SILICON THIN FILM CHIP RESISTORS

R3000-S

The R3000-S series of microwave thin film resistors is designed to be used in microwave hybrid circuits for biasing of active components. These devices can be used over the full military temperature range -55°C to +125°C. Quality and workmanship is per MIL-S-883. Level B. Devices are 100% tested, visual inspected and packaged in waffle packs. US Microwaves employs proprietary thin film technologies for deposition of a wide range of sheet resistance films from 1W/sq to 10.000W /sq. Resistors from 0.1W to x MW range are available.

R(W)	USM Part #	R(W)	USM Part #	R(W)	USM Part #	R(W)	USM Part #
1.0	R3000-S-1P0	10	R3000-S-10P0	100	R3000-S-100P0	1000	R3000-S-1000
1.2	R3000-S-1P2	12	R3000-S-12P0	120	R3000-S-120P0	1200	R3000-S-1200
1.5	R3000-S-1P5	15	R3000-S-15P0	150	R3000-S-150P0	1500	R3000-S-1500
1.8	R3000-S-1P8	18	R3000-S-18P0	180	R3000-S-180P0	1800	R3000-S-1800
2.2	R3000-S-2P2	22	R3000-S-22P0	220	R3000-S-220P0	2200	R3000-S-2200
2.7	R3000-S-2P7	27	R3000-S-27P0	270	R3000-S-270P0	2700	R3000-S-2700
3.3	R3000-S-3P3	33	R3000-S-33P0	330	R3000-S-330P0	3300	R3000-S-3300
3.9	R3000-S-3P9	39	R3000-S-39P0	390	R3000-S-390P0	3900	R3000-S-3900
4.7	R3000-S-4P7	47	R3000-S-47P0	470	R3000-S-470P0	4700	R3000-S-4700
5.0	R3000-S-5P0	50	R3000-S-50P0	500	R3000-S-500P0	5000	R3000-S-5000
5.6	R3000-S-5P6	56	R3000-S-56P0	560	R3000-S-560P0	5600	R3000-S-5600
6.8	R3000-S-6P8	68	R3000-S-68P0	680	R3000-S-680P0	6800	R3000-S-6800
7.5	R3000-S-7P5	75	R3000-S-75P0	750	R3000-S-750P0	7500	R3000-S-7500
8.2	R3000-S-8P2	82	R3000-S-82P0	820	R3000-S-820P0	8200	R3000-S-8200

SUBSTRATE INFORMATION			RESISTOR SPECIFICATIONS
Material	Thickness (mils)	Die size (mils)	Power rating	Tolerances q%	Capacitance
SiO₂/Silicon	10 ±1	(30±2)x(30±2)	200mW@70°C	1, 5, 10	2.2pF

PROCESS INFORMATION
Resistor	Conductor	Backside metallization
The resistive material is high stability Tantalum Nitride with low temperature coefficient of resistance, <75ppm/°C typical. For Rsq<10W/sq and Rsq>500W/sq, the resistive material is proprietary.	The bonding pads of the resistors are 3m thick, 99.99% electroplated gold with a TiW barrier that withstands 30 min at 400°C in air without loss of adhesion.	The backside of the die is metallized with TiW/Au which is compatible with most die attaching methods. Other metallizations are available upon special request.

ORDERING INFORMATION R3000-S-xxPx-q %

TOLERANCE q	MINIMUM ORDER	U/P($) /1K	U/P($) /5K	U/P($) /10K	U/P($) /50K	U/P($) /100K	DELIVERY	ORDER
10%	$320 / 200 pc						2 weeks ARO for 5% and 10% tolerance and 3-4 weeks ARO for 1%. Certain items are available from Stock
5%	$320 / 125 pc
1%	$320 / 75 pc