits.

MIL-PRF-38534GTABLE I. Performance requirements summary.

Test flow or requirement 1/ Class
D E 2/ G 2/ H 2/ K 2/
Certification Required Required Required Required (Class H) Required (Class K)
QML listing Required IAW 4.5.2.2 Required I accordance Required IAW 4.5.2.2 Required IAW 4.5.2.1 Required IAW 4.5.2.1
Incoming inspection (appendix C) Manufacturer specified 3/ with the Applicable device class and the Manufacturer specified 3/ Applicable (Class H) 1/ Applicable (Class K) 1/
In-process inspections (appendix. C) Manufacturer specified 3/ Acquisition Document Applicable (Class H) 1/ Applicable 1/ Applicable 1/
Screening (appendix. C) Manufacturer specified 3/ Applicable (Class H) 1/ Applicable (Class H) 1/ Applicable (Class K) 1/
Conformance inspection and periodic inspection (appendix. C) Manufacturer specified 3/ Guaranteed (Class H) 4/ Applicable (Class H) 1/ Applicable (Class K) 1/
Temperature range 5/ 0oC to +70oC -40oC to +85oC -55oC to +125oC -55oC to +125oC

1/ For test flow implementation and available flexibility see 3.7.1.

2/ Design and construction and rework criteria are as specified in Appendix E and shall be utilized in accordance with 3.7.1.

3/ Manufacturer specified means that the manufacturer does not have to take the generic criteria of this specification into consideration during the establishment of its manufacturing and test flows. The manufacturer's flow may or may not meet the same requirements as the flow of this specification. In addition, the manufacturer may specify that they do not perform the particular test or inspection flow.

4/ Guaranteed (Class H) means that the manufacturer is assuring that their devices shall meet the conformance inspection and periodic inspection test flow contained in tables C-Xa, C-Xb, C-Xc, and C-Xd, but may or may not actually perform the tests and inspections specified. Elimination of these tests and inspections does not necessitate DSCC approval or notification.

5/ Classes D and G may be specified at wider temperature ranges. Classes H and K shall be -55oC to +125oC unless otherwise specified in the acquisition document.

3.7 General. The manufacturer of devices, in compliance with this specification, shall have and use production and test facilities and a verification program adequate to assure successful compliance with the provisions of this specification and the associated device acquisition specification. Adequacy of a device manufacturer to meet the requirements of this specification shall be determined by the Government qualifying activity. The individual item requirements shall be as specified in the associated device acquisition specification and as specified herein. Only devices which meet all the performance requirements of this specification and the associated device acquisition specification and have been adequately verified shall be marked as compliant and delivered. Monolithic microcircuits may be built to the Class K, H, G, or E performance requirements of this specification; however, monolithic microcircuits offered in compliance with this specification shall be specified on a Standard Microcircuit Drawing (SMD). Facilities and programs listed on the Qualified Manufacturer's List (QML) may be used for the manufacture of other than compliant devices; however, any use or reference to compliant device marking, Class K, H, G, or E certification status, or this specification in such a way as to state or imply equivalency (and thereby Government endorsement) in connection with noncompliant devices is prohibited and may be cause for revocation of certification or QML status (or both). Terms, definitions, methods, and symbols are in accordance with 6.4. Any defense specification or standard referred to in this specification may be replaced by an equivalent commercial standard as determined by the preparing activity.

3.7.1 Implementation of this specification. All devices offered and shipped in compliance with this specification shall meet the performance requirements specified for the applicable device class. The manufacturer shall verify that devices meet the performance requirements of the applicable device class. The manufacturer is responsible for developing a verification program which shall meet this requirement. The appendices of this specification give standard methods for verifying that the devices meet the performance requirements (except for Class D). The manufacturer may address the requirements of this specification as written, adapt them to their products, or develop a new methodology. Prior to the manufacturer being certified, the actual verification program to be used shall be reviewed and approved by DSCC. Any deletions or changes to the test flow shall also be reviewed and approved by DSCC or the manufacturer's DSCC approved Technology Review Board (TRB) prior to implementation. In this manner, a manufacturer may use an alternative method to the method specified in this specification to evaluate their parts if the alternate method verifies the same performance requirement. Furthermore, the manufacturer may eliminate a test or inspection (or decrease the occurrence or sample size of the test or inspection) if it is shown that the test or inspection is not necessary or can be performed less frequently. It is the manufacturer's responsibility to show how their verification program (and any changes to it) meets the requirements of this specification. The manufacturer shall analyze the impact of major changes and their affect on previously approved modifications of tests (test optimization). See table II for clarification.

MIL-PRF-38534GTABLE II. Implementation summary.

Option Definition Typical examples Implementation procedures
Meet requirement as written The manufacturer performs the test or requirement as specified. Self explanatory The manufacturer implements the test or requirement into internal documentation, verified during certification.
Alternate method to the requirement The manufacturer assures that the intent of the requirement is met, but does not perform the - Replacement of a test with statistical process control (SPC) or alternate method. - Historical data analysis shows For TRB companies, alternate method and appropriate justification are approved by the manufacturer's TRB.
test/requirement exactly as written. that the requirement is met. - Design verification/validation shows that the process is capable of meeting the requirement. - Requirement does not address new materials, technologies, or designs. For traditional companies, manufacturer proposes the alternate method and justification to the qualifying activity for approval.
Elimination of the requirement The manufacturer proves that the test or requirement is either: Non-value added
- Test does not stress the process adequately (e.g., PIND for encapsulated parts). - Historical data analysis shows that the test does not induce failures. Elimination is achieved in the same manner as alternate methods described above.
The product will not comply with the test or requirement due to technology limitations. - Configuration of the product (i.e., size, mass, package) is incompatible with the test method. The exception shall be documented in the applicable acquisition document. Product is classified as Class E.
Application has no need of the requirement. The device will not experience the particular stress in the application. The exception shall be documented in the applicable acquisition document. Product is classified as Class E.

3.7.2 Device acquisition specification. The preferred device acquisition document for devices built in full compliance with this specification is a SMD. Monolithic microcircuits built in compliance with this document shall be documented on an approved SMD.

3.7.3 Design and construction. The design and construction of compliant devices shall address the limitations and guidelines of Appendix E.

3.7.3.1 Lead finish. Appendix E provides the general interface requirements for lead finishes.

3.7.4 QML qualification requirements. Hybrid microcircuits furnished under this specification shall be products which are authorized by the qualifying activity for listing on the QML. Qualification testing shall be performed in accordance with the agreed upon qualification plan. (See appendix C for guidance on qualification testing.)

* 3.7.5 Marking of devices. Marking shall be in accordance with the requirements of this specification and the device procurement specification. The marking shall be legible and complete, and shall meet the resistance to solvents requirements of method 2015 of MIL-STD-883. When mechanical or laser marking is performed, it shall be clearly visible through those conformal coatings approved for use in MIL-I-46058 (see method 2015 of MIL-STD-883 if contrasting material or ink is used to highlight the trace). Mechanical or laser marked metal surfaces shall meet all applicable microcircuit finishes and shall not degrade the performance requirements of the device. Mechanical or laser marking shall be approved by the qualifying activity. If any special marking is used, it shall in no way interfere with the marking required herein, and shall be visibly separated therefrom. The following marking shall be included on each microcircuit unless otherwise specified.

a.
Part or Identifying Number (PIN) (see 3.7.5.1).
b.
Index point (see 3.7.5.2).
c.
Lot identification code or date code (see 3.7.5.3).
d.
Device manufacturer's identification (see 3.7.5.4).
e.
Device manufacturer's CAGE CODE. The CAGE CODE online database is available at http://www.bpn.gov/bincs/begin_search.asp (see 3.7.5.5).
f.
Country of manufacture (see 3.7.5.6).
g.
Serialization, when applicable (see 3.7.5.7).
h.
Special marking (see 3.7.5.8).
i.
Electrostatic discharge (ESD) sensitivity identifier (see 3.7.5.8.2).
j.
Certification mark (see 3.7.5.8.3).

Unless otherwise specified, the certification mark, the PIN, the inspection lot identification code, and the ESD identifier shall be located on the top surface of flat packages or dual-in-line configurations and on either the top or the side of cylindrical packages (TO configurations and similar configurations).

3.7.5.1 Part or Identifying Number (PIN). Each Standard Microcircuit Drawing (SMD) microcircuit shall be marked with the complete PIN, as specified in the SMD. The number sequence for MIL-PRF-38534 is 5962-XXXXXZZHYY, where:

5962 -XXXXX ZZ H Y Y

Federal RHA Device QML Case Lead stock class designator type no. device outline finish designator (see 3.7.5.1.1) class (see 3.7.5.1.3) designator

\ / designator (see 3.7.5.1.4) \/ (see 3.7.5.1.2) Drawing number

3.7.5.1.1 Device type. The device type shall identify the circuit function as indicated in the SMD.

3.7.5.1.2 Device class designator. This device class designator shall be a single letter identifying the quality level in accordance with the SMD.

3.7.5.1.3 Case outline. The case outline shall be designated by a single letter assigned to each outline within each SMD.

3.7.5.1.4 Lead finish. Lead frame or terminal material and finish shall be as specified (see Appendix E). The lead finish shall be designated by a single letter as follows: Finish letter Lead finish (see note)

A Hot solder dip B Tin-lead plate C Gold plate X Finishes A, B, or C (see note)

NOTE: Finish letter "X" shall not be marked on the microcircuit or its packaging. This designation is provided for use in drawings, part lists, acquisition orders, or other documentation where lead finishes A, B, and C are all considered acceptable and interchangeable without preference. For Government logistic support, the A lead finish will be acquired and supplied to the end user when the X is included in the PIN for lead finish. If the PIN is not available with the A lead finish, the same PIN will be acquired except with the C or B lead finish designator as determined by availability. Type C terminal material is a fired on metallization used with leadless chip carriers.

3.7.5.2 Index point. The index point, tab, or other marking indicating the starting point for numbering of leads or for mechanical orientation shall be as specified and shall be applied so that it is visible from above when the microcircuit is installed in its normal mounting configuration. The outline of an equilateral triangle (i.e., ), which may be used as an electrostatic identifier (see 3.7.5.8.2), may also be used as the pin 1 identifier.

3.7.5.3 Lot identification code (date code). Devices shall be marked by a unique code to identify the week of final seal. The first two numbers in the code shall be the last two digits of the number of the year, the third and fourth numbers shall be two digits indicating the calendar week of the year. When the number of the week is a single digit, it shall be preceded by a zero. Reading from left to right or from top to bottom, the code number shall designate the year and week, in that order (e.g., 8806 equals week 6 of 1988).

3.7.5.4 Manufacturer's identification. Devices shall be marked with the name or trade mark of the manufacturer. The identification of the equipment manufacturer may appear on the device only if the equipment manufacturer is also the device manufacturer.

3.7.5.5 Manufacturer's designating symbol. When space permits, the manufacturer may mark the CAGE code on devices. The manufacturer's designating symbol or CAGE code number shall be as listed on NAVSHIPS 0967-190-4010 or cataloging Handbook H4/H8. NAVSHIPS 0967-190-4010 and Handbook H4/H8 are no longer being maintained. Manufacturing symbols found in NAVSHIPS 0967-190-4010 should no longer be used for current product. All current product should use the current manufacturers CAGE code. CAGE codes can be found using the online database references in 3.7.5.e. The designating symbol shall be used only by the manufacturer to whom it has been assigned and only on those devices manufactured at the manufacturer's plant. In the case of small devices, the manufacturer's designating symbol may be abbreviated by omitting the first "C" in the series of letters.

3.7.5.6 Country of manufacture. The manufacturer shall indicate the country where the device was manufactured (i.e., substrate and element attach, interconnect, seal). At the option of the manufacturer, the country of manufacture marking may be omitted from the body of the device but shall be retained on the initial container.

3.7.5.7 Serialization. Serialization allows traceability of electrical tests results (variables data) to an individual device.

3.7.5.7.1 Class K serialization. Prior to the first recorded electrical measurement in screening, each Class K device shall be marked with a unique serial number assigned consecutively. Lot records shall be maintained to provide traceability from the serial number to the specific incoming inspection lots from which the elements originated.

3.7.5.7.2 Class H and G serialization. Serialization of Class H and G devices shall only be required when specified in the device acquisition specification.

3.7.5.8 Special marking. When the size of a package is insufficient to allow marking of special process identifiers on the top surface, the back side of the package may be used for these markings except the ESD identifier shall be marked on the top. Button cap flat packs with less than, or equal to, 16 leads may have the identifier marked on the ceramic. Back side marking with conductive or resistive ink shall be prohibited on nonconductive surfaces.

3.7.5.8.1 Beryllium oxide package identifier. If a device package contains beryllium oxide, the device shall be marked with this designation: BeO.

NOTE: Packages containing beryllia will not be ground, sandblasted, machined, or have other operations performed on them which will produce beryllia or beryllium dust. Furthermore, beryllium oxide packages will not be placed in acids that will produce fumes containing beryllium.

* 3.7.5.8.2 Electrostatic discharge (ESD) sensitivity identifier. ESD classification levels are defined as follows when tested in accordance with method 3015, of MIL-STD-883. The testing procedure of JESD22-A114 may optionally be used in lieu of method 3015 provided the manufacturer is able to demonstrate correlation between the two methods.

Optional

Prior individual Required ESD class designation part packaging Electrostatic designator category marking marking voltage___

0 0 0 <250 V 1A A A 250 V – 499 V 1B B B 500 V - 999 V 1C C C 1,000 V – 1,999 V

1Note * A  Note*  Note * 0 - 1,999 V 2 B  2,000 - 3,999 V 3 Note*  Note*  Note* ≥ 4,000 V 3A A A 4,000 V – 7,999 V 3B B B  8,000 V

NOTE * ESD class designator 1 has been replaced with designators 0, 1A, 1B, 1C and ESD class 3 designator has been replaced with 3A and 3B ESD class designators as of 24 March 2006. Devices not yet ESD re-classified may continue to be marked as class 1 (single triangle) or class 3 until testing determines the appropriate class. The class 1 single () may be used as a pin 1 identifier. The manufacturer may mark the part as indicated under “Optional Individual Part Marking” (see C.6.3.3.4 for testing requirements.) After 24 March 2006, (for newly qualified product-PI), the 0, 1A, 1B, 1C, 3A, and 3B designators shall be used with the appropriate marking.

Devices previously classified by test as category A may be designated as class 1 and devices classified as category B may be designated as class 2.

3.7.5.8.3 Certification mark. All devices acquired to and meeting the requirements of this specification, and the applicable associated device acquisition specification, and which are approved for listing on QML-38534, shall bear a certification mark as shown in table III.

TABLE III. Certification mark.

Acquisition document Class Certification mark
SMD All QML or Q for small devices
Non-SMD dated after this document K CK
H CH
G CG
E CE
D CD
Non-SMD dated prior to this document All CH or C for small devices

These certification marks, or the abbreviations "Q" or "C", shall not be used for any device acquired under contracts or orders which permit or require any changes to this specification except as allowed in 3.7.1. In the event that a lot fails to pass inspection, the manufacturer shall remove or obliterate the certification mark from the sample tested and also from the devices represented by the sample.

3.7.5.9 Marking option for controlled storage of Class H and G. Where devices are subjected to testing and screening in accordance with some portion of the quality assurance requirements and stored in controlled storage areas pending receipt of orders requiring conformance to the same or a different level, the inspection lot identification code shall be placed on the device package along with the other markings specified in 3.7.5 sufficient to assure identification of the material. As an alternative, if the microcircuits are stored together with sufficient data to assure traceability to processing and inspection records, all markings may be applied after completion of all inspection to the specified level.

3.8 Item requirements. The individual item requirements, including temperature range, for devices delivered under this specification shall be documented in the device acquisition specification.

* 3.8.1 Certification of conformance. Manufacturers, or distributors, who offer compliant devices described by this specification shall provide written certification, signed by the corporate officer who has management responsibility for the production of the devices, that the devices are built, tested, and handled in accordance with this specification and that they meet or exceed the performance requirements for the applicable class. The responsible corporate official may, by documented authorization, designate other responsible individuals to sign the certificate of conformance, but, the responsibility for conformity to the facts shall rest with the responsible corporate officer. The certificate shall include the following information:

a.
Manufacturer documentation:
(1)
Manufacturer’s name and address.
(2)
Customer’s or distributor’s name and address.
(3)
Acquisition order number.
(4)
Device type and Class level (SMD part numbers include both).
(5)
Date code.
(6)
Assembly plant location, if applicable.
(7)
Quantity of devices in shipment from manufacturer.
(8)
Statement certifying QML microcircuit conformance and traceability.
(9)
Signature and date.
b.
Distributor documentation for each distributor:
(1)
Distributor’s name and address.
(2)
Name and address of customer.
(3)
Quantity of devices in shipment.
(4)
Latest re-inspection date, if applicable.
(5)
Certification that this shipment is a part of the shipment covered by the manufacturer’s documentation.
(6)
Signature and date.
(7)
Contract number.
(8)
Part number.
(9)
Company or distributor from which parts were received.
(10)
Include all documentation from 3.8.1.a.
11

3.9 Recycled, recovered, or environmentally preferable materials. Recycled, recovered, or environmentally preferable materials should be used to the maximum extent possible, provided that the material meets or exceeds the operational and maintenance requirements, and promotes economically advantageous life cycle costs.

3.10 Workmanship. Devices shall be manufactured, processed, and verified to meet the performance requirements of this specification; and with the production practices, workmanship instructions, inspection and test procedures, and training aids prepared by the manufacturer in fulfillment of the baseline process flow.

  1. Rework and repair provisions. All rework and repair operations shall address the limitations and guidelines of Appendix E.

  2. VERIFICATION

4.1 General verification. All items shall meet all requirements of section 3. The manufacturer is responsible for verifying that product delivered to this specification meets the performance requirements as stated in section 3. The absence of any inspection requirements in the specification shall not relieve the contractor of the responsibility of ensuring that all products or supplies submitted to the Government for acceptance comply with all requirements of the contract. Sampling inspection, as part of manufacturing operations, is an acceptable practice to ascertain conformance to requirements, however, this does not authorize submission of known defective material, either indicated or actual, nor does it commit the Government to accept defective material.

4.2 Quality Management (QM) Program. Manufacturers of compliant devices to this specification shall have in place, or shall implement a quality management program, (see Appendix A). This system will be used to verify that devices meet the applicable performance requirements of section 3. This system will be verified by the qualifying activity, see 4.5 herein.

4.3 Baseline process flows. Manufacturers of compliant devices to this specification shall implement a baseline process flow detailing the processes, tests, inspections/monitors, material entry points, and the order in which operations are performed. Appendices C and E provide generic verifications, design, and construction criteria for use in developing these flows. The criteria and verifications identified in Appendices C and E may be modified as specified in 3.7.1 herein. The baseline flow will be verified by the qualifying activity, see 4.5 herein. The baseline process flow used to list a QML manufacturer as Class G or D may be one or more of its product manufacturing flows (e.g., travelers) that are representative of the manufacturer's processes and materials.

4.4 Quality management (QM) plan. The manufacturer's QM plan reflects the major elements of the quality management program. The QM plan shall be available at, and continually effective in, the manufacturer's plant.

4.4.1 Self-audit program. As part of the QM plan, the manufacturer shall establish an independent self-audit program under the direction of the quality organization to assess the effectiveness of the manufacturer's quality assurance system, and ability to meet specification requirements. The results of these audits shall be available.

4.4.2 Change control procedures. As part of the QM plan, the manufacturer shall have a system which shall include procedures for notification of change that affects form, fit, and function, to all applicable acquiring activities.

4.5 Verifications for QML listing. Manufacturers of devices furnished as compliant to this specification shall obtain a (QML) listing from the qualifying activity (DSCC). The qualifying activity is as defined in 6.4.39. QA approval of the manufacturers quality management program, baseline process flows, and technology capability will result in the manufacturers receiving a QML certification and QML listing. The manufacturing processes and materials portion of the baseline flow (see 4.3) are listed on the QML. The qualifying activity shall provide procedures to obtain a QML certification and QML listing. This verification will require an on-site visit to the manufacturer's facility.

4.5.1 Verification audit. During the audit, the qualifying activity shall verify the adequacy of the manufacturer's quality management program to achieve at least the same level of quality as could be achieved by complying with Appendix A. The qualifying activity shall also verify the adequacy of the manufacturer's baselined process flow, assessing the flow’s capability to produce products that can meet the generic performance verifications defined in Appendix C. The qualifying activity shall also evaluate the manufacturer’s capability for holding critical processes within established limits at specified points and continuously maintaining this capability during production. Qualifying activity approval of the manufacturer's quality management system and baseline process flow results in certification, and is a mandatory precondition to QML listing. The interval between on-site reaudits shall normally be two years. However, the qualifying activity will adjust this interval based on the manufacturer's TRB reports or retention reports (as applicable), customer feedback, self-audit, and other indications of the manufacturer's maintenance of the QML system.

4.5.1.1 On-site verification. The manufacturer shall make available to the qualifying activity all data needed to support the quality management program and procedures. Qualifying activity access to manufacturing and testing facilities and operators will be required. For first time qualification, on-site verifications will include all of the following areas: The manufacturer's quality management program, design program, substrate fabrication, assembly and test processes, and facility control. Deficiencies and concerns shall be noted by the audit team and provided during the exit critique.

4.5.1.2 Certification. After verification, and upon correction of all deficiencies and concerns, the qualifying activity shall issue a certificate and letter of certification to the manufacturer.

4.5.1.3 Classes E, G, H, and K process flow audits. The qualifying activity shall also verify the adequacy of the manufacturer's baselined process flow, assessing those flows' capability to produce a product that can meet the generic performance verifications and criteria as defined in Appendices C, and E as applicable.

4.5.1.4 Class D process flow audit. The qualifying activity shall verify that the manufacturer plans the manufacturing of products and ensures that process control is practiced in accordance with the manufacturer's defined quality management program. The manufacturer's processes and materials will also be compared to the manufacturer's selected baseline process flow (see 4.3) for verification.

4.5.2 Technology capability verification (qualification). In order to receive a QML listing, manufacturers shall demonstrate the capability of their processes and materials to produce products that meet the appropriate performance requirements. Manufacturers of emerging technologies or advanced technologies shall also perform technology characterization as part of their technology capability verification.

4.5.2.1 Class H and K QML listing. The manufacturer shall demonstrate the capability of products built using their baseline process flow to meet the specified performance requirements with an established reliability safety margin. An established reliability safety margin is shown by testing performed to more stringent stress levels than those specified for screening and conformance inspection and periodic inspection testing. The safety margin is specified in Appendix C as a qualification test flow. This demonstration shall be performed using data, either historical data or data specifically generated by testing, performed to meet the qualification test flow of Appendix C. In order to qualify advanced or emerging technologies, the manufacturer may need to modify the qualification test flow of Appendix C.

4.5.2.2 Class G and D QML listing. The manufacturer shall demonstrate the ability of their baseline to produce devices which will meet the performance requirements of the respective class. This demonstration shall consist of data, either historical or specifically generated to demonstrate this capability. This data shall be presented to the qualifying activity. It is the manufacturer's responsibility to provide enough information to demonstrate that their devices are capable of meeting the performance requirements.

4.5.2.3 Class E listing. Class E listing is granted upon qualification to one of the above levels. As Class E is based upon one of the above flows, users should carefully evaluate and approve exceptions taken to the H, K, or G baselined flow.

5.PACKAGING

  1. Packaging For acquisition purposes, the packaging requirements shall be as specified in the contract or order (see 6.2). When packaging of materiel is to be performed by DoD or in-house contractor personnel, these personnel need to contact the responsible packaging activity to ascertain packaging requirements. Packaging requirements are maintained by the Inventory Control Point’s packaging activity within the Military Service or Defense Agency, or within the Military Service’s system command. Packaging data retrieval is available from the managing Military Department’s or Defense Agency’s automated packaging files, CD-ROM products, or by contacting the responsible packaging activity.

  2. NOTES. (This section contains information of a general or explanatory nature that may be helpful, but is not mandatory.)

6.1 Intended use. Microcircuits conforming to this specification are intended for use for Government microcircuit applications and logistic purposes. For maximum cost effectiveness while maintaining essential quality and reliability requirements, it is recommended that, for initial acquisitions for original equipment complements, the device class appropriate to the need of the application be acquired. For acquisition of spare parts for logistic support, it is recommended that, unless otherwise specified, all devices be acquired to Class H requirements.

6.2 Acquisition requirements. Acquisition documents should specify the following:

a.
Title, number, and date of the specification.
b.
Packaging requirements (see 5.1).
c.
PIN.
d.
Title, number, and date of applicable device acquisition specification and identification of the originating design activity.
e.
Device finishes.
f.
Product assurance level (see 1.3).
g.
Change notification (i.e, point of contact).

6.2.1 Optional acquisition data. The following items are optional and are only applicable when specified in the acquisition documents.

a.
Requirements for failure analysis.
b.
Special requirements.
c.
Disposition of samples.
d.
Requirement for qualification or conformance inspection (CI) and periodic inspection (PI) plan.
e.
Requirements for resistance of soldering heat.

6.3 Qualification. With respect to products requiring qualification, awards will be made only for products which are, at the time of award of contract, qualified for inclusion in Qualified Manufacturer’s List, QML-38534, whether or not such manufacturers have actually been listed by that date. The attention of the contractors is called to these requirements, and manufacturers are urged to arrange to have the products that they propose to offer to the Federal Government tested for qualification in order that they may be eligible to be awarded contracts or orders for the products covered by this specification. Information pertaining to qualification of products may be obtained from Defense Supply Center, Columbus, ATTN: DSCC-VQ, P.O. Box 3990, Columbus, Ohio 43218-3990.

6.4 Terms, definitions, methods, symbols, and abbreviations. For the purposes of this specification, the terms, definitions, methods, and symbols of MIL-STD-883, MIL-STD-750, MIL-HDBK-1331, and those contained herein apply and may be used in applicable device acquisition specifications wherever they are pertinent. The preparing activity will interpret these definitions for use wherever pertinent. To further describe a particular type of device, additional modifiers may be prefixed to the type name.

6.4.1 Acquiring activity. The organizational element of the Government which contracts for articles, supplies, or services may authorize a contractor or subcontractor to be it’s agent. When this organizational element of the Government has given specific written authorization to a contractor or subcontractor to serve as agent, the agent will not have the authority to grant waivers, deviations, or exceptions to this specification unless specific written authorization to do so has also been given by the Government organization which is the preparing activity, or qualifying activity. In the absence of a specific acquiring activity, the acquiring activity will be an organization within the supplier's company that is independent of the group responsible for device design, process development or screening, or may be an independent organization outside the supplier's company.

6.4.2 Acquisition documents. Acquisition documents consist of the acquisition order or contract, SMD, or specifications as applicable. The preferred device acquisition document for compliant devices is the SMD.

6.4.3 Audit checklist. A form listing specific items which are to be audited.

6.4.4 Baseline index of documents. The documents which establish the baseline for a given device manufacturer in satisfying the requirements of certification in accordance with this specification.

6.4.5 Baseline process flow. The manufacturer's baseline process flow is that flow of manufacturing processes, inspection and test processes, and material entry points into the flow that defines the manufacturer's specific technology flow. This flow begins with incoming material, goes through all manufacturing processes including in-processes monitors, completed device screening, and final acceptance verification of the product. The manufacturing processes and materials portion of the baseline process flow are the portions of the baseline that are listed on the QML. The total baseline flow is certified under QML certification.

6.4.6 Burn-in lot. The burn-in lot is used for purposes of percent defective allowable (PDA) or pattern failure accountability (or both).

6.4.7 Compliant devices. Compliant devices are those that meet, without exception, the performance requirements of this specification, as well as the requirements of the device acquisition specification (e.g., SMD).

6.4.8 Compound bond. A bond placed on top of another bond, wire, ribbon, or other conductor not integral to the substrate.

6.4.9 Cpk. Cpk is a capability index that reflects process centering and variability with respect to specification requirements. The higher the Cpk number, the more capable the process.

6.4.10 Critical control parameters. Critical control parameters are parameters whose variability most affect a design, process, or material.

6.4.11 Customer compliance matrix (CCM). The CCM documents the relationship between each customer requirement for a specific product, and the method used to assure that customer requirements will be achieved. The CCM will document the correlation between alternative methods used by the manufacturer and the verification methods of Appendix C including any changes, and justification for any changes, made to the design requirements.

6.4.12 Delta () limits. Delta limits, maximum changes in specified parameter readings which permit device acceptance on specified tests, will be based on comparison of present measurements with specified previous measurements.

NOTE: When expressed as a percentage value, they will be calculated as a proportion of previously measured values.

6.4.13 Design activity. The organization that specifies the device design parameters, layout, materials of construction, elements, sources, etc.

6.4.14 Design analysis. Design analysis is an evaluation of critical performance parameters or design data to determine a design/process/material combination that guarantees compliance to a specific requirement without testing.

6.4.15 Design of experiments (DOE). DOE is a formal plan for conducting experiments which may be used to make achievement of a specific requirement less sensitive to process/material variability. Typical examples include: Taguchi, Central Composite Design, and factorial designs.

6.4.16 Design robustness. Design robustness is the insensitivity of a design to uncontrollable variation so that it does not significantly affect the product or process once it is in routine operation.

