SILICON THIN FILM CHIP RESISTORS

R1421-S

The R1421-S series of microwave thin film resistors is designed to be used in microwave hybrid circuits for biasing of active components. These devices can be used over the full military temperature range -55°C to +125°C. Quality and workmanship is per MIL-S-883. Level B. Devices are 100% tested, visual inspected and packaged in waffle packs. US Microwaves employs proprietary thin film technologies for deposition of a wide range of sheet resistance films from 1W/sq to 10.000W /sq. Resistors from 0.1W to x MW range are available.

R(W)	USM Part #	R(W)	USM Part #	R(W)	USM Part #	R(W)	USM Part #
1.0	R1421-S-1P0	10	R1421-S-10P0	100	R1421-S-100P0	1000	R1421-S-1000
1.2	R1421-S-1P2	12	R1421-S-12P0	120	R1421-S-120P0	1200	R1421-S-1200
1.5	R1421-S-1P5	15	R1421-S-15P0	150	R1421-S-150P0	1500	R1421-S-1500
1.8	R1421-S-1P8	18	R1421-S-18P0	180	R1421-S-180P0	1800	R1421-S-1800
2.2	R1421-S-2P2	22	R1421-S-22P0	220	R1421-S-220P0	2200	R1421-S-2200
2.7	R1421-S-2P7	27	R1421-S-27P0	270	R1421-S-270P0	2700	R1421-S-2700
3.3	R1421-S-3P3	33	R1421-S-33P0	330	R1421-S-330P0	3300	R1421-S-3300
3.9	R1421-S-3P9	39	R1421-S-39P0	390	R1421-S-390P0	3900	R1421-S-3900
4.7	R1421-S-4P7	47	R1421-S-47P0	470	R1421-S-470P0	4700	R1421-S-4700
5.0	R1421-S-5P0	50	R1421-S-50P0	500	R1421-S-500P0	5000	R1421-S-5000
5.6	R1421-S-5P6	56	R1421-S-56P0	560	R1421-S-560P0	5600	R1421-S-5600
6.8	R1421-S-6P8	68	R1421-S-68P0	680	R1421-S-680P0	6800	R1421-S-6800
7.5	R1421-S-7P5	75	R1421-S-75P0	750	R1421-S-750P0	7500	R1421-S-7500
8.2	R1421-S-8P2	82	R1421-S-82P0	820	R1421-S-820P0	8200	R1421-S-8200

SUBSTRATE INFORMATION			RESISTOR SPECIFICATIONS
Material	Thickness (mils)	Die size (mils)	Power rating	Tolerances q%	Capacitance
SiO₂/Silicon	10 ±1	(14±2)x(21±2)	75mW@70°C	1, 5, 10	0.7pF

PROCESS INFORMATION
Resistor	Conductor	Backside metallization
The resistive material is high stability Tantalum Nitride with low temperature coefficient of resistance, <75ppm/°C typical. For Rsq<10W/sq and Rsq>500W/sq, the resistive material is proprietary.	The bonding pads of the resistors are 3m thick, 99.99% electroplated gold with a TiW barrier that withstands 30 min at 400°C in air without loss of adhesion.	The backside of the die is metallized with TiW/Au which is compatible with most die attaching methods. Other metallizations are available upon special request.

ORDERING INFORMATION R1421-S-xxPx-q %

TOLERANCE q	MINIMUM ORDER	U/P($) /1K	U/P($) /5K	U/P($) /10K	U/P($) /50K	U/P($) /100K	DELIVERY	ORDER
10%							2 weeks ARO for 5% and 10% tolerance and 3-4 weeks ARO for 1%. Certain items are available from Stock
5%
1%