6.4.17 Electrostatic discharge sensitivity (ESDS). The level of susceptibility of devices to damage by static electricity, found by classification testing, is used as the basis for assigning an ESDS class.

6.4.18 Element. A constituent of a device that contributes directly to its operation (e.g., chip resistor, capacitor, diode, transistor, integrated circuit, surface acoustic wave (SAW), substrate, package, etc., incorporated into a device), is an element of the device.

6.4.19 Film microcircuit. A microcircuit consisting exclusively of elements which are films formed in-situ upon or within an insulating substrate.

6.4.20 Final seal. After manufacturing operations which complete the enclosure of a device following all allowable rework so that further internal processing cannot be performed, and for the purpose of seal date code identification and (CI) and (PI) testing, the final seal date code is used.

6.4.21 Flip chip bonding. Direct attachment of a bare die face down with the surface of the die being placed in direct contact with the substrate.

6.4.22 Hybrid microcircuit. A microcircuit that contains two or more of a single type, or a combination of the following types of elements with at least one of the elements being active.

a. Film microcircuit (6.4.19).
b. Monolithic microcircuit (6.4.30).
c. Semiconductor element (6.4.42).
d. Passive chip or printed or deposited substrate elements (6.4.35).

6.4.23 Hybrid microcircuit type (device type). The term "hybrid microcircuit type" (device type) refers to a single specific device configuration. All samples of a hybrid microcircuit type are electrically and functionally interchangeable with each other; have the same electrical and environmental test limits; and use the same package, materials, piece parts, and assembly process.

6.4.24 Inspection lots. Inspection lots consist of a quantity of devices of a single device type (required for group A) or several different circuit types (allowed for groups B, C3, and D tests only) in a single package type and lead finish submitted at one time for final acceptance. All devices within each inspection lot will be finally sealed in the same period not exceeding 13 weeks.

6.4.25 Inspection lot formation. Inspection lot formation is required if the inspection lot is to be formally accepted by the lot related CI and PI testing of this specification or method 5005 of MIL-STD-883. If the in-line process verification testing alternative is used, inspection lot formation is not required.

6.4.26 Integral substrate/package. An integral substrate/package (ISP) element is a unit where the base substrate becomes an integral part of the finished package.

6.4.27 Known good die (KGD). A bare die of the same quality and reliability level as an equivalent packaged die.

6.4.28 Microelectronics. That area of electronic technology associated with, or applied to, the realization of electronic systems from extremely small electronic parts or elements.

6.4.29 Microcircuit. A small active circuit having a high equivalent circuit element density, which is considered as a single part composed of interconnected elements on one or more substrates to perform an electronic circuit function. (This excludes printed wiring boards, circuit cards assemblies, and modules composed exclusively of discrete electronic parts mounted on a non-ceramic substrate or board.)

6.4.30 Monolithic microcircuit. A microcircuit (active) consisting exclusively of elements formed in-situ or within a single semiconductor substrate with at least one of the elements formed within the substrate.

6.4.31 Multichip module (MCM). A hybrid microcircuit that contains two or more microcircuits, each having greater than 100,000 junctions.

6.4.32 Non-continuous production. Non-continuous production occurs when devices are held by the manufacturer, with no additional assembly work performed, for more than 30 days.

6.4.33 Off-line reliability assessment. Off-line reliability assessment is the use of statistically based methods to monitor reliability data. This data may be used to control future adjustments to the design/process/material.

6.4.34 Package type. Packages which have the same case outline, configuration, materials (including bonding wire and die attach), piece parts (excluding preforms which differ only in size), and assembly processes.

6.4.35 Passive element. Planar resistors, capacitors, inductors and patterned substrates (single and multilayer), and nonplanar chip resistors, capacitors, inductors, and transformers.

6.4.36 Percent defective allowable (PDA). PDA is the maximum observed percent defective which will permit the lot to be accepted after the specified 100 percent test.

6.4.37 Periodic capability certification. Periodic capability certification is the calibration and certification of equipment or process steps for an individual parameter(s) such that it can be used as an alternative method to detection testing.

6.4.38 Production lot. A production lot consists of a device type manufactured from the same basic raw materials on the same production line, processed under the same manufacturing techniques and controls using the same type of equipment. The production lot is formed at, or prior to, device kit preparation (i.e., release to manufacturing). In addition for Class K devices, all materials will be from the same incoming inspection lot for each element. If necessary, rework requirements may be satisfied with materials from a different incoming inspection lot.

6.4.39 Qualifying activity. The qualifying activity is the organizational element of the Government that grants certification and QML status. For the purpose of this document the qualifying activity will be DSCC.

6.4.40 Quality function deployment (QFD). QFD is a technique for analysis of the interrelationships between different requirements. These interrelationships are evaluated in a decision making matrix developed through concurrent engineering.

6.4.41 Self-audit. The performance of periodic surveys and reviews by the device manufacturer's designated personnel to evaluate compliance to defense specifications, customer and internal requirements, and to evaluate the companies overall quality programs.

6.4.42 Semiconductor element. Active semiconductor elements other than microcircuits (e.g. transistors, diodes, silicon controlled rectifiers (SCRs), etc.)

* 6.4.43 Similar devices. For the purpose of PI, one device type is similar to another when it meets all the following conditions:

a.
Designed and manufactured identically using the same or fewer fabrication and assembly processes and materials.
b.
Assembled with the same, or fewer, active and passive elements.
c.
Subjected to the same screening except electrical testing.
d.
Designed to generate the same, or fewer, functions (magnitude of functional attributes such as voltage, current, duty cycle, frequency, etc. may vary) using the same, or less functional, circuitry and element type (e.g., a 4-bit A/D converter is similar to a 10-bit A/D converter, but not vice versa).

6.4.44 Standard evaluation circuit (SEC). An SEC is a test coupon/device that is representative of actual product. The SEC may be actual product or may be specifically designed to evaluate a particular process. The SEC should be processed using the same processes, equipment, and type of material as the product it represents.

6.4.45 Statistical process control (SPC). SPC utilizes statistical methods to monitor parameters (i.e., process or product) in order to provide early warning of a process fluctuation or shift. Appropriate actions should be taken to maintain a state of statistical control. SPC may be used as a tool to facilitate process improvement.

6.4.46 Tape automated bonding (TAB). The attachment of a bare die to a very fine pitch lead frame.

6.4.47 Technology capability. Technology reliability and performance limits, normally determined through tests known to reveal failure modes/mechanisms; and through testing of critical characteristics of the technology that are known to impact performance and reliability. Testing performed to more severe test conditions than those used for screening and final acceptance testing of the device, or test-to-failure testing, are examples of testing performed specifically to determine a technology's capability. The data may also be produced through other means for mature technologies, e.g., production test data taken over time, design or product qualification test data accumulated for a specific program or customer, etc.

6.4.48 Wafer lots. Wafer lots consist of microcircuit and semiconductor wafers formed into lots at the start of wafer fabrication for homogeneous processing as a group. Each lot is assigned a unique identifier or code to provide traceability and maintain lot integrity throughout the fabrication process. Wafer lot processing as a homogeneous group is accomplished by any of the following procedures, providing process schedules and controls are sufficiently maintained, to assure identical processing in accordance with process instructions of all wafers in the lot:

a.
Batch processing of all wafers in the wafer lot through the same machine process steps simultaneously.
b.
Continuous or sequential processing (wafer by wafer or batch portions of wafer lot) of all wafers through the same machine or process steps.
c.
Parallel processing of portions of the wafer lot through multiple machines or process stations on the same certified line, provided statistical quality control (SQC) assures and demonstrates correlation between stations and separately processed portions of the wafer lot.

6.5 Destructive tests. All mechanical or environmental tests (other than those listed in 6.6), will be considered destructive initially, but may subsequently be considered nondestructive upon accumulation of sufficient data to indicate that the test is nondestructive. The accumulation of data from five repetitions of the specified tests on the same sample of product, without evidence of cumulative degradation or failure to pass the specified test requirements in any device in the sample, is considered sufficient evidence that the test is nondestructive. Any test specified as a 100 percent screen will be considered nondestructive for the stress level and duration or number of cycles applied as a screen. Unless otherwise specified, or subsequently determined to be otherwise, the following MIL-STD-883 test methods will be initially classified as destructive.

Internal visual and mechanical (method 2014). 1/ Die shear strength test. Bond strength (method 2011). Total dose radiation hardness test. Solderability (except for lead finish A). ESDS test. Moisture resistance. Lid torque test. Lead integrity (method 2004). Adhesion of lead finish. Salt atmosphere. Vibration, variable frequency.SEM inspection for metallization. Internal water vapor test. 2/ Steady state life test (accelerated). Pin grid package lead pull (method 2028). Single Event Upset (SEE). Dose rate upset. Neutron testing.

6.6 Nondestructive tests. Unless otherwise specified, the following tests are classified as nondestructive:

Barometric pressure. Radiography. Steady-state life (see note). Particle impact noise detection (PIND). Intermittent life (see note). Physical dimensions. Hermeticity. Nondestructive bond pull test (method 2023). External visual. Resistance to solvents. Internal visual (preseal). Solderability (for lead finish A only). Burn-in screen (see note).

NOTE: When the test temperature exceeds the maximum specified junction temperature for the device (including maximum specified for operation or test), these tests are considered destructive unless otherwise specified.

6.7 Environmentally preferable material. Environmentally preferable materials should be used to the maximum extent possible to meet the requirements of this specification. As of the dating of this document, the U.S. Environmental Protection Agency (EPA) is focusing efforts on reducing 31 priority chemicals. The list of chemicals and additional information is available on their website at http://www.epa.gov/osw/hazard/wastemin/priority.htm . Included in the list of 31 priority chemicals are cadmium, lead, and mercury. Use of these materials should be minimized or eliminated unless needed to meet the requirements specified herein (see Section 3)

6.8 Subject term (key word) listing.

Class E Qualified Manufacturers List (QML) Class G Qualification Class H Statistical Process Control (SPC) Class K Technology Review Board (TRB) Multichip module (MCM)

* 1/ This inspection is nondestructive when performed at preseal visual.

2/ Test samples may be delidded/relidded in accordance with Appendix E making these devices eligible for shipment. The manufacturer will ensure that proper precautions for handling, testing, and shipping have been taken by the RGA test laboratory.

19 6.9 List of acronyms.

ATT -Authorization to test
CCM -Customer compliance matrix
CI -Conformance inspection
DOE -Design of experiments
DRC -Design rules check
ERC -Electrical rules check
ESD -Electrostatic discharge
ESDS -Electrostatic discharge sensitivity
IC -Integrated circuit
IR -Insulation resistance
ISP -Integral substrate package
KGD -Known good die
LTPD -Lot tolerance percent defective
MCM -Multichip module
MIS -Metal insulation semiconductor
PDA -Percent defective allowable
PI -Periodic inspection
PIND -Particle impact noise detection
PPM -Parts per million
QA -Qualifying activity
QFD -Quality function deployment
QM -Quality management
QML -Qualified manufacturers list
QPL -Qualified product list
RF -Radio frequency
RGA -Residual gas analysis
RHA -Radiation hardness assurance
SAW -Surface acoustic wave
SCR -Silicon controlled rectifier
SEC -Standard evaluation circuit
SEM -Scanning electron microscope
SEU -Single event upset
SMD -Standard microcircuit drawing
SPC -Statistical process control
SQC -Statistical quality control
TAB -Tape automated bonding
TCR -Temperature coefficient of resistance
TRB -Technology review board

6.10 Change from previous issue. The margins of this specification are marked with asterisks to indicate where changes from the previous issue were made. This was done as a convenience only and the Government assumes no liability whatsoever for any inaccuracies in these notations. Bidders and contractors are cautioned to evaluate the requirements of this document based on the entire content irrespective of the marginal notations and relationship to the last previous issue.

QUALITY MANAGEMENT PROGRAM

A.1 SCOPE

A.1.1 Scope. This appendix is intended to be used by manufacturers in developing their Quality Management (QM) Program for implementation of verification and preventative techniques to assure product quality and reliability. The QM program should demonstrate the methods used to assure conformance to the applicable performance requirements, including design, manufacturing, and verification. This appendix is a mandatory part of the specification. The information contained herein is intended for compliance. Manufacturers may demonstrate a QM system that achieves at least the same level of quality as could be achieved by complying with this appendix.

A.1.2 Technology Review Board (TRB) option. Manufacturers using this option will develop a TRB system and have it approved by the qualifying activity (QA). This option allows a manufacturer to migrate from the conventional design and construction requirements and detection tests (e.g., screening, conformance inspection and periodic inspection, and qualification) of this document to alternative prevention methods with sufficient documentation. Alternative prevention methods include statistical process control (SPC), periodic process capability certification, design analysis, design robustness, off-line reliability assessment, etc. The documentation will show that the alternative methods ensure product compliance to the minimum quality and reliability requirements of this specification without performing the detection tests or adhering to the specific design and construction requirements.

Using this specification as a baseline, the manufacturer develops a QM program, which encompasses the entire manufacturing line being validated. This line is controlled by the TRB, which can modify, substitute, or delete detection tests as appropriate for the technology or process. Techniques such as statistical process control (SPC) and design of experiments may be employed to ascertain process capabilities. Once alternative techniques are developed, periodic assessment is required to ensure that the processes continue to meet the required capabilities. The QM program also requires a program of continuous improvement to reduce overall product cost and improve quality and reliability. A customer compliance matrix (CCM) is generated for each product as part of the conversion of customer requirements process, and documents the means by which the end-item performance requirements will be met.

A.1.3 Description of appendix A. This appendix describes a QM program to demonstrate and assure that design, manufacture, inspection, and testing of devices are adequate to ensure compliance with the applicable performance requirements and quality standards for each device manufactured. This appendix also describes an optional TRB system. When used, the TRB system will be certified by the QA.

A.1 SCOPE 21

A.2 APPLICABLE DOCUMENTS 21

A.3 QUALITY SYSTEM REQUIREMENTS 22

A.2 APPLICABLE DOCUMENTS

A.2.1 General. The documents listed in this section are specified in section A.3 of this specification. This section

*

does not include documents cited in other sections of this specification or recommended for additional information or as examples. While every effort has been made to ensure the completeness of this list, document users are cautioned that they must meet all specified requirements of documents cited in section A.3 of this specification, whether or not they are listed.

A.2.2 Government documents.

A.2.2.1 Specifications, standards, and handbooks. The following specifications, standards, and handbooks form a part of this specification to the extent specified herein. Unless otherwise specified, the issues of these documents are those cited in the solicitation or contract.

DEPARTMENT OF DEFENSE STANDARDS

MIL-STD-883 -Test Method Standard Microcircuits

(Copies of this document are available online at http://assist.daps.dla.mil/quicksearch/ or from the Standardization Document Order Desk, 700 Robbins Avenue, Building 4D, Philadelphia, PA 19111-5094.)

A.2.3 Non-Government publications. The following documents form a part of this document to the extent specified herein. Unless otherwise specified, the issues of these documents are those cited in the solicitation or contract.

AMERICAN NATIONAL STANDARDS INSTITUTE (ANSI)

ANSI/NCSL Z540.3 -Calibration Laboratories and Measuring and Test Equipment - General Requirements.

(Copies of these documents are available online at http://www.ansi.org/ or from American National Standards Institute, Incorporated, 25 West 43rd Street, 4th Fl. New York, NY 10036.)

INTERNATIONAL ORGANIZATION FOR STANDARDIZATION (ISO) STANDARDS

ISO 14644-1 - Cleanrooms and Associated Controlled Environments - Part 1: Classification of Air Cleanliness - First Edition. ISO 14644-2 - Cleanrooms and Associated Controlled Environments – Part 2: Specifications for Testing and Monitoring to Prove Continued Compliance with ISO 14644-1 – First Edition.

(Applications for copies of ISO Standards should be addressed to the Institute of Environmental Sciences and Technology (IEST), 940 East Northwest Highway, Mount Prospect, IL 60056-3444. Copies of these documents are also available online at http://www.iso.org/iso/home.htm

A.2.4 Order of precedence. Unless otherwise noted herein or in the contract, in the event of a conflict between the text of this document and the references cited herein, the text of this document takes precedence. Nothing in this document, however, supersedes applicable laws and regulations unless a specific exemption has been obtained.

A.3 QUALITY SYSTEM REQUIREMENTS

A.3.1 Management responsibility. Management is responsible to ensure that the quality system is implemented and successful in fulfilling its goals.

A.3.2 Quality system.

A.3.2.1 QM plan . The QM plan should consist of a volume or portfolio, or series of documents, which is adequate to assure the quality of the device. This section is a guide in developing these documents. A summary of the manufacturer's approach that makes specific reference to the manufacturer's actual procedures is also a method of documenting the product assurance program plan. The documents authorizing and implementing changes should be maintained. Any difference in treatment of different product lines within a plant should be stated and explained in the QM plan, or separate QM plan's prepared for such different lines. The QM plan should contain, as a minimum, documentation covering the items detailed herein, including all TRB information when applicable.

A.3.2.1.1 Functional block organization chart. This chart should show, in functional block-diagram form, the lines of authority and responsibility (both line and staff) for origination, approval, and implementation of all aspects of the product assurance program. Names of the incumbents are not necessary in this chart.

A.3.2.1.2 Baseline process flowchart. The flow (see 4.3 herein) should identify all major documents pertaining to the inspection of materials, the production processes, the production environments, and production controls which were used. The documents will be identified by name and number. Changes approved thereafter will be treated in accordance with the approved document change control procedures in A.3.5 herein.

A.3.2.1.3 Design guidelines. Design guidelines used to design or verify the design of microcircuits intended to be submitted for acceptance inspection (see A.3.4 herein).

A.3.2.1.4 Travelers. Travelers are used to track materials and products during production and testing.

A.3.2.1.5 Baseline index of documents. A list of the specification titles, document numbers, and revisions which make up the QML program. This is the baseline the manufacturer is certified to at the certification audit.

A.3.2.1.6 Manufacturer's self-audit. The manufacturer's self-audit program should identify key review areas, their frequency of audit, and the corrective action system to be employed when variations from approved procedures or specification requirements are identified.

* A.3.2.2 Design, processing, manufacturing, and testing instructions. The manufacturer should maintain documentation and instructions covering, as a minimum, the areas identified below. Procedures should exist which will control the processes and materials which affect the quality of the devices. The following is a guideline for developing these procedures; it is the manufacturer’s responsibility to develop necessary procedures to adequately control the quality of their devices. These areas will normally be addressed by the manufacturer's standard drawings, specifications, process instructions, and other established manufacturing practices.

a.
Quality control operations (A.3.2).
b.
Material handling (A.3.2.3).
c.
Design, processing, rework, tool and materials standards, and instructions (A.3.2.3).
d.
Conversion of customer requirements into manufacturer’s internal instructions (A.3.3).
e.
Change control of design, process, and documentation (A.3.5).
f.
Inspection of incoming materials, applicable utilities, and work in-process (A.3.6).
g.
Incoming, in-process, and outgoing inventory control (A.3.6.2).
h.
Performance verification operations (including test methods) (A.3.10.3).
i.
Tool, gauge, and test equipment maintenance and calibration (A.3.11).
j.
Failure and defect analysis and data feedback (A.3.13).
k.
Failure corrective action and evaluation (A.3.14.1).
l.
Control of non-conforming materials (A.3.14).
m.
ESD handling control program (A.3.15.1).
n.
Cleanliness and atmosphere control in work areas (A.3.15.2)
o.
Personnel training and testing (A.3.18)
p.
Packaging

A.3.2.3 Design, processing, manufacturing equipment, and materials instructions. Procedures should address device design, processing, manufacturing equipment, and materials described in drawings, standards, specifications, or other appropriate media covering the requirements and tolerances for all aspects of design and manufacturing including equipment test and prove-in, materials acquisition and handling, design verification testing and processing steps. As a minimum, detailed instructions should exist for the following items, and be adequate to assure that quantitative controls are exercised, that tolerances or limits of control are sufficiently tight to assure a reproducible high quality product, and that process and inspection records reflect the results actually achieved:

a.
Incoming materials control (substrates, packages, active and passive chips or elements, wire, water
purification, etc.).
b.
Substrate fabrication operations.
c.
Die, element, or substrate attachment.
d.
Interconnect (e.g., wire bonding).
e.
Rework.
f.
Sealing.

A.3.2.4 Quality improvement program. The manufacturer should develop and implement a program for continuous quality and reliability improvement of processes, including corrective and preventative action.

A.3.2.5 QM program (TRB option).

A.3.2.5.1 General. A QM program should be developed and implemented by the manufacturer, documented in the QM plan, and controlled by the TRB. The QM program should ensure and demonstrate compliance to the minimum performance requirements of this specification and outline a program for continuous improvement. A device manufactured under this option should, as a minimum, be equivalent in form, fit, function, quality, and reliability to a device manufactured in accordance with Appendix C.

A.3.2.5.2 Implementation. Appendix A should be used as a baseline for the QM program. From that baseline, this option may be implemented incrementally by process, or by product line. After satisfying the minimum requirements for validation, a manufacturer may implement alternative methods for addressing the requirements contained in the baselined (Appendix C) flow while performing detection testing in accordance with Appendix C on the remainder of the processes. The minimum requirements for the QM program which should be reviewed during validation are as follows:

a.
A TRB.
b.
A QM plan.
c.
Process/material confirmation and capability achievement procedures including technology qualification test flows.

A.3.2.5.3 TRB. The manufacturer should establish a TRB and develop the necessary procedures to govern its’ operation. The manufacturer will be responsible for ensuring that the actions of the TRB result in products that meet all customer and performance requirements. As a minimum, these operating procedures should address the following:

a. Record retention.
b. Minimum organizational membership.
c. TRB charter.
d. Responsibilities.
e. System for recovery of data used in TRB decisions.
f. TRB meeting structure.
g. Decision making/approval procedures.
h. Distribution of TRB minutes.

A.3.2.5.3.1 TRB organizational structure. The following functions, as a minimum, should be represented on the manufacturer's TRB: Design, material procurement, assembly, test, reliability, and quality assurance. Other personnel with decision making responsibilities affecting the product, its processes, or its production facility should participate as required. The manufacturer should identify those organizations that shall be represented on the TRB. A responsible technical representative within each of these organizations should be identified to the qualifying activity.

A.3.2.5.3.2 TRB responsibilities. The TRB should oversee the manufacturer's qualified line, including the processes and materials that continue to be controlled under Appendix C. The TRB should be responsible for the following:

a.
Developing, monitoring, maintaining and controlling the QM program and QM plan, and all supporting documents and data.
b.
Managing QM plan implementation.
c.
Monitoring and controlling the self audit program.
d.
Managing and maintaining the quality improvement programs.
e.
Overseeing the process/material confirmation and change control activities.
f.
Overseeing the initial process/materials certification/qualification and subsequent maintenance thereof.
g.
Reviewing and analyzing data (e.g., Cpk data, defect data, rate of assembly failures, rate of failure returns, and failure analysis results) and taking appropriate action to improve processes. When performance or reliability of shipped microcircuits is called into question, the TRB should provide quick evaluation, appropriate corrective action, and prompt notification of the problem to the qualifying activity.
h.
Maintaining records of conditions found and actions taken.
i.
Reporting status of the QM program to the qualifying activity.
j.
Approving alternative methods that modify, substitute, or delete existing methods (e.g., inspection, testing, screening, CI and PI, or design/construction procedures of this specification).

A.3.2.5.4 Alternative method correlation, confirmation, and implementation procedures. This is the approach by which inspection/testing/screening/CI and PI or design/construction requirements within this specification should be modified, substituted, or deleted. The manufacturer should develop methods for confirmation and maintenance of process and material capability and for verification of design capability under this option. Test methods and design/construction requirements of this specification are intended to address worst case application environments for military product. Any alternate method used in lieu of testing, screening, or design/construction requirements should be approved by the manufacturer's TRB and should document the specific areas of correlation between the alternative method and the specification requirement it replaces (i.e., how it meets the specific application environments of this specification) or if the requirement does not apply to a particular technology (see 3.7.1). Alternative methods may be used by non-TRB companies with qualifying activity approval.

A.3.2.5.4.1 Correlation, confirmation, and implementation. The following is a typical flow.

a.
Identify candidate requirements of this specification for alternative method.
b.
Using data, identify any correlations between the candidate requirement and potential alternative method(s).
c.
Where correlations exist, develop and document alternative method(s).
d.
Accumulate data off-line to confirm the capability of the alternative method(s) to assure meeting the requirement.
e.
Submit alternative method(s) for TRB approval.
f.
Implement the alternative method(s) as directed by the TRB.

NOTE: If an alternative method is determined to no longer assure meeting the requirements of this

specification, the product should be inspected/screened/tested in accordance with the previous TRB approved

baseline, until the required capability is achieved.

A.3.2.5.4.2 Alternative methods. For each candidate process under this option, the manufacturer should specify and implement alternative methods that should be used to maintain each process/material capability such that it continues to meet the minimum performance requirements of this specification. Examples of alternative methods are design analysis, Design of experiment (DOE), off-line reliability assessment, periodic capability certification, SPC, embedded machine controls, manufacturer derived test methods, automated methods with feedback controls, etc.

A.3.2.5.4.2.1 Standard evaluation circuits (SEC). A manufacturer may utilize SEC's to evaluate the capability of alternative methods and monitor product performance. The SEC design should be approved by the TRB and controlled through the manufacturer's documentation system. SEC documentation should include construction, dimensions, intended application (i.e., the processes it evaluates), and minimum acceptable limits (e.g., mechanical or electrical values).

A.3.2.5.4.2.2 Periodic assessment of alternative methods. Alternative methods should be periodically assessed, as necessary (determined and documented by the TRB), to assure their continued effectiveness. This periodic assessment is a tool for the TRB to aid in monitoring and maintaining product quality. Methods for periodic assessment may include stress-to-failure tests, failure mode analysis, analytic prediction modeling, etc. If an alternative method is determined to no longer meet the initial requirement (i.e., Appendix C), the manufacturer should implement the appropriate previous TRB approved baselined inspection/screening/testing/step.

A.3.2.5.5 TRB records. Records of the TRB's membership, deliberations, and decisions should be maintained; dissenting opinions should be recorded. As a minimum, TRB minutes and associated data should be maintained for 5 years.

A.3.3 Conversion of customer requirements. The manufacturer should develop a system by which customer requirements and all requirements of this specification, are converted into working instructions. The results of this review, including alternate methods, shall be documented and made available to the customer upon request. As part of the conversion of customer requirements process for TRB companies, the manufacturer should generate a Customer compliance matrix (CCM) for each product that documents the means by which the end-item quality, reliability, and customer/specification requirements should be met and the next level assembly environment should be considered. Required process capabilities and specific internal documents used by the manufacturer to control, monitor, or assess processes and materials should be specified in the CCM. The CCM should be approved by the TRB or procuring activity when specified by contract. The CCM should be kept current.

A.3.4 Design requirements. The manufacturer should develop an approach for device design when applicable. The design approach should include the following:

a.
Design guidelines/handbook. The design guidelines/handbook should define the manufacturer's qualified processes and materials as they relate to the design including the interactions between the application environment and affected materials/processes. Any design requirement not in accordance with this specification should be recorded. These guidelines should form the basis for all designs to be manufactured under the QM program.
b.
Design models/procedures for worst case temperature and electrical extremes.
c.
Rules check procedures, covering the following areas, as applicable:
(1)
Design rules check (DRC) - geometric and physical.
(2)
Electrical rules check (ERC) - shorts and connectivity.
(3)
Reliability rules - Electromigration and current density, IR drops, latchup, single event upset (SEU), hot electrons, ESD, burn-out, or backgating, as applicable.
(4)
RHA rules - applicable radiation environments.
d.
Thermal design verification procedures.
e.
Reliability design verification procedures. Worst case circuit design.
f.
Package design performance verification procedures.
g.
Feedback loop from design/material/process development activities into design guidelines.
h.
Next level assembly environment (e.g. hand solder device or wave solder device to the next level assembly).

A.3.4.1 Changes in design, materials, or processing. Records should document the change, the date the change is made, traceability of the first change through processing and testing, and justification for the change.

A.3.5 Change control. Procedures should address the methods and procedures for implementation and control of changes in device design, processing, and documentation; and for making change information available when applicable. This includes changes made for cost reduction and continuous improvement. The manufacturer should assure that the correct revisions of all documents are available to the appropriate people.

A.3.5.1 Configuration control. Changes are categorized into three classifications.

Class Description

I Major changes II Minor changes III Editorial changes

All changes in design, substitution of materials or processes, or modifications to baselined documentation (i.e., all class I, II, and III changes) for any hybrid microcircuit should be processed in accordance with established change control procedures.

a.
Class I: Class I changes are those changes that may affect the performance, quality, reliability, radiation (when specified), or interchangeability of the product (see Table E-I of Appendix E for representative examples of major changes). Acquiring activity approval shall be required if specified by contract.
b.
Class II changes are all changes except class I and class III changes (e.g., conformance to the performance specification revision, vendor metallization mask change, package height change within the envelope tolerances of the detail drawing, etc.). Control procedures, records, and rationale for the changes should be kept available for review.
c.
Class III: Class III, editorial changes, are those changes to documentation necessary to ensure the understanding and execution of the affected document (e.g., format changes, spelling, word identity, etc.). Change documentation history for class III type changes should be kept available for on-site review.

A.3.6 Control and acceptance of incoming materials.

A.3.6.1 Supplier control program. The capability of supplied material may be validated through a supplier certification system. This system selects and monitors suppliers in order to guarantee that the supplied material should meet and maintain required capability levels (e.g., Cpk, ppm, etc.). Supplier certification is granted based on consistent proof that their product conforms to the specification requirements, through implementation of SPC and quality control systems analogous to those herein. Conventional element evaluation is not required when the elements are purchased from certified suppliers. Material may be procured from vendors who are not certified; such material should be evaluated in accordance with Appendix C of this specification or alternative methods approved by the TRB or the QA. The following are the minimum documentation requirements for each supplier controlled under this program:

a.
A description of the vendor quality assurance plan with status update reports as required by the TRB or QA.
b.
A description of the procedure used by the vendor for notification of changes in materials or processes.
c.
A quality assurance procedure that can be performed by either the vendor or the manufacturer, or a combination of the two.

A.3.6.2 Incoming, in-process, and outgoing inventory control. Procedures should address methods and procedures which are used to control storage and handling of incoming materials, work in-process, and warehoused and outgoing product in order to achieve such factors as age control of limited-life materials; and prevent inadvertent mixing of conforming and nonconforming materials, work, or finished product. Each area should maintain identity of work in process.

A.3.7 Customer supplied material. A system should be in place to track and control all customer supplied material.

A.3.8 Traceability.

A.3.8.1 Material and element traceability. Traceability for each device, all adhesives and coatings shall be traceable to a material production lot, inspection lot, or other specified grouping. All elements and materials used for Classes G, H, and K will be traceable to the element manufacturer’s production lot. Traceability for die for Class G, H, K , and parts identified as radiation hardened, is to the wafer lot. For Class K, traceability shall be from the device serial number to specific wafer lot.

A.3.8.2 Process/test traceability. Each device, or each group of devices, which have been fabricated as a common batch, will be identifiable through means of production travelers or similar documentation such that the complete manufacturing history, including rework, will be recorded. The records should include, as a minimum, the performance date of all identified production process steps, the specification, number of production process steps, and the identification of the operator performing the process steps. The records will be retained in accordance with

A.3.16.

*
A.3.8.3 Production lot traceability. The manufacturer will maintain production lot traceability. In addition for Class K devices, all materials will be from the same incoming inspection lot for each element. If necessary, rework requirements may be satisfied with materials from a different incoming inspection lot, and shall be traceable to the device serial number.
A.3.8.4 Country of manufacture. The manufacturer shall maintain traceability to the location(s) where the baselined assembly processes were performed. A.3.8.5 Production lot identification. Records should identify when each production or inspection lot was processed through each area. These records should identify, for each production or performance verification lot (as applicable) of finished product, test/inspections performed and results, device serial numbers, date of completion, lot identification, device acquisition specification, lot disposition, and the number of devices at seal, shipped, and stocked. A.3.9 Process control. The manufacturer should define all processes and methods used to assure the capability and consistency of the processes. As a minimum, all critical process parameters should be defined. The manufacturer should define process monitors as appropriate. A.3.9.1 Process and materials controls. Records should cover the implementation of tools such as control charts (e.g., X and R charts) or other means of indication of the degree of control achieved at the points in the material, utility, and assembly process flow documented in the manufacturing instructions. Records should also indicate the action taken when each out-of-control condition is observed, and the disposition of product processed during the period of out-of-control operation. A.3.10. Inspection and testing A.3.10.1 Inspection operations. Procedures should address inspection operations specifying type of inspection, sampling and test procedures, acceptance and rejection criteria, and frequency of use. A.3.10.2 Quality control operations. Procedures should address quality control operations specifying the type, procedures, rating criteria, action criteria, records, and frequency of use. A.3.10.3 Performance verification operations. Procedures should address performance verification operations specifying the type, procedures, equipment, judgment, and action criteria, records, and frequency of use. A.3.10.4 Inspection operations. Records of inspection operations should cover the tests or inspections made, the materials group (lot, batch, etc.) inspected, the controlling documentation, the date of completion of inspection, the amount of material tested, and acceptance, rejection, or other final disposition of the material. A.3.11 Tool, gauge and test equipment maintenance and calibration. Procedures should address the maintenance and calibration procedures, and the frequency of scheduled actions, for tools, gauges, and test equipment in accordance with the requirements of ANSI/NCSL Z540.3 or equivalent. For electrical test see MILSTD-883 electrical test equipment accuracy requirements. A.3.11.1 Equipment calibrations. Records should cover the scheduled calibration intervals for each equipment item, the dates of completion of actual calibration, identification of the group performing the calibration, and certification of the compliance of the equipment with documented requirements after calibration, in accordance with ANSI/NCSL Z540.3 or equivalent. A.3.12 Examples of assembly and verification travelers. Screening and conformance inspection verification travelers should be maintained on a current basis. When in-line inspections replace end-of-line verifications (i.e., alternate group A or B) the traveler should include evidence of required inspections. The traveler should include information necessary to adequately detail the steps utilized in the production and testing of the devices, including all manufacturer imposed tests. As a guide, the following information should be available: A.3.13 Failure and defect analysis and data feedback. Procedures should address methods for identification, handling, analysis, and disposition of failed or defective devices. A.3.13.1 Procedure in case of test equipment failure or operator error. Whenever a device is believed to have failed as a result of faulty test equipment or operator error, the failure will be entered in the test record which will be retained for review along with a complete explanation verifying why the failure is believed to be invalid. NOTE: ESD failures will be counted as rejects and not attributed to equipment or operator error for screening, group A, and end-point electrical tests of screening, CI and PI, and qualification and method 5005 of MIL-STD-883. A.3.13.1.1 Procedure for sample tests. When it has been established that a failure is due to test equipment failure or operator error, and it has been established that the sample device has been damaged or degraded, a replacement device from the same inspection lot may be added to the sample. The replacement device will be subjected to all tests to which the discarded device was subjected prior to its failure and to any remaining specified tests to which the discarded device was not subjected prior to its failure. The manufacturer, at their own risk, has the option of replacing the failed device and continuing with the tests before the validity of the test equipment failure or operator error has been established. A.3.13.1.2 Procedure for screening tests. When it has been established that a lot failure during screening test is due to operator or equipment error, and it has been established that the remaining product has not been damaged or degraded, the lot, or surviving portion of the lot, as the case may be, may be resubmitted to the corrected screening test in which the error occurred. Failures verified as having been caused by test equipment failure or operator error will not be counted in the PDA calculation (when applicable). A.3.13.2 Failure and corrective action reports. When the procedures of A.3.13.1.1 and A.3.13.1.2 are used in continuing sample tests or resubmitting lots for screening tests, the manufacturer will document the results of their failure investigations and corrective actions. A.3.14 Failure analysis and corrective action program. The manufacturer should develop the procedures for testing, analyzing, and taking corrective actions on failed parts from all stages of manufacturing, including field returns. The program should include the specific steps to be followed in order to correct any process that is out of control. The manufacturer should also develop procedures for corrective actions to nonconformities other than failed parts. A.3.14.1 Reports and analyses of defective devices and failures. Records of defective devices should cover the source from which each device was received, the test or operation during which failure occurred or defects were observed, and prior testing or screening history of the device, the date of receipt, and the disposition of the device. Records of failure and defect analyses should cover the nature of the reported failure or defect (failure or defect mode), verification of the failure or defect, the nature of any device discrepancies which were found during analysis (failure or defect mechanism), assignment of the failure activating cause if possible, the date of completion of the analysis, identification of the group performing the analysis, disposition of the device after analysis, and the distribution of the record. The record should also address the relationship of observed failure or defect modes in related lots or devices and, where applicable, corrective action taken as a result of the findings. A.3.15 Atmospheric control and handling. A.3.15.1 ESD handling control program. Procedures should address the ESD handling control program documentation. This includes methods, equipment and materials, training, packaging, handling, and procedures for handling ESD sensitive devices. A.3.15.2 Cleanliness and atmosphere control in work areas. Procedures should address instructions for cleanliness and atmosphere control in each work area in which unsealed devices, or parts thereof, are processed or assembled. Controlled work areas should be established in accordance with ISO 14644-1 or equivalent. Airborne particulate class limits shall be as defined by ISO 14644-1. A method for class verification and reverification shall be documented and implemented. ISO 14644-2 may be used for a guide. Action and absolute control limits (at which point work stops until corrective action is completed) based on historical data and criticalness of the process in each particular area, should be established. A method for the identification and control of foreign material, equivalent to or better than the foreign material control program described in method 2017 of MIL-STD-883, should be employed. A.3.16 Control of quality records.
*
A.3.16.1 Records to be maintained. Records shall be legible and maintained which will adequately describe the processes, materials, inspections, and tests which affect the quality of the device for appropriate amounts of time such that quality concerns and customers are properly supported (e.g. method 5011 of MIL-STD-883 test records, Group C, QML, package evaluation testing, and alternate methods). The records pertaining to production processes, incoming, and in-process inspections should be retained for a minimum of 3 years (7 years for Class K) and those pertaining to performance verification retained for a minimum of 5 years (7 years for Class K) after performance of the inspections. Records pertaining to alternate methods, group C testing, QML, package evaluation, and method 5011 testing shall be retained for 5 years (7 years for Class K) after the process or materials affected have been removed from the qualified flow.
a. Name or title of operation and specification number of each process or test.
b. Identify PIN, date code, and manufacturer internal lot identification number.
c. Date of test and operator identification.
d. Calibration control number or equipment identification of all major equipment components used for test.
e. Quantity tested and rejected for each process or test and actual quantity tested, if sampled.
f. Serial numbers of passing and failing devices, when applicable.
g. Time in and out of process, or test, if critical to process, or test, results (i.e., burn-in and 96-hour window).
h. Specific major conditions of test that are verifiable by operator including times, temperature, rpm, etc.
i. The percent defective calculated and the pattern failure analysis for burn-in.
j. Burn-in or life test board serial number or test circuit identification number and revision.
k. All required variables data except for electrical tests (use attachments if applicable).
l. For electrical tests, test program number and revision, and identify when variables data is required.

A.3.16.1.1 Computerized records. Computerized records are optional provided they clearly and objectively indicate that all requirements of this document have been met. The computerized records for traceability, screening, and conformance inspection should be readily accessible and available to Government personnel for review and an appropriate electronic or hard copy provided to the qualifying activity as required. Computerized records, when used, should be maintained with controls sufficient to easily provide the necessary information and traceability, including identification of individual and time of input. The integrity of the system and the data should be maintained.

A.3.16.2 Altered records. Altered records should identify all information necessary to maintain proper traceability and the integrity of the original data and justification for the change.

A.3.17 Internal quality audits.

A.3.17.1 Self-audit requirements. The manufacturer should have a self-audit program which assists in determining what areas need improvement. The self-audit program should be approved, monitored, and controlled by the manufacturer’s TRB, when applicable.

A.3.17.1.1 Self-audit representatives. The designated auditors should be independent from the area being audited. If the use of an independent auditor is not practical; then, as a minimum, another individual should be assigned to participate in the audit or review the results with the auditor from the area. The auditors should be trained in the area to be audited, in the applicable defense specification requirement, and provided with an appropriate checklist for annotating deficiencies. Prior to the audit, the assigned auditor should review the previous audit checklist and deficiencies to assure corrective actions have been implemented and are sufficient to correct the deficiencies.

A.3.17.1.2 Audit deficiencies. All audit deficiencies should be documented on the appropriate checklist and a copy submitted to the department head for corrective action. All corrective actions should be agreed to by the quality organization or review board.

A.3.17.1.3 Audit follow-up. All audit reports should be filed and maintained. A procedure should be established to follow up on all audit deficiencies to assure that the corrective actions have been implemented in a timely manner. The system (e.g., management review) should also review the acceptability and timeliness of all corrective actions and determine if any deficiencies have repeated since the last required self-audit. If any deficiencies have occurred two or more times in the predetermined time period, additional corrective actions should be taken to assure immediate correction of the problem including notification of applicable organizations.

A.3.17.1.4 Audit schedules. The original audit frequency is established by the manufacturer normally not to exceed 1 year for each area.

A.3.17.1.5 Self-audit report. The manufacturer keeps the self-audit report on file for the established amount of time prescribed by the manufacturer's record retention requirements, and makes the self-audit report, deficiencies, and corrective actions taken available for review by the qualifying activity.

A.3.17.1.6 Self-audit areas. The self-audit should be performed on all areas which directly affect the quality of the device.

A.3.17.1.7 Self-audit checklist. The audit checklist should be approved and maintained under document control. The checklist is intended to assure that the quality assurance system is adequate and followed by all personnel in each area.

A.3.18 Personnel training and testing. The procedures should address the training and testing practices employed to establish, evaluate, and maintain the skills of personnel engaged in reliability critical work including the form, content, and frequency of use.

A.3.18.1 Personnel training and testing. Records should cover the nature of training or testing given (e.g., when it was given, how long it lasted, and who was trained and tested). An effective training program should address various types of training (formal, on-the-job etc.) identification of critical areas, evaluation and re-evaluation, and the use of trained personnel.

Appendix B has been combined with the previous appendix. The appendix letter will be held for future use. This page intentionally left blank.

GENERIC PERFORMANCE VERIFICATIONS FOR HYBRID AND MULTICHIP MODULE TECHNOLOGIES

C.1 SCOPE

C.1.1 Scope. This appendix is intended to be used by manufacturers in developing their baseline flow of processes, tests, and inspections. This appendix provides an acceptable standard which may be used to verify the performance requirements of compliant devices. This appendix is a mandatory part of the specification. The information contained herein is intended for compliance. Manufacturers may demonstrate a test and inspection system that achieves at least the same level of quality as could be achieved by complying with this appendix. These standards may be used as is, or as modified in accordance with 3.8.1. The test flow presented in this appendix may not be appropriate for all technologies. For these types of devices this appendix should be used as a starting point in developing an appropriate test flow.

C.1.2 Description of Appendix C. This appendix contains the standard testing and inspection approach to verifying the performance requirements of this specification. This approach is a five-step approach consisting of an element evaluation program, a process control program, a screening program, a conformance inspection (CI) and periodic inspection (PI) program, and a qualification program.

C.1 SCOPE 35

C.2 APPLICABLE DOCUMENTS 35

C.3 ELEMENT EVALUATION 36

C.4 PROCESS CONTROL 47

C.5 DEVICE SCREENING 50

C.6 CONFORMANCE INSPECTION AND PERIODIC INSPECTION 55

C.7 QUALIFICATION 65

C.2 APPLICABLE DOCUMENTS

* C.2.1 General. The documents listed in this section are specified in sections C.3, C.4, C.5, C.6, or C.7 of this specification. This section does not include documents cited in other sections of this specification or recommended for additional information or as examples. While every effort has been made to ensure the completeness of this list, document users are cautioned that they must meet all specified requirements of documents cited in sections C.3, C.4, C.5, C.6, or C.7 of this specification, whether or not they are listed.

C.2.2 Government documents.

C.2.2.1 Specifications, standards, and handbooks. The following specifications, standards and handbooks form a part of this document to the extent specified herein. Unless otherwise specified, the issues of these documents are those cited in the solicitation or contract.

DEPARTMENT OF DEFENSE SPECIFICATIONS

MIL-PRF-19500 -Semiconductor Devices, General Specification for.

MIL-PRF-38535 -Integrated Circuits (Microcircuits) Manufacturing, General Specification for.

DEPARTMENT OF DEFENSE STANDARDS

MIL-STD-202 -Test Method Standard for Electronic and Electrical Component Parts.

MIL-STD-750 -Test Method Standard for Semiconductor Devices.

MIL-STD-883 -Test Method Standard Microcircuits.

(Copies of these documents are available online at http://assist.daps.dla.mil/quicksearch/ or from the Standardization Document Order Desk, 700 Robbins Avenue, Building 4D, Philadelphia, PA 19111-5094.)

C.2.3 Non-Government publications. The following documents form a part of this document to the extent specified herein. Unless otherwise specified, the issues of these documents are those cited in the solicitation or contract.

ELECTRONIC INDUSTRIES ALLIANCE (EIA)

JEDEC Publication JEP 142 – Obtaining and Accepting Material for Use in Hybrid/MCM Products.

(Copies of this document are available online at http://www.jedec.org/ or from the Electronics Industries Alliance, 2500 Wilson Boulevard, Arlington, VA 22201-3834).

C.2.4 Order of precedence. Unless otherwise noted herein or in the contract, in the event of a conflict between the text of this document and the references cited herein, the text of this document takes precedence. Nothing in this document, however, supersedes applicable laws and regulations unless a specific exemption has been obtained.

C.3 ELEMENT EVALUATION

C.3.1 Description of element evaluation. Element evaluation is used to verify that procured materials and devices meet their specified characteristics and are adequate to perform as intended under the conditions experienced in the application. Element characteristics required to assure device performance and assembly process capability shall be identified. These evaluations should be completed on all materials prior to their use in production devices (see Table C-I). These evaluations may be modified by the manufacturer based on:

a.
Element quality and reliability history.
b.
Device quality and reliability history.
c.
Supplier history.
d.
Supplier/manufacturer relationship.
e.
Possible impact of element evaluation failure after assembly.

NOTE: Elements may be assembled into the device prior to final element lot acceptance. The hybrid manufacturer will have a system, approved by the qualifying activity, to maintain traceablility of all such elements for the purpose of element containment. This system should be employed only when a work stoppage situation is encountered, schedule is affected, or when a lengthy test is required. For Class K devices, elements may be assembled into the device only with acquiring activity approval. For all classes, element evaluation will be successfully completed prior to device shipment.

C.3.1.1 Element evaluation guidance. JEP 142 provides guidance regarding design considerations, material assessment techniques, and recommendations for material acceptance prior to use in hybrid/MCM products. JEP 142 is not an alternate element evaluation and shall not supersede any element evaluation requirements of Class H and Class K of this document.

C.3.2 General.

C.3.2.1 Sequence of testing. Subgroups within a group (table) of tests may be performed in any sequence, but individual tests within a subgroup will be performed in the sequence indicated.

C.3.2.2 Sample selection. Samples will be randomly drawn from inspection lots or in-line production samples as applicable. The sample size columns in the evaluation tables give minimum quantities to be evaluated with applicable accept number enclosed in parentheses.

C.3.2.3 Class requirements. Class K and Class H element evaluation requirements are identified by X's in the appropriate column locations of evaluation tables.

C.3.2.4 Location of element evaluation. Element evaluation may be performed at the element supplier facility (or other facility approved by the device manufacturer) or at the device manufacturing facility.

C.3.2.5 Characteristics. Characteristics to be verified will be those necessary for compatibility with the element acquisition documents and assembly procedures and at least those which cannot be verified after assembly, but could cause functional failure.

C.3.2.6 Protection from electrostatic discharge. Suitable handling precautions and grounding procedures will be taken to protect ESDS elements from accidental damage.

C.3.2.7 Electrical test specifications. Electrical test parameters, values, limits (including deltas when applicable), and conditions will be specified in the element acquisition documents.

TABLE C-I. Element evaluation summary.

Element Paragraph Table or MIL-STD-883 method
Microcircuit and semiconductor dice C.3.3 Table C-II
Passive elements C.3.4 Table C-III
Surface acoustic wave (SAW) elements C.3.5 Table C-IV
Alternate evaluation C.3.6 N/A
Substrate evaluation C.3.7 Table C-V
Package evaluation C.3.8 Table C-VI
Integral substrate/package evaluation C.3.9 Table C-VII
Polymeric material evaluation C.3.10 Method 5011

C.3.3 Microcircuit and semiconductor dice. Microcircuit and semiconductor dice from each wafer lot will be evaluated in accordance with table C-II and C.3.3.1 through C.3.3.6.1. For Class H devices, element evaluation testing is not required for JANHC or JANKC discrete semiconductor MIL-PRF-19500 qualified die or for MIL-PRF-38535 Class Q or Class V qualified die. For Class K devices, element evaluation is not required for JANKC discrete semiconductor MIL-PRF-19500 qualified die or for MIL-PRF-38535, Class V qualified die.

C.3.3.1 Subgroup 1, 100 percent electrical test of dice. Each die will be electrically tested, which may be done at the wafer level provided all failures are identified and removed from the lot when the dice are separated from the wafer.

When wafer/die level testing requirements are not specified in the procurement documents, the manufacturer/die supplier will choose the parameters, conditions, and limits to assure compliance with the electrical characteristics.

C.3.3.2 Subgroup 2, 100 percent visual inspection of dice. Each die will be visually inspected to ensure conformance with the applicable die related requirements of method 2010 of MIL-STD-883; methods 2072 and 2073 of MIL-STD-750; and the element acquisition documents.

C.3.3.3 Sample evaluation of assembled dice.

C.3.3.3.1 Test samples. A sample of dice from each wafer lot will be evaluated in accordance with table C-II, subgroups 3 through 6 as applicable, and C.3.3.3.2 through C.3.3.6.1.

C.3.3.3.2 Test sample preparation. Test samples may be assembled such that similar assembly methods and conditions the element will see during normal production assembly will be simulated. Electrical probe testing may be performed in lieu of assembly.

C.3.3.4 Subgroups 3 and 4.

C.3.3.4.1 Sample size. The Class H sample will consist of at least ten die from each wafer lot. The Class K sample will consist of three die from each wafer and a total of at least ten die from each wafer lot. If one wafer is evaluated, then ten die shall be tested. If ten wafers are evaluated, then 30 die (three from each wafer) shall be tested.

C.3.3.4.2 Internal visual. Each sample will be visually inspected to ensure conformance with the applicable requirements of method 2010 of MIL-STD-883; methods 2072 and 2073 of MIL-STD-750; and the element acquisition documents.

C.3.3.4.3 Electrical test. For interim, post burn-in, and final electrical tests, the minimum requirements for microcircuits and semiconductor dice will include static tests at each of the following:

a.
+25C.
b.
Maximum rated operating temperature.
c.
Minimum rated operating temperature.

NOTE: Final electrical tests that satisfy end-point electrical test requirements specified in preceding test methods and need not be repeated.

C.3.3.5 Subgroup 5.

C.3.3.5.1 Sample size. From each wafer lot, a sample of at least five die requiring ten bond wires minimum will be selected.

C.3.3.5.2 Wire bond strength testing. For wire bond strength testing:

a.
A minimum of ten wires consisting of die-to-package, die-to-die, or die-to-substrate bonds will be destructively pull tested. An equal number of bonds will be tested on each sample die.
b.
For beam lead and flip-chips, five devices shall be tested.
c.
The element metallization shall be acceptable if no failure occurs. If only one wire bond fails, a second sample shall be selected in accordance with C.3.3.5.1 and subjected to subgroup 5 evaluation. If the second sample contains no failures, the bonding test results are acceptable and the lot of dice is acceptable. If the second sample contains one or more failures, or if more than one failure occurs in the first sample, the lot of dice shall be rejected.
d.
The rejected wafer lot may be resubmitted to subgroup 5 evaluation if the failure was not due to defective die metallization.

C.3.3.6 Subgroup 6, scanning electron microscope (SEM).

C.3.3.6.1 Sample selection and reject criteria. Microcircuit sample selection and reject criteria shall be in accordance with method 2018 of MIL-STD-883 on a homogeneous lot. Discrete semiconductor devices with oxide steps or expanded contacts shall be tested with the sample selection and reject criteria in accordance with method 2077 of MIL-STD-750. In cases when dice are very large and comprise a large area of the wafer, the qualifying activity may approve other alternate sample selection plans.

TABLE C-II. Microcircuit and semiconductor dice evaluation requirements.

Subgroup Class Test MIL-STD-883 Quantity (accept number) Reference paragraph
K H Method Condition
1 X X Element electrical 100 percent C.3.3.1
2 X X Element visual 2010 1/ 2072 1/ 2073 100 percent C.3.3.2
3 X X Internal visual 2010 1/ 2072 1/ 2073 10 (0) C.3.3.3 C.3.3.4.2
4 X Temperature cycling 1010 C 2/ 10 (0) C.3.3.3
X Mechanical shock or Constant acceleration 2002 2001 B, Y1 direction 3,000 g’s, Y1 direction
X Interim electrical C.3.3.4.3
X Burn-in 1015 240 hours
minimum at
+125C
X Post burn-in electrical C.3.3.4.3
X Steady-state life 1005
X X Final electrical C.3.3.4.3
5 X X Wire bond evaluation 2011 10 (0) wires or 20 (1) wires C.3.3.3 C.3.3.5
6 X SEM 2018 1/ 2077 See method 2018 of MIL-STD-883 or method 2077 of MIL-STD-750 C.3.3.6

1/ MIL-STD-750 methods.
2/ For Class K sample sizes, see C.3.3.4.1.

C.3.4 Passive elements. Passive elements from each inspection lot will be evaluated in accordance with table C-III and C.3.4.1 through C.3.4.7 This evaluation is not required when the elements are acquired from the established reliability series of performance specifications and is listed on the QPL.

C.3.4.1 Subgroup 1, 100 percent electrical test of passive elements. Each passive element will be electrically tested at +25C as specified in the element acquisition documents.

C.3.4.2 Subgroup 2, visual inspection of passive elements. Passive elements will be visually inspected to assure conformance with the applicable passive element related requirements of method 2032 of MIL-STD-883, and the passive element acquisition documents.

a.
Each Class K passive element will be visually inspected.
b.
Class H elements will be sample inspected using a sample size and (accept number) of 22 (0).

C.3.4.3 Test sample preparation for subgroups 3 and 4.

a.
For Class H and Class K passive elements, when assembly is required to perform electrical tests, test samples may be assembled such that the assembly methods and conditions the element will see during normal assembly will be simulated. Electrical probe testing may be performed in lieu of assembly.
b.
The total test sample will contain at least ten wires (an equal number on each element) if wire bonding assembly is applicable.

C.3.4.4 Sample electrical test of passive elements. Sample passive elements will be electrically tested at +25C for the following characteristics (minimum):

a.
Resistors: DC resistance.
b.
Capacitors:
(1)
Ceramic type: Dielectric withstanding voltage, insulation resistance, capacitance, and dissipation factor.
(2)
Tantalum type: DC leakage current, capacitance, and dissipation factor.
(3)
Metal insulation semiconductor type (MIS): DC leakage current, capacitance, dielectric withstanding voltage.
c.
Inductors: DC resistance, inductance, and Q.

C.3.4.5 Visual examination. Elements will be visually examined for evidence of corrosion or damage attributable to the test and conditioning sequence.

C.3.4.6 Wire bond strength testing. Wire bond strength testing applies to elements which are wire bonded during the device assembly operation. The sample will include at least five elements and ten bond wires minimum.

a.
At least ten wires, consisting of element-to-substrate, element-to-package, or element-to-element bonds will be destructively pull tested. An equal number of bonds will be tested on each sample element.
b.
The element metallization will be acceptable if no failure occurs. If only one wire bond fails, a second sample will be selected and subjected to the test in accordance with C.3.4.6.a. If the second sample contains no failures, the bonding test results and the element lot are acceptable. If the second sample contains one or more failures, or if more than one failure occurs in the first sample, the element lot will be rejected.
c.
The element inspection lot may be resubmitted to evaluation if the failure was not due to defective element metallization.

C.3.4.7 Voltage conditioning or aging. Voltage conditioning or aging shall be performed in accordance with the appropriate passive device specification. When there is no applicable device specification, or the requirements of the device specifications are not appropriate, the manufacturer shall document the procedure being used. Below are some examples of performance specifications used for passive element conditioning requirements:

MIL-PRF-38534G APPENDIX C

a. Resistors:

MIL-PRF- 914 -Resistor Networks, Fixed, Film, Surface Mount, Nonestablished Reliability, and Established Reliability, General Specification For.

MIL-PRF-32159 -Resistors, Chip, Fixed, Film, Zero Ohm, Industrial, High Reliability, Space Level, General Specification for.

MIL-PRF-39007 -Resistors, Fixed, Wire Wound (Power Type), Nonestablished Reliability, Established Reliability, and Space level, General Specification for

MIL-PRF-55182 - Resistors, Fixed, Film, Nonestablished Reliability, Established Reliability, and Space Level, General Specification for.

MIL-PRF-55342 -Resistors, Chip, Fixed, Film, Nonestablished Reliability, Established Reliability Space Level, General Specification for.

b. Capacitors:

MIL-PRF-123 - Capacitors, Fixed, Ceramic, Dielectric, (Temperature Stable and General Purpose), High Reliability General Specification for.

MIL-PRF-49470 -Capacitor, Fixed, Ceramic Dielectric, Switch Mode Power Supply (General Purpose and Temperature Stable), Standard Reliability and High Reliability, General Specification for.

MIL-PRF-55365 -Capacitor, Fixed, Electrolytic (Tantalum), Chip, Established Reliability, Nonestablished Reliability, and High Reliability, General Specification for.

MIL-PRF-55681 - Capacitor, Chip, Multiple Layer, Fixed, Ceramic Dielectric, Established and Nonestablished Reliability, General Specification for.

c. Coils, transformers:

MIL-PRF-27 - Transformers and Inductors (Audio, Power, and High Power Pulse) General Specification for.

MIL-PRF-15305 -Coils, Fixed and Variable, Radio Frequency, General Specification for.

* TABLE C-III. Passive element evaluation requirements.

Subgroup Class Test MIL-STD-883 Quantity (accept number) Reference paragraph
K H Method Condition
1 X X Element, electrical 100 percent C.3.4.1
2 X X Visual inspection 2032 100 percent 22 (0) C.3.4.2
3 X Temperature cycling 1010 C 10 (0) C.3.4.3
X X Mechanical shock or constant acceleration 2002 2001 B, Y1 direction 3,000g’s, Y1 direction
X X Voltage conditioning or aging C.3.4.7
X Visual inspection 2032 C.3.4.5
X X Element electrical C.3.4.4
4 X X Wire bond evaluation 2011 10 (0) wires or 20 (1) wires C.3.4.3 C.3.4.6

C.3.5 Surface acoustic wave (SAW) element evaluation. SAW elements will be evaluated in accordance with table C-IV and C.3.5.1 through C.3.5.3.

41

C.3.5.1 Radio frequency (RF) probe test. Each SAW element will be RF probe tested as specified in the detail/acquisition specification. This RF probe test may be done at the wafer level provided all failures are identified and removed from the lot when the elements are separated from the wafer. RF probe testing will be performed at +25C unless otherwise specified by the detail/acquisition specification.

C.3.5.2 Visual inspection. Each SAW element will be visually inspected to ensure conformance with the requirements of method 2032 of MIL-STD-883.

C.3.5.3 Wire bond evaluation. From each inspection lot of SAW elements, a randomly selected sample of at least two elements will be evaluated for wire bond pull strength.

a.
A minimum of ten wires will be bonded and destructively pull tested in accordance with method 2011 of MIL-STD-883.
b.
The SAW element metallization will be acceptable if no failure occurs. If only one wire bond fails, a second sample will be selected and subjected to the test in accordance with C.3.5.3.a. If the second sample contains no failures, the bonding test results and the element lot are acceptable. If the second sample contains one or more failures, or if more than one failure occurs in the first sample, the element lot will be rejected.
c.
The element inspection lot may be resubmitted to wire bond evaluation if the failure was not due to defective element metallization.
d.
With acquiring activity approval, destructive bond pull tests may be performed on test coupons that provide the specified test requirements. Test coupons shall be processed with the same element production lot.

TABLE C-IV. SAW element evaluation requirements.

Subgroup Class Test MIL-STD-883, method Quantity (accept number) Reference paragraph
K H
1 X X RF electrical probe 100 percent C.3.5.1
2 X X Visual inspection 2032 100 percent C.3.5.2
3 X X Wire bond evaluation 2011 10 (0) wires or 20 (1) wires C.3.5.3

C.3.6 Alternate element evaluation. Alternate element evaluation will be used only in cases where full device performance cannot be adequately ascertained outside the actual end item (e.g., hybrid microcircuit RF component). The sample built into devices shall successfully complete evaluation prior to release of the balance of the incoming lot. In lieu of packaged element evaluation tests in accordance with C.3.3, C.3.4, and C.3.5, elements may be assembled into devices and screened in accordance with table C-IX through final electrical. Acceptance of these elements will be based on the ability of the device to meet all group A, subgroups 1, 2, and 3 (plus 4, 7, and 9, as applicable) electrical tests required for the device. A minimum of ten elements or 100 percent of the elements, whichever is less, (0 defects) will be assembled into at least 3 devices. Devices assembled for the purpose of element evaluation are deliverable provided all of the provisions of this specification are met. Element wire bond evaluation for elements may be accomplished using a second or additional sample of elements wire bonded for that purpose only. When the device build option for evaluation is selected, the manufacturer will establish and maintain a sample plan or procedure to identify the sample prior to electrical test. In case of lot failure when alternative element evaluation is used, all of the device samples and the inspection lots will be rejected. When the manufacturer chooses to analyze the failed devices to isolate the cause of failure and this analysis determines that the cause of failure is not related to the element being tested, and that the element has been correctly stressed during the required screening and testing, then the inspection lot may be accepted. If the element has not been correctly stressed, the failed device may be reworked or new sample replacement devices may be assembled.

C.3.7 Substrate evaluation. Substrates will be evaluated in accordance with table C-V and C.3.7.1 through

C.3.7.5.3.3.

NOTE: Substrates fabricated by the device manufacturer using a qualified process will be exempt from this evaluation.

C.3.7.1 Definition. For the purpose of substrate evaluation, a substrate inspection lot will consist of homogeneous substrates having the same number of layers, manufactured using the same facilities, processes, materials, and vacuum deposited, plated, or printed as one lot.

C.3.7.2 Electrical test parameters. Electrical test parameters, values, limits, and conditions will be as specified in the applicable detail/acquisition specification.

C.3.7.3 Subgroup 1, 100 percent electrical testing. Each substrate will be electrically tested at +25C, if and as specified in the applicable detail/acquisition specification.

C.3.7.4 Subgroup 2, 100 percent visual inspection. Each substrate will be visually inspected to ensure conformance with the applicable requirements of method 2032 of MIL-STD-883, and the applicable detail/acquisition specification.

C.3.7.5 Subgroups 3, 4, and 5 general requirements. From each inspection lot of substrates, a randomly selected sample will be evaluated. Destructive tests may be performed on test coupons which provide the required test data.

The test coupons shall be made with the same materials that were used in the manufacturing of the inspection lot and processed at the same time as the inspection lot.

C.3.7.5.1 Subgroup 3. A minimum of five samples will be submitted to subgroup 3 testing.

C.3.7.5.1.1 Physical dimension. Inspect in accordance with method 2016 of MIL-STD-883, and the applicable detail/acquisition specification.

C.3.7.5.1.2 Visual inspection. Inspect in accordance with method 2032 of MIL-STD-883, and the applicable detail/acquisition specification.

C.3.7.5.1.3 Electrical. Substrates will be electrically tested at +25C for the following characteristics (minimum). Requirements will be as specified in the applicable detail/acquisition specification.

a.
Resistors: DC resistance.
b.
Capacitors: Capacitance. As specified in the applicable detail/acquisition specification, test for dielectric withstanding voltage, insulation resistance, and dissipation factor.
c.
For multilayered substrates, continuity and isolation testing will be performed to verify the interconnection of conductors as specified in the applicable detail/acquisition specification.

C.3.7.5.2 Subgroup 4. A minimum of three samples that have been subjected to, and passed, subgroup 3 testing will be submitted to subgroup 4 testing.

C.3.7.5.2.1 Conductor thickness. Measure conductor thickness in accordance with the applicable detail/acquisition specification. Conductor thickness will meet the requirements specified in the applicable detail/acquisition specification.

C.3.7.5.2.2 Conductor resistivity. Measure conductor resistivity in accordance with the applicable detail/acquisition specification. Conductor resistivity will meet the requirements specified in the applicable detail/acquisition specification.

C.3.7.5.2.3 Film adhesion. Perform film adhesion testing in accordance with acceptable industry standards. The substrate and tape will show no evidence of peeling or flaking of metallization.

C.3.7.5.2.4 Solderability. For solderable substrates only, perform solderability testing if specified in the applicable detail/acquisition specification.

C.3.7.5.3 Subgroup 5. A minimum of two samples that have been subjected to, and passed, subgroup 3 testing will be submitted to subgroup 5 testing.

C.3.7.5.3.1 Temperature coefficient of resistance (TCR): Perform TCR testing for resistors in accordance with method 304 of MIL-STD-202. TCR will meet the requirements specified in the applicable detail/acquisition specification.

a.
Thick film type: Test as a minimum, two resistors from each resistor paste sheet resistance value. One from the smallest and one from the largest area resistors at -55C using a reference reading at +25C, or temperatures as specified in the detail/acquisition specification.
b.
Thin film type: Test as a minimum, the highest value resistor at +125C using a reference reading at +25C, or temperatures as specified in the detail/acquisition specification.
c.
If specified in the applicable detail/acquisition specification, TCR tracking testing will be performed. TCR tracking will meet the requirements specified in the applicable detail/acquisition specification.

C.3.7.5.3.2 Wire bond strength testing. For wire bondable substrates, perform wire bond strength testing in accordance with method 2011 of MIL-STD-883. The sample will include at least two substrates and ten bond wires minimum. For gold metallized Class K substrates that at the device level are intended to contain aluminum wire bonds, aluminum wires will be placed as specified in the detail/acquisition specification and these wire bond samples will be baked for 1 hour at +300C in either an air or an inert atmosphere prior to the performance of wire bond strength testing.

a.
At least ten wires, consisting of substrate to substrate bonds, will be destructively pull tested. An equal number of bonds will be tested on each sample substrate.
b.
The substrate metallization will be acceptable if no failure occurs. If only 1 wire bond fails, a second sample of a minimum of ten wires will be prepared using the same wire type/size and the same type equipment as the failed bond(s). If the second sample contains one or more failures, or if more than one failure occurs in the first sample, then the substrate inspection lot will be rejected.
c.
The substrate inspection lot may be resubmitted to evaluation if the failure(s) was not due to defective substrate metallization.

C.3.7.5.3.3 Die shear strength testing. Perform shear strength testing in accordance with method 2019 of MIL-STD-883. At least two die for each substrate will be attached and tested for each die attachment method as specified in applicable detail/acquisition specification. If a failure occurs at less than the specified force and is not due to defective substrate materials, the lot will be resubmitted to die shear evaluation and the failure mode documented.

TABLE C-V. Substrate evaluation requirements.

Subgroup Class Test MIL-STD-883 Method Quantity (accept number) Reference paragraph
K H
1 X X Electrical testing 100 percent C.3.7.3
2 X X Visual inspection 2032 100 percent C.3.7.4
3 X X Physical dimensions 2016 5 (0) C.3.7.5.1.1
X X Visual inspection 2032 C.3.7.5.1.2
X X Electrical C.3.7.5.1.3
4 X X Conductor thickness or conductor resistivity3 (0) C.3.7.5.2.1 C.3.7.5.2.2
X X Film adhesion C.3.7.5.2.3
X X Solderability C.3.7.5.2.4
5 X X TCR 2 (0) C.3.7.5.3.1
X X Wire bond evaluation 2011 10 (0) wires or 20 (1) wires C.3.7.5.3.2
X X Die shear evaluation 2019 2 (0) C.3.7.5.3.3

C.3.8 Package evaluation. Package cases or covers will be evaluated in accordance with table C-VI and C.3.8.1 through C.3.8.5. In addition, laser marked surfaces will be subjected to, and pass, subgroups 3 and 6 of table C-VI.

C.3.8.1 Definition. For the purpose of package evaluation, a package inspection lot will consist of homogeneous cases or covers of the same package type and outline dimensions (may differ only in lead length and lead count); manufactured using the same facilities and processes; and plated as one lot within a 6-month time frame (if plating is applicable).

C.3.8.2 General.

a.
From the package inspection lot, a randomly selected sample will be subjected to package evaluation.
b.
Subgroups 1, 2, and 3 of table C-VI will be accomplished for each lot. Subgroup 4 of table C-VI will be accomplished periodically at intervals not exceeding 6 months for additional package inspection lots, for metal packages. Subgroup 6 will be performed one time only for Class H and at 6-month intervals for Class K unless a change in material or plating is made.
c.
Subgroups 2, 3, and 4 of table C-VI apply to cases only. A quantity (accept number) of 15 (0) will apply to the number of terminals or leads to be tested. The leads will be randomly selected from three packages minimum.
d.
Covers require only subgroups 1 and 6 of table C-VI.

C.3.8.3 Subgroup 1. Separately verify case and cover dimensional compliance with the element acquisition documents.

C.3.8.4 Subgroup 4. For metal cases with leads separated by an insulator, measure insulation resistance between the metal body of the case and the leads that are isolated from the case. This test does not apply to non-metallic cases. This test will be performed at 6-month intervals unless a change in insulator material is made for Class H devices and on every incoming lot for Class K devices.

C.3.8.5 Subgroup 6. Separately verify case and cover for compliance with subgroup 6 of table C-VI. Corrosion in the internal cavity area will not be cause for rejection.

TABLE C-VI. Package evaluation requirements.

Subgroup Class Test MIL-STD-883 Quantity (accept number) Reference paragraph
K H Method Condition
1 X X Physical dimensions 2016 3 (0) C.3.8.3
2 X X Solderability 2003 Soldering temperature 3 (0) C.3.8.2c
+245C + 5C
3 X X Thermal shock 1011 C 3 (0) C.3.8.2
X X High temperature bake 1008 1 hour at +150C
X X Lead integrity 2004 2028 B2 (lead fatigue) D (leadless chip carriers) B1 for rigid leads (pin grid array leads)
X X Seal 1014 A4 Unlidded cases
4 X X Metal package isolation 1003 600 V dc 100 nA maximum 3 (0) C.3.8.4
5 Not used
6 X X Salt atmosphere 1009 A 5 (0) C.3.8.5

C.3.9 Integral substrate/package (ISP) evaluation. (ISP) will be evaluated in accordance with table C-VII and

C.3.9.1 through C.3.9.8.

C.3.9.1 ISP inspection lot. For the purpose of ISP evaluation, an ISP inspection lot shall consist of ISP of the same type; manufactured using the same facilities, processes and materials, within 90 days.

C.3.9.2 General.

a.
Section C.3.9 is intended to be used as an end-of-line ISP acceptance procedure performed at the completion of the ISP construction and prior to the construction of the device.
b.
ISP elements fabricated by the hybrid device manufacturer using a MIL-PRF-38534 qualified process will be exempt from this evaluation as long as C.3.7 and C.3.8 are used for the components of the ISP.
c.
Subgroups 1, 2, 3, 4, 5, 6, and 7 of table C-VII will be accomplished for each inspection lot.
d.
For lead integrity and solderability testing, a quantity (accept number) of 15 (0) will apply to the number of terminals or leads to be tested. The leads will be randomly selected from three packages minimum.
e.
The same samples may be used for subgroups 4, 5, 6, and 7 of table C-VIII.

C.3.9.3 Subgroup 1. Each element will be electrically tested at +25C as specified in the detailed acquisition specification. If none is stated, the device manufacturer shall use their standard procedure.

NOTE: This may be satisfied by performing a continuity/isolation test.

C.3.9.4 Subgroup 2. Each element will be visually inspected to ensure conformance to the applicable requirements of method 2009 and method 2032 of MIL-STD-883, and the applicable detailed/acquisition specification. This inspection shall be limited to the features that are inspectable.

*
C.3.9.5 Subgroup 4. The physical dimensions will be verified against the detailed/acquisition specification.
*
C.3.9.6 Subgroup 5. Wire bond strength testing. For wire bondable devices, perform wire bond strength testing in accordance with method 2011 of MIL-STD-883. The sample size shall include at least two ISP devices and ten bond wires minimum. For gold metallized Class K ISPs that at the hybrid level are intended to contain aluminum wire bonds, aluminum wires shall be placed as specified in the detail/acquisition specification and these wire bond samples shall be baked for one hour at 300C +10C in either air or an inert atmosphere prior to the performance of wire bond strength testing.
a.
At least ten wires, consisting of substrate to substrate bonds, shall be destructively pull tested. An equal number of bonds shall be tested on each sample ISP device.
b.
The ISP metallization shall be acceptable if no failures occur. If only 1 wire bond fails, a second sample of a minimum of ten additional wires shall be prepared using the same wire type/size and the same type of equipment as the failed bond. If the second sample contains one or more failures, or if more than one failure occurs in the first sample, then the ISP lot shall be rejected.
c.
The ISP inspection lot may be resubmitted to evaluation if the failure(s) was not due to defective ISP metallization.
*
C.3.9.7 Subgroup 7. Prior to solderability testing, the elements shall be submitted to a preconditioning temperature of +250C +10C for a period of 6 +0.5 hours, or equivalent. (See C.6.3.2.6 herein for examples of equivalent conditions).
*
C.3.9.8 Subgroup 8. Corrosion in the internal cavity area shall not be cause for rejection. This test shall be performed one time only for the life of the program, or as needed to evaluate changes in the fabrication process.
*
TABLE C-VII. Integral substrate/package element evaluation requirements.
Subgroup Class Test MIL-STD-883 Quantity (accept number) Reference paragraph
K H Method Condition
1 X X Electrical testing 100 percent C.3.9.3
2 X X Visual inspection 2032 and 2009 100 percent C.3.9.4
Not used
4 X X Physical dimensions 2016 3 (0) C.3.9.5
5 X X Wire bond evaluation 2011 10 wires (0) 20 wires (1) C.3.9.6
6 X X Thermal shock 1011 C 3 (0) C.3.9.2
X X Lead integrity 2004 B2
X X Seal 1014 A4
7 X X Solderability 2003 Solder temperature +245C + 5C 3 (0) C.3.9.7
8 X X Salt atmosphere 1009 A 3 (0) C.3.9.8

* C.3.10 Polymeric material evaluation. The polymeric materials used in device applications will be subjected to and pass the evaluation procedures detailed in method 5011 of MIL-STD-883.

C.4 PROCESS CONTROL

C.4.1 Description of process control. Process control is a methodology used to detect defective processes prior to completion of assembly. This section outlines the requirements for process control on two processes though process control may be applied to other areas. The indicated processes will be controlled in accordance with table C-VIII and C.4.2 and C.4.3.

C.4.2 Wire bonding.

C.4.2.1 General. A process machine operator evaluation will be performed:

a.
When a machine is put into operation.
b.
Periodically while in operation, not to exceed 4 hours.
c.
When the operator is changed. Change of certified auto wire bond operators is allowed without machine re-evaluation if all other machine conditions for evaluation are maintained.
d.
When any machine part has been changed.
e.
When any machine adjustment of the process parameters has been made.
f.
When the spool of wire is changed.
g.
When a new device type is started (unless the machine was evaluated using test samples that also simulate the new device type, see C.4.2.2).

C.4.2.2 Standard evaluation circuit (test coupon or test vehicle). Standard evaluation circuits (test coupons or test vehicles) that simulate the production device metal bonding system (e.g., thick film, thin film, aluminum bonding pads, plated gold) may be destructively evaluated in lieu of the product.

C.4.2.3 Process machines. Process machines not meeting the evaluation requirements will not be used.

C.4.2.4 Corrective action of process machine. A process machine may be returned to operation only after appropriate corrective action has been implemented and the machine has been evaluated and passed testing in accordance with table C-VIII as required.

C.4.2.5 Data record. A data record will be maintained and identifiable to each machine, operator, shift, and date of test.

C.4.2.6 Wire bonding.

C.4.2.6.1 Process machine/operator evaluation. Sample wires from three devices or a test sample will be destructively pull tested in accordance with method 2011 of MIL-STD-883, and as follows:

a.
Class H devices: A minimum of ten wires total consisting of wire bonds to elements metalization bonding systems (e.g., thick film, thin film, aluminum bonding pads, plated gold) typical of device assembly operation will be tested.
b.
Class K devices: A minimum of 15 wires total will be tested. As a minimum, wires tested will include one each from a typical transistor, diode, capacitor, and resistor die, and five wires from the header to the substrate, as applicable.
c.
Class H and Class K: Evaluation results are acceptable if no failure occurs at less than the value given in method 2011 of MIL-STD-883. If any of the sample wires fail, the machine/operator will be deactivated and corrective action taken. When a new sample has been prepared, tested, and has passed this procedure, the machine/operator has been certified or recertified, it can be returned to service.

*

*

*

MIL-PRF-38534G APPENDIX C

C.4.2.6.2 Lot sample bond strength. From each wire bonding lot, a random sample of at least two devices will be nondestructively tested in accordance with method 2023 of MIL-STD-883. This requirement does not apply to devices that are 100 percent nondestructively tested. Alternately, destructive pull testing in accordance with method 2011 may be performed. Devices with known visual wire bonding rejects will not be excluded from this sample.

a. A wire bonding lot consists of devices that are consecutively bonded using the same set-up and wire, by one machine/operator (operator changes are allowed for autobonders) during the same period not to exceed 4 hours.
b. In each sample device, at least 15 wires will be tested, including one wire from each type of transistor, diode, capacitor, and resistor chips, three wires from each type of integrated circuit, and five wires connecting package leads, as applicable. If there are less than 15 wires in the device, all wires will be tested. Sample devices will be inspected for lifted wires. Lifted wires resulting from bond pull testing will be counted as nondestruct pull test failures.
c. The wire bonding lot will be acceptable if no failure occurs. If one wire/bond fails, another sample of two devices will be selected and 100 percent nondestructively tested. If the second sample contains no failures, the wire bonding lot is acceptable. If the second sample also contains failure(s), or more than one wire/bond fails in the first sample, the bonding machine/operator will be removed from the operation.
d. The failures will be investigated and appropriate corrective action will be implemented. The machine/operator will be recertified in accordance with C.4.2.6.1 before being returned to operation. All devices bonded since the previous certification (lot sample bond strength test) will be subjected to 100 percent nondestructive bond strength testing (Class H).
e. For RF/microwave devices, test sample circuits that simulate the production device may be destructively evaluated in lieu of the product (see C.4.2.2). When test sample circuits are used, the data from this test

will be used for SPC monitoring of the process/product.

C.4.3 Seal testing. All Class K devices will receive fine leak testing, without pressurization (bomb) within one hour of removal from sealing atmosphere and prior to any other test. Class K devices may be sealed with any amount of helium tracer gas and shall pass the corresponding leak rate, or the helium leak rate may be calculated based on the helium tracer gas atmosphere.

37 percent Helium – 3.7 x 10-8 atm cc/sec He 10 percent Helium – 1.0 x 10-8 atm cc/sec He

5.0 percent Helium – 5.0 x 10-9 atm cc/sec He

3.0 percent Helium – 3.0 x 10-9 atm cc/sec He

Calculation: He leak rate = 1 x 10-7 x He%If failure occurs, the lid seal rework requirements will be followed.

CAUTION NOTE: The use of helium fill for high voltage devices may lead to ionization of the helium and cause the parts to fail. The device manufacturer should contact the qualifying activity to review and possibly eliminate this requirement for sealing in helium tracer gas if this requirement is shown to be degrading to the device.

C.4.4 Internal water vapor process monitor. The manufacturer shall develop and document a system to utilize method 1018, of MIL-STD-883, as a guideline to monitor the sealing process. Levels of all gases reported, including moisture, shall be evaluated to the extent necessary to detect any variation in the sealing process, based upon the manufacturer’s data. Reported gases shall be used to aid in identifying possible process deficiencies or evidence of out-of-control conditions

C.4.5 Testing for pure tin finishes. The manufacturer will develop a test plan that will assure no parts used in the hybrid have a pure tin finish.

TABLE C-VIII. Process control summary.

*

Operation Class MIL-STD-883 Paragraph
K H Method Condition
Wire bonding X X X X 2011 2023 C.4.2
Seal X 1014 A C.4.3
Internal water vapor X X 1018 C.4.4

C.5 DEVICE SCREENING

C.5.1 Description of device screening. Screening is a series of tests and inspections performed on each device in each lot in order to eliminate products which do not meet the performance requirements. Each device will be subjected to and pass all of the applicable screening tests and inspections in accordance with table C-IX and C.5.2 through C.5.13.

C.5.2 General.

a.
Additional tests and inspections may be performed where experience indicates justifiable concern for specific quality characteristics.
b.
Electrical test parameters, values, limits (including deltas), and conditions will be as specified on the acquisition document.
c.
All devices that fail any test criterion in the screening sequence will be removed from the lot at the time of observation, or immediately at the conclusion of the test, in which the failure was observed.
d.
When PDA, pattern failure, or delta limits have been specified, or other conditions for lot acceptance have been imposed, the required data will be recorded and maintained as a basis for lot acceptance.
e.
Once rejected and verified as a device failure, rework and subsequent rescreening in accordance with the limitations of this specification may be performed.
f.
Tests will be performed in the order specified in table C-IX, except as specified in C.5.11 and C.5.12.

C.5.3 Pre-seal burn-in test Pre-seal burn-in is optional.

C.5.4 Non-destructive bond pull test for Class K devices. Non-destructive 100 percent bond pull test will be performed for Class K devices. The total number of failed wires and the total number of devices failed will be recorded. The lot will have a PDA of 2 percent or one wire, whichever is greater based on the number of wires pulled in the wire bond lot or production lot. Failed lots may be resubmitted one time to 100 percent non-destructive bond pull test with a tightened PDA of 1.5 percent. The test will be performed in accordance with method 2023 of MIL-STD-883. Devices from lots that have been subjected to the non-destructive 100 percent bond pull test and have failed the specified Class K PDA requirement will not be delivered as Class H, G, D, or E product.

C.5.5 Internal visual inspection. Devices awaiting pre-seal inspection and accepted devices awaiting further processing will be stored in a controlled environment until sealed as specified in method 2017 of MIL-STD-883.

C.5.6 Visual inspection for damage. The manufacturer may inspect for damage after each thermal or mechanical screening step, or at any subsequent time in the screening sequence.

C.5.7 Particle impact noise detection (PIND) test. PIND will be performed in accordance with test method 2020

* of MIL-STD-883, condition A or B. For Class K devices, condition A shall be used unless otherwise specified. For Class K screening, the lot may be accepted on any of the five runs if the percentage of defective devices is less than 1 percent (or one device, whichever is greater). All defective devices will be removed after each run. Lots which do not meet the 1 percent PDA on the fifth run, or exceed 25 percent defectives cumulative, will be rejected.

C.5.8 Pre-burn-in electrical test.

a.
Pre-burn-in electrical testing is optional except when delta limit measurements are required. However, devices may be tested to remove defects prior to further screening and to form a basis for application of PDA criteria.
b.
This test need not include all device parameters, but will include those measurements most sensitive to, and effective in removing, electrically defective devices.
c.
When delta limits are specified in the device acquisition specification, the measurements will be recorded, and traceability will be maintained from the device to the corresponding electrical test data.

C.5.9 Burn-in. Burn-in will be performed on each device.

C.5.9.1 General.

a.
Pre-burn-in (interim burn-in for Class K) and post burn-in electrical parameters as specified in the device acquisition specification will be measured.
b.
Burn-in electrical conditions will be as specified in the device acquisition specification.
c.
Delta limits will be defined in the device acquisition specification when required.
d.
Delta measurements will be made on parameters specified in the device acquisition specification.
e.
The manufacturer will determine and document, prior to beginning burn-in, the criteria for the formation of burn-in lots (e. g., devices submitted to burn-in at one time, a production lot, or an inspection lot). The burn-in lot will be > 41 devices or all devices submitted to burn-in during a 1 week period.
f.
The manufacturer will not conduct burn-in in addition to that specified.
g.
Unless otherwise specified in the device acquisition specification, PDA, and pattern failure, analysis will be applicable only to +25C static tests (group A, subgroup 1).

C.5.9.2 Burn-in period.

a.
Class K devices will be burned-in in accordance with the time-temperature regressions specified in method 1015 of MIL-STD-883. The burn-in time will be equally divided into two successive burn-ins. Interim electrical tests in accordance with the device acquisition specification will be performed after the first burn-in to determine acceptable devices for the second burn-in.
b.
Class H devices will be burned-in in accordance with the time-temperature regressions specified in method 1015 of MIL-STD-883.

C.5.9.3 Failure analysis of burn-in screen failures for Class K devices. Catastrophic failures (e.g., shorts or opens measurable or detectable at +25C) after burn-in will be analyzed. Analysis of catastrophic failures may be limited to a quantity and degree sufficient to establish failure mode and cause. Failure analysis results will be documented and available to the Government representatives.

C.5.9.4 Lots resubmitted for burn-in. Burn-in lots that do not exceed twice the allowable PDA may be resubmitted for burn-in one time only (e.g., if the PDA limit is ten percent, then the lot may be resubmitted if less than twenty percent). Failure analysis for other than Class K is not required. Resubmitted lots will be kept separate from new lots and will be inspected for all specified characteristics using a tightened inspection PDA equal to the next lower number in the PDA series. The number of pattern failures allowed will be the same as required for the original burn-in.

C.5.9.5 Burn-in acceptance criteria. At the option of the manufacturer, burn-in acceptance will be based on PDA or pattern failures. Either option, or both, may be applied to a burn-in lot as acceptance criteria (i.e., if a lot exceeds PDA requirements, then pattern failure analysis may be used to determine if the lot is acceptable without performing a resubmitted burn-in).

C.5.9.5.1 General. Pattern failures are multiple device failures within a device burn-in lot with the same root cause of failure. When the PDA or pattern failures applies to delta limits, the delta parameter values measured after burn-in (100 percent screening test) will be compared with the delta parameter values measured prior to that burn-in.

C.5.9.5.2 PDA option.

C.5.9.5.2.1 PDA Class H. For Class H, the PDA will be 10 percent or one device, whichever is greater, regardless of burn-in lot size.

C.5.9.5.2.2 PDA Class K. For Class K, the PDA will be 2 percent or one device, whichever is greater, regardless of burn-in lot size. Class K PDA will be calculated on failures occurring during the second half of burn-in only.

C.5.9.5.3 Pattern failure option.

C.5.9.5.3.1 Pattern failure option, Class H. For Class H devices, when acceptance is based on pattern failures, all multiple device static failures at +25C shall be analyzed to determine root cause. Multiple device failures with the same root cause (three or more, depending on lot size) will be considered a “pattern failure”. If a “pattern failure” is established, the lot will be rejected; otherwise, the lot will be accepted regardless of PDA. In all cases, lots with device failures that do not exceed the PDA are acceptable and do not require pattern failure analysis. The number of device failures with the same root cause that establish a “pattern failure” will be based on lot size, as follows:

Number of failures

Lot size (x) that establish a pattern
x  20 21  x  40 40 < x  100 100 < x  300 300 < x  500 500 < x3 4 5 6 11 16

EXAMPLE 1: Lot size is 25 with four device static failures at +25C. If all four device static failures do not have the same root cause of failure (i.e., 3 or less failures

with the same root cause), then no “pattern failure” exists and the passing 21 devices are acceptable. If all four device static failures have the same root cause of failure, then a “pattern failure” exists

and the lot should be rejected. EXAMPLE 2: Lot size is 400 with 15 device static failures at +25C. The lot is acceptable (i.e., 10 percent PDA allows 40 device static failures).

EXAMPLE 3: Lot size 400 with 41 device static failures at +25C.

If ten or less of the device static failures are due to the same root cause, then a “pattern failure” does not exist and the lot is acceptable.

If 11 or more of the device static failures are due to the same root cause, then a “pattern failure” has been established and the lot is unacceptable.

In all instances where analysis of the failed devices indicates that the failure mechanism is due to poor basic processing procedures, a basic design fault, or non-screenable defects, the lot will be rejected.

* C.5.9.5.3.2 Pattern failure option, Class K. For Class K, when acceptance is based on pattern failures, all multiple device static failures at +25C shall be analyzed to determine root cause. The lot will be stopped and placed on hold if:

a.
Any two device static failures within the burn-in lot have the same root cause of failure (i.e., pattern failure established),or
b.
The total number of device static failures in the burn-in lot exceeds 5 percent.

The lots may be reworked and recovered if the failure is due to:

a.
A defect that can be effectively removed by rescreening the entire burn-in lot or,
b.
Random type defects which do not reflect poor basic device design or poor basic processing procedures.

In all instances where analysis of the failed devices indicates that the failure mechanism is due to poor basic processing procedures, a basic design fault, or non-screenable defects, the lot will be rejected.

C.5.10 Final electrical test.

a.
Final electrical testing will include all parameters, limits, and conditions of test which are specifically identified in the device acquisition specification as final electrical test requirements. As a minimum, final electrical testing will include group A electrical test, table C-Xa, subgroups 1, 2, and 3 (plus subgroups 4, 7, and 9 as applicable).
b.
Final electrical testing satisfies end-point electrical test requirements specified in the preceding test methods, and need not be duplicated.

* C.5.11 Seal (fine and gross leak).

a.
For Class K devices, the seal test may be performed in any sequence between the final electrical test and external visual, but it will be performed after all shearing and forming operations on the terminals.
b.
For Class H devices, the seal test may be performed in any sequence between the constant acceleration/mechanical shock test (or PIND, if applicable) test and external visual, but it will be performed after all shearing and forming operations on the terminals.
c.
For Class K and H devices, all device lots (sublots) having any physical processing steps that may affect the seal (e.g., solder dipping to the glass seal, etc.) performed following seal or external visual will be retested for hermeticity and visual defects. This will be accomplished by performing, and passing, as a minimum, a sample seal test (method 1014 of MIL-STD-883) using an acceptance criteria of a quantity (accept number) of 45 (0), and an external visual inspection (method 2009 of MIL-STD-883) on the entire inspection lot (sublot). For devices with leads that are not glass sealed, and that have a lead pitch less than or equal to .050 inch (1.27 mm), the sample seal test will be performed using an acceptance criteria of a quantity (accept number) of 15 (0). If the sample fails the acceptance criteria specified, all devices in the inspection lot represented by the sample will be subjected to the fine and gross seal tests and all devices that fail will be removed from the lot for final acceptance.

C.5.12 Radiography for Class K devices. Radiographic inspection can be performed anytime after PIND.

C.5.12.1 Solder sealed devices. Solder sealed devices will be tested 100 percent in accordance with method 2012 of MIL-STD-883.

C.5.12.2 Non-solder sealed devices. Non-solder sealed devices will be tested 100 percent in accordance with method 2012 of MIL-STD-883, unless otherwise specified.

NOTE: Radiography should only be deleted if the manufacturer and customer determine it to be unapplicable; or, of limited value for a given design or technology.

C.5.13 External visual screen. The final external visual screen will be conducted in accordance with, method 2009 of MIL-STD-883, after all other 100 percent screens have been performed. The manufacturer will inspect the devices 100 percent or on a sample basis using a quantity/accept number of 116 (0). If one or more rejects occur in this sample, the manufacturer may double the sample size with no additional failures allowed or inspect the remaining devices 100 percent for failed criteria and remove the failed devices from the lot. If the doubled sample also fails, the manufacturer will be required to 100 percent inspect the remaining devices in the lot for the failed criteria. Re-inspection magnification will be no less than that used for the original inspection for the failed criteria.

TABLE C-IX. Device screening.

*

Test or inspection MIL-STD-883 Requirement Reference paragraph
Method Condition Class K Class H
Preseal burn-in 1030 Optional Optional C.5.3
Non-destructive bond pull 2023 100 percent Optional C.5.4
Internal visual 2017 100 percent 100 percent C.5.5
Temperature cycling 1010 C, 10 cycles 100 percent 100 percent C.5.6
Mechanical shock or constant acceleration 2002 2001 B, (Y1 direction only) 3,000 g’s, Y1 direction only 100 percent 100 percent C.5.6
PIND 2020 Condition A shall be used for Class K, unless otherwise specified 100 percent Optional C.5.7
Pre-burn-in electrical test In accordance with applicable device specification 100 percent Optional C.5.8
Burn-in 1015 100 percent 100 percent C.5.9
Final electrical test In accordance with applicable device specification 100 percent 100 percent C.5.10
Seal (fine and gross) 1014 100 percent 100 percent C.5.11
Radiographic 2012 100 percent Optional C.5.12
External visual screen 2009 100 percent 100 percent C.5.13

C.6 CONFORMANCE INSPECTION AND PERIODIC INSPECTION

* C.6.1 Description of conformance inspection and periodic inspection. Conformance inspection (CI) and periodic inspection (PI) is a series of tests and inspections performed on samples of devices that have passed screening. These tests and inspections are used to further verify the performance requirements on a sample basis. Sample testing is necessary due to the fact that many of these tests are either destructive, expensive, or time consuming. Group A is considered CI, whereas groups B, C, and D are considered PI. CI and PI will consist of the tests and inspections specified herein. Devices will not be accepted or approved for delivery until all applicable CI and PI requirements have been met. The acquiring activity may approve delivery if groups A, B, C1, C3, C4, C5 and D testing have been completed and group C2, steady-state life test, has commenced. The manufacturer will maintain traceability of all devices delivered to the acquiring activity prior to completion of CI and PI testing for the purpose of notification/recall in case of test failure.

C.6.2 General. CI and PI for a given device type is determined by selection of a requirements option flow (see Table C-X). The requirements option flow selected will determine the CI and PI requirements for the specific device manufactured. Where applicable, inspection lot sampling will be in accordance with Appendix F of this specification.

Except where the use of final electrical test rejects or simulation samples (i.e., test coupons or test vehicles) are allowed, all devices will have been previously screened and subjected to and passed all final electrical tests. Successful completion of CI and PI for a given product assurance level will satisfy the requirements for any lower level device manufactured on the same certified line. If a lot is withdrawn in a state of failing to meet requirements and is not resubmitted, it will be considered a failed lot and reported as such.

C.6.2.1 Inspection lots. Inspection lots consist of a quantity of devices of a single device type (required for group A) or several different circuit types (allowed for groups B, C3, and D tests only) in a single package type and lead finish submitted at one time for final acceptance. All devices within each inspection lot will be finally sealed in the same period not exceeding 13 weeks.

C.6.2.2 Inspection lot formation. Inspection lot formation is required if the inspection lot is to be formally accepted by the lot related CI and PI testing of this specification or method 5005 of MIL-STD-883. If the in-line process verification testing alternative is used, inspection lot formation is not required.

NOTE: The device manufacturer has the right to elect not to use any solution or solvent identified within this specification, or related specifications, that has also been identified by the American Congress of Government Industrial Hygienists as being a potential or suspect carcinogen. Where the device manufacturer elects not to use a material, they shall notify the acquiring or qualifying activities and the customer in writing in clear, unambiguous language not subject to misinterpretation that this right has been exercised.

TABLE C-X. CI and PI summary.

Requirement Reference Option 1 (in-line) Option 2 (end-of-line)
General Paragraph C.6.3 C.6.4
Group A (CI) Paragraph C.6.3.1 C.6.4.1
Table C-Xa C-Xa
Group B (PI) Paragraph C.6.3.2 C.6.4.2
Table N/A C-Xb
Group C (PI) Paragraph C.6.3.3 C.6.4.3
Table C-Xc C-Xc
Group D (PI) Paragraph N/A C.6.4.4
Table N/A C-Xd

C.6.2.3 Sample selection. The number of hybrid microcircuits to be tested will be chosen (independent of lot size) by the manufacturer in accordance with the applicable requirements of options 1 or 2 herein. Initial samples and resubmitted samples, when applicable, will be randomly selected from the inspection lot. Lot acceptance is based on an accept number of zero. If a failure occurs, the failed subgroup or test may be performed once using double the sample size, or 100 percent, with zero failures allowed. For group C inspection, limited sample quantities may be used to meet the requirements of C.6.1 for production start-up. When limited sampling is used for start-up, a subsequent full sample, group C test will be performed within 6 months of initial group C or prior to exceeding the limited usage requirements of C.6.3.3.1.c, whichever comes first.

C.6.2.4 End-point. Electrical end-points will be measured and recorded when applicable.

C.6.2.5 Data. Test results will be recorded by inspection lot identification code (date code), or each inspection lot, when applicable. For in-line group B inspections, where inspection lots are not applicable, data records or logs will be maintained and available for review by the qualifying and acquiring activities. A summary of attributes results for all tests and measurements shall be part of the test report unless 100 percent recorded data is provided. Variable data will be provided when required by the device acquisition specification.

C.6.2.6 Non-functional samples. Electrically rejected devices from the same inspection lot may be used in all subgroups when end-point measurements are not required, provided that the devices have been subjected to all device screening conditions through burn-in.

C.6.3 Option 1 (in-line inspection). Option 1 CI and PI will be satisfied by in-line inspections and tests in accordance with C.6.3.1, through C.6.3.4.

C.6.3.1 Group A electrical testing. Group A electrical testing will be performed in accordance with table C-Xa,

C.6.3.1.1 through C.6.3.1.4 and the applicable device acquisition specification.

C.6.3.1.1 Group A general requirements. Group A subgroups will, as a minimum, include the final electrical testing subgroups 1, 2, and 3 (plus subgroups 4, 7, and 9, as applicable) and any other subgroups required by the device acquisition specification. Each inspection lot or sublot will be tested. A procedure for performing group A inspection in accordance with one or more of the following methods will be available for review by the qualifying activity. Each of these three methods are equivalent, therefore, the manufacturer may choose to use any of the three.

a.
Sampling: A single sample may be used for all subgroup testing. Where the required size exceeds the lot size, 100 percent inspection will be allowed.
b.
Sequence of test: Group A testing by subgroup, or within subgroups may, be performed in any sequence after subgroup 1, or alternate subgroups, (see method 1015 of MIL-STD-883) are performed.

C.6.3.1.2 End-of-line sample testing.

a.
Production performs all required final electrical screening tests.
b.
Quality assurance or quality designate randomly pulls samples in accordance with table C-Xa and performs acceptance testing.
*
C.6.3.1.3 In-line sample testing. Test samples for each individual group A subgroup will be randomly selected from the inspection lot after 100 percent screening of that subgroup (or subgroups, in the event that multiple subgroups are tested at the same temperature in sequence with the same test program). All devices in the inspection lot or sublot will be available for selection as a test sample and a fully random sample will be selected in accordance with table C-Xa from the total population of devices. In addition, a different person will check the entire test set-up and verify the use of the correct test program prior to testing the group sample.
*
C.6.3.1.4 In-line verification testing. In-line verification testing, generally, is performed in conjunction with final electrical tests at screening which satisfy the requirements of group A testing and need not be repeated. Therefore, if the screening tests are performed with the verification defined here, the requirements of group A have been met.
a.
For each test set-up (and operator for manual testing) production will test a correlation unit to ensure that the accuracy requirements of MIL-STD-883 are being met.
b.
Testing will be performed using the verified set-up.
c.
At the completion of testing (or at least once each week) or following a change of operators for manual testing, a different person designated by quality assurance verifies the production testing by:
(1)
Visually inspecting to confirm that the correct test fixture, equipment, software, and procedures were used.
(2)
Review actual testing or data of a controlled, known good, device of the device type being tested, utilizing the fixtures, equipment, software, and procedure(s) that were used by production. Variables data for all applicable group A tests at +25C will be read and recorded for the controlled unit. This data will be maintained with the lot or traceable to the lot.
(3)
Failure of the verification test will, as a minimum, require engineering to perform a detailed review of hardware, software, set-up, and parts. If the engineering review does not locate the problem, the verification unit will undergo failure analysis. The appropriate corrective action shall be taken based on the failure analysis results. The entire group of devices being considered for acceptance at the time of the failure may then be retested for the appropriate subgroup(s) acceptance, one time only, by repeating in-line verification testing. If the failure analysis does not specifically locate the problem, the lot may be reconsidered for acceptance, one time only, for 100 percent retesting of all of the devices to all of group A requirements and by repeating in-line verification testing.
C.6.3.2 Group B inspection. Group B inspection will be satisfied by performing in-line inspection sample monitoring as follows. Electrically rejected devices or test vehicles or coupons may be used in all subgroup tests in lieu of actual product. C.6.3.2.1 Physical dimensions. Randomly select devices from devices at final inspection such that, as a minimum, two devices of each package configuration presented for inspection are inspected each month. Confirm that all critical dimensions affected by the assembly process (e.g., package length, width, height, pin length, etc.) meet the requirements of the device acquisition specification. Critical dimensions unaffected by assembly processes may be inspected at final visual inspection or as a part of incoming (receiving) inspection. C.6.3.2.2 Resistance to solvents. Each inspection lot of marking ink will be tested prior to acceptance in accordance with method 2015 of MIL-STD-883. This series of tests will be performed on each type of surface which is used as the marking surface on completed devices (e.g., silver plate, abraded nickel plate, non-abraded nickel plate, etc.). One piece of each surface type will be tested in each solvent. Each week one device or element (lid or package) representative of each of the marking surfaces of each device marked during the week will be tested in accordance with method 2015 of MIL-STD-883, except that only "solvent D" is required. C.6.3.2.3 Internal visual and mechanical. Internal visual and mechanical inspection will be performed at pre-seal visual inspection in accordance with the requirements of method 2014 of MIL-STD-883. As a minimum, one device of each device type received at pre-seal visual inspection each month will be inspected. C.6.3.2.4 Bond strength. Wire bond strength in-line inspection will be performed as a part of wire bond certification and in accordance with method 2011 of MIL-STD-883. Each wire bond process (i.e., thermosonic gold, ultrasonic aluminum, thermal compressions gold, etc.) will be tested weekly. Where more than one machine exists for a specific process, the test sample will be rotated between machines such that all machines are tested at least once during each 13 week period when in operation. At the time of certification, an additional minimum 10 wires total (15 wires for Class K) will be bonded in the certification sample part(s). After completion of certification bond pulls, the parts with the additional 10 wires (15 wires for Class K) intact will be preconditioned for 1 hour at +300C minimum in either air or an inert atmosphere followed by destructive pull tests. Bond strength requirements (i.e., minimum pull forces) will be as specified in table C-Xb-1. No failures are allowed. C.6.3.2.5 Die shear. Die shear testing will be performed on two devices as a part of group C inspection (i.e., first lot and any element attach changes). Die shear testing during group C will be performed in accordance with method 2019 of MIL-STD-883.
*
C.6.3.2.6 Solderability. Solderability testing will be performed as a part of incoming inspection (i.e., package evaluation) as follows:

TABLE C-Xa. Group A electrical test. Packages will be temperature aged to one of the following conditions prior to performing the solderability test.

Subgroup Parameters Quantity (accept number)
1 Static test at +25C 116 (0)
2 Static tests at maximum rated operating temperature 76 (0)
3 Static tests at minimum rated operating temperature 45 (0)
4 Dynamic tests at +25C 116 (0)
5 Dynamic tests at maximum rated operating temperature 76 (0)
6 Dynamic tests at minimum rated operating temperature 45 (0)
7 Functional tests at +25C 116 (0)
8 Functional tests at maximum and minimum rated operating temperatures 76 (0)
9 Switching tests at +25C 116 (0)
10 Switching tests at maximum rated operating temperature 76 (0)
11 Switching tests at minimum rated operating temperature 45 (0)

6 0.5 hours at TA = +250C, 10C

22 1 hours at TA = +200C, 8C

160 8 hours at TA = +150C, 6C

When the device process flow includes an operation in which the package lead finish is changed prior to delivery of the device (i.e., a solder coating is applied), this operation will be performed on the package evaluation sample packages subsequent to the temperature aging. Following the temperature aging (and the lead finish application, if applicable), the sample packages will be solderability tested in accordance with method 2003 of MIL-STD-883 including an 8 hour (±15 min) steam aging.

C.6.3.2.7 Seal. Seal tests will be performed in accordance with method 1014 of MIL-STD-883. One-hundred percent testing will be performed on all devices between final electrical test and external visual.

C.6.3.3 Group C inspection. Group C inspection will be performed only on the first inspection lot submitted for inspection and as required to evaluate or qualify changes. Group C inspection will be performed in accordance with table C-Xc under the PI column and as outlined herein. For QML qualification, refer to section C.7 herein of this specification.

NOTE: The qualifying activity may approve alternate test plans for small lots of devices for group C inspection.

C.6.3.3.1 General.

a.
Group C sample selection: Samples for group C will be drawn from the first inspection lot submitted.
b.
Subgroup sampling: Subgroup 1 samples (or electrical rejects or mechanical samples, see C.6.2.6) will be used for the subgroup 3 and subgroup 4 tests.
c.
Limited usage samples: (See C.6.2.3 for group C production start-up). A minimum of five devices will be subjected to subgroup 2 when all three criteria listed below are met. A sample of 22 devices shall be selected otherwise.
(1)
A maximum of 500 devices in a single order against a single drawing (SMD or contractor prepared document).
(2)
A maximum of 2,000 devices acquired against a single drawing (SMD or contractor prepared document) on a given equipment-acquisition contract or program.
(3)
A maximum of 2,000 devices acquired against a single drawing (SMD or contractor prepared document) during a 12 month period for a given device and manufacturer.
d.
Tests will be performed in the order specified in table C-Xc.

C.6.3.3.2 Wire bond strength for option 1 PI product qualification. Two devices minimum will be tested to assure conformance to the applicable requirements of method 2011 of MIL-STD-883. Sample criteria will be based on the number of wires pulled using a sample size (accept number) of 22 (0) for Class H and a sample size (accept number) of 45 (0) for Class K devices. If the 45 (0) requirement for Class K cannot be met with two devices then all wires in two devices will be pulled with a minimum of 22 wires being pulled with zero failures. Sample wires will include one wire from each type transistor, diode, capacitor, and resistor chip; three wires from each type of integrated circuit; and five wires from package leads, as applicable. For test conditions F and H, test three dice for each method of interconnection, or all flip chips and beam lead dice, if less. The minimum allowable bond strength will be the post-seal bond strength requirements of method 2011 of MIL-STD-883.

C.6.3.3.3 Element shear for option 1 PI product qualification. The element (die/chip) shear test will be performed to a quantity (accept number) 22 (0) of the elements in the devices, or all elements in the two sample devices, whichever is less. The shear sample will be uniformly divided among all element types (or all elements, if less) in the device and will be performed in a minimum of two devices. The sample will include typical resistor, capacitor, integrated circuit, and discrete semiconductor elements. Alternative element shear may be conducted in accordance with C.7.5.4.11.1.

* C.6.3.3.4 Qualification to electrostatic discharge sensitivity (ESDS) classes. Initial qualification to an ESDS class or re-qualification after redesign will consist of qualification to the appropriate quality and reliability level plus ESDS classification in accordance with method 3015 of MIL-STD-883. ESDS classification levels and associated marking are defined in 3.7.5.8.2 herein.

NOTE: Manufacturers may, at their option, classify hybrid devices by:

(1)
Testing the devices using method 3015 or MIL-STD-883.
(2)
Classifying the hybrid to the lowest electrostatic voltage class level of the active devices ESDS listed in accordance with MIL-PRF-38535 that are accessible to leads of the device by analysis. Support data (from device testing or IC manufacturers’ ESD results) will be retained by the hybrid manufacturer for all device types compliant with this specification.
(3)
Classify hybrid devices as Class 0 (see 3.7.5.8.2 herein) without performing the ESD sensitivity test with procuring activity approval.

*

C.6.3.3.5 Resistance to soldering heat. Products qualified or re-qualified after 9 September 2009 require testing to method 2036 of MIL-STD-883, unless called out by contract, resistance to soldering heat testing is to be done for table C-Xc group C, QML, and PI testing prior to any other subgroup 1 testing. Unless otherwise specified, condition A testing shall be used for devices with leads and condition I testing shall be used for devices without leads.

* TABLE C-Xc. Group C testing.

Subgroup Class Test MIL-STD-883 Quantity (accept number) Reference paragraph
Method Conditions
K H PI QML
1 X X Resistance to Soldering Heat 2036 A or I 1/ N/A 5 (0) C.6.3.3.5
X X External visual 2009
X X PIND 2/ 2020 N/A A 5 passes 3/ C.7.5.4.1
X Temperature cycling 1010 C, 20 cycles C, 100 cycles C.7.5.4.2
X Temperature cycling 1010 C, 10 cycles C, 100 cycles C.7.5.4.2
X X X X Mechanical shock or Constant acceleration 2002 or 2001 B, Y1 direction or 3,000 g’s, Y1 direction B, Y1 direction and 5,000 g’s, Y1 direction C.7.5.4.3 C.7.5.4.4
X X Seal (fine and gross) 1014
X X PIND 2020 N/A A, 1 pass 3/ C.7.5.4.1
X X Visual examination 1010 C.7.5.4.5
X X End-point electrical 4/ C.7.5.4.6
2 X X Steady-state life test 1005 1,000 hours at +125C or 1,000 hours at +125C or C.7.5.4.7
equivalent in accordance with method 1005 equivalent in accordance with method 1005 5/ 22 (0) or 5 (0)
X X End-point electrical 4/ C.7.5.4.6
3 X X Internal water vapor content 1018 6/ 3 (0) or 5 (1) C.7.5.4.8
4 X X Internal visual 2017 Option 1 only 6/ 2(0) C.7.5.4.9
X X Wire bond strength 2011 Option 1 only C.7.5.4.10, C.6.3.3.2
X X Element shear 2019 or 2027 Option 1 only C.7.5.4.11, C.6.3.3.3
5 X X ESD a. Electrical parameters b. ESDS c. Electrical parameters 3015 Group A-1 Group A-1 N/A 3 (0) C.6.3.3.4

*

1/ Unless otherwise specified condition A testing shall be used for devices with leads, and condition I testing shall be

used for devices without leads.
2/ Manufacturer may choose to do PIND before temperature cycling at their option.
3/ Condition B may be used when specified in the applicable device specification or acquisition order.
4/ In accordance with the applicable device specification.

5/ When group C, subgroup 2 is being performed for QML qualification or limited PI or class I changes only, a sample size (accept number) of 5 (0) may be used.

6/ Subgroups 3 and 4 samples will have received subgroup 1 environmental exposure. Subgroup 3 samples may be used to perform subgroup 4 tests.

C.6.3.4 Nonconformance. Should failure occur in any of the above in-line inspections, an analysis to determine cause will be performed and corrective action, as necessary, will be imposed. The cause of failure, applicable corrective action, and disposition of product affected by the failure will be documented. This documentation will be available for qualifying and acquiring activity review.

C.6.4 Option 2 (end-of-line). Option 2 CI and PI will be satisfied by end-of-line inspections and tests in accordance with C.6.4.1 through C.6.4.5.

C.6.4.1 Group A electrical testing. Group A testing will be performed in accordance with table C-Xa, C.6.3.1 through C.6.3.1.4, and the applicable device acquisition specification.

C.6.4.2 Group B inspection. Group B inspection will be performed on each inspection lot for each package type and lead finish in accordance with table C-Xb and C.6.4.2.1 through C.6.4.2.5.

C.6.4.2.1 Internal visual and mechanical. The criteria for internal visual and mechanical examination will be the general requirements for design and construction, the requirements of the device acquisition specification and confirmation that the actual device construction is in accordance with the design documentation on file.

C.6.4.2.2 Bond strength. Destructive wire bond pull tests will be performed in accordance with method 2011 of MIL-STD-883 and as follows. Testing may be accomplished in-line anytime after device wire bonding. Coupons which simulate actual production processes and materials may be used in lieu of actual product.

a.
Two devices will be pre-conditioned and tested.
b.
Sample devices will be pre-conditioned for one hour minimum at +300C minimum in either air or an inert atmosphere.
c.
Sampling criteria will be based on the number of wires pull tested using a sample size (accept number) as follows:
(1)
Class H: 22 (0) wires, 11 wires each device (or all wires, if less).
(2)
Class K: 44 (0) wires, 22 wires each device (or all wires, if less).
d.
Sample wire locations will include wires from the following device locations, as applicable:
(1)
One wire from each type transistor, diode, capacitor, and resistor chip/die.
(2)
Three wires from each type integrated circuit.
(3)
Five wires connecting to package leads.
e.
The minimum allowable bond strength will be in accordance with table C-Xb-1. TABLE C-Xb-1. Bond strength requirements.
Gold or aluminum wire diameter, X (inches) Minimum bond strength (grams)
X < 0.001 0.5
X = 0.001 1.0
0.0001 < X < 0.003 (Method 2011 of MIL-STD-883, table I, post-seal requirement) minus 1 gram
0.003 < X (Method 2011 of MIL-STD-883, figure 2011-1, post-seal requirement) minus 10 percent

C.6.4.2.3 Die shear strength. The element (die/chip) shear test will be performed to a quantity (accept number) of 22

(0) of the elements in the devices, or all elements in the two sample devices, whichever is less. The shear sample will be uniformly divided among all element types (or all elements, if less) in the device and will be performed in a minimum of two devices. The sample will include typical resistor, capacitor, integrated circuit, and discrete semi-conductor elements. Alternative element shear may be conducted in accordance with C.7.5.4.11.1.

C.6.4.2.4 Solderability. At least 15 leads (or all leads, if less) will be randomly selected, identified, and tested.

C.6.4.2.5 Seal (fine and gross). This test is not required if the 100 percent seal test screening is performed between the final electrical test and external visual.

* TABLE C-Xb. Group B testing (option 2 only).

Subgroup Class Test MIL-STD-883 Quantity (accept number) Reference paragraph
K H Method Condition
1 X X Physical dimension 2016 2(0)
2 Not used
3 X X Resistance to solvents 2015 3(0)
4 X X Internal visual and mechanical 2014 1(0) C.6.4.2.1
5 X X Bond strength: a. Thermocompression b. Ultrasonic or wedge c. Flip-chip d. Beam lead 2011 C or D C or D F H 2(0) C.6.4.2.2
6 X X Die shear strength 2019 2(0) C.6.4.2.3
7 X X Solderability 2003 Solder temperature +245C + 5C 1(0) C.6.4.2.4
8 X Seal: a. Fine b. Gross 1014 A or B C or D 15(0) C.6.4.2.5
C.6.4.3 Group C inspection. Group C inspection will be in accordance with C.6.3.3 except table C-Xc, subgroup 4
tests are not required.
C.6.4.4 Group D inspection. Group D inspection will be performed on the first inspection lot submitted, and at

intervals not exceeding 26 weeks, for additional inspection lots (except as modified in C.6.4.4.4 and C.6.4.4.5 herein). Group D inspection will be performed in accordance with table C-Xd and C.6.4.4.1 through C.6.4.4.5.

NOTE: This testing may be accomplished during package evaluation at incoming inspection and need not be repeated.

C.6.4.4.1 Samples. Sealed empty packages that have been subjected to the handling and stress conditions of screening may be used for group D testing.

C.6.4.4.2 End-point electrical measurements. End-point electrical measurements are not required.

C.6.4.4.3 Lead integrity. Lead integrity testing will be performed on 15 leads minimum, or all leads if there are fewer than 15 leads for each device package.

C.6.4.4.4 Subgroup 3. Verify complete package (may verify case and cover separately) for compliance with subgroup 3. Corrosion in the internal cavity area is not cause for rejection. This test is performed one time for Class H and at 26 week intervals for Class K unless a change in material or plating is made.

C.6.4.4.5 Subgroup 4. For metal cases with leads separated by an insulator, measure insulation resistance between the metal body of the case and the leads that are isolated from the case. This test does not apply to nonmetallic cases. This test will be performed once for Class H unless a change in insulator material is made, and on every group D lot for Class K.

TABLE C-Xd. Group D package related tests.

Subgroup Test MIL-STD-883 Quantity (accept number) Reference paragraph
Method Condition
1 Thermal shock 1011 C 5(0)
Stabilization bake 1008 +150C, 1 hour 5(0)
Lead integrity 2004 2028 B2 (lead fatigue) D (leadless chip carrier) B1 for rigid leads (pin grid array leads) 1(0) C.6.4.4.3
Seal: a. Fine b. Gross 1014 A or B C or D 5(0)
2 Not used
3 Salt atmosphere 1009 A 5(0) C.6.4.4.4
4 Metal package isolation 1003 600 V dc, 100 nA maximum 3(0) C.6.4.4.5

C.6.4.5 Nonconformance. Lots which fail subgroup requirements of groups A, B, C, and D may be resubmitted in accordance with the provisions of C.6.4.5.1. A failed lot which is reworked, or is rescreened, (resubmittal to inadvertently missed process steps is not considered a rescreen) may not be resubmitted to the failed subgroups (and will be counted as a failure) for periodic groups B, C, and D PI coverages. The lot may be resubmitted only to the failed subgroup to determine its’ own acceptance. If a lot is not resubmitted, or fails the resubmission, the lot will not be shipped and the compliant marking and all references to this document will be removed.

C.6.4.5.1 Resubmission of failed lots. Resubmitted lots will be kept separate from new lots and will be clearly identified as resubmitted lots. When any lot submitted for CI and PI fails any subgroup requirement of groups A, B, C, and D tests, it may be resubmitted once for that particular subgroup at double the sample size with zero failures allowed. A second resubmission using double the initial sample size with zero failures allowed is permitted only if failure analysis is performed to determine the mechanism of failure for each failed device from the prior submissions and it is determined that failure is due to:

a.
A defect that can be effectively removed by rescreening the entire lot, or
b.
Random type defects which do not reflect poor basic device design or poor basic processing procedures.

In all instances where analysis of the failed devices indicates that the failure mechanism is due to poor basic processing procedures, a basic design fault, or nonscreenable defects, the lot will not be resubmitted.

C.7 QUALIFICATION

C.7.1 Description of qualification. The following criteria have traditionally been used to qualify all processes and materials used in the manufacture of chip and wire devices. It may not, however, be adequate for all, or new, technologies, in which case it should be used as a starting point for developing a qualification program. These criteria are intended to be used to characterize all process and materials used in the manufacture of the device. These criteria will be used to determine the acceptability of the processes and materials. All parts built using processes and materials that have successfully completed characterization and have been verified by the qualifying activity are considered qualified.

C.7.2 Rework qualification. Devices containing any unqualified rework will not be shipped until the rework has been successfully qualified. The rework and repair provisions will apply.

C.7.2.1 Qualification of rework. If any rework is to be qualified, and unless otherwise allowed, the manufacturer will build a qualification lot of reworked devices in which certified rework processes are performed. Standard evaluation circuits may be used. Qualification of rework by this method will require qualifying activity approval of the test plan and authorization to test (ATT) prior to assembly of the lot.

C.7.2.2 Delid/relid rework qualification procedures. If delid/relid rework is to be qualified, a qualification lot of delidded/relidded devices will be assembled that includes adequate devices for five qualification samples plus reserve units. Qualification of two or more delid/relid cycles require that the samples be delidded and relidded N+1 times to qualify "N" delid/relid cycles. The N+1 delid/relid rework operations will be performed on qualification devices that have been fully screened. In addition to the original screen, there will be N screens performed for N+1 delid/relid operations. The final screen will occur after the last delid/relid cycle.

NOTE: One delid/relid qualification will require no additional delid/relid operation.

C.7.2.3 Alternate qualification procedures for die/wire bond rework. The manufacturer may elect to review the initial production lot(s) from which qualification samples are selected for the occurrence of certified rework processes. The devices containing the rework to be qualified will be among those selected for qualification. If the amount of rework that was performed does not meet the sample size requirements, then additional die/bond rework will be performed on the selected rework samples, or more rework samples, to meet the minimum sample size requirements. If the initial qualification does not cover all certified rework, then subsequent production lot(s) will be reviewed for the occurrence of the unqualified rework until all certified rework is qualified. Delid/relid rework will not be qualified by these procedures.

C.7.3 Qualified manufacturers list (QML) qualification lot. The manufacturer may elect to perform the QML qualification in accordance with C.7.5 on an inspection lot of shippable product; or, the manufacturer may choose to build a lot of devices specifically for QML qualification and test them in accordance with C.7.5. Devices specifically built for QML qualification may either be actual product or standard evaluation circuits. Any actual products from the qualification lot are shippable as a compliant product after successful completion of qualification tests, subgroups 1, 3, 5, and 7 of table C-Xb, and table C-Xd tests.

C.7.4 Qualification test requirements. QML qualification will be accomplished by successful performance of group C testing as specified herein. For options 1 and 2, the group C testing will be the QML qualification tests and inspections specified in table C-Xc, under the QML column.

C.7.5 QML-38534 qualification. All tests, test methods, test conditions, and limits will be in accordance with MIL-STD-883 and as specified herein. If a qualification lot is withdrawn due to: (1) failing to meet qualification requirements or (2) lack of failure analysis, corrective action, and (3) no retesting is performed, the certification of the process or material (or both) to be covered by that qualification will be removed by the qualifying activity.

NOTE: The device manufacturer has the right to select to not to use any solution or solvent identified within this specification, or related specifications, that has also been identified by the American Congress of Government Industrial Hygienists as being a potential or suspect carcinogen. Where the device manufacturer elects not to use a material, they shall notify the acquiring or qualifying activities and the customer in writing in clear, unambiguous language not subject to misinterpretation that this right has been exercised.

C.7.5.1 Qualification eligibility. All processes to be qualified, and which are to be included on QML-38534, shall have been certified by the qualifying activity in accordance with 4.5.1.2 herein.

C.7.5.2 Test samples. Devices used for qualification will have been assembled using certified process (or as allowed by the Qualifying Activity) and screened in accordance with the applicable sections of C.6 herein. Qualification tests will be performed at facilities which have a laboratory suitability granted by the qualifying activity or approved by the manufacturer’s TRB. DSCC Form VQH-42H, “Device Product Baseline”, or its equivalent, will be used to baseline the specific processes and materials used in the qualification device.

C.7.5.2.1 Standard evaluation circuits. The manufacturer may elect to design and build a functional standard evaluation circuit (device) in lieu of utilizing actual product. If qualification is to be performed on a lot of devices built specifically for QML qualification, the device will be representative of the physical complexity of the product that will be covered by its testing. Standard evaluation circuits will not be used for group C PI product qualifications.

C.7.5.2.2 Sample selection. The sample size for each test is listed in the corresponding subgroups of the group C table C-Xc. Except for designated rework and nonfunctional devices, test samples will be randomly selected from the inspection lot. The manufacturer will retain a sufficient number of test devices from the lot to designate reserve samples.

C.7.5.2.3 Rework samples. For approval of rework qualification, the rework sample will be prepared in accordance with the manufacturer's baselined rework procedure. Three out of five devices tested in group C, subgroup 1 will have undergone the rework to be qualified. Two out of the three (3 (0)) devices tested in group C, subgroup 3 will contain the rework to be qualified. One of the two devices tested in group C, subgroup 4 will contain the rework to be qualified. The die and wire sample size requirements of C.7.5.4.10 and C.7.5.4.11 will be applied to reworked wire bonds and replaced die. Each rework method will be considered a different process.

C.7.5.2.4 Nonfunctional samples. Electrical rejects from final electrical testing in screening can be used in any subgroup of qualification tests where electrical testing is not required (e.g., for group C3, the rejects shall be subjected to group C1 prior to testing to group C3).

C.7.5.2.5 Disposition of samples. Samples destructively tested during qualification testing will be submitted to the qualifying activity with the qualification test report. Other devices in the qualification inspection lot will be properly disposed of.

C.7.5.3 Test failures.

C.7.5.3.1 Resubmission of failed samples or lots (or both). Unless otherwise specified (C.7.5.4.8.1), resubmission of failed samples, or additional samples from the same production lot, are not allowed unless such failures are due to equipment or operator errors in accordance with Appendix A. Notification of the qualifying activity is required.

C.7.5.3.2 Failures. All test failures will be reported to the qualifying activity, along with (if applicable) the resulting failure analysis and corrective actions needed to assess qualification status or alternatives.

C.7.5.4 Technology capability verifications. Table C-Xc under the QML column and C.7.5.4.1 through C.7.5.4.11 detail the testing requirements for qualification for both Class H and Class K devices.

C.7.5.4.1 PIND. The devices will show no evidence of loose particles. Any device showing loose particles when tested as specified herein will be analyzed. Failure of PIND will not jeopardize qualification provided the manufacturer demonstrates that the loose particle control is established and random samples, from product fabricated using the baselined process, are PIND tested after corrective action implementation. These random samples will have been screened (see C.5). The retest requirements will be determined based on the nature of the changes made as a result of the corrective action. Compliant Class H will receive 100 percent PIND screening until the manufacturer demonstrates to the qualifying activity that these requirements are met.

C.7.5.4.1.1 Loose particle recovery. The loose particles that caused the failures will be recovered and analyzed for the cause and source. If the analysis fails to locate the particles causing failure, the device will be carefully delidded and examined in an attempt to locate the particles. Captured particles will be evaluated at 30X minimum and the offending portion of the process will be identified and corrected.

*

*

* *

MIL-PRF-38534G APPENDIX C

C.7.5.4.2 Temperature cycling. Temperature cycling will be done in accordance with method 1010 of MIL-STD-883.

C.7.5.4.3 Mechanical shock. When QML qualification is being performed, constant acceleration is not an option in place of mechanical shock. Both tests are required for qualification.

C.7.5.4.4 Constant acceleration. For QML qualification, a stiffener plate (e.g., .125 inch (3.18 mm) aluminum) may be attached to the base of the package to prevent damage due to "oil canning" of the package.

C.7.5.4.5 Visual examination. The visual examination will be in accordance with the procedure of method 1010 or 1011 of MIL-STD-883.

C.7.5.4.6 Electrical requirements. Electrical end-points will be measured (and recorded when required) before starting and after completion of all tests in subgroups 1 and 2 of group C tests. Data from group A, or final electrical test, may be used as the initial end-point electrical before starting subgroup 1 and 2. Electrical end-point limits, life test conditions, and intermediate measurement requirements will be specified as required by the applicable device acquisition specification. Test samples which require variable data will be serialized prior to tests.

C.7.5.4.7 Steady-state life test. Steady-state life testing will be performed on each initial lot of each device type. If group C, subgroup 2 testing is being performed for QML qualification only, the sample size will be five with zero failures allowed. In addition, if group C2 testing is being performed for QML qualification only and life test has previously been completed, a 1,000-hour bake at +150C followed by end-point electrical testing may be performed in lieu of steady-state life testing.

C.7.5.4.8 Internal water vapor. An internal water vapor content sample of three devices (zero failures) or five devices (one failure) will be selected from the subgroup 1 sample. The use of electrical rejects, or representative mechanical samples, is permissible provided these samples have seen, as a minimum, the environmental exposures required in subgroup 1 (e.g., temperature cycle or thermal shock, mechanical shock or constant acceleration, and seal tests as applicable). If the sample size (accept number) of 5 (1) is used and the sample contains one (1) failure, then the manufacturer shall perform an engineering evaluation of the failure. The evaluation, as an example, may include data to support materials used, element evaluation of materials, cure process time and temperature, bake-out process, seal chamber environment, seal process, adequacy of hermeticity test process, trend analysis, historical data review, or the consideration of other gases present. The engineering evaluation data will be available for review. Different circuits in the same package type, and with an equal quantity (or fewer) of elements and the same materials, may be qualified by similarity to the qualified test sample.

C.7.5.4.8.1 Correlation testing for internal water vapor. At the manufacturer's option, if the initial test samples (three or five devices) fail internal water vapor, a second complete sample may be tested at an alternate laboratory that has been issued suitability by the qualifying activity. An additional three samples will be held by the manufacturer until final disposition of the test report. If this test passes, the devices and data from both test submissions will be submitted to the qualifying activity for review of internal water vapor criteria.

C.7.5.4.9 Internal visual. In addition to the criteria of method 2017 of MIL-STD-883, this inspection will verify that no damage has occurred to, and no contamination is present on, the elements and substrate. Manufacturer may disregard damage done by delidding and shall be recorded.

C.7.5.4.10 Wire bond strength for QML qualification. Two devices minimum will be tested to ensure the post-seal bond strength requirements of method 2011 of MIL-STD-883. The bond strength test will be performed on a sample size (accept number) of 15 (0) bond wires for each wire bond process (including each rework method outlined in

C.7.5.4.10.1 as a separate process) material (wire metallization and size), and bonding surface (posts, substrate metallization, and die pad) present in the device. Each 15 piece sample of wires will contain an even distribution of all wire sizes that can be qualified by that sample. No failures will be allowed. Additional devices will be added, if necessary, to meet the required wire sample size. The test wires will be predesignated.

C.7.5.4.10.1 Wire bond strength for QML rework qualification. Each of the following wire bond rework methods will be considered as separate methods requiring QML qualification:

a.
Gold ball bonds on substrate wires.
b.
Gold ball bonds on crescent bonds.
c.
Gold ball bonds on top of gold ball bonds.

* C.7.5.4.11 Element shear for QML qualification. Two devices minimum will be tested to ensure the die shear strength requirements of method 2019 of MIL-STD-883. The die shear test will be performed to a quantity (accept number) of 5 (0) elements for each element attach process (including element replacement as a separate process) and material present in the device. The materials considered will include the attach medium, element backing, and substrate/package attach area surface. Each five piece sample of elements will contain an even distribution of all element sizes that can be qualified by that sample. No failures will be allowed. Additional devices will be added if necessary to meet the required element sample size. The test elements will be predesignated.

C.7.5.4.11.1 Alternative to element shear testing. The manufacturer may utilize method 2027 of MIL-STD-883 to test the strength of organic and solder/alloy attachments on selected elements, except that the accept/reject criteria shall be based on an acceleration on the element of 50,000 g's in the Y1 direction (i.e., the minimum acceptable pull strength shall be 50,000 times the weight of the element).

NOTE: This alternative test is only appropriate for elements whose element thickness or mass is small in proportion to the area of attach (e.g., 10 mil thick GaAs die). The acceptance level is more severe than die shear testing for many element types. In cases where the element is relatively massive compared to the attachment area (e.g., tantalum capacitors), this method will give a false indication of die attach strength, pass, or fail.

Appendix D has been deleted. The appendix letter will be held for future use. This page intentionally left blank.

GENERIC DESIGN AND CONSTRUCTION CRITERIA

E.1 SCOPE

E.1.1 Scope. This appendix is intended to present the generic design and construction criteria which will be addressed by the manufacturer. The criteria of this appendix may be modified as described in this specification. This appendix is a mandatory part of the specification. The information contained herein is intended for compliance. Manufacturers may demonstrate a design and construction system that achieves as least the same level of quality as could be achieved by complying with this appendix.

E.1.2 Description of appendix E. This appendix will describe the generic design and construction criteria of this technology and is presented as requirements for conformance.

E.1 SCOPE 71
E.2 APPLICABLE DOCUMENTS 71
E.3 REWORK LIMITATIONS 71
E.4 DESIGN AND CONSTRUCTION 75
E.5 MAJOR CHANGES 77

E.2 APPLICABLE DOCUMENTS

E.2.1 General. The documents listed in this section are specified in sections E3, E4, or E5 of this specification. This section does not include documents cited in other sections of this specification or recommended for additional information or as examples. While every effort has been made to ensure the completeness of this list, document users are cautioned that they must meet all specified requirements of documents cited in sections E3, E4, or E5 of this specification, whether or not they are listed.

E.2.2 Government documents.

E.2.2.1 Specifications, standards, and handbooks. The following specifications, standards, and handbooks form a part of this specification to the extent specified herein. Unless otherwise specified, the issues of these documents are those cited in the solicitation or contract.

DEPARTMENT OF DEFENSE STANDARDS

MIL-STD-883 -Test Method Standard Microcircuits.

(Copies of these documents are available online at http://assist.daps.dla.mil/quicksearch/ or from the Standardization Document Order Desk, 700 Robbins Avenue, Building 4D, Philadelphia, PA 19111-5094.)

E.2.3 Order of precedence. Unless otherwise noted herein or in the contract, in the event of a conflict between the text of this document and the references cited herein, the text of this document takes precedence. Nothing in this document, however, supersedes applicable laws and regulations unless a specific exemption has been obtained.

E.3 REWORK LIMITATIONS

E.3.1 Description of the rework limitations. This section describes a typical rework program, including limitations and testing required to ensure that reworked devices are capable of meeting the performance requirements of this specification.

E.3.2 Rework and repair provisions. All rework and repair permitted on devices will be accomplished in accordance with procedures and safeguards documented in accordance with Appendix A. This documentation will reflect the processes, procedures, and materials to be used including verification or test data. Each process or procedure will be designated as rework or repair. This documentation will indicate that a decision to rework is made solely by the manufacturer while a repair decision will be made with the concurrence of the customer, except for repairs permitted by this specification. A typical example of rework is the removal of a defective element and replacement with a new element. An example of repair is the use of an organically attached molytab to replace a previously alloy attached semiconductor element.

* E.3.2.1 General rework and repair provisions.

a.
All temperature excursions during any rework or repair will not exceed the baselined rework or repair limitations. Time and temperature limits will be specified.
b.
Replate of package sealing surface on delidded packages is not permitted.
c.
The minimum distance between the glass-to-metal seals and the package sealing surface will be at least .040 inch (1.02 mm) after final seal to prevent damage to lead seals by welding adjacent to them. (Applies to seam welding only.)
d.
For Class H devices, any device that is reworked or repaired after pre-seal visual inspection will be subjected to full screening or rescreening as applicable. If a device has not been subjected to a given required screen prior to rework or repair, then that device will be subjected to that screen after rework or repair. If a device has been subjected to a given screen prior to rework or repair, then rescreening applies as follows:
(1)
Pre-seal visual inspection. Inspect for general damage (low magnification in accordance with method 2017 and method 2032 of MIL-STD-883) which might have been caused by the rework or repair and perform a complete method 2017 or method 2032 inspection of the reworked or repaired element or area (e.g., replaced die, wire bonds, etc.).
(2)
Temperature cycle or shock, mechanical shock or centrifuge, seal, and external visual. Rescreen all rework or repair devices 100 percent.
(3)
Burn-in. Devices delidded to rework package seal failures do not require burn-in rescreen. Devices which have had elements reworked, have been wire bonded or rewire bonded, or have been active trimmed/tuned require 100 percent burn-in rescreen.
e.
Class K devices that are reworked or repaired prior to sealed burn-in shall be (re)screened as follows:
(1)
If no active elements or wire bonds affecting them have been replaced, full (re)screening shall apply with the following allowances:
(a)
Only the replacement wires need be non-destructively pull tested.
(b)
Pre-seal burn-in need not be repeated.
(c)
Post-seal burn-in may be reduced to 240 hours at 125C, or at the time temperature equivalent, provided total pre-seal burn-in on active devices is 320 hours or at the time temperature equivalent.
(2)
If active elements or wire bonds affecting them have been replaced, full (re)screening shall apply with the following allowances:
(a)
Only the replacement wires need be non-destructively pull tested.
(b)
Pre-seal burn-in need not be repeated.
(c)
Total burn-in (pre-seal plus post-seal) shall be 320 hours at 125C, or at the time temperature equivalent.
f.
Class K devices that are reworked or repaired after sealed burn-in.
(1)
If no active elements or wire bonds affecting them have been replaced, full (re)screening shall apply with the following allowances:
(a)
Only the replacement wires need be non-destructively pull tested.
(b)
Pre-seal burn-in need not be repeated.
(c)
Sealed burn-in may be reduced to 240 hours at 125C, or at the time temperature equivalent if burn-in was previously performed.
(2)
If active elements or wire bonds affecting them have been replaced, full (re)screening shall apply as follows:
(a)
Only the replacement wires need be non-destructively pull tested.
(b)
Pre-seal burn-in need not be repeated.
(c)
Burn-in (pre-seal plus post-seal) shall be 320 hours at 125C, or at the time temperature equivalent.
g.
When flux is required for rework or repair, the specific flux and detailed procedures for its use and subsequent special cleaning operations will be documented and approved in accordance with Appendix A.
h.
Replacement elements will not be bonded onto the chip element they are to replace.

E.3.2.2 Element wire rebonding. Wire rebonding of elements other than substrates, thick film elements, capacitors, and package posts will be permitted with the following limitations:

a.
No scratched, voided, or discontinuous paths or conductor patterns on an element will be repaired by bridging with, or addition of, bonding wire or ribbon.
b.
All rebonds will be placed on at least 50 percent undisturbed metal (excluding probe marks that do not expose underlying oxide). No more than one rebond attempt at any design bond location will be permitted. No rebonds will touch an area of exposed oxide caused by lifted or blistered metal. Bond-offs required to clear the bonder after an unsuccessful bond attempt need not be visible, will not be cause for reject and will not be counted as a rebond. For Class K, the total number of rebond attempts (exclusive of element replacement or tuning wire replacement) will be limited to a maximum of 10 percent of the total number of bonds in the device. The 10 percent limit on rebond attempts may be rounded to the nearest whole number to the 10 percent value.

E.3.2.3 Substrate, thick film elements, capacitors, and package post wire rebonding or repair. Wire rebonding on substrates and package posts will be permitted with the following limitations:

a.
Scratched, open, or discontinuous substrate metallization paths or conductor pattern on a substrate, not caused by poor adhesion, may be repaired by bridging with, or by addition of, bonded conductors having current carrying capacity at least three and one-half times the maximum calculated operating load current for the conductor or three and one-half times the current capacity of the wire bond connection terminating on the damaged conductor path. The quantity of repairs will be limited to one for each one-half square inch, or fraction thereof, of substrate area. This repair is not applicable to thick film elements, capacitors, or package posts.
b.
No rebonds will be made over intended bonding areas in which the top layer metallization has lifted, peeled, or has been damaged such that underlying metallization or substrate is exposed at the immediate bond site.

E.3.2.4 Compound bonding. Compound bonding is permitted only as follows:

a.
When required for design, rework, or repair, gold compound bonds will be limited to one bond over the original bond, wire, or ribbon.
b.
Only monometallic compound bonds of the same size wire or ribbon are permitted (i.e., the original bond wire and that used for compound bonding shall be the same material).
c.
For rework or repair, the maximum number of compound bonds will not exceed 10 percent of the total number of wires.
d.
For rework or repair, a corrective action system shall be utilized in order to reduce the number of compound bonds.
e.
For rework or repair, all compound bonds will be 100 percent non-destructive pull tested in accordance with method 2023 of MIL-STD-883.
f.
A compound bond will not be used to connect two wires.
g.
All compound bonds will meet the visual criteria in method 2017 of MIL-STD-883.

E.3.2.5 Element replacement. Element replacement will be permitted with the following limitations:

a.
Any polymer attached element may be replaced two times at a given location on any device. Any element attached with polymer to metal, other than substrate metallization (e.g., pedestals, ribs, carriers, etc.) may be replaced four times at a given location. The number of polymer attached tuning element replacements will be defined in the manufacturers' baseline documentation, and approved by the qualifying activity.
b.
Any metallic attached element may be replaced one time at a given location.
c.
Any metallic attached element onto a plated tab, where the tab is attached to a substrate with a higher temperature metallic attach process, may be replaced two times.
d.
Substrates may be removed, replaced, or put into a new package one time. This restriction does not apply to substrates attached into a package using mechanical fasteners.

E.3.2.6 Seal rework. The use of polymers to affect, improve, or repair any hermetic package seal will not be permitted.

E.3.2.6.1 Lid seal rework. It will be permissible to perform seal rework without delidding on devices that fail fine leak testing one time, only if tracer gas is included during the original sealing operation and under all of the following conditions:

a.
Fine leak testing, without pressurization (bomb), shall be performed immediately after sealing prior to any other test.
b.
Devices will be stored in a nitrogen environment for a maximum of 4 hours between initial seal and reseal without replacing the cover.
c.
Devices will be submitted to a predetermined vacuum bake prior to reseal.

d. Solder sealed packages may not be reworked in accordance with this procedure. NOTE: The above leak testing will not be used as a substitute for the fine leak testing.

E.3.2.6.2 Other seal rework. It will be permissible to rework other seals (e.g., feed-throughs, connectors, seal plugs, windows, etc.) at metal-to-metal interfaces on unlidded devices.

E.3.2.7 Delidding of devices. Devices may be delidded and relidded for rework or repair provided the delid-relid procedures, controls, and resulting data are baselined. The number of delid-relid cycles allowed will be in accordance with E.3.2.7.1 or E.3.2.7.2. Delid-relid history (i.e., traceability by lot number or serial numbers) will be maintained by the device manufacturer.

E.3.2.7.1 Solder sealed devices. Class H solder sealed devices may be delidded-relidded one time. Class K solder sealed devices may not be delidded-relidded.

E.3.2.7.2 Welded devices. Only seam sealed, overlapping pulse welded, or laser welded packages designed for delid-relid may be delidded-relidded. Devices may be delidded-relidded N times, with N = 2 maximum for Class K.

E.4 DESIGN AND CONSTRUCTION

E.4.1 Description of design and construction. This section describes a typical design and construction program used to ensure that these devices will be capable of meeting of the performance requirements of this specification.

E.4.2 Design and construction. Device design and construction will be in accordance with the requirements specified herein and the device acquisition specification or SMD. The design will be capable of passing all applicable tests and screens (see Appendix C).

E.4.2.1 Package. Devices will be hermetically sealed in glass, metal, or ceramic (or combinations of these) packages. The following provisions apply to package construction and sealing:

a.
No adhesive or polymeric materials will be used for package lid, or feedthrough, attach (or seal) or rework/repair.
b.
Polymer impregnations or secondary seal (backfill, coating, other uses or organic or, polymeric materials to effect, improve, or rework/repair the seal) on the device package will not be permitted.
c.
Flux will not be used in the final sealing process.
d.
In the case of final lid seal using a welding process, sufficient distance will be maintained between the lid seal and any glass-to-metal seal so as to preclude damage or degradation of the glass-to-metal seal.
e.
Package materials will be selected such that thermal expansion rate mismatches between different materials do not compromise package integrity or hermeticity during applicable temperature excursions.

E.4.2.2 Polymeric materials. The cure temperature of polymeric materials will not be exceeded after completion of final seal. Polymeric materials will meet the requirements of method 5011 of MIL-STD-883. For materials outside the scope of method 5011, the manufacturer will develop an alternative plan.

E.4.2.3 External metals. External metal surfaces, other than seal weld areas, will meet the applicable corrosion resistance requirements, or will be plated to do so.

E.4.2.4 Other external materials. External parts, elements, or coatings, including markings, will be non-nutrient to fungus and will not blister, crack, flow, or exhibit defects that adversely affect storage, operation, or environmental capabilities of the device under the specified test and operating conditions.

E.4.2.5 Design and manufacturing documentation. Design, topography, schematic circuit information, manufacturing flowcharts, and process control documents for all devices will be available for review by the acquiring activity and the qualifying activity. This documentation will depict the physical and electrical construction of the device. Each device will be traceable to a specific part, drawing, or type number, and to the production lot and inspection lot codes under which devices are manufactured and tested (so that revisions can be identified).

E.4.2.5.1 Schematic diagrams. The device schematic diagram, logic diagram, or combination thereof, will be available with sufficient detail to represent all electrical elements functionally designed into the device together with their values (when applicable). For complex devices, or those with redundant detail, the overall device may be represented by a logic diagram in combination with schematic details.

E.4.2.6 Internal conductors. Internal thin film conductors on elements (metallization stripes, contact areas, bonding interfaces, etc.) and internal wires (wires, ribbons, etc.) will be designed such that no properly fabricated conductor will experience current in excess of the maximum value calculated by the manufacturer to preclude damage or degradation to the conductors, except by design (e.g., internal fuses). The following conditions will be considered when calculating the maximum current:

a.
Calculate the current density at the point of maximum current density (i.e., greatest current in accordance with unit cross section) for the specified device type.
b.
Use a current value equal to the maximum continuous current (at full fan-out for digitals or at maximum load for linears) or equal to the simple time-averaged current obtained at maximum rated frequency and duty cycle with maximum load, whichever results in the greater current value at the point of maximum current density. This current value will be determined at the maximum recommended supply voltage and with the current assumed to be uniform over the entire conductor cross-sectional area.
c.
Use the minimum allowed metal thickness in accordance with manufacturing specifications and controls including appropriate allowance for thinning experienced in the metallization step (via). The thinning factor over a metallization step is not required unless the point of maximum current density is located at the step.
d.
Use the minimum allowable actual conductor widths (not mask widths) including appropriate allowance for narrowing or undercutting experienced in metal etching.
e.
Do not include areas of barrier metals and non-conducting material in the calculation of conductor cross-section.

E.4.2.7 Device finishes. Tin is prohibited as a final finish and as an undercoat. The use of tin-lead finish is acceptable provided that the lead content is a minimum of 3 percent by weight.

E.4.2.7.1 Internal element finishes. Finishes on interior elements (e.g., bonding pads, posts, tabs, element backing, element leads, attach material, etc.) shall be such that they meet lead and element bonding requirements and any applicable design and construction requirements. The use of pure tin on interior elements is prohibited. Tin lead alloy with a minimum of 3 percent lead is acceptable on interior elements. Tin alloys other than lead used on interior elements or as an attach material require that the tin content be less than or equal to 97percent and require approval of the qualifying activity and notification of the acquiring activity.

E.4.2.7.2 External element finishes. Finishes of all external leads, or terminals, and all external metallic package/lid elements will meet the applicable corrosion resistance requirements.

* E.4.2.7.3 External lead finish. Lead finish thickness measurements will be taken halfway between the seating plane and the tip of the lead. The finish system on all external leads or terminals will conform to one of the following:

a.
Hot solder dip. The hot solder dip will be homogeneous with a minimum thickness of 60 microinches (1.52 m) for round leads and, for other shapes, a minimum thickness at the crest of the major flats of 200 microinches (5.08 m) solder (SN60 or SN63). For leadless chip carrier devices, the solder will cover a minimum of 95 percent of the metallized side castellation or notch and metallized areas above and below the notch (except the index feature if not connected to the castellation). Terminal area intended for device mounting will be completely covered. The hot solder dip on leads is applicable to either E.4.2.7.3.a.(1) or E.4.2.7.3.a.(2) as follows:
(1)
All outlines with hot solder dip over a finish with c or d as follows. The hot solder dip shall extend beyond the effective seating plane. If the seating plane is not defined, the hot solder dip shall extend to within .040 inch (1.02 mm) of the lead/package interface and is bound by the lead/package interface. For dual inline type termination forms (through hole and surface mount), the plane of the two longest lead/package interfaces will define this bound. For leadless chip carrier devices, the hot solder dip shall cover a minimum of 95 percent of the metallized side castellation or notch and metallized areas above and below the notch, except the index feature if not connected to the castellation. Terminal area intended for device mounting shall be completely covered.
(2)
All outlines with hot solder dip over base metal or noncompliant coating. The solder shall extend to the glass seal or point of emergence of the metallized contact or lead through the package wall. If solder is applied up to the seal, a hermeticity test and external visual in accordance with C.5.11.c shall subsequently be performed and passed. For leadless chip carrier devices, the hot solder dip shall completely cover the metallized side castellation or notch and metallized areas above and below the notch, except the index feature if not connected to the castellation
b.
Tin-lead plate. Tin-lead plate will have in the plated deposit 3 percent to 50 percent by weight lead (balance nominally tin) co-deposited. As plated tin-lead will be a minimum of 300 microinches thick and will contain no more than 0.05 percent by weight co-deposited organic material (measured as elemental carbon). Tin-lead plating may be fused by heating above its liquidus temperature. Fused tin-lead will be a minimum of 200 microinches thick. Tin-lead plate is applicable:
(1)
Over a finish in accordance with entry c as follows, or
(2)
Over the basis metal.

* c. Nickel plate or undercoating. Electroplated nickel, or electroless nickel phosphorous nickel undercoating, or finishes, will be 50 to 350 microinches (1.27 m to 8.89 m) thick measured on major flats or diameters. Electroless nickel will not be used as the undercoating on flexible or semiflexible leads and will be permitted only on rigid leads or package elements other than leads (see method 2004 of MIL-STD-883 for definitions of flexible and semiflexible leads).

Combinations of pre-plate electroplate or electroless nickel and final electroplate nickel finishing shall not exceed 700 microinches/17.78 micrometers total. Combinations of pre-plate electroplate nickel and final electroless nickel plate finishing shall not exceed 600 microinches total.

d. Gold plate. Gold plating will be a minimum of 99.7 percent gold, and only cobalt will be used as the hardener. Gold plating will be a minimum of 50 microinches (1.27 m) and a maximum of 225 microinches (5.72 m) thick. Gold plating will be permitted only over nickel plate or undercoating in accordance with c above.

E.4.2.8 Thermal design. Thermal design analysis will be performed and will establish, as a minimum, that functional device elements are operating within their design temperature ratings when the device is operated at the specified maximum operating case temperature. Finite element analysis is an acceptable thermal design analysis technique. All active and passive elements will be derated.

E.4.2.9 Electrical circuit design. Worst case circuit design analysis will be performed and include the following evaluations as a minimum (applicable to the design):

a.
Electrical element stress over the specified operating temperature range will be within the specified derating criteria under worst case temperature conditions.
b.
Evaluated to meet the Group A CI test limits at worse case operating temperature conditions, as applicable.

E.4.2.10 Assembly process induced environments. When the next level assembly environment (e.g. solder attach to a board assembly) is specified, the design and construction shall be considered.

E.5 Major changes. This section describes how to handle major changes to devices or processes.

E.5.1 Manufacturer controls. The manufacturer is responsible for controlling all materials and processes (see A.3.2.3) involved in the production of devices compliant to this specification. Any change to the supplier, materials, or processes which may impact the reliability and performance of the final device, will be controlled and evaluated by the manufacturer. This may include documentation of all changes, additional testing of devices, and/or notification of customers and the qualifying activity. This includes obsolescence and availability issues.

E.5.2 Class I, major changes. A thorough description of the proposed change, acceptable engineering data, and a suggested test plan designed to demonstrate that the changed product will continue to meet the acquisition document requirements including performance, quality, reliability, or interchangeability will be generated and provided to the qualifying activity for review and approval. The manufacturer will proceed with the change after approval of the test plan. To minimize the need for additional tests due to insufficient details or data regarding the proposed changes, it is recommended that the test plan be discussed with the acquiring or qualifying activity prior to commencing the test program. Test guidelines for each major change listed herein are provided in table E-I for product design changes (column CI and PI) and baselined process changes (column QML). The subgroup designations in table E-I correspond with the subgroups designated in tables C-Xa, C-Xb, C-Xc, and C-Xd of Appendix C. Tests will be performed on samples of the first devices or subassemblies manufactured incorporating the changes. Upon completion of the prescribed test program, the results will be recorded and available for review. At the manufacturer's option, devices incorporating the change may be manufactured and tested prior to approval; however, all shipments of these changed devices will be withheld until formal documented approval is granted by the acquiring activity or qualifying activity. Changes representative of those which are subject to the requirement are:

a.
Change of substrate material (e.g., alumina versus BeO).
b.
Change of materials or inks deposited on the substrate (e.g., (1) Conductor: Gold versus copper; (2) Resistor: Ruthenium base versus carbon) or deposit method (e.g., thin film versus thick film).
c.
Cumulative change of nominal process time of deposited materials exceeding 25 percent or nominal process temperature exceeding +50C or 10 percent, whichever is greater, since the last qualification or major change notification.
d.
Cumulative changes to substrate mask design that reduce nominal design dimensions, spacing, or isolation more than 25 percent, or changes to electrical parameters of the deposited elements beyond the design limits since the last qualification or major change notification.
e.
Change of trimming method (e.g., abrasive versus laser).
f.
Increase in substrate fabrication multi-layer conductor levels more than one conductor level from the QML listing.
g.
Change of attach material (e.g., epoxy A versus epoxy B) or of attachment method (e.g., epoxy versus eutectic) for device elements.
h.
Change in the baselined attach process temperature for element or substrate attachment which exceeds +25C or 10 percent, whichever is greater.
i.
Change of die type (e.g., 2N2484 versus 2N2905) or other element types (e.g., tantalum versus ceramic capacitors or thin film versus thick film resistors) mounted on the substrate.
j.
Increase in element attach area more than 50 percent from the QML listing.
k.
Change of baselined wire bond method (e.g., ultrasonic versus thermal compression) or wire size changes greater than 1.0 mil.
l.
Any change in specified material composition or purity of the wire.
m.
Increase in substrate attach perimeter more than 50 percent of the QML listing.
n.
Change of package configuration (e.g., platform versus bathtub), lid or covers (e.g., step lid versus drawn cover) or plating material.
o.
Change of package or lid base material (e.g., nickel versus stainless steel).
p.
Changes to finished device dimensions exceeding the acquisition document, or SMD envelope tolerances.
q.
Change of seal method (e.g., seam weld versus laser weld), or seal material (e.g., SnAg versus AuSn).
r.
Change in the baselined seal process time, temperature, or vacuum of more than 10 percent, or sealing atmosphere, except for the addition of helium.
s.
Increase in package seal perimeter more than 50 percent from the QML listing.
t.
Increase in lead count for QML listing in accordance with package type.
u.
Changes to the baselined product flowchart in which element evaluation, screening, CI and PI options, and any operations are added or deleted, except for additional inspections and SPC operations.
v.
Addition of new processes or materials to the QML.
w.
Assembly operation or test facility move.
x.
Class I and Class II changes for Class K.
y.
Change of die manufacturer for class K devices, all Class I and Class II changes since the original baseline qualification (CI, PI, QML).
z.
For radiation hardened devices, all Class I and class II as defined in Appendix G changes since the original baseline qualification (CI, PI, QML).

aa. Change of element backside or topside finish (e.g. palladium termination to gold, gold plated lead to nickel) from QML listing.

bb. Change affecting ESD level.

NOTE: Table E-I provides examples for PI and QML tests to be performed for major changes. Consideration to increase or decrease the testing shall be given depending on existing data and on the particular circumstance. Manufacturers shall evaluate the impact of the change, determine any necessary testing, and notify the qualifying activity, acquiring activity or TRB.

* Changes that may result in increased TJ of components, shall be reviewed and, as necessary, justified through data on similar devices, or applications, or repeat life testing to demonstrate performance at the increased TJ. C2 need not be repeated where data exists to justify the increased TJ.

TABLE E-I. Testing guidelines for major product/process changes. 1/ 2/ 3/ 4/ 5/ 6/ 7/ 8/ 9/

Major changes a. Change of substrate material b. Change of material deposited on substrate (1) conductor (2) resistor (3) dielectric (4) deposit method c. Process/time/temperature changes Recommended test subgroups of table C-Xc, (unless otherwise noted) PI QML C1 C2, C3, C4 C1 C2, C3, C4 C1, C2 C4 C2 C2 C1, C4, C2 C1 ,C2 C4 C1, C2 C1, C2 C1 C2 C4 Notify qualifying activity with your recommendation Notify qualifying activity with your recommendation Variable data required (subgroups) PI QML C2, C3, C4 C2, C3, C4 C2, C4 C2 C2 C2, C4 C2, C4 C2 C2 C2, C4 N/A N/A Explanation for recommended test guideline C1 then C4 will demonstrate mechanical integrity via electrical test, visual inspection (adhesion, cracking, delamination), bond strength, and die shear of the elements on the substrate. C2 will demonstrate electrical performance differences and long term reliability of substrate material change. C3 will validate outgas properties of substrate material. C2 will demonstrate electrical performance differences and long term reliability of deposited materials. C1 then C4 will demonstrate mechanical integrity via electrical test, visual inspection (adhesion, cracking, delamination), bond strength, and die shear of the elements on the substrate material.

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APPENDIX E

80

MIL-PRF-38534G

APPENDIX E

TABLE E-I. Testing guidelines for major product/process changes – Continued.

Major changes Recommended test subgroups of Table C-Xc (unless otherwise specified Variable data required (subgroups) Explanation for recommended test guideline
PI QML PI QML
d. Substrate mask design Pre-cap, C2 N/A C2 N/A In-line pre cap inspection will validate the internal inspection and mechanical requirements. C2 will demonstrate electrical performance differences from Group A and long term reliability of the mask change.
e. Change of trim method C2 C1, C2, C4 C2 C2, C4 C1 then C4 will demonstrate active trim integrity via electrical test; visual inspection, bond strength, and die shear will provide supporting data on the affects of the active trim. Group C2 will demonstrate electrical performance differences from Group A and long term reliability of trim method.
f. Increase in multi-layer conductor levels, more than one level C1, C2, C4 C1, C2, C4 C2, C4 C2, C4 C1 then C4 will demonstrate mechanical integrity via electrical test; visual inspection (adhesion, cracking, delamination), bond strength, and die shear will verify the multilayer increase. C2 will demonstrate electrical differences from Group A and long term reliability.
g., h. Change of attach material or attach process temperature C1 C3, C2 , C4 (no wire bond pull) C1 C2, C3, C4 (no wire bond pull) C2, C3, C4 (no wire bond pull) C2, C3, C4 (no wire bond pull) C1 will demonstrate mechanical integrity via electrical test. C3 will validate the process temperatures (cure time/temp, vacuum bake, etc). C4 (no wire pull) will demonstrate mechanical integrity via visual inspection (adhesion, cracking, delamination) and die shear of the elements on the substrate C2 will demonstrate electrical differences from Group A and long term reliability.

81 MIL-PRF-38534G

APPENDIX E

TABLE E-I. Testing guidelines for major product/process changes – Continued.

Major changes Recommended test subgroups of Table C-Xa, C-Xc (unless otherwise noted) Variable data required (subgroups) Explanation for recommended test guideline
PI QML PI QML
i. Change of die type 7/ C2 C2 C2 C2 C2 will demonstrate electrical differences from Group A and long term reliability.
j. Increase in element area from QML listing N/A C1, C4 (no wire bond pull) N/A C4 (no wire bond pull) C1 then C4 (no wire bond) will demonstrate mechanical integrity via electrical test, visual inspection (adhesion, cracking, delamination), and die shear of the elements on the substrate.
k1. Change of baselined wire bond method k2. Wire size change N/A C1 C4 (no die shear) C1, C4 (no die shear) C1, C4 (no die shear) N/A C4 (no die shear) C4 (no die shear) C4 (no die shear) C1 then C4 (no die shear) will demonstrate mechanical integrity via electrical test, visual inspection, and bond strength. C1 then C4 (no die shear) will demonstrate mechanical integrity via electrical test, visual inspection, and bond strength.
l. Change of wire bond material C1 C4 (no die shear) C1, C4 (no die shear) C4 (no die shear) C4 (no die shear) C1 then C4 (no die shear) will demonstrate mechanical integrity via electrical test, visual inspection, and bond strength.
m. Increase in substrate perimeter from QML listing N/A C1, C3, C4 (no die shear, wire bond pull) N/A C3 C4 (no die shear wire bond pull) C1 then C4 will demonstrate mechanical integrity via electrical test and visual inspection (adhesion, cracking, delamination). C3 will validate outgas of larger substrate.
n. Change of package or lid configuration, etc. C1, C3 C1, C3 C3 C3 C1 will demonstrate mechanical integrity via electrical test. C3 will validate the integrity of the new package configuration.

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APPENDIX E

TABLE E-I. Testing guidelines for major product/process changes – Continued.

Major changes Recommended test subgroups of Table C-Xa, C-Xc (unless otherwise noted) Variable data required (subgroups) Explanation for recommended test guideline
PI QML PI QML
o. Change of package, lid base material C1, C3 C1, C3 C3 C3 C1 will demonstrate mechanical integrity via electrical test. C3 will validate the integrity of the new package configuration.
p. Change to finished device dimensions Notify acquiring activity N/A N/A N/A Notify acquiring activity.
q., r. Change of seal method, profile or seal material C1, C3 C1, C3 C3 C3 C1 will demonstrate the package mechanical integrity and electrical test will validate the process changes. C3 will validate the new seal process.
s. Increase in package seal perimeter from QML listing N/A C1, C3 N/A C3 C1 will demonstrate mechanical integrity via electrical test. C3 will validate the new package increase in package volume, processes related to the increased seal perimeter.
t. Increase in lead count for each package type from QML listing N/A C1 C3 N/A C3 C1 then C3 will demonstrate the package mechanical integrity and electrical test will validate the package/process. Not required for ceramic packages.
u. Change to baselined product flowchart N/A Notify qualifying activity N/A N/A Notify qualifying activity.
v. Addition of new process or material N/A Notify qualifying activity N/A N/A Notify qualifying activity.
w. Assembly operation or test facility move N/A Notify qualifying activity N/A N/A Notify qualifying activity.
x. Class I and Class II changes for Class K Notify acquiring activity N/A N/A N/A

83

TABLE E-I. Testing guidelines for major product/process changes – Continued.

Major changes Recommended test subgroups of Table C-Xa, C-Xc (unless otherwise noted) Variable data required (subgroups) Explanation for recommended test guideline
PI QML PI QML
y. Change of die manufacturer for Class K devices Notify the acquiring activity N/A N/A N/A Notify acquiring activity to determine the applicable re-qualification requirements for change of die manufacturer for Class K devices
z For Radiation Hardened Devices, major changes as defined in appendix G See Appendix G See Appendix G N/A N/A See Appendix G
aa. Change of element backside or topside finish material from QML listing N/A C1, C4 N/A C4 This affects the attach interface. C1 then C4 will demonstrate mechanical integrity via electrical test, visual inspection will validate attach (inspect for cracks, fissures), and die shear will validate the attach strength to the newfinish material.
bb. Change affecting ESD Level N/A C5 N/A N/A

1/ Sampling will be in accordance with Table C-Xc, of this specification.

2/ All electrical parameter testing will be in accordance with the device acquisition specification, drawing, or SMD.

3/ Data histograms providing a parametric data summary may be submitted in place of variables data.

4/ The acquiring or qualifying activity (or both) may add or reduce testing as warranted by detail specification requirements, unique design, or process circumstances, after notification by the manufacturer.

5/ The acquiring activity will determine testing requirements for design changes affecting Class K devices.

6/ Notification is required at the time of acceptance of new order; or delivery on existing order, when changes are made to devices acquired to Specification Control Drawings.

7/ Review and determine if worst case circuit analysis or thermal analysis is required based upon the change.

8/ If QML is covered, then PI is not required to be performed.

9/ Group A testing is expected to be completed prior to any table E-I test.

MIL-PRF-38534G
APPENDIX E

84

STATISTICAL SAMPLING

F.1 SCOPE

F.1.1 Scope. This appendix contains statistical sampling qualification procedures and general test and inspection procedures used throughout this specification. This appendix is a mandatory part of the specification. The information contained herein is intended for compliance.

F.1.2 Description of Appendix F. This appendix contains general information and guidance to be used by manufacturers when testing and inspecting devices.

F.1 SCOPE 85
F.2 APPLICABLE DOCUMENTS 85
F.3 GENERAL STATISTICAL SAMPLING 85
F.4 STATISTICAL SAMPLING PROCEDURES AND TABLE 86
F.2 APPLICABLE DOCUMENTS

F.2.1 General. The documents listed in this section are specified in sections F3, F4, or F5 of this specification. This section does not include documents cited in other sections of this specification or recommended for additional information or as examples. While every effort has been made to ensure the completeness of this list, document users are cautioned that they must meet all specified requirements of documents cited in sections F3, F4, or F5 of this specification, whether or not they are listed.

F.2.2 Government documents.

F.2.2.1 Specifications, standards, and handbooks. The following specifications, standards, and handbooks form a part of this specification to the extent specified herein. Unless otherwise specified, the issues of these documents are those cited in the solicitation or contract.

DEPARTMENT OF DEFENSE STANDARDS

MIL-STD-883 -Test Method Standard Microcircuits.

(Copies of these documents are available online at http://assist.daps.dla.mil/quicksearch/ or from the Standardization Document Order Desk, 700 Robbins Avenue, Building 4D, Philadelphia, PA 19111-5094.)

F.2.3 Order of precedence. Unless otherwise noted herein or in the contract, in the event of a conflict between the text of this document and the references cited herein, the text of this document takes precedence. Nothing in this document, however, supersedes applicable laws and regulations unless a specific exemption has been obtained.

F.3 GENERAL STATISTICAL SAMPLING

F.3.1 Definitions. The following definitions will apply for all statistical sampling procedures:

a.
Percent defective allowable (PDA) series: The PDA series is defined as the following decreasing series of PDA values: 50, 30, 20, 15, 10, 7, 5, 3, 2, 1.5, 1, 0.7, 0.5, 0.3, 0.2, 0.15, 0.1.
b.
Tightened PDA inspection: Tightened PDA inspection is defined as inspection performed using the next PDA value in the PDA series which is lower than that specified.
c.
Acceptance number (c): The acceptance number is defined as zero.
d.
Rejection number (r): Rejection number is defined as one or more.

F.3.2 Symbols. The following symbols will apply for all statistical sampling procedures:

a.
c: Acceptance number.
b.
r: Rejection number.

F.4 STATISTICAL SAMPLING PROCEDURES AND TABLE

F.4.1 General. Statistical sampling will be conducted using a sample size (accept number) method as specified in table F-I herein. The procedures specified herein are suitable for all quality conformance requirements.

F.4.1.1 Selection of samples. Samples will be randomly selected from the inspection lot or inspection sublots. For continuous production, the manufacturer, at their option, may select the sample in a regular periodic manner during manufacture provided the lot meets the formation of lots requirement.

F.4.1.2 Failures. Failure of a unit for one or more tests of a subgroup will be charged as a single failure.

F.4.2 Single-lot sampling method. CI and PI information (sample sizes and number of observed defectives) will be accumulated from a single inspection lot to demonstrate conformance to the individual subgroup criteria.

F.4.2.1 Sample size. The sample size for each subgroup will be determined from table F-I and will meet the specified sample size (accept number).

F.4.2.2 Acceptance procedure. If zero failures are found in the initial sample of the required sample size, the lot will be accepted. If the observed number of defectives from the initial sample is greater than zero, a second sample of double the initial sample size may be selected from the original sub(lot). The sub(lot) may be accepted if zero defectives are observed in this double-size sample.

F.4.2.3 One-hundred percent inspection. Inspection of 100 percent of the lot will be allowed, at the option of the manufacturer, for any or all subgroups other than those which are called "destructive". If the observed percent defective for the inspection lot exceeds the specified PDA series value for the sample size specified, the lot will be considered to have failed the appropriate subgroup. One-hundred percent sampling is required where lot size is smaller than the required sample size with zero defectives allowed. Resubmission of lots tested on a 100 percent inspection basis will also be on a 100 percent inspection basis and in accordance with the tightened PDA inspection criteria.

TABLE F-I. Sample size (accept number) sampling plan. 1/ 2/ 3/

PDA series 50 30 20 15 10 7 5 3 2
Minimum sample size (accept number)
Accept number c = 0, r > 1 5(0) 8(0) 11(0) 15(0) 22(0) 32(0) 45(0) 76(0) 116(0)
PDA series 1.5 1 0.7 0.5 0.3 0.2 0.15 0.1
Minimum sample size (accept number)
Accept number c = 0, r > 1 153(0) 231(0) 328(0) 461(0) 767(0) 1152(0) 1534(0) 2303(0)
1/ Sample sizes are based upon the Poisson exponential binomial limit.
2/ In this specification lot tolerance percent defective (LTPD) has been replaced with sample size
(accept number) where the accept number is zero. Where reference is made by unrevised test
methods of MIL-STD-883 to an LTPD value, that value will be found in the PDA series and the
sample size will be the value immediately below the PDA series value. The accept number will
always be zero.
3/ Minimum size of sample to be tested to assure, with a 90 percent confidence, that a lot having
percent defective equal to the specified sample size (accept number) will not be accepted (single
sample).
86

RADIATION HARDNESS ASSURANCE REQUIRMENTS FOR HYBRID MICORCIRCUITS AND MULTICHIP MODULES

G.1 SCOPE

G.1.1 Scope. This appendix establishes the performance requirements for hybrid microcircuits and multichip modules (MCM’s) that have a radiation hardening requirement. This appendix is a mandatory part of the specification. The information contained herein is intended for compliance This appendix is intended for devices which are offered as radiation hardened devices and are in full compliance with the remainder of this document.

G.1.2 Description of Appendix G. This appendix provides the performance requirements and verification methods applicable for RHA devices. Section G.3 provides the performance requirements which shall be met in order to provide RHA devices to this specification, the definitions of RHA levels, and the criteria for conversion of customer requirements and change control. Verification methods to verify that devices meet the performance requirements shall be developed. Due to the complexity of this field, and these devices, it is apparent that a non-standard approach to verification is necessary. Section G.4 is provided as a methodology for manufacturers and their customers to determine what the RHA requirements are and how to verify that the devices are meeting these requirements. Devices shall only be marked with the appropriate designator if they meet the requirements. Devices built in accordance with G.3 are RHA devices as defined in the acquisition document (e.g., SMD) and verified using the methods developed by the manufacturer.

G.1 SCOPE 87

G.2 APPLICABLE DOCUMENTS 87

G.3 PERFORMANCE REQUIREMENTS 88

G.4 VERIFICATION 89

G.2 APPLICABLE DOCUMENTS

G.2.1 General. The documents listed in this section are specified in sections G.3, G.4, or G.5 of this specification.

This section does not include documents cited in other sections of this specification or recommended for additional information or as examples. While every effort has been made to ensure the completeness of this list, document users are cautioned that they must meet all specified requirements of documents cited in sections G.3, G.4, or G.5 of this specification, whether or not they are listed.

G.2.2 Government documents.

G.2.2.1 Specifications, standards, and handbooks. The following specifications, standards, and handbooks form a part of this specification to the extent specified herein. Unless otherwise specified, the issues of these documents are those cited in the solicitation or contract.

DEPARTMENT OF DEFENSE STANDARDS

MIL-STD-883 -Test Method Standard Microcircuits.

DEPARTMENT OF DEFENSE HANDBOOKS

MIL-HDBK-814 -Ionizing Dose and Neutron Hardness Assurance Guidelines for Microcircuits and Semiconductor Devices. MIL-HDBK-815 -Dose-Rate Hardness Assurance Guidelines.

(Copies of these documents are available online at http://assist.daps.dla.mil/quicksearch/ or http://assist.daps.dla.mil or from the Standardization Document Order Desk, 700 Robbins Avenue, Building 4D, Philadelphia, PA 19111-5094.)

G.2.3 Non-Government publications. The following documents form a part of this document to the extent specified herein, Unless otherwise specified, the issues of these documents are those cited in the solicitation or contract.

ELECTRONIC INDUSTRIES ALLIANCE

JEDEC Publication JEP 133 -Guide for the Production and Acquisition of Radiation Hardness Assured Multichip Modules and Hybrid Microcircuits.

JESD57 -Test Procedures for the Measurement of Single-Event Effects in Semiconductor Devices from Heavy Ion Irradiation. JESD89 -Measurement and Reporting of Alpha Particles and Terrestrial Cosmic Ray-Induced Soft Errors in Semiconductor Devices.

(Copies of this document are available online at http://www.jedec.org/ or from the Electronics Industries Alliance, 2500 Wilson Boulevard, Arlington VA 22201-3834).

AMERICAN SOCIETY FOR TESTING AND MATERIALS (ASTM)

ASTM F 1032 -Standard Guide for Measuring Time-Dependent Total Dose Effects in Semiconductor Devices Exposed to Pulse Ionizing Radiation. ASTM F 1192 -Standard Guide for the Measurement of Single Event Phenomena (SEP) Induced by Heavy Ion Irradiation of Semiconductor Devices. ASTM F 1892 -Standard Guide for Ionizing Radiation (Total Dose) Effects Testing of Semiconductor Devices.

(Copies of these documents are available online at http://www.astm.org or from the American Society for Testing and Materials, P O Box C700, 100 Barr Harbor Drive, West Conshohocken, PA 19428-2959)

G.2.4 Order of precedence. Unless otherwise noted herein or in the contract, in the event of a conflict between the text of this document and the references cited herein, the text of this document takes precedence. Nothing in this document, however, supersedes applicable laws and regulations unless a specific exemption has been obtained.

G.3 PERFORMANCE REQUIREMENTS

G.3.1 Performance requirements for RHA devices. RHA devices shall meet the performance requirements of this document for the applicable device class (D, E, G, H, or K) and shall be capable of passing the tests, analyses, and inspections applicable for the environments specified in the acquisition document and the manufacturers approved QML RHA program plan. For further guidance on specific methods related to radiation hardness assurance see MIL-HDBK-814, MIL-HDBK-815, methods 1017, 1019, 1020, 1021, 1022, 1023 and 1032 of MIL-STD-883, JESD 57, JEP 133, ASTM F 1892, ASTM F 1032, and ASTM F 1192.

G.3.1.1 Radiation hardness assurance (RHA) levels. The RHA designators defined In table G-I shall be used in the PIN of the compliant devices which meet the requirements of the manufacturer’s approved QML RHA program. Other parameters may be specified in the acquisition specification.

TABLE G-I. RHA levels.

RHA level and designator Radiation total ionizing dose (krad (SI))
- (dash) No RHA
M 3
D 10
P 30
L 50
R 100
F 300
G 500
H 1000

Devices are considered to meet a specific RHA level if the manufacturer meets the requirements of this appendix and the acquisition specification.

G.3.2 Implementation of this appendix. Manufacturers wishing to offer compliant RHA devices verified in accordance with an approved QML RHA program shall meet the requirements of G.3. The manufacturer of RHA devices shall be certified by the qualifying activity (DSCC) to this appendix. In addition to the standard certification requirements, the qualifying activity shall examine all aspects of the RHA program. This includes determining that the manufacturer’s conversion of customer requirements procedure includes the RHA requirements of G.3.3 and that the manufacturer’s change control procedure includes the requirements of G.3.4. Furthermore, all RHA tests, process flows, and configuration control documentation shall be available for review to determine if they meet the intent of this appendix.

G.3.3 Conversion of customer requirements. The manufacturer shall have a conversion of customer requirements procedure(s) in accordance with Appendix A, which includes determining from the customer which RHA environments, tests, and analyses are applicable for the device application. Once this is determined, the methods for verification shall be developed. The environments, the respective radiation levels, and the requisite tests and analyses shall be specified in the acquisition document.

G.3.4 Change control procedures. In addition to the change control procedures specified in Appendix A, manufacturers of RHA devices shall have in place a procedure to notify their customers of any change in components (die, resistors, capacitors, substrate, metallization, package, etc.) or test and analysis methods which are proposed. The acquisition specification may specify the applicable change control procedures (e.g., all class I and applicable class II changes). Prior to implementation of the change, the manufacturer and the customer shall determine what additional verification shall be performed to ensure that the proposed change will not degrade the radiation hardness of the device.

G.4 VERIFICATION

G.4.1 Verification methods. Verification methods for determining radiation hardness in the applicable environments shall be established by the manufacturer, or the manufacturer in conjunction with a third party source, expert in the RHA area. Due to the many different types of hybrid and Multichip module (MCM) technologies and RHA environments, verification methods may vary significantly between manufacturers.

MIL-PRF-38534G

TITLE PARAGRAPH PAGE Acceptance procedure............................ F.4.2.2 86
Acquiring activity..................................... 6.4.1 15
Acquisition documents............................ 6.4.2 15
Acquisition requirements ........................ 6.2 14
Altered records ....................................... A.3.16.2 31
Alternate element evaluation .................. C.3.6 42
Alternate to element shear testing.......... C.7.5.4.11.1 68 Alternative method correlation, confirmation, and implementation procedures ........................................ A.3.2.5.4 26
Alternative methods................................ A.3.2.5.4.2 26
Alternate qualification procedures
for die/wire bond rework .................... C.7.2.3 65
Applicable documents ............................ 2. 2
Applicable documents ............................ A.2 21
Applicable documents ............................ C.2 35
Applicable documents ............................ E.2 71
Applicable documents ............................ F.2 85
Applicable documents ............................ G.2 87 Assembly Process Induced Environments…………………………. E.4.2.10 77
Atmospheric control and handling .......... A.3.15 31
Audit checklist......................................... 6.4.3 15
Audit deficiencies.................................... A.3.17.1.2 32
Audit follow-up ........................................ A.3.17.1.3 32
Audit schedules ...................................... A.3.17.1.4 32
Baseline index of documents.................. 6.4.4 15
Baseline index of documents.................. A.3.2.1.5 22
Baseline process flow............................. 6.4.5 15
Baseline process flowchart..................... A.3.2.1.2 22
Baseline process flows ........................... 4.3 12
Beryllium oxide package identifier .......... 3.7.5.8.1 9
Bond strength ......................................... C.6.3.2.4 58
Bond strength ......................................... C.6.4.2.2 62
Burn-in .................................................... C.5.9 51
Burn-in acceptance criteria..................... C.5.9.5 52
Burn-in lot ............................................... 6.4.6 15
Burn-in period ......................................... C.5.9.2 51
Case outline............................................ 3.7.5.1.3 8
Certification............................................. 4.5.1.2 13
Certification mark.................................... 3.7.5.8.3 10
Certification of conformance................... 3.8.1 11
Change control ....................................... A.3.5 27
Change control procedures .................... 4.4.2 12
Change control procedures .................... G.3.4 89
Change from previous issue................... 6.10 20 Changes in design, materials, or processing......................................... A.3.4.1 27
Characteristics........................................ C.3.2.5 37
Class I, major changes ........................... E.5.2 78
Class D ................................................... 1.3.4 2
Class D process flow audit ..................... 4.5.1.4 13
Class E ................................................... 1.3.5 2
Class E listing…………………………….. 4.5.2.3 13
Class G................................................... 1.3.3 2
Class G and D QML listing ..................... 4.5.2.2 13
Class H ................................................... 1.3.2 2
Class H and K QML listing...................... 4.5.2.1 13

TITLE PARAGRAPH PAGE Class H, G, and D serialization .............. 3.7.5.7.2 9 Class K................................................... 1.3.1 2 Class K serialization............................... 3.7.5.7.1 9 Class requirements ................................ C.3.2.3 37 Classes E, G, H, and K process flowaudits......................................... 4.5.1.3 13 Classification.......................................... 1.3 2 Cleanliness and atmosphere control in work areas .................................... A.3.15.2 31 Compliant devices.................................. 6.4.7 15 Compound bond..................................... 6.4.8 15 Compound bonding................................ E.3.2.4 74 Computerized records............................ A.3.16.1.1 31 Conductor resistivity............................... C.3.7.5.2.2 43 Conductor thickness............................... C.3.7.5.2.1 43 Configuration control.............................. A.3.5.1 28 Conformance inspection and periodic inspection.......................................... C.6 55 Constant acceleration ............................ C.7.5.4.4 67 Control and acceptance of incoming materials ........................................... A.3.6 28 Control of quality records ....................... A.3.16 31 Conversion of customer requirements ... A.3.3 27 Conversion of customer requirements ... G.3.3 89 Corrective action of process machine.... C.4.2.4 48 Correlation, confirmation, and implementation ................................. A.3.2.5.4.1 26 Correlation testing for internal water vapor................................................. C.7.5.4.8.1 67 Country of manufacture.......................... 3.7.5.6 9 Country of manufacture.......................... A.3.8.4 29 Cpk......................................................... 6.4.9 15 Critical control parameters ..................... 6.4.10 15 Customer compliance matrix (CCM) ...... 6.4.11 15 Customer supplied material ................... A.3.7 28 Data........................................................ C.6.2.5 56 Data record ............................................ C.4.2.5 48 Definition ................................................ C.3.7.1 43 Definition ................................................ C.3.8.1 45 Definitions .............................................. F.3.1 85 Delid/relid rework qualification procedures........................................ C.7.2.2 65 Delidding of devices............................... E.3.2.7 75 Delta () limits........................................ 6.4.12 15 Description of Appendix A...................... A.1.3 21 Description of Appendix C...................... C.1.2 35 Description of Appendix E...................... E.1.2 71 Description of Appendix F ...................... F.1.2 85 Description of Appendix G ..................... G.1.2 87 Description of conformance inspection and periodic inspection..................... C.6.1 55 Description of design and construction .. E.4.1 75 Description of device screening ............. C.5.1 50 Description of element evaluation.......... C.3.1 36 Description of process control................ C.4.1 47 Description of qualification ..................... C.7.1 65 Description of the rework limitations ...... E.3.1 71 Description of this specification.............. 1.2 2

MIL-PRF-38534G

TITLE PARAGRAPH PAGE Design Activity……………………………. 6.4.13 15
Design analysis ...................................... 6.4.14 16
Design and construction ......................... 3.7.3 7
Design and construction ......................... E.4 75
Design and construction ......................... E.4.2 75 Design and manufacturing documentation................................... E.4.2.5 75
Design guidelines ................................... A.3.2.1.3 22
Design of experiments (DOE)................. 6.4.15 16 Design, processing manufacturing equipment, and materials instructions ........................................ A.3.2.3 24 Design, processing, manufacturing and testing instructions ..................... A.3.2.2 23
Design requirements .............................. A.3.4 27
Design robustness.................................. 6.4.16 16
Destructive tests ..................................... 6.5 18
Device acquisition specification.............. 3.7.2 7
Device class designator.......................... 3.7.5.1.2 8
Device finishes ....................................... E.4.2.7 76
Device screening .................................... C.5 50
Device type............................................. 3.7.5.1.1 8
Die shear ................................................ C.6.3.2.5 58
Die shear strength .................................. C.6.4.2.3 63
Die shear strength testing....................... C.3.7.5.3.3 44
Disposition of samples............................ C.7.5.2.5 66
Electrical ................................................. C.3.7.5.1.3 43
Electrical circuit design........................... E.4.2.9 77
Electrical requirements ........................... C.7.5.4.6 67
Electrical test .......................................... C.3.3.4.3 38
Electrical test parameters ....................... C.3.7.2 43
Electrical test specifications.................... C.3.2.7 37
Electrostatic discharge
sensitivity (ESDS).............................. 6.4.17 16
Electrostatic discharge (ESD)
sensitivity identifier ............................ 3.7.5.8.2 10
Element .................................................. 6.4.18 16
Element evaluation ................................. C.3 36
Element evaluation guidance ................. C.3.1.1 36
Element replacement.............................. E.3.2.5 74
Element shear for option 1 PI
product qualification .......................... C.6.3.3.3 59 Element shear for QML qualification....... C.7.5.4.11 68
Element wire rebonding.......................... E.3.2.2 73
End-of-line sample testing ...................... C.6.3. 1.2 56 End point ................................................ C.6.2.4 56
End point electrical measurements ........ C.6.4.4.2 63
Environmentally preferable material ...... 6.7 19
Equipment calibrations ........................... A.3.11.1 30
ESD handling control program................ A.3.15.1 31 Examples of assembly and verification travelers............................................. A.3.12 30
External element finishes........................ E.4.2.7.2 76
External lead finish ................................. E.4.2.7.3 76
External metals....................................... E.4.2.3 75
External visual screen............................. C.5.13 54 Failure analysis and corrective action program............................................. A.3.14 31

TITLE PARAGRAPH PAGE Failure analysis of burn-in screen failures for class K devices ............... C.5.9.3 51
Failure and corrective action reports...... A.3.13.2 31 Failure and defect analysis and data feedback ........................................... A.3.13 30
Failures .................................................. C.7.5.3.2 66
Failures .................................................. F.4.1.2 86
Film adhesion......................................... C.3.7.5.2.3 43
Film microcircuit ..................................... 6.4.19 16
Final electrical test ................................. C.5.10 53
Final seal................................................ 6.4.20 16
Flip chip bonding.................................... 6.4.21 16
Functional block organization chart........ A.3.2.1.1 22
General .................................................. 3.7 6
General .................................................. A.3.2.5.1 24
General .................................................. C.3.2 37
General .................................................. C.3.8.2 45
General .................................................. C.3.9.2 46
General .................................................. C.4.2.1 48
General .................................................. C.5.2 50
General .................................................. C.5.9.1 51
General .................................................. C.5.9.5.1 52
General .................................................. C.6.2 55
General .................................................. C.6.3.3.1 59
General .................................................. F.4.1 86
General rework and repair provisions .... E.3.2.1 72
General statistical sampling ................... F.3 85
General verification ................................ 4.1 12
General .................................................. 2.1 2
General .................................................. A.2.1 21
General .................................................. C.2.1 35
General .................................................. E.2.1 71
General .................................................. F.2.1 85
General .................................................. G.2.1 87
Government documents......................... 2.2 2
Government documents......................... A.2.2 21
Government documents......................... C.2.2 35
Government documents......................... E.2.2 71
Government documents......................... F.2.2 85
Government documents......................... G.2.2 87
Group A electrical testing....................... C.6.3 .1 56 Group A electrical testing....................... C.6.4.1 62
Group A general requirements............... C.6.3.1.1 56
Group B inspection................................. C.6.3.2 57
Group B inspection................................. C.6.4.2 62
Group C inspection ................................ C.6.3.3 58
Group C inspection ................................ C.6.4.3 63
Group D inspection ................................ C.6.4.4 63
Handbooks............................................. G.2.2.1 87
Hybrid microcircuit.................................. 6.4.22 16
Hybrid microcircuit type (device type) .... 6.4.23 16
Implementation....................................... A.3.2.5.2 24
Implementation of this appendix ............ G.3.2 89
Implementation of this specification ....... 3.7.1 6
Incoming, in-process, and outgoing
inventory control ............................... A.3.6.2 28 Index point.............................................. 3.7.5.2 9
In-line sample testing ............................. C.6.3.1.3 56

MIL-PRF-38534G MIL-PRF-38534G

INDEX
TITLE PARAGRAPH PAGE TITLE PARAGRAPH PAGE
In-line verification testing ........................C.6.3.1.4 57 Non-Government publications................ A.2.3 22
Inspection and testing.............................A.3.10 29 Non-Government publications................ C.2.3 36
Inspection lots.........................................6.4.24 16 Non-Government publications................ G.2.3 87
Inspection lots……………………………..C.6.2.1 55 Non-solder sealed devices..................... C.5.12.2 54
Inspection lot formation ..........................6.4.25 16 Notes...................................................... 6. 14
Inspection lot formation…………………..C.6.2.2 55 Off-line reliability assessment ................ 6.4.33 17
Inspection operations .............................A.3.10.1 29 On-site verification ................................. 4.5.1.1 13
Inspection operations .............................A.3.10.4 29 One-hundred percent inspection............ F.4.2.3 86
Integral substrate/package .....................6.4.26 16 Option 1 (in-line inspection) ................... C.6.3 56
Integral substrate/package evaluation....C.3.9 46 Option 2 (end-of-line) ............................. C.6.4 62
Intended use...........................................6.1 14 Optional acquisition data........................ 6.2.1 14
Internal conductors .................................E.4.2.6 76 Order of precedence .............................. 2.3 3
Internal element finishes.........................E.4.2.7.1 76 Order of precedence .............................. A.2.4 22
Internal quality audits..............................A.3.17 32 Order of precedence .............................. C.2.4 36
Internal visual .........................................C.3.3.4.2 38 Other external materials......................... E.4.2.4 75
Internal visual and mechanical ...............C.6.3.2.3 58 Other Government documents,
Internal visual and mechanical ...............C.6.4.2.1 62 drawings, and publications ............... 2.2.2 3
Internal visual ........................................C.7.5.4.9 67 Other seal rework................................... E.3.2.6.2 74
Internal visual inspection ........................C.5.5 50 Package ................................................. E.4.2.1 75
Internal water vapor ................................C.7.5.4.8 67 Package evaluation................................ C.3.8 45
Internal water vapor process monitor .....C.4.4 49 Package type ......................................... 6.4.34 17
ISP inspection lot....................................C.3.9.1 46 Packaging .............................................. 5 14
Item requirements...................................3.8 11 Packaging .............................................. 5.1 14
Known good die (KGD)...........................6.4.27 16 Part or identifying number (PIN)............. 3.7.5.1 8
Lead finish ..............................................3.7.3.1 7 Particle impact noise detection (PIND)
Lead finish ..............................................3.7.5.1.4 8 test .................................................... C.5.7 51
Lead integrity ..........................................C.6.4.4.3 63 Passive element..................................... 6.4.35 17
Lid seal rework........................................E.3.2.6.1 74 Passive elements ................................... C.3.4 39
Lists or acronyms ...................................6.9 20 Pattern failure option.............................. C.5.9.5.3 52
Location of element evaluation...............C.3.2.4 37 Pattern failure option, class H ................ C.5.9.5.3.1 52
Loose particle recovery...........................C.7.5.4.1.1 66 Pattern failure option, class K ................ C.5.9.5.3.2 53
Lot identification code (date code)..........3.7.5.3 9 PDA class H ........................................... C.5.9.5.2.1 52
Lot sample bond strength .......................C.4.2.6.2 49 PDA class K ........................................... C.5.9.5.2.2 52
Lots resubmitted for burn-in....................C.5.9.4 52 PDA option ............................................. C.5.9.5.2 52
Major changes ........................................E.5 77 Percent defective allowable (PDA)......... 6.4.36 17
Marking of devices..................................3.7.5 8 Performance requirements..................... G.3 88
Marking option for controlled storage Performance requirements for
of class H and G................................3.7.5.9 11 Class D devices ................................ 3.5 4
Management responsibility.....................A.3.1 22 Performance requirements for
Manufacturer controls…………………....E.5.1 77 Class E devices ................................ 3.4 4
Manufacturer’s designating symbol ........3.7.5.5 9 Performance requirements for
Manufacturer’s identification...................3.7.5.4 9 Class G devices................................ 3.3 4
Manufacturer’s self-audit ........................A.3.2.1.6 23 Performance requirements for
Material and element traceability............A.3.8.1 29 Class H devices ................................ 3.2 3
Mechanical shock ...................................C.7.5.4.3 67 Performance requirements for
Microelectronics......................................6.4.28 17 Class K devices ................................ 3.1 3
Microcircuit..............................................6.4.29 17 Performance requirements for
Microcircuit and semiconductor dice ......C.3.3 37 RHA devices ..................................... 3.6 4
Monolithic microcircuit ............................6.4.30 17 Performance requirements for
Multichip module (MCM).........................6.4.31 17 RHA devices ..................................... G.3.1 88
Nonconformance ....................................C.6.3.4 62 Performance verification operations....... A.3.10.3 29
Nonconformance ....................................C.6.4.5 64
Noncontinuous production......................6.4.32 17 Periodic assessment of alternative
Nondestructive bond pull test for methods ............................................ A.3.2.5.4.2.2 26
class K devices..................................C.5.4 50 Periodic capability certification............... 6.4.37 17
Nondestructive tests ...............................6.6 19 Personnel training and testing................ A.3.18 32
Nonfunctional samples ...........................C.6.2.6 56 Personnel training and testing................ A.3.18.1 32
Nonfunctional samples ...........................C.7.5.2.4 66 Physical dimension ................................ C.3.7.5.1.1 43
92

TITLE PARAGRAPH PAGE Physical dimensions ............................... C.6.3.2.1 57
PIND ....................................................... C.7.5.4.1 66
Polymeric material evaluation................. C.3.10 47
Polymeric materials ................................ E.4.2.2 75
Preburn-in electrical test......................... C.5.8 51
Preseal burn-in test ................................ C.5.3 50
Procedure for sample tests..................... A.3.13.1.1 30
Procedure for screening tests................. A.3.13.1.2 30
Procedure in case of test equipment
failure of operator error...................... A.3.13.1 30
Process and materials controls .............. A.3.9.1 29
Process control....................................... A.3.9 29
Process control....................................... C.4 47
Process machines .................................. C.4.2.3 48
Process machine/operator evaluation .... C.4.2.6.1 48
Process/test traceability.......................... A.3.8.2 29
Production lot.......................................... 6.4.38 17
Production lot identification..................... A.3.8.5 29
Production lot traceability ....................... A.3.8.3 29
Protection from electrostatic discharge .. C.3.2.6 37
QML qualification requirements.............. 3.7.4 7
QML-38534 qualification......................... C.7.5 65 Qualified manufacturers list (QML) qualification lot .................................. C.7.3 65
Qualification............................................ 6.3 14
Qualification............................................ C.7 65
Qualification eligibility ............................. C.7.5.1 66
Qualification of rework ............................ C.7.2.1 65
Qualification test requirements ............... C.7.4 65 Qualification to electrostatic discharge sensitivity (ESDS) classes................. C.6.3.3.4 59
Qualifying activity.................................... 6.4.39 17
Quality control operations....................... A.3.10.2 29
Quality function deployment (QFD) ........ 6.4.40 17
Quality improvement program ................ A.3.2.4 24
Quality management (QM) plan.............. 4.4 12
Quality management (QM) plan.............. A.3.2.1 22 Quality management (QM) program (TRB option) ...................................... A.3.2.5 24
Quality management program ................ 4.2 12
Quality system ........................................ A.3.2 22
Quality system requirements .................. A.3 22 Radiation hardness assurance (RHA) levels ................................................. G.3.1.1 88
Radiography for class K devices ............ C.5.12 53
Records to be maintained....................... A.3.16.1 31 Recycled, recovered, or environmentally preferable materials........................... 3.9 12 Reports and analysis of defective devices and failures........................... A.3.14.1 31
Requirements ......................................... 3. 3
Resistance to soldering heat .................. C.6.3.3.5 60
Resistance to solvents............................ C.6.3.2.2 58
Resubmission of failed lots..................... C.6.4.5.1 64 Resubmission of failed samples or lots (or both)............................................. C.7.5.3.1 66
Rework and repair provisions ................. 3.10.1 12
Rework and repair provisions ................. E.3.2 72

TITLE PARAGRAPH PAGE Rework limitations.................................. E.3 71
Rework qualification............................... C.7.2 65
Rework samples..................................... C.7.5.2.3 66
RF probe test ......................................... C.3.5.1 42
Sample electrical test of passive
elements ........................................... C.3.4.4 40
Sample evaluation of assembled dice.... C.3.3.3 38
Sample selection.................................... C.3.2.2 37
Sample selection.................................... C.6.2.3 56
Sample selection.................................... C.7.5.2.2 66
Sample selection and reject criteria ....... C.3.3.6.1 39
Sample size............................................ C.3.3.4.1 38
Sample size............................................ C.3.3.5.1 38
Sample size............................................ F.4.2.1 86
Samples ................................................. C.6.4.4.1 63
Schematic diagrams............................... E.4.2.5.1 75
Scope..................................................... 1 1
Scope..................................................... 1.1 1
Scope..................................................... A.1 21
Scope..................................................... A.1.1 21
Scope..................................................... C.1 35
Scope..................................................... C.1.1 35
Scope..................................................... E.1 71
Scope..................................................... E.1.1 71
Scope..................................................... F.1 85
Scope..................................................... F.1.1 85
Scope..................................................... G.1 87
Scope..................................................... G.1.1 87
Seal (fine and gross leak) ...................... C.5.11 53
Seal........................................................ C.6.3.2.7 58
Seal (find and gross).............................. C.6.4.2.5 63
Seal rework ............................................ E.3.2.6 74
Seal testing ............................................ C.4.3 49
Selection of samples.............................. F.4.1.1 86
Self-audit................................................ 6.4.41 17
Self-audit areas...................................... A.3.17.1.6 32
Self-audit checklist ................................. A.3.17.1.7 32
Self-audit program.................................. 4.4.1 12
Self-audit report...................................... A.3.17.1.5 32
Self-audit representatives ...................... A.3.17.1.1 32
Self-audit requirements.......................... A.3.17.1 32
Semiconductor element ......................... 6.4.42 17
Sequence of testing ............................... C.3.2.1 37
Serialization............................................ 3.7.5.7 9
Similar devices....................................... 6.4.43 17
Single-lot sampling method.................... F.4.2 86
Solder sealed devices............................ C.5.12.1 54
Solder sealed devices............................ E.3.2.7.1 75
Solderability............................................ C.3.7.5.2.4 43
Solderability............................................ C.6.3.2.6 58
Solderability............................................ C.6.4.2.4 63
Special marking...................................... 3.7.5.8 9
Specifications, standards, and
handbooks ........................................ 2.2.1 2
Specifications, standards, and
handbooks ........................................ C.2.2.1 35
Standard................................................. A.2.2.1 21
Standard................................................. E.2.2.1 71

MIL-PRF-38534G

TITLE PARAGRAPH PAGE Standard ................................................. F.2.2.1 85 Standard evaluation circuit (SEC)........... 6.4.44 18

Standard evaluation circuit (test coupon

or test vehicle)................................... C.4.2.2 48
Standard evaluation circuits ................... A.3.2.5.4.2.1 26
Standard evaluation circuits ................... C.7.5.2.1 66
Statistical process control (SPC) ............ 6.4.45 18
Statistical sampling procedures and

table................................................... F.4 86
Steady-state life test ............................... C.7.5.4.7 67
Subgroup 1 ............................................. C.3.8.3 45
Subgroup 1 ............................................. C.3.9.3 46

Subgroup 1, 100 percent electrical

test of dice......................................... C.3.3.1 37 Subgroup 1, 100 percent electrical test

of passive elements........................... C.3.4.1 39 Subgroup 1, 100 percent electrical

testing................................................ C.3.7.3 43 Subgroup 2 ............................................. C.3.9.4 46 Subgroup 2, 100 percent visual

inspection of dice .............................. C.3.3.2 38

Subgroup 2, 100 percent visual

inspection .......................................... C.3.7.4 43 Subgroup 2, visual inspection

of passive elements........................... C.3.4.2 39
Subgroup 3 ............................................. C.3.7.5.1 43
Subgroup 3 ............................................. C.6.4.4.4 63
Subgroup 4 ............................................. C.3.7.5.2 43
Subgroup 4 ............................................. C.3.8.4 45
Subgroup 4 ............................................. C.3.9.5 46
Subgroup 4 ............................................. C.6.4.4.5 64
Subgroup 5 ............................................. C.3.3.5 38
Subgroup 5 ............................................. C.3.7.5.3 44
Subgroup 5 ............................................. C.3.9.6 47
Subgroup 6 ............................................. C.3.8.5 45
Subgroup 6, scanning electron

microscope (SEM)............................. C.3.3.6 38
Subgroup 7 ............................................. C.3.9.7 47
Subgroup 8 ............................................. C.3.9.8 47
Subgroups 3 and 4 ................................. C.3.3.4 38
Subgroups 3, 4, and 5 general

requirements ..................................... C.3.7.5 43 Subject term (key word) listing................ 6.8 19 Substrate evaluation............................... C.3.7 43 Substrate, thick film elements,

capacitors, and package post wire

rebonding or repair............................ E.3.2.3 73
Supplier control program ........................ A.3.6.1 28

Surface acoustic wave (SAW) element

evaluation.......................................... C.3.5 41 Symbols.................................................. F.3.2 86 TABLE I . Performance

requirements summary...................... 5
TABLE II Implementation summary....... 7

TITLE PARAGRAPH PAGE TABLE III . Certification mark................. 10 TABLE C-I. . Element evaluation summary........................................... 37 TABLE C-II. . Microcircuit and semiconductor dice evaluation requirements..................................... 39 TABLE C-III. . Passive element evaluation requirements..................................... 41 TABLE C-IV . SAW element evaluation requirements..................................... 42 TABLE C-V Substrate evaluation requirements..................................... 45 TABLE C-VI . Package evaluation requirements..................................... 46 TABLE C-VII . Integral substrate/package element evaluation requirements...... 47 TABLE C-VIII . Process control summary 50 TABLE C-IX. Device screening ............. 54 TABLE C-X. CI and PI summary............ 55 TABLE C-Xa . Group A electrical test .... 57 TABLE C-Xb Group B testing (option 2 only) ................................... 63 TABLE C-Xb-1 . Bond strength requirements..................................... 62 TABLE C-Xc . Group C testing............... 61 TABLE C-Xd . Group D package related tests .................................................. 64 TABLE E-I Testing guidelines for major product/process changes.................. 80 TABLE F-I . Sample size (accept number) sampling plan.................................... 86 TABLE G-I . RHA levels ......................... 89 Tape automated bonding (TAB)............. 6.4.46 18 Technology capability............................. 6.4.47 18 Technology capability verification (qualification) .................. 4.5.2 13 Technology capability verifications......... C.7.5.4 66 Technology review board (TRB)............. A.3.2.5.3 25 Technology Review Board (TRB) option...................................... A.1.2 21 Temperature coefficient of resistance (TCR) ............................................... C.3.7.5.3.1 44 Temperature cycling............................... C.7.5.4.2 67 Terms, definitions, methods, symbols, and abbreviations .............. 6.4 15 Test failures............................................ C.7.5.3 66 Test sample preparation ........................ C.3.3.3.2 38 Test sample preparation for subgroups 3 and 4............................ C.3.4.3 40 Test samples.......................................... C.3.3.3.1 38 Test samples.......................................... C.7.5.2 66 Testing for pure tin finishes.................... C.4.5 49 Thermal design ...................................... E.4.2.8 77 Tool and test equipment maintenance and calibration .................................. A.3.11 29 Traceability............................................. A.3.8 29 Travelers ................................................ A.3.2.1.4 22 TRB organizational structure.................. A.3.2.5.3.1 25

MIL-PRF-38534G
INDEX
TITLE PARAGRAPH PAGE TITLE PARAGRAPH PAGE
TRB records............................................A.3.2.5.5 26
TRB responsibilities................................A.3.2.5.3.2 25
Verification..............................................4 12
Verification..............................................G.4 89
Verification audit .....................................4.5.1 13
Verification methods ...............................G.4.1 89
Verifications for QML listing....................4.5 12
Visual examination..................................C.3.4.5 40
Visual examination..................................C.7.5.4.5 67
Visual inspection.....................................C.3.5.2 42
Visual inspection.....................................C.3.7.5.1.2 43
Visual inspection for damage .................C.5.6 50
Voltage conditioning or aging .................C.3.4.7 40
Wafer lots ...............................................6.4.48 18
Welded devices ......................................E.3.2.7.2 75
Wire bond evaluation..............................C.3.5.3 42
Wire bond strength for option 1 PI
product qualification ..........................C.6.3.3.2 59
Wire bond strength for QML
qualification .......................................C.7.5.4.10 67
Wire bond strength for QML rework
qualification .......................................C.7.5.4.10.1 68
Wire bond strength testing .....................C.3.3.5.2 38
Wire bond strength testing .....................C.3.4.6 40
Wire bond strength testing .....................C.3.7.5.3.2 44
Wire bonding ..........................................C.4.2 48
Wire bonding ..........................................C.4.2.6 48
Workmanship .........................................3.10 12

CONCLUDING MATERIAL

Custodians: Preparing activity: Army - CR DLA - CC Navy - EC Air Force - 85 NASA – NA (Project 5962-2008-007) DLA - CC

Review activities: Army - MI, SM Navy – AS, CG, MC, SH, TD Air Force - 03,19, 99

NOTE: The activities listed above were interested in this document as of the date of this document. Since* organization and responsibilities can change, you should verify the currency of the information above using the ASSIST Online database at http://assist.daps.dla.mil.


